[1]
[2] Lotters J C, Olthuis W, Veltink P H, et al. A sensitive differential capacitance to voltage converter for sensor applications[J]. IEEE Transactions on Instrumentation and Measurement, 1999, 48(1): 89-96.
[3]
[4] Hierold C. A pure CMOS micro machined integrated accelerometer [C]//IEEE, 1996: 174-179.
[5]
[6] Josselin V, Touboul P, Kielbasa R. Capacitive detection scheme for space accelerometers applications[J]. Sensors and Actuators, 1999, 78: 9298.
[7] Zhou Haitao. Research in the detection circuit of the digital closed-loop accelerometer[D]. Beijing: Beihang University,2010. (in Chinese)
[8]
[9] Kaznyuki Kondo, Kenzo Wantanabe. A switched-capacitor interface for capacitive sensors with wide dynamic range[J]. IEEE Trans on Instrumentation and Measurement, 1993, 42(5): 926931.
[10]
[11] Li Lin, Zhang Chunxi, Zhang Xi, et al. Investigation on noise of digital close-loop Q-Flex accelerometer[C]//IEEE Conference on Industrial Electronics and Applications, 2011: 614-619. (in Chinese)
[12]
[13]
[14] Zhang Chunxi, Wei Yuan, Zhang Xi, et al. Model analysis and emendation design of digital close-loop accelerometer system[J]. Chinese Journal of Scientific Instrument, 2012, 33(12): 2833-2839. (in Chinese)
[15] Wei Yuan. Design and realization of digital close-loop quartz flex accelerometer system[D]. Beijing: Beijing University of Aeronautics and Astronautics, 2012. (in Chinese)
[16]
[17]
[18] Josselin V, Touboul P, Kielbasa R. Capacitive detection scheme for space accelerometers applications[J]. Sensors and Actuators, 1999, 78: 9298.
[19] Gao Jinzhan. Detection of Weak Signals[M]. Beijing: Tsinghua University Press, 2011. (in Chinese)
[20]
[21]
[22] Zhang Chaoyang, Zhang Chunxi, Wang Xiaxiao, et al. Signal processing system for digital closed-loop fiber optic current sensor[J]. Proceeding of the CSEE, 2009, 29(30): 42-46. (in Chinese)
[23] GJB 1037A-2004 Test methods for single-axis pendulous servo linear accelerometers[S]. Beijing: COSTIND, 2004. (in Chinese)