[1] |
|
[2] |
Stefan Wurm. Transition to EUV lithography[C]//Proceedings of the 2012 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), 2012. |
[3] |
Kim Hyun-Woo, Na Hai-Sub, Cho Kyoung-Yong, et al. Patterning with EUVL: the road to 22 nm node[C]//Proc of SPIE, 2010, 7636: 76360Q-1-76360Q-11. |
[4] |
|
[5] |
Takahiro Kozawa, Seiichi Tagawa. Radiation chemistry in chemically amplified resists[J]. Japanese Journal of Applied Physics, 2010, 49(3): 030001-1-030001-19. |
[6] |
|
[7] |
|
[8] |
Kim Jeongsik, Lee Jae-Woo, Kim Deogbae, et al. Measurement of EUV resists performances RLS by DUV light source[C]//SPIE, 2010, 7636: 76362Y-1-76362Y-7. |
[9] |
Ken Maruyama, Hiroki Nakagawa, Shalini Sharma,et al. EUV resist development for 16 nm half pitch[C]//SPIE, 2012, 8325: 83250A-1-83250A-6. |
[10] |
|
[11] |
Chawon Koh, Jacque Georger, Liping Ren, et al. Characterization of promising resist platforms for sub-30 nm HP manufacturability and EUV CAR extendibility study[C]//SPIE, 2010, 7636:763604-1-763604-16. |
[12] |
|
[13] |
|
[14] |
Thackeray James W, Jain Vipul, Coley Suzanne, et al. Optimization of Polymer-bound PAG (PBP) for 20nm EUV Lithography[J]. Journal of Photopolymer Science and Technology, 2011, 24(2): 179-183. |
[15] |
Hiroaki Oizumi, Kazuyuki Matsumaro, Julius Santillan, et al. Development of EUV resists based on various new materials[C]//SPIE, 2010, 7639: 76390R-1-76390R-8. |
[16] |
|
[17] |
Masamitsu Shirai, Koichi Maki, Haruyuki Okamura, et al. EUV negative resist based on Thiol-Yne system[C]//SPIE, 2011, 7972: 79721E-1-79721E-8. |
[18] |
|
[19] |
Jun Iwashita, Taku Hirayama, Isamu Takagi, et al. Characteristics of main chain decomposable STAR polymer for EUV resist[C]//SPIE, 2011, 7972: 79720L-1-79720L-10. |
[20] |
|
[21] |
Markos Trikeriotis, Marie Krysak, Yeon Sook Chung, et al. A new inorganic EUV resist with high-etch resistance[C]//SPIE, 2012, 8322: 83220U-1-83220U-6. |
[22] |
|
[23] |
Brian Cardineau, Marie Krysak, Markos Trikeriotis, et al. Tightly-bound ligands for hafnium nanoparticle EUV resists[C]//SPIE, 2012, 8322: 83220V-1-83220V-10. |
[24] |
|
[25] |
|
[26] |
Stowers Jason K, Telecky Alan, Kocsis Michael, et al. Directly patterned inorganic hardmask for EUV lithography[C]//SPIE, 2011, 7969: 796915-1-796915-11. |
[27] |
Deng Changmeng, Geng Yongyou, Wu Yiqun. Research development of laser lithography technology[J]. Infrared and Laser Engineering, 2012, 41(5): 1223-1231. (in Chinese) 邓常猛,耿永友,吴谊群. 激光光刻技术的研究与发展[J].红外与激光工程, 2012, 41(5): 1223-1231. |