子孔径拼接检测光学平面反射镜技术

Technology of sub-aperture stitching testing optical flat mirror

摘要: 干涉检测作为高精度光学面形加工的基础，其检测精度决定了加工精度。为了解决大口径光学平面反射镜检测问题，基于子孔径拼接算法，提出了一种拼接因子用于重叠区域取值，同时利用 100mm口径干涉仪对120mm口径平面反射镜完成拼接检验，并将拼接检测结果与利用150mm 口径干涉仪直接检测结果进行了对比分析，实验结果表明，拼接结果无拼痕，拼接检测结果与全口径测量结果PV 与RMS 的相对偏差分别为7.25%与7.14%，检测面形是一致的，由此验证了拼接检测的可靠性和准确性。

Abstract: As the fundamental factor of high precision optical producing, the testing accuracy of interferometry is the key of producing accuracy. In order to solve the problem of large optical flat mirror testing, a kind of stitching factor was provided for overlapped area values, based on the stitching algorithm. At the meantime, the stitching measurement was completed for a 120 mm flat mirror with a 100mm interferometer. Comparing the stitching result with the full aperture testing result with a 150mm interferometer, it turns out that the stitching result is smooth and the relative deviation of PV and RMS between the stitching result and the full aperture testing result is 7.25% and 7.14% respectively. The testing result is consistent, verifying the reliability and accuracy of the stitching testing.