汪宝旭, 朱明智, 陈晓娟, 王美聪, 吴文凯. 三自由度柔性镜框结构力学性能分析[J]. 红外与激光工程, 2014, 43(12): 3998-4005.
引用本文: 汪宝旭, 朱明智, 陈晓娟, 王美聪, 吴文凯. 三自由度柔性镜框结构力学性能分析[J]. 红外与激光工程, 2014, 43(12): 3998-4005.
Wang Baoxu, Zhu Mingzhi, Chen Xiaojuan, Wang Meicong, Wu Wenkai. Mechanical analysis of 3-DOF flexure optical mount structure[J]. Infrared and Laser Engineering, 2014, 43(12): 3998-4005.
Citation: Wang Baoxu, Zhu Mingzhi, Chen Xiaojuan, Wang Meicong, Wu Wenkai. Mechanical analysis of 3-DOF flexure optical mount structure[J]. Infrared and Laser Engineering, 2014, 43(12): 3998-4005.

三自由度柔性镜框结构力学性能分析

Mechanical analysis of 3-DOF flexure optical mount structure

  • 摘要: 为实现小型光学元件的柔性安装和精密调整,设计了一种三自由度柔性安装结构,并对其力学特性进行了理论研究。首先,从柔性镜框的工作原理出发,建立了柔性结构的力学模型,推导了模型的刚度表达式,并利用有限元分析方法进行了验证分析。然后,根据推导的刚度表达式分析了主要结构参数对柔性镜框力学特性的影响,并讨论了减小寄生运动的措施。最后,以通光口径为135 mm的平面反射镜为例,进行了柔性结构的设计计算和参数优化,并对其力学性能进行了仿真分析。验证结果表明:给定的参数范围内,刚度的理论计算和有限元分析结果的相对误差5.5%,表明所推导的刚度计算公式具有足够的精度,验证了理论模型与计算的正确性。同时,柔性镜框力学特性分析结果对柔性镜框的结构设计、力学性能分析和参数优化具有理论指导意义。

     

    Abstract: A 3-DOF flexure optical mount was designed to achieve elastic mounting and precise adjusting for small optics. Its mechanical properties were studied analytically. The mechanical model of the optical mount has been established based on its working principles. The stiffness formulas of each DOF were deduced and validated by finite element analysis (FEA). The mechanical properties influenced by structure parameters were analyzed and the methods to reduce parasitic motions were discussed based on the stiffness formulas. The structure design, parameters optimization, and mechanical performance stimulation were carried out for a mirror plate with clear aperture of 135 mm. The comparative results between analytical studies and FEA show that the relative errors are 5.5% and the stiffness formulas have sufficient accuracy. The analysis results also demonstrate that the analytical model and calculations are correct. The conclusions of mechanical analysis of the 3 -DOF flexure optical mount have theoretic significance for its structure design, mechanical performance analysis, and parameters optimization.

     

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