光学显微三维测量解耦合准则

刘俭; 谷康; 李梦周; 谭久彬

doi:10.3788/IRLA201746.0302001

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

光学显微三维测量解耦合准则

刘俭, 谷康, 李梦周, 谭久彬

文章导航 > 红外与激光工程 > 2017 > 46(3): 302001-0302001(7)

刘俭, 谷康, 李梦周, 谭久彬. 光学显微三维测量解耦合准则[J]. 红外与激光工程, 2017, 46(3): 302001-0302001(7). doi: 10.3788/IRLA201746.0302001

引用本文:

刘俭, 谷康, 李梦周, 谭久彬. 光学显微三维测量解耦合准则[J]. 红外与激光工程, 2017, 46(3): 302001-0302001(7). doi: 10.3788/IRLA201746.0302001

Liu Jian, Gu Kang, Li Mengzhou, Tan Jiubin. 3D measurement decoupling criterion in optical microscopy[J]. Infrared and Laser Engineering, 2017, 46(3): 302001-0302001(7). doi: 10.3788/IRLA201746.0302001

Citation:

Liu Jian, Gu Kang, Li Mengzhou, Tan Jiubin. 3D measurement decoupling criterion in optical microscopy[J]. Infrared and Laser Engineering, 2017, 46(3): 302001-0302001(7). doi: 10.3788/IRLA201746.0302001

光学显微三维测量解耦合准则

doi: 10.3788/IRLA201746.0302001

1.
哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨 150080

基金项目:

国家重大科学仪器设备开发项目（2011YQ040087）;国防工业基础研究项目（2013xe0873）;国家自然科学基金（51275121）

详细信息

作者简介:
刘俭(1974-),男,教授,博士,主要从事光学立体显微成像与计量、应用光学技术方面的研究。Email:liujian@hit.edu.cn

通讯作者: 李梦周(1992-),男,博士,主要从事光学立体显微成像与计量、生物成像技术方面的研究。Email:lm2@hit.edu.cn

中图分类号: TB96

3D measurement decoupling criterion in optical microscopy

1.
Center of Ultra-Precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China

摘要: 光学显微三维测量耦合效应是指沟槽或台阶样品高度测量准确性受横向周期影响产生原理误差的现象。采用卷积不相关原则和有限能量损失原则，分别建立了薄样品和深沟槽样品光学显微三维测量的解耦合模型，揭示了被测样品特征参数与光学仪器表征能力之间的关联关系。与现有W/3准则相比，光学显微三维测量解耦合准则能够客观反映光学仪器表征能力受样品结构差异变化的影响，指示高度测量解耦合评定的示值区域，预见高度测量原理误差产生，为沟槽或台阶样品三维结构表征提供了一种新的计量评定准则。
- 解耦合准则 /
- 光学显微测量 /
- 薄样品测量 /
- 深沟槽测量 /
- 台阶高度
Abstract: The coupling effect in three dimensional measurements using optical microscopy refers to the phenomenon that the accuracy of the measurement height of a groove or step sample that suffers a principle error caused by the influence of the relatively small transverse period of the sample. Based on the convolution irrelevance principle and the limited energy lost principle, two models depicting the coupling effects in measurements of the thin step samples and the deep groove samples were established respectively, thus the coupling relationship between the geometric parameters of the sample and the measurement capability of the optical instrument were revealed. Compared with the existing W/3 reading rule, this criterion can more objectively reflect the different influences of samples with different structures on the actual measurement capability of the optical instrument, and indicate the assessment portions for height measurements without accuracy loss, also is able to predict the generation of principle error in height assessment if the structure is too tight or deep, thus provides a new reading and evaluation criterion for the three dimensional measurement of a groove or step sample.
- decoupling criterion /
- optical microscopic measurement /
- thin sample measurement /
- deep groove measurement /
- step height

[1]	Peng B, Giancarlo P, Wolfgang O. Optical surface profile measurement using phase retrieval by tuning the illumination wavelength[J]. Optics Communications, 2012, 285(285):5029-5036.
[2]	Zhang Mingkai, Gao Sitian, Lu Rongsheng, et al. Ultraviolet scanning linewidth measuring system[J]. Infrared and Laser Engineering, 2015, 44(2):625-631. (in Chinese)
[3]	Liu J, Wang Y, Liu C, et al. Digital differential confocal microscopy based on spatial shift transformation[J]. J Microsc, 2014, 256:126-132.
[4]	Gao Meijing, Fan Xiangrui, Gu Haihua, et al. Optical microscanning microscope thermal imaging system for electronic devices nondestructive testing[J]. Laser Infrared, 2013, 43(7):779-784. (in Chinese)
[5]	Martin R, Thorsten D, Axel K, et al. A landmark-based 3D calibration strategy for SPM[J]. Meas Sci Technol, 2007, 18:404-414.
[6]	2000 Geometrical product specifications(GPS)-Surface texture:Profile method; Measurement standards-Part 1:Material measures[S]. Geneva:International Organization for Standardization, 2000.
[7]	Lin Dejiao, Liu Zhongyao, Zhang Rui, et al. Step-height measurement by means of a dual-frequency interferometric confocal microscope[J]. Optical Society of America, 2004, 4:0003-6935.
[8]	Liu Jian, Li Mengzhou, Li Qiang, et al. Decoupling criterion based on limited energy loss condition for groove measurement using optical scanning microscopes[J]. Meas Sci Technol, 2016, 27(12):125014.
[9]	Nouira H, Salgado J A, El-Hayek N, et al. Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards[J]. Meas Sci Technol, 2014, 25:044016.
[10]	Yan Lisong, Wang Xiaokun, Zheng Ligong, et al. Large-diameter mirror stitching accuracy analysis based on self-test[J]. Infrared and Laser Engineering, 2014, 43(6):1920-1924. (in Chinese)
[11]	Sheppard C J R, Heaton J M. Confocal images of straight edges and surface steps[J]. Optik, 1984, 68:371-80.
[12]	Tan Jiubin, Liu Chenguang, Liu Jian, et al. Sinc2 fitting for height extraction in confocal scanning[J]. Meas Sci Technol, 2016, 27:025006.

[1]	伍凯凯, 谢博娅, 陈琳, 游淞清, 熊哲文, 杨鹏. 基于光学偏振控制的散粒噪声极限微振动光学测量方法 . 红外与激光工程, 2023, 52(7): 20220872-1-20220872-10. doi: 10.3788/IRLA20220872
[2]	张超, 袁群, 张佳乐, 冀翼, 高志山, 闫钧华. 白光显微干涉三维形貌测量中的移相误差校正方法 . 红外与激光工程, 2022, 51(7): 20220050-1-20220050-8. doi: 10.3788/IRLA20220050
[3]	张赛文, 邓亚琦, 王冲, 冷潇泠, 张光富, 文兵, 邓杨保, 谭伟石, 田野, 李稳国. 基于多测量矢量压缩感知的超分辨荧光显微成像研究 . 红外与激光工程, 2021, 50(11): 20210484-1-20210484-8. doi: 10.3788/IRLA20210484
[4]	刘维新, 魏志伟, 赵文谦, 丁星卜. 光学波片相位延迟测量仪设计 . 红外与激光工程, 2019, 48(7): 718001-0718001(7). doi: 10.3788/IRLA201948.0718001
[5]	田永胜, 侯金, 龙银福, 唐翠姣, 黄玉春, 杨春勇, 陈少平. 光纤倾斜耦合角度的快速精密图像测量 . 红外与激光工程, 2019, 48(10): 1013001-1013001(8). doi: 10.3788/IRLA201948.1013001
[6]	杨亮亮. 衍射光学元件斜入射衍射效率的测量 . 红外与激光工程, 2018, 47(1): 117003-0117003(5). doi: 10.3788/IRLA201847.0117003
[7]	季琲琲, 李照鑫, 周薇, 宋宾宾, 郭祥帅, 李德华. 不等光程法太赫兹波段材料光学参数的精确测量 . 红外与激光工程, 2017, 46(4): 417002-0417002(5). doi: 10.3788/IRLA201746.0417002
[8]	金星, 常浩, 叶继飞. 超短脉冲激光烧蚀冲量耦合测量方法 . 红外与激光工程, 2017, 46(3): 329002-0329002(7). doi: 10.3788/IRLA201746.0329002
[9]	徐均琪, 苏俊宏, 葛锦蔓, 基玛格拉索夫. 光学薄膜激光损伤阈值测量不确定度 . 红外与激光工程, 2017, 46(8): 806007-0806007(7). doi: 10.3788/IRLA201746.0806007
[10]	雷李华, 李源, 蔡潇雨, 魏佳斯, 傅云霞, 邵力. 基于变速扫描技术的大尺寸台阶测量 . 红外与激光工程, 2017, 46(7): 717003-0717003(8). doi: 10.3788/IRLA201746.0717003
[11]	李斌, 赵春江. 用于太赫兹光谱测量的土壤样品压片制备方法研究 . 红外与激光工程, 2016, 45(6): 625001-0625001(5). doi: 10.3788/IRLA201645.0625001
[12]	杨晓杰, 李向军, 刘建军. 石英玻璃太赫兹光学参数测量的误差分析 . 红外与激光工程, 2015, 44(6): 1827-1831.
[13]	滕书华, 鲁敏, 马燕新, 杨阿锋, 张军. 一种基于光学测量的航天器结构分析方法 . 红外与激光工程, 2015, 44(11): 3317-3323.
[14]	肖悦娱, 王洪伟, 颜锦奎, 彭蕾. 基于FOCT的3×3光纤耦合器相位差测量 . 红外与激光工程, 2015, 44(4): 1297-1300.
[15]	李凯朋, 王多书, 李晨, 王济州, 董茂进, 张玲. 光学薄膜参数测量方法研究 . 红外与激光工程, 2015, 44(3): 1048-1052.
[16]	苗扬, 王少萍. 飞机燃油管道中的润湿阻力及其光学测量 . 红外与激光工程, 2014, 43(1): 284-287.
[17]	周柯江, 胡科可, 王涛. 双折射波导偏振耦合的短相干干涉测量 . 红外与激光工程, 2014, 43(9): 2992-2995.
[18]	韩光宇, 曹立华, 张文豹. 地基目标光学辐射特性测量系统设计 . 红外与激光工程, 2014, 43(2): 551-556.
[19]	王添, 于佳, 杨宇, 闫高宾, 王金城. 数字全息显微测量中相位畸变的矫正方法 . 红外与激光工程, 2014, 43(11): 3615-3620.
[20]	郝宏刚, 周翱, 饶敏, 阮巍. 采用光热失调技术的光学薄膜吸收均匀性测量系统 . 红外与激光工程, 2013, 42(10): 2842-2845.

点击查看大图

计量

文章访问数: 341
HTML全文浏览量: 44
PDF下载量: 307
被引次数: 0

光学显微三维测量解耦合准则

doi: 10.3788/IRLA201746.0302001

1. 哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨 150080

作者简介:
刘俭(1974-),男,教授,博士,主要从事光学立体显微成像与计量、应用光学技术方面的研究。Email:liujian@hit.edu.cn

通讯作者: 李梦周(1992-),男,博士,主要从事光学立体显微成像与计量、生物成像技术方面的研究。Email:lm2@hit.edu.cn

收稿日期: 2016-08-05
修回日期: 2016-09-03
刊出日期: 2017-03-25

基金项目:

国家重大科学仪器设备开发项目（2011YQ040087）;国防工业基础研究项目（2013xe0873）;国家自然科学基金（51275121）

中图分类号: TB96

关键词:

摘要: 光学显微三维测量耦合效应是指沟槽或台阶样品高度测量准确性受横向周期影响产生原理误差的现象。采用卷积不相关原则和有限能量损失原则，分别建立了薄样品和深沟槽样品光学显微三维测量的解耦合模型，揭示了被测样品特征参数与光学仪器表征能力之间的关联关系。与现有W/3准则相比，光学显微三维测量解耦合准则能够客观反映光学仪器表征能力受样品结构差异变化的影响，指示高度测量解耦合评定的示值区域，预见高度测量原理误差产生，为沟槽或台阶样品三维结构表征提供了一种新的计量评定准则。

English Abstract

3D measurement decoupling criterion in optical microscopy

1. Center of Ultra-Precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China

Received Date: 2016-08-05
Rev Recd Date: 2016-09-03
Publish Date: 2017-03-25

Keywords:

Abstract: The coupling effect in three dimensional measurements using optical microscopy refers to the phenomenon that the accuracy of the measurement height of a groove or step sample that suffers a principle error caused by the influence of the relatively small transverse period of the sample. Based on the convolution irrelevance principle and the limited energy lost principle, two models depicting the coupling effects in measurements of the thin step samples and the deep groove samples were established respectively, thus the coupling relationship between the geometric parameters of the sample and the measurement capability of the optical instrument were revealed. Compared with the existing W/3 reading rule, this criterion can more objectively reflect the different influences of samples with different structures on the actual measurement capability of the optical instrument, and indicate the assessment portions for height measurements without accuracy loss, also is able to predict the generation of principle error in height assessment if the structure is too tight or deep, thus provides a new reading and evaluation criterion for the three dimensional measurement of a groove or step sample.