[1] Xie Yi, Chen Qian, Liu Yongzhi. Determination of the optical constants and thickness of thin film by improved flexible tolerance method[J]. Infrared and Laser Engineering, 2007, 36(4): 521-525. (in Chinese)
[2]
[3] Sun Guozheng, Sun Qiang, Ren Zhibin. Analysis of the radius of microsphere particles based on Mie scattering theory[J]. Infrared and Laser Engineering, 2005, 34(4): 495-498. (in Chinese)
[4] 谢意, 陈前, 刘永智. 利用复合型算法确定薄膜光学常数和厚度[J]. 红外与激光工程, 2007, 36(4): 521-525.
[5]
[6] Pan Yongqiang, Wu Zhensen, Hang Lingxia, et al. Interface roughness of multilayer dielectric optical thin film[J]. Infrared and Laser Engineering, 2009, 38(3): 433-436. (in Chinese)
[7]
[8] Germer T A, Mulholland G W, Kim J H, et al. Measurement of the 100 nm NIST SRM 1963 by laser surface light scattering[C]//SPIE, 2002, 4779: 60-71.
[9] Germer T A, Asmail C. Polarization of light scattered by microrough surfaces and subsurface defects[J]. Journal of the Optical Society of America A, 1999, 16(6): 1326-1332.
[10] 孙国正, 孙强, 任智斌. 基于Mie散射理论的微球体颗粒半径分析[J]. 红外与激光工程, 2005, 34(4): 495-498.
[11]
[12] Germer T A. Angular dependence and polarization of out-of-plane optical scattering from particulate contamination, subsurface defects, and surface microroughness[J]. Applied Optics, 1997, 36: 8798-8805.
[13]
[14] Liu C, Fu W. Polarized angular dependence of out-of-plane light-scattering measurements for nanoparticles on wafer[J]. Optics Communications, 2009, 282: 2097-2103.
[15] Shen Jian, Deng Degang, Kong Weijin, et al. Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface[J]. Journal of the Optical Society of America A, 2006, 23(11): 2810-2816.
[16] 潘永强, 吴振森, 杭凌侠, 等. 多层介质薄膜膜层间界面粗糙度及光散射[J]. 红外与激光工程, 2009, 38(3): 433-436.
[17] Torrance K E, Sparrow E M. Theory for off-specular reflection from roughened surfaces[J]. Journal of the Optical Society of America, 1967, 57(9): 1105-1115.
[18]
[19]
[20] Pan Yongqiang, Wu Zhensen, Hang Lingxia. Optical thin films interfaces roughness cross-correlated properties and light scattering [J]. Chinese Journal of Lasers, 2008, 35(6): 916-920. (in Chinese)
[21] Germer T A. Polarized light diffusely scattered under smooth and rough interfaces[J]. Polarization Science and Remote Sensing, 2003, 5158: 193-204.
[22]
[23] Priest R G, Germer T A. Polarimetric BRDF in the microfacet model: theory and measurements[C]//Naval Research Laboratory, Proceedings of the 2000 Meeting of the Military Sensing Symposia Specialty Group on Passive Sensors, 2000, 1: 169-181.
[24]
[25]
[26] Amra C, Raviol C D. Light scattering from optical substrates and multilayers[C]//SPIE, 2005, 5647: 72-77.
[27]
[28]
[29]
[30] 潘永强, 吴振森, 杭凌侠. 光学薄膜截面粗糙度互相关特性与光散射[J]. 中国激光, 2008, 35(6): 916-920.
[31]
[32]
[33]