[1]
[2] Cote D, Ahouse D, Galburt D, et al. Advances in 193nm lithography tools[C]//SPIE, 2000, 4000: 542-550.
[3] Peng Jianhua, Shen Yibing, Wang Kaiwei, et al. Error impact analysis and experimental research for absolute testing of spherical surfaces[J]. Infrared and Laser Engineering, 2012, 41(5): 1345-1350. (in Chinese)
[4]
[5] Xu Rongwei, Liu Liren, Liu Hongzhan, et al. Support schemes and thermal deformation analysis of large aperture interferometer mirrors [J]. Acta Optica Sinica, 2005, 25 (6): 809-815. (in Chinese)
[6]
[7]
[8] Wu Xuhua, Chen Lei, Wang Lei. Design and test of reference mirror in 300mm interferometer [J]. Optics and Precision Engineering, 2007, 15 (8): 1235-1240. (in Chinese)
[9]
[10] Lei Jiang, Jiang Shilei, Cheng Gang, et al. Deformation of high accuracy photolithographic object lens [J]. Opto-Electronic Engineering, 2005, 32(2): 12-14. (in Chinese)
[11] Liu Yongqi, Wu Jinhu, Hu Mingyong, et al. Research on support system for 1.5m aperture mirror [J]. Optical Technique, 2011, 37(4): 429-432. (in Chinese)
[12]
[13] Wang Yang, Zhang Jingxu, Yang Fei. Support structure of large-aperture telescope primary mirror [J]. Infrared and Laser Engineering, 2006, 35: 31-34. (in Chinese)
[14]
[15]
[16] Xin Hongwei, Yang Jinsong, Gao Minghui, et al. Support design for secondary mirror of high resolution space telescope[J]. Infrared and Laser Engineering, 2011, 40(9): 1724-1729. (in Chinese)
[17]
[18] Tan Jinguo, He Xin, Fu Liangliang. Support technique in centre of minitype reflector [J]. Infrared and Laser Engineering, 2010, 39(6): 1070-1074. (in Chinese)
[19] Zhao Lei, Gong Yan. Design and analysis for the high-precision lens support structure of objective lens for lithography [J]. Acta Optica Sinica, 2012, 32 (9): 1-6. (in Chinese)