[1] |
Chen Liang. Research and application of the micro spectrometer system[D]. Hangzhou: Zhejiang University, 2008: 1-15. (in Chinese) |
[2] |
Khalil Diaa, Omran Hitham, Medhat Mostafa, et al. Miniaturized tunable integrated Mach-Zehnder MEMS interferometer for spectrometer applications[C]//SPIE, 2010, 7594(5): 155-179. |
[3] |
Yu K, Lee D, Krishnamoorthy U, et al. Micromachined Fourier transform spectrometer on Silicon optical bench platform[C]//The International Conference on Solid-State Sensors, Actuators and Microsystems, IEEE, 2005: 523-530. |
[4] |
Wang Yongqing, Ma Wen, Lou Jianzhong, et al. Investigation and progress of microspectrometer based on micro electro mechanical system[J]. Metallurgical Analysis, 2006, 26(4): 43-44. (in Chinese) |
[5] |
Yang Xiaoxu, Zhou Sizhong, Xiangli Bin, et al. Studies on nonlinearity of optical path difference of rotary Fourier transform spectrometer[J]. Acta Optica Sinica, 2004, 24(10): 1388-1392. (in Chinese) |
[6] |
Khalil D, Sabry Y, Omran H, et al. Characterization of MEMS FTIR spectrometer[C]//MOEMS and Miniaturized Systems, SPIE-The International Society for Optical Engineering, 2011, 7930: 876124. |
[7] |
Wu Lei, Pais A, Samuelson S R, et al. A miniature Fourier transform spectrometer by a large-vertical-displacement microelectromechanical mirror[C]//Fourier Transform Spectroscopy, Optical Society of America, 2009. |
[8] |
Wu Lei, Xie Huikai. A large vertical displacement electrothermal bimorph microactuator with very small lateral shift[J]. Sensors Actuators A Physical, 2008, 145-146(7): 371-379. |
[9] |
Weng Shifu. Fourier Transfom Infrared Spectroscopy[M]. Beijing: Chemical Industry Press, 2010. (in Chinese) |
[10] |
Pal S, Xie Huikai. Analysis and fabrication of curved multimorph transducers that undergo bending and twisting[J]. Journal of Microelectromechanical Systems, 2012, 21(5): 1241-1251. |
[11] |
Chen Qiao, Xie Huikai, Zhou Liang. A optical interference platform and assembly method with MEMS: China,103063130A, 2013-04-24. (in Chinese) |
[12] |
Zhang Ning, Liu Yulong, Wu Jiahui, et al. Design of CCD data acquisition system of miniature spectrometer[J]. Infrared and Laser Engineering, 2015, 44(1): 142-145. (in Chinese) |