天文短波红外焦平面探测器的增益均匀性

Gain uniformity of astronomical short-wave infrared focal plane detector

  • 摘要: 碲镉汞短波红外焦平面探测器在红外天文观测中具有重要作用。采用光子转移曲线(Photon Transfer Curve, PTC)来表征探测器性能参数是一种重要的测试方法。根据PTC测量探测器的增益是表征探测器其他性能的前提。采用碲镉汞液相外延薄膜材料和n-on-p芯片结构制备了640×512规格的红外探测器,探测器截止波长为2.0 μm。用PTC方法测量红外焦平面探测器的增益,发现在焦平面上不同区域的增益是不均匀的,增益的非均匀性达到了20.2%。增益的非均匀性反映了探测器芯片内部性能的差异,尤其是不同光敏元噪声的差异。芯片加工过程可能是引起增益不均匀的原因之一。通过改进芯片工艺,特别是改进芯片的机械化学减薄工艺,降低抛光损伤,提高了探测器芯片表面不同区域的增益均匀性。改进工艺后,增益的非均匀性从20.2%降低到0.3%,获得了增益均匀的探测器芯片,增益的平均值为0.159 DN/e-,并测量得到探测器的暗电流为2.2 e/s,读出噪声为67 e

     

    Abstract:
    Objectives  HgCdTe short-wave infrared focal plane array(IRFPA) plays a significant role in infrared astronomical observations. Photon transfer curves (PTC) is an important method to characterize the detector performance. Measuring the gain of the detector by the PTC method is a prerequisite for characterizing detector's other performance metrics. In previous studies, the measured gain was typically the average gain of all pixels in the focal plane array. For infrared detectors, the gain across the array may be non-uniform. This research aims to test the gain distribution across different regions of a short-wave IRFPA using the PTC method and to improve gain uniformity through chip process optimization.
    Methods  Mercury-cadmium-telluride (HgCdTe) material is used to develop short-wave IRFPA. The detector chip is based on an ion-implanted n-on-p structure. It features a resolution of 640×512 pixels with a pixel pitch of 15 micrometers. The PTC method is used to characterize the detector's gain. The test setup is illustrated in Fig.2. Two methods are employed for PTC testing: 1) maintaining a constant blackbody temperature while varying the exposure time, and 2) fixing the integration time while adjusting the blackbody temperature. The dark current and readout noise are measured after obtaining the gain.
    Results and Discussions  The test results indicate that the gain is unevenly distributed across the 640×512 pixel array. The 640×512 array is divided into 10×8 groups, each consisting of a 64×64 pixel region.The gain for each group is calculated, as shown in Fig.5. By determining the standard deviation of the gain from this data, the non-uniformity of the gain is found to be 20.2%. To further verify the non-uniformity, each pixel's gain is tested by PTC method of fixing the integration time and adjusting the blackbody temperature. The heatmap of each pixel gain (Fig.7) also clearly shows that the gain distribution is uneven. The non-uniformity may be linked to the chip fabrication process. To investigate this, process parameters were adjusted, and after implementing improvements, the gain uniformity significantly improved, as shown in Fig.8, with the non-uniformity reduced to 0.3%. Additionally, the dark current and readout noise were measured under dark conditions. Figure 9 shows the variation of the detector's output signal with integration time under dark conditions. The slope of the line in the figure divided by the gain gives the detector's dark current, which is 2.2 e/s. Figure 10 presents a histogram of the detector's noise, with the maximum value corresponding to the noise level of 67 e.
    Conclusion  The chip's fabrication process, particularly the stress caused by the polishing and thinning process, can propagate into the detector, affecting the noise of the detector's photosensitive elements and, consequently, the uniformity of the gain. By optimizing the process parameters and reducing polishing damage, noise can be decreased, thereby enhancing the uniformity of the gain. With the improved process, the gain non-uniformity of the IRFPA is reduced from 20.2% to 0.3%. Based on the gain obtained from the PTC, the detector's dark current is measured to be 2.2 e/s, and the detector's noise is 67 e. In this study, it was also observed that in the region where photon noise dominates, the linearity of the PTC deviates. The reasons for this deviation may be multifaceted, including material non-uniformity, non-effective pixels, non-uniformity of illumination during testing, and noise in the test system. In future technical improvements, it is necessary to enhance the performance of the detector, particularly by reducing detector noise.

     

/

返回文章
返回