基于桥面面积调控的非制冷红外焦平面探测器品质因子优化

Optimization of figure of merit for uncooled infrared focal plane arrays based on bridge area modulation

  • 摘要: 为提升非制冷红外焦平面探测器在动态成像应用场景下的综合性能,文中围绕品质因子(Figure of Merit, FOM)开展系统性优化研究。FOM作为衡量探测器噪声等效温差 (Noise Equivalent Temperature Difference, NETD) 与热时间常数 (Thermal Time Constant, τ) 综合性能的关键指标,其优化对于实现快速动态成像具有重要意义。研究首先通过理论分析,识别出影响FOM的关键参数,包括探测器噪声、热容及红外有效吸收率等,并进一步明确桥面面积是调控这些参数以实现灵敏度与响应速度协同优化的关键结构变量。在此基础上,提出以桥面面积调控为核心的优化策略,设计并制备了多种不同尺寸的微桥结构器件,系统研究其对上述FOM关键参数的影响规律。实验结果表明,适当减小桥面面积可显著降低热时间常数,同时对NETD影响可控。最终成功研制出像元尺寸为12 μm、阵列规模为640×512的低热时间常数探测器,其实测噪声等效温差为32.4 mK,热时间常数低至5.1 ms,FOM达到165 mK·ms,支持最高120 frame/s的工作帧频。成像测试显示,该探测器在观测快速运动目标时,有效抑制了图像拖尾与果冻效应,显著提升了动态成像的清晰度与实时性。研究表明,通过桥面面积优化可实现FOM的显著改善,为高性能、高帧频非制冷红外成像系统的工程化应用提供了可行的技术方案。

     

    Abstract:
    Objective For high-speed dynamic imaging applications such as automotive night vision and unmanned aerial vehicles, uncooled infrared focal plane arrays (UFPA) must simultaneously maintain high thermal sensitivity and fast response speed. The figure of merit (FOM = NETD (Noise Equivalent Temperature Difference) × τ (thermal time constant)) is a key metric for evaluating this comprehensive performance. While smaller pixel sizes offer advantages in size, weight, and power (SWaP), they suffer from reduced photosensitive area, resulting in a higher FOM and greater optimization difficulty. Achieving a balanced enhancement of sensitivity and response speed through structural design remains a core technical challenge.
    Methods Through theoretical modeling, the key parameters influencing FOM—detector noise Vn, thermal capacitance C, and effective absorptivity Aeff (the product of fill factor and absorptivity)—were identified. The bridge area was determined to be the critical structural variable for modulating these parameters. Based on this insight, an optimization strategy centered on bridge area modulation was proposed. Multiple micro-bridge structures with varying dimensions were designed and fabricated to systematically investigate their impact on device performance.
    Results and Discussions Experimental results reveal a nonlinear relationship between bridge area reduction and its effects on noise, thermal capacitance, and effective absorptivity. When the bridge area is large, 1/f noise contributes less to the total noise, resulting in a relatively stable noise level. However, as the area decreases below a critical threshold, 1/f noise rapidly increases and becomes dominant, leading to the degradation of NETD (Fig.3(b)). Thermal capacitance C decreases nearly proportionally with area, whereas effective absorptivity Aeff decays more slowly due to optical diffraction effects and edge absorption, causing the C/Aeff ratio to decrease with shrinking area (Fig.5). This trend favors a shorter thermal time constant per unit absorption. A comprehensive analysis of Vn, C, and Aeff shows that FOM initially decreases and then increases with further area reduction, indicating an optimal point (Fig.6). The minimum FOM is achieved at a bridge area of 30.7 μm2. The non-monotonic dependence of FOM on bridge area is governed by the competing effects of noise and thermal time constant. At large areas, the 1/f noise is negligible, and the total noise is dominated by Johnson and readout circuit noise. As the area decreases, the 1/f noise, which scales inversely with the volume of the thermosensitive material, increases rapidly. This leads to a sharp rise in NETD, outweighing the benefit of reduced thermal time constant. Therefore, the optimal FOM is achieved at a bridge area of 30.7 μm2, where the trade-off between noise and response speed is balanced.Based on this optimization, a 12 μm-pitch 640×512 detector was developed, supporting a maximum frame rate of 120 frame/s. The measured NETD is 32.4 mK (at 120 frame/s), the thermal time constant is 5.1 ms, and the FOM is as low as 165 mK·ms. This performance significantly surpasses that of current mainstream products, whose FOM typically ranges from 260 to 700 mK·ms with frame rates generally not exceeding 60 frame/s. In contrast, the developed detector achieves a shorter τ and supports 120 frame/s operation, enabling superior dynamic imaging capability. Imaging tests demonstrate that the detector effectively suppresses image smearing and the "jello effect" (rolling shutter distortion) when observing fast-moving targets, resulting in a substantial enhancement in image quality (Fig.8 and Fig.9).
    Conclusions The bridge area is a critical structural parameter for optimizing the FOM of uncooled infrared detectors. Precise modulation of the bridge area enables a reduction in thermal capacitance while effectively controlling the increase in noise and the decrease in effective absorptivity, thereby achieving a lower thermal time constant without sacrificing sensitivity, leading to a significant improvement in FOM. The FOM optimization method based on bridge area modulation provides an effective technical solution for developing high-performance, high-frame-rate uncooled infrared detectors; the fabricated device demonstrates excellent dynamic imaging performance, validating the feasibility of the proposed approach.

     

/

返回文章
返回