近红外谱域显微干涉仪的位移传感特性研究

郑权; 韩志刚; 陈磊

doi:10.3788/IRLA201645.1017002

近红外谱域显微干涉仪的位移传感特性研究

doi: 10.3788/IRLA201645.1017002

郑权¹,
韩志刚²,
陈磊^1,2

1.
南京理工大学电子工程与光电技术学院,江苏南京 210094;
2.
南京理工大学协同创新中心,江苏南京 210094

基金项目:

国家自然科学基金（U1231111）;国家自然科学基金青年基金（61505082）;江苏省自然科学基金（SBK2015041354）

详细信息

作者简介:
郑权(1990-),男,博士生,主要从事光干涉测量方面的研究。Email:zhengquan_njust@163.com

中图分类号: O436

Study of displacement sensing technology of near-infrared microscopic interferometry in spectral domain

1.
School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;
2.
Corporative Innovation Center,Nanjing University of Science and Technology,Nanjing 210094,China

摘要: 为研究近红外谱域显微干涉仪在近红外波段的位移传感特性，分析了条纹载频对位移量提取的影响，建立了测量光谱中心波长与干涉仪位移传感范围之间关系公式，讨论了光源可见光分量对近红外光栅光谱仪所记录条纹的串扰现象并提出抑制方法。构建近红外迈克尔逊型谱域显微干涉实验系统，单次测量位移量传感精度优于0.02 m。测量标准台阶板的台阶高度（其标称值为7.732 m），测量偏差为0.044 m。采用近红外谱域显微干涉装置，无需轴向扫描即可实现位移量测量，将光谱仪记录的谱域干涉信号转换为随波数线性变化信号处理能有效提高位移传感精度，增大中心波长能够有效提高位移传感范围，在系统中加入短波截止滤光片则能有效抑制可见光分量对近红外光谱域条纹造成的串扰。
- 测量 /
- 干涉测量 /
- 位移量传感 /
- 近红外 /
- 谱域分析
Abstract: To research the technology of displacement sensing based on near-infrared microscopic interferometry in spectral domain, the impact of fringe carrier on extracting displacement is analyzed, the formula of spectral central wavelength and displacement range was deduced. Also the crosstalk of interference fringes caused by the visible light from illuminant recorded by the spectrometer was discussed. The near-infrared microscopic interference experiment system of Michelson type in the spectral domain is built up, the precision of displacement sensing at one time is 0.02 m. The measured deviation of a standard step whose nominal value is 7.732 m can reach 0.044 m. No axial scanning was needed to realize displacement sensing with adopting device of near-infrared microscopic interference in the spectral domain. Through analyzing character of interference fringes in the near-infrared band, a conclusion that the accuracy of displacement sensing will enhance effectually can be drawn if the recorded fringes were transformed to fringes of linear carrier frequency for resolving, the range of displacement sensing was increased effectively by enlarging the center wavelength, and the crosstalk of interference fringes caused by the visible light can be restrained with a short-wave pass filter.
- measurement /
- interferometry /
- displacement sensing /
- near-infrared /
- spectral analysis

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近红外谱域显微干涉仪的位移传感特性研究

doi: 10.3788/IRLA201645.1017002

作者简介:
郑权(1990-),男,博士生,主要从事光干涉测量方面的研究。Email:zhengquan_njust@163.com

Study of displacement sensing technology of near-infrared microscopic interferometry in spectral domain

计量

近红外谱域显微干涉仪的位移传感特性研究

doi: 10.3788/IRLA201645.1017002

1. 南京理工大学电子工程与光电技术学院,江苏南京 210094;

2. 南京理工大学协同创新中心,江苏南京 210094

作者简介:
郑权(1990-),男,博士生,主要从事光干涉测量方面的研究。Email:zhengquan_njust@163.com

English Abstract

Study of displacement sensing technology of near-infrared microscopic interferometry in spectral domain

1. School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;

2. Corporative Innovation Center,Nanjing University of Science and Technology,Nanjing 210094,China

全文HTML

目录

留言板

近红外谱域显微干涉仪的位移传感特性研究

doi: 10.3788/IRLA201645.1017002

作者简介: 郑权(1990-),男,博士生,主要从事光干涉测量方面的研究。Email:zhengquan_njust@163.com

Study of displacement sensing technology of near-infrared microscopic interferometry in spectral domain

计量

出版历程

近红外谱域显微干涉仪的位移传感特性研究

doi: 10.3788/IRLA201645.1017002

1. 南京理工大学 电子工程与光电技术学院,江苏 南京 210094; 2. 南京理工大学 协同创新中心,江苏 南京 210094

作者简介: 郑权(1990-),男,博士生,主要从事光干涉测量方面的研究。Email:zhengquan_njust@163.com

English Abstract

Study of displacement sensing technology of near-infrared microscopic interferometry in spectral domain

1. School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China; 2. Corporative Innovation Center,Nanjing University of Science and Technology,Nanjing 210094,China

全文HTML

目录

作者简介:
郑权(1990-),男,博士生,主要从事光干涉测量方面的研究。Email:zhengquan_njust@163.com

1. 南京理工大学电子工程与光电技术学院,江苏南京 210094;

2. 南京理工大学协同创新中心,江苏南京 210094

作者简介:
郑权(1990-),男,博士生,主要从事光干涉测量方面的研究。Email:zhengquan_njust@163.com

1. School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;

2. Corporative Innovation Center,Nanjing University of Science and Technology,Nanjing 210094,China