激光干扰和损伤CMOS图像传感器研究进展（特邀）

温佳起; 卞进田; 李欣; 孔辉; 郭磊; 吕国瑞; 温佳起; 卞进田; 李欣; 孔辉; 郭磊; 吕国瑞

doi:10.3788/IRLA20230269

[1]

倪晓武, 沈中华, 陆建. 强激光对光电器件及半导体材料的破坏研究[J]. 光电子(激光), 1997, 第8卷(6): 487-490. DOI:10.16136 /j .joel .1997.06.018

Ni Xiaowu, Shen Zhonghua, Lu Jian. Study of laser destruction for optoelectronic device and semiconductor material [J]. Journal of Optoelectronics · Laser, 1997, 8(6): 487-490. (in Chinese) doi: 10.16136/j.joel.1997.06.018

[2]

林均仰, 舒嵘, 黄庚华, 方抗美, 闫志新. 激光对CCD及CMOS图像传感器的损伤阈值研究[J]. 红外与毫米波学报, 2008, 27(6): 475-478

Lin Junyang, Shu Rong, Huang Genghua, et al. Study on threshold of laser damage to CCD and CMOS image sensors [J]. Journal of Infrared and Millimeter Waves, 2008, 27(6): 475-478. (in Chinese)

[3]

王雪. 光电传感器激光致盲与损毁技术研究. 西安电子科技大学[D], 2018

Wang Xue. Study on laser blindness and damage technology of photoelectric sensors[D]. Xi’an: Xidian University, 2018. (in Chinese)

[4]

王昂. 可见光CMOS图像传感器的激光辐照效应研究[D]. 国防科学技术大学, 2014

Wang Ang. Research on the irradiation effects of CMOS image sensor under laser[D]. Changsha: National University of Defense Technology, 2013. (in Chinese)

[5]

朱孟真, 刘云, 米朝伟, 魏靖松, 陈霞, 田方涛, 冯苏茂, 王赛. 复合激光损伤CMOS图像传感器实验研究[J]. 红外与激光工程, 2022, 第51卷(7): 227-233. 20210537

Zhu Mengzhen, Liu Yun, Mi Chaowei, et al. Experimental study on a CMOS image sensor damaged by a composite laser [J]. Infrared and Laser Engineering, 2022, 51(7): 20210537. (in Chinese)

[6]

邵俊峰, 郭劲, 王挺峰, 郑长彬. 激光脉冲串对电荷耦合器件积累损伤效应研究[J]. 红外与激光工程, 2017, 第46卷(10): 13-18 doi: 10.3788/IRLA201746.1003002

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Cheng Yong, Zhu Mengzhen, Ma Yunfeng, et al. Mechanism and effects of complex laser ablation [J]. Infrared and Laser Engineering, 2016, 45(11): 1105005. (in Chinese) doi: 10.3788/IRLA201645.1105005

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[1]	倪晓武, 沈中华, 陆建. 强激光对光电器件及半导体材料的破坏研究[J]. 光电子(激光), 1997, 第8卷(6): 487-490. DOI:10.16136 /j .joel .1997.06.018 Ni Xiaowu, Shen Zhonghua, Lu Jian. Study of laser destruction for optoelectronic device and semiconductor material [J]. Journal of Optoelectronics · Laser, 1997, 8(6): 487-490. (in Chinese) doi: 10.16136/j.joel.1997.06.018
[2]	林均仰, 舒嵘, 黄庚华, 方抗美, 闫志新. 激光对CCD及CMOS图像传感器的损伤阈值研究[J]. 红外与毫米波学报, 2008, 27(6): 475-478 Lin Junyang, Shu Rong, Huang Genghua, et al. Study on threshold of laser damage to CCD and CMOS image sensors [J]. Journal of Infrared and Millimeter Waves, 2008, 27(6): 475-478. (in Chinese)
[3]	王雪. 光电传感器激光致盲与损毁技术研究. 西安电子科技大学[D], 2018 Wang Xue. Study on laser blindness and damage technology of photoelectric sensors[D]. Xi’an: Xidian University, 2018. (in Chinese)
[4]	王昂. 可见光CMOS图像传感器的激光辐照效应研究[D]. 国防科学技术大学, 2014 Wang Ang. Research on the irradiation effects of CMOS image sensor under laser[D]. Changsha: National University of Defense Technology, 2013. (in Chinese)
[5]	朱孟真, 刘云, 米朝伟, 魏靖松, 陈霞, 田方涛, 冯苏茂, 王赛. 复合激光损伤CMOS图像传感器实验研究[J]. 红外与激光工程, 2022, 第51卷(7): 227-233. 20210537 Zhu Mengzhen, Liu Yun, Mi Chaowei, et al. Experimental study on a CMOS image sensor damaged by a composite laser [J]. Infrared and Laser Engineering, 2022, 51(7): 20210537. (in Chinese)
[6]	邵俊峰, 郭劲, 王挺峰, 郑长彬. 激光脉冲串对电荷耦合器件积累损伤效应研究[J]. 红外与激光工程, 2017, 第46卷(10): 13-18 doi: 10.3788/IRLA201746.1003002 Shao Junfeng, Guo Jin, Wang Tingfeng, et al. Damage accumulation effects of multiple laser pulses irradiated on charged coupled device [J]. Infrared and Laser Engineering, 2017, 46(10): 1003002. (in Chinese) doi: 10.3788/IRLA201746.1003002
[7]	Li Mingxin, Jin Guangyong, Tan Yong. Study on CCD detector irradiated by multi-pulse laser [C]//Proceedings of SPIE, 2016, 10152: 1015207.
[8]	程勇, 朱孟真, 马云峰, 魏靖松, 刘旭, 丁方正, 谭朝勇, 陈霞, 郭延龙, 初华. 激光复合损伤机理与效应研究[J]. 红外与激光工程, 2016, 第45卷(11): 35-41 doi: 10.3788/IRLA201645.1105005 Cheng Yong, Zhu Mengzhen, Ma Yunfeng, et al. Mechanism and effects of complex laser ablation [J]. Infrared and Laser Engineering, 2016, 45(11): 1105005. (in Chinese) doi: 10.3788/IRLA201645.1105005
[9]	孙羽. 小尺寸背照式CMOS图像传感器像素结构研究[D]. 天津大学, 2012 Sun Yu. Study of pixel structure in small size backside illuminated CMOS image sensor[D]. Tianjin: Tianjin University, 2012. (in Chinese)
[10]	Kagawa Y, Fujii N, Aoyagi K. et al. Novel stacked CMOS image sensor with advanced Cu2Cu hybrid bonding [C]//2016 IEEE International Electron Devices Meeting (IEDM), 2016.
[11]	Christopher W, David J. Visible-band nanosecond pulsed laser damage thresholds of silicon 2D imaging arrays [J]. Sensors, 2022, 22(7): 2526. doi: 10.3390/s22072526
[12]	陈慧敏, 栗苹, 张英文, 孙建强, 李昆. CMOS图像传感器的研究新进展[J]. 半导体光电, 2006, 第27卷(6): 664-668 doi: 10.16818/j.issn1001-5868.2006.06.003 Chen Huimin, Li Ping, Zhang Yingwen, et al. Current developments of CMOS image sensors [J]. Semiconductor Optoelectronics, 2006, 27(6): 664-668. (in Chinese) doi: 10.16818/j.issn1001-5868.2006.06.003
[13]	Panneerselvam A. A review on pixel performance in CMOS image sensors [J]. Journal of Advanced Research in Dynamical and Control Systems, 2017(5): 544-554.
[14]	赖莉萍, 付博, 张蓉竹.宽谱光源对 CMOS 阵列电串扰的影响[J].红外与激光工程,2017,第46卷(1): 232-237 Lai Liping, Fu Bo, Zhang Rongzhu. Effect of broadband sources on electrical crosstalk of CMOS array [J]. Infrared and Laser Engineering, 2017, 46(1): 0120005. (in Chinese)
[15]	Tournier A, Leverd F, Favennec L et al. Pixel-to-pixel isolation by deep trench technology: application to CMOS image sensor [C]//International Image Sensor Workshop (IISW), 2011.
[16]	汪豪. CMOS图像传感器像元结构设计与优化[D]. 西安理工大学, 2020 Wang Hao. Design and optimization of CMOS image sensor pixel[D]. Xi’an: Xi’an University of Technology, 2020. (in Chinese)
[17]	Shin Iwabuchi, Yasushi Maruyama, Yuko Ohgishi, et al. A back-illuminated high-sensitivity small-pixel color cmos image sensor with flexible layout of metal wiring [C]//IEEE International Solid State Circuits Conference - Digest of Technical Papers, 2006: 1171-1178.
[18]	Shunichi Sukegawa, Taku Umebayashi, Tsutomu Nakajima, et al. A 1/4-inch 8M pixel back-illuminated stacked CMOS image sensor [C]//IEEE International Solid-State Circuits Conference-Digest of Technical Papers, 2013, 22: 484-486.
[19]	Kagawa Y, Hashiguchi H, Kamibayashi T, et al. Impacts of misalignment on 1 μm pitch Cu-Cu hybrid bonding [C]//IEEE International Interconnect Technology Conference (IITC), 2020: 148-150.
[20]	Oike Yusuke. Evolution of image sensor architectures with stacked device technologies [J]. IEEE Transactions on Electron Devices, 2022, 69(6): 2757-2765. doi: 10.1109/TED.2021.3097983
[21]	Jansz P V, Hinckley S. Extrinsic Evolution of the Stacked Gradient Poly-homojunction Photodiode Genre [M]//Betta G F D. Advances in Photodiodes. London: IntechOpen, 2011.
[22]	Wang Xinyang, Bogaerts J, Vanhorebeek G, et al. A 2.2 M CMOS image sensor for high-speed machine vision applications [C]//Sensors, Cameras, and Systems for Industrial/Scientific Applications XI, SPIE, 2010, 7536: 75360M.
[23]	Okada C, Zeituni G, Uemura K, et al. A 50.1-M pixel 14-bit 250-frames/s back-illuminated stacked CMOS image sensor with column-parallel kT/C-Canceling S&H and ADC [J]. IEEE Journal of Solid-State Circuits, 2021, 56(11): 3228-3235. doi: 10.1109/JSSC.2021.3111154
[24]	郭锋. 激光对CMOS和CCD的辐照效应对比研究[D]. 国防科学技术大学, 2013 Guo Feng. Comparative study on the irradiation effect of the laser to CMOS and CCD[D]. Changsha: National University of Defense Technology, 2013. (in Chinese)
[25]	5刘传军. CMOS图像传感器的失效分析及工艺改进[D]. 天津大学, 2015 Liu Chuanjun. Failure analysis and process optimization of CMOS image sensor[D]. Tianjin: Tianjin University, 2015. (in Chinese)
[26]	Han Min, Nie Jinsong, Sun Ke, et al. Experiment on the temporal evolution characteristics of a CCD multilayer structure irradiated by a 1.06 μm continuous laser [J]. Applied Optics, 2018, 57(16): 4415-4420. doi: 10.1364/AO.57.004415
[27]	Théberge F, Auclair M, Daigie J, et al. Damage thresholds of silicon-based cameras for in-band and out-of-band laser expositions [J]. Applied Optics, 2022, 61(10): 2473-2482. doi: 10.1364/AO.450317
[28]	张震. 可见光CCD的激光致眩现象与机理研究[D]. 国防科学技术大学, 2010 Zhang Zhen. Laser-induced dazzling phenomena in visible light CCD and their mechanism[D]. Changsha: National University of Defense Technology, 2010. (in Chinese)
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