850 nm高速垂直腔面发射激光器技术研究进展（特邀）

Advances in the technology of 850 nm high-speed vertical cavity surface emitting lasers (Invited)

摘要: 垂直腔面发射激光器(VCSEL)具有低成本、低阈值、高速率和低功耗等优点，在短距离光互连中有着重要的应用。随着大数据、超级计算机技术的发展，短距离光互连性能需求越来越高，从而对高速调制的850 nm VCSEL技术提出了更高要求。从带宽限制机理、调制新方法两方面详细回顾了高速850 nm VCSEL技术最新进展，对技术发展趋势进行了总结与展望。

Abstract: Vertical-cavity surface-emitting lasers (VCSELs) have important applications in the short-distance optical interconnection attributed to their advantages, such as low cost, low threshold current, high modulation bandwidth and low power consumption. With the development of big-data and supercomputer technology, the performance demand of short-distance optical interconnection is increasing quickly, which also proposes a challenge for high-speed 850 nm VCSEL. In this paper, the latest development of high-speed 850 nm VCSEL technology was reviewed from the aspects of bandwidth-limited factors and new modulation methods, and the growing trend of this technology is prospected and summarized.