[1] |
Yang Jing, Feng Qibo, Li Jiakun. Reviewon multi-degree-of-freedom motion error measurement methods for rotary-axis laser[J]. Laser Optoelectronics Progress, 2016, 53:090003. (in Chinese) |
[2] |
Zhu Fan, Tan Jiubin, Cui Jiwen. Common-path design criteria for laser datum based measurement of small angle deviations and laser auto collimation method in compliance with the criteria with high accuracy and stability[J]. Optics Express, 2013, 21(9):11391-11403. |
[3] |
Shimizu Y, Tan S L, Murata D, et al. Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions[J]. Optics Express, 2016, 24(3):2788-2805. |
[4] |
Hsieh Mengchang, Lin Jiunyou, Chang Chiaou. Using a hexagonal mirror for varying light intensity in the measurement of small-angle variation[J]. Sensors, 2016, 16(8):16081301. |
[5] |
Lin J Y, Liao Y C. Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer[J]. Applied Optics, 2014, 53(9):1903-1908. |
[6] |
Hsieh Hunglin, Lee Juyi, Chen Linyu, et al. Development of an angular displacement measurement technique through birefringence heterodyne interferometry[J]. Optics Express, 2016, 24(7):6802-6813. |
[7] |
Pi Shiwei, Liu Qiang, Sun Pengpeng. Geometric error detection for rotary feed drive based on laser interferometer[J]. Chinese Journal of Scientific Instrument, 2017, 38(10):2484-2491. (in Chinese) |
[8] |
He Zhengya, Fu Jianzhong, Zhang Liangchi, et al. A new error measurement method to identify all six error parameters of a rotational axis of a machine tool[J]. International Journal of Machine Tools Manufacture, 2015, 88(1):1-8. |
[9] |
Yang Xingang, Huang Yumei, Shi Wenhao, et al. Development on a measuring system for circular movement errors of rotary feed axis[J]. Mechanical Science and Technology for Aerospace Engineering, 2010, 29(3):369-372. |
[10] |
Wang Tao, Zhao Jianke, Tian Liude, et al. Influence of parallelism between photoelectric shaft encoder axis and polyhedron one on the rotation angle error[J]. Infrared and Laser Engineering, 2018, 47(2):0217001. (in Chinese) |