[1] Guo Jiang, Zhang Jianguo, Pan Yanan, et al. A critical review on the chemical wear and wear suppression of diamond tools in diamond cutting of ferrous metals [J]. International Journal of Extreme Manufacturing, 2020, 2(1): 1-24.
[2] 袁明文. 金刚石电子器件的研究进展 [J]. 微纳电子技术, 2012, 49(10): 643-649.

Yuan Mingwen. Research Progress of Diamond Based Electronic Devices [J]. Micronanoelectronic Technology, 2012, 49(10): 643-649. (in Chinese)
[3] Kiss Marcell, Mi Sichen, Huszka Gergely, et al. Diamond diffractive optics—recent progress and perspectives [J]. Advanced Optical Technologies, 2021, 10(1): 19-30. doi:  10.1515/aot-2020-0052
[4] Wang D, Zhao W S, Gu L, et al. A study on micro-hole machining of polycrystalline diamond by micro-electrical discharge machining [J]. Journal of Materials Processing Technology, 2011, 211(1): 3-11. doi:  10.1016/j.jmatprotec.2010.07.034
[5] Axinte D A, Srinivasu D S, Kong M C, et al. Abrasive waterjet cutting of polycrystalline diamond: A preliminary investigation [J]. International Journal of Machine Tools and Manufacture, 2009, 49(10): 797-803. doi:  10.1016/j.ijmachtools.2009.04.003
[6] Subramani K, Vasudevan A, Karthik K, et al. Insights of abrasive water jet polishing process characteristics and its advancements [J]. Materials Today: Proceedings, 2022, 52: 1113-1120. doi:  10.1016/j.matpr.2021.11.005
[7] 郭世斌, 曲杨, 吕反修, 等. 大面积金刚石自支撑膜机械抛光的优化工艺研究 [J]. 功能材料, 2007(07): 1173-1175.

Guo Shibin, Qu Yang, Lv Fanxiu, et al. The study on the optimizational technology of the large area free-standing diamond films’ mechanical polishing [J]. Journal of Functional Materials, 2007(07): 1173-1175. (in Chinese)
[8] Zheng Yuting, Cumont A E L, Bai Mingjie, et al. Smoothing of single crystal diamond by high-speed three-dimensional dynamic friction polishing: Optimization and surface bonds evolution mechanism[J]. International Journal of Refractory Metals and Hard Materials, 2021, 96: 105472.
[9] 李世谕, 安康, 邵思武, 等. CVD金刚石膜激光平整化效率和粗糙度 [J]. 金刚石与磨料磨具工程, 2022, 42(01): 61-68.

Li Shiyu, An Kang, Shao Siwu, et al. Laser planarization efficiency and roughness of CVD diamond film [J]. Diamond & Abrasives Engineering, 2022, 42(1): 61-68.
[10] Ohfuji H, Okuchi T, Odake S, et al. Micro-/nanostructural investigation of laser-cut surfaces of single- and polycrystalline diamonds [J]. Diamond and Related Materials, 2010, 19(7-9): 1040-1051. doi:  10.1016/j.diamond.2010.02.015
[11] Jiang Tong, Gao Si, Tian Zhennan, et al. Fabrication of diamond ultra-fine structures by femtosecond laser [J]. Chinese Optics Letters , 2020, 18(10): 38-42. doi:  10.3788/COL202018.101402
[12] Yang Liangliang, Wei Jiangtao, Ma Zhe, et al. The fabrication of micro/nano structures by laser machining [J]. Nanomaterials (Basel), 2019, 9(12): 1789. doi:  10.3390/nano9121789
[13] Konov V I. Laser in micro and nanoprocessing of diamond materials [J]. Laser & Photonics Reviews, 2012, 6(6): 739-766.
[14] 卢康, 许竞翔, 孙强, 等. 金刚石材料石墨化相变诱导机制研究进展[J]. 中国材料进展, 2022, 41(07): 536-546. doi:  10.7502/j.issn.1674-3962.202012028

Lu Kang, Xu Jingxiang, Sun Qiang, et al Research Progress on lnduction Mechanism of Graphitization Phase Transition of Diamond Materials[J]. Materials China , 2022, 41(07): 536-546. (in Chinese) doi:  10.7502/j.issn.1674-3962.202012028
[15] 周炳琨. 激光原理[M]. 第6版. 北京: 国防工业出版社, 2009.
[16] 崔涵. 无序光纤结构中激光脉冲的产生及优化 [D]; 电子科技大学, 2020.

Cui Han. Generation optimization of laser pulse in disordered fiber structure[D]. Chengdu: University of Electronic Science and Technology of China, 2020.
[17] 任彦宇. 窄线宽激光器及其在Φ-OTDR中的应用研究 [D]; 太原理工大学, 2022.

Ren Yanyu. Narrow line-width laser and application study in phase sensitive optical time domain reflectometer[D]. Taiyuan: Taiyuan University of Technology, 2022.
[18] 杜雯. 固体激光器中激光介质热传导方程的解析研究 [D]; 西安工业大学, 2023.

Du Wen. Analytical study of laser medium heat conduction-equation in solid-state[D]. Xi’an: Xi'an Technological University, 2023.
[19] Korneychuk S, Guzzinati G, Verbeeck J. Measurement of the indirect band gap of diamond with EELS in STEM[J]. Physica Status Solidi(A), 2018, 215(22): 1800318.
[20] Granger M C, Witek M, Xu J, et al. Standard electrochemical behavior of high-quality, boron-doped polycrystalline diamond thin-film electrodes [J]. Anal Chem, 2000, 72(16): 3793-3804. doi:  10.1021/ac0000675
[21] Hermani J-P, Brecher C, Emonts M. Nanosecond laser processing of diamond materials[C]//Lasers in Manufacturing Conference 2015, 2015.
[22] 姜玺阳, 王飞飞, 周伟, 等 飞秒激光与材料相互作用中的超快动力学 [J]. 中国激光, 2022, 49(22): 2200001. doi:  10.3788/CJL202249.2200001

Jiang Xiyang, Wang Feifei, Zhou Wei, et al. Ultrafast Dynamics of Femtosecond Laser Interaction with Materials[J]. Chinese Journal of Lasers , 2022, 49(22): 2200001. (in Chinese) doi:  10.3788/CJL202249.2200001
[23] 王海航, 马玉平, 武晓龙, 等. 金刚石涂层激光抛光机理及加工工艺研究进展 [J]. 材料保护, 2021, 54(06): 136-146.

Wang Haihang, Ma Yuping, Wuxiaolong, et al. Research progress on laser polishing mechanism and processing technology of diamond coating[J]. Materials Protection, 2021, 54(6): 136-146. (in Chinese)
[24] 熊彪, 陈根余, 殷赳, 等. 飞秒激光加工单晶金刚石锥形阵列的试验研究 [J]. 应用激光, 2018, 38(02): 270-277.

Xiong Biao, Chen Genyu, Yin Jiu, et al. Experimental research on conical array of single crystal diamond based on femtosecond laser [J]. Applied Laser, 2018, 38(2): 270-277. (in Chinese)
[25] Komlenok M S, Kononenko V V, Ralchenko V G, et al. Laser induced nanoablation of diamond materials[J]. Physics Procedia, 2011, 12: 37-45. doi:  10.1016/j.phpro.2011.03.103
[26] 姜海涛,崔健磊,殷东平等. 雷达功率组件的金刚石微通道热沉激光加工工艺 [J]. 中国机械工程, 2022, 32(03): 261-268.

Jiang Haitao, Cui Jianlei, Yin Dongping, et al. Femtosecond laser processing technology of diamond micro-channel heat sink based on radar power module[J]. China Mechanical Engineering, 2022, 32(3): 261-268. (in Chinese)
[27] 闫雄伯. CVD金刚石自支撑膜的高温石墨化行为研究 [D]; 北京科技大学, 2019.

Yan Xiongbo. Graphitization behavior of CVD free-standing diamond films at high temperature [D]. Beijing: University of Science and Technology Beijing, 2019. (in Chinese)
[28] Smedley J, Bohon J, Wu Q, et al. Laser patterning of diamond. Part I. Characterization of surface morphology [J]. Journal of Applied Physics , 2009, 105(12): 123107. doi:  10.1063/1.3152956
[29] Kononenko T V, Pivovarov P A, Khomich A A, et al. Effect of absorbing coating on ablation of diamond by IR laser pulses [J]. Quantum Electronics, 2018, 48(3): 244-250. doi:  10.1070/QEL16567
[30] Kononenko T V, Meier M, Komlenok M S, et al. Microstructuring of diamond bulk by IR femtosecond laser pulses [J]. Applied Physics A, 2007, 90(4): 645-651.
[31] Kononenko T V, Pivovarov P A, Khomich A A, et al. Processing of polycrystalline diamond surface by IR laser pulses without interior damage [J]. Optics & Laser Technology, 2019, 117: 87-93.
[32] Liu Yan, Chen Gengxu, Song Min, et al. Fabrication of nitrogen vacancy color centers by femtosecond pulse laser illumination [J]. Opt Express, 2013, 21(10): 12843-12848. doi:  10.1364/OE.21.012843
[33] Kononenko V V, Vlasov I I, Gololobov V M, et al. Nitrogen-vacancy defects in diamond produced by femtosecond laser nanoablation technique [J]. Applied Physics Letters, 2017, 111(8): 081101.
[34] Dumitru G, Romano V, Weber H P, et al. Femtosecond ablation of ultrahard materials [J]. Applied Physics A: Materials Science & Processing, 2002, 74(6): 729-739.
[35] Forster M, Huber C, Armbruster O, et al. 50-nanometer femtosecond pulse laser induced periodic surface structures on nitrogen-doped diamond [J]. Diamond and Related Materials, 2017, 74: 114-118. doi:  10.1016/j.diamond.2017.02.016
[36] Huang Min, Zhao Fuli, Cheng Ya, et al. Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond [J]. Physical Review B, 2009, 79(12): 125436.
[37] Mastellone M, Bellucci A, Girolami M, et al. Deep-Subwavelength 2D periodic surface nanostructures on diamond by double-pulse femtosecond laser irradiation[J]. Nano Lett, 2021, 21(10): 4477-4483. doi:  10.1021/acs.nanolett.1c01310
[38] 江海河. 激光加工技术应用的发展及展望 [J]. 光电子技术与信息, 2001(04): 1-12.

Jiang Haihe. Development and forecast of the laser processing technology application [J]. Journal of Atmospheric and Environmental, 2001(4): 1-12. (in Chinese)
[39] Chichkov B N, Momma C, Nolte S, et al. Femtosecond, picosecond and nanosecond laser ablation of solids [J]. Applied Physics A, 1996, 63(2): 109-115. doi:  10.1007/BF01567637
[40] 张少军, 郭智, 成加皿, 等. 高重频硬X射线自由电子激光脉冲到达时间诊断方法研究 [J]. 物理学报, 2023, 72(10): 262-272.

Zhang Shaojun, Guo Zhi, Cheng Jiamin, et al. Arrival time diagnosis method of high refrequency hard X-ray free electron laser[J]. Acta Physica Sinica, 2023, 72(10): 262-272. (in Chinese)
[41] Qi Zhina, Zheng Yuting, Zhu Xiaohua, et al. An ultra-thick all-diamond microchannel heat sink for single-phase heat transmission efficiency enhancement[J]. Vacuum, 2020, 177: 1-7.
[42] Okamoto Yasuhiro, Okubo Tubas, Kajitani Atsuya, et al. High-quality micro-shape fabrication of monocrystalline diamond by nanosecond pulsed laser and acid cleaning [J]. International Journal of Extreme Manufacturing, 2022, 4(2): 025301. doi:  10.1088/2631-7990/ac5a6a
[43] Eberle G, Jefimovs K, Wegener K. Characterisation of thermal influences after laser processing polycrystalline diamond composites using long to ultrashort pulse durations [J]. Precision Engineering, 2015, 39: 16-24. doi:  10.1016/j.precisioneng.2014.06.008
[44] Mao Bo, Siddaiah Arpith, Liao Yiliang, et al. Laser surface texturing and related techniques for enhancing tribological performance of engineering materials: A review [J]. Journal of Manufacturing Processes, 2020, 53: 153-173. doi:  10.1016/j.jmapro.2020.02.009
[45] Zhang Zhen, Zhang Quanli, Wang Yeqing, et al. Modeling of the temperature field in nanosecond pulsed laser ablation of single crystalline diamond [J]. Diamond and Related Materials, 2021, 116: 108402.
[46] Takayama N, Yan J. Mechanisms of micro-groove formation on single-crystal diamond by a nanosecond pulsed laser[J]. Journal of Materials Processing Technology, 2017, 243: 299-311. doi:  10.1016/j.jmatprotec.2016.12.032
[47] Cadot G B J, Thomas K, Best J P, et al. Investigation of the microstructure change due to phase transition in nanosecond pulsed laser processing of diamond [J]. Carbon, 2018, 127: 349-365. doi:  10.1016/j.carbon.2017.10.030
[48] Kononenko T V, Kononenko V V, Pimenov S M, et al. Effects of pulse duration in laser processing of diamond-like carbon films [J]. Diamond and Related Materials, 2005, 14(8): 1368-1376. doi:  10.1016/j.diamond.2005.02.009
[49] 温秋玲, 韦新宇, 王华禄, 等. 皮秒激光加工CVD单晶金刚石的特征和机理研究[J]. 光子学报, 2021, 50(6): 126-136. doi:  10.3788/gzxb20215006.0650113

Wen Qiuling, Wei Xinyu, Wang Hualu, et al. Characteristics and mechanism of CVD single crystal diamond processed by picosecond laser[J]. Acta Photonica Sinica, 2021, 50(6): 126-136. (in Chinese) doi:  10.3788/gzxb20215006.0650113
[50] Takayama N, Ishizuka J, Yan J. Microgrooving of a single-crystal diamond tool using a picosecond pulsed laser and some cutting tests [J]. Precision Engineering, 2018, 53: 252-262. doi:  10.1016/j.precisioneng.2018.04.009
[51] Pimenov S M, Khomich A A, Neuenschwander B, et al. Picosecond-laser bulk modification induced enhancement of nitrogen-vacancy luminescence in diamond[J]. Journal of the Optical Society of America B, 2016, 33(3): B49-B55.
[52] Pimenov S M, Neuenschwander B, Jäggi B, et al. Effect of crystal orientation on picosecond-laser bulk microstructuring and Raman lasing in diamond[J]. Applied Physics A, 2013, 114(4): 1309-1319.
[53] Pimenov S M, Vlasov I I, Khomich A A, et al. Picosecond-laser-induced structural modifications in the bulk of single-crystal diamond [J]. Applied Physics A, 2011, 105(3): 673-637. doi:  10.1007/s00339-011-6645-0
[54] Fork R L, Greene B I, Shank C V. Generation of optical pulses shorter than 0.1 psec by colliding pulse mode locking [J]. Applied Physics Letters, 1981, 38(9): 671-672. doi:  10.1063/1.92500
[55] Schaffer C B, Brodeur A, Mazur E. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses[J]. Meas Sci Technol, 2001, 12(11): 1784-1794. doi:  10.1088/0957-0233/12/11/305
[56] Gattass R R, Mazur E. Femtosecond laser micromachining in transparent materials [J]. Nature Photonics, 2008, 2(4): 219-225. doi:  10.1038/nphoton.2008.47
[57] Glezer E N, Milosavljevic M, Huang L, et al. Three-dimensional optical storage inside transparent materials [J]. Opt Lett, 1996, 21(24): 2023-2025. doi:  10.1364/OL.21.002023
[58] Qu Meina, Jin Tan, Xie Guizhi, et al. Developing a novel binderless diamond grinding wheel with femtosecond laser ablation and evaluating its performance in grinding soft and brittle materials[J]. Journal of Materials Processing Technology, 2020, 275: 1-9.
[59] Zalloum O H, Parrish M, Terekhov A, et al. An amplified femtosecond laser system for material micro-/nanostructuring with an integrated Raman microscope [J]. Rev Sci Instrum, 2010, 81(5): 053906. doi:  10.1063/1.3430073
[60] Ogawa Y, Ota M, Nakamoto K, et al. A study on machining of binder-less polycrystalline diamond by femtosecond pulsed laser for fabrication of micro milling tools [J]. CIRP Annals, 2016, 65(1): 245-248. doi:  10.1016/j.cirp.2016.04.081
[61] 韩源, 马玉平, 王海航, 等. 飞秒激光刻蚀纳米金刚石涂层材料去除率的研究 [J]. 激光与光电子学进展, 2021, 58(11): 1114001.

Han Yuan, Ma Yuping, Wang Haihang, et al. Material removal rate of nano-diamond coating ablated by femtosecond laser[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1114001. (in Chinese)
[62] 方向阳. CVD金刚石膜激光铲平切割工艺研究 [J]. 宁夏工程技术, 2003(02): 157-160. doi:  10.3969/j.issn.1671-7244.2003.02.017

Fang Xiangyang. The research on laser cutting technology of CVD diamond film [J]. Ningxia Engineering Technology, 2003, 2 (2): 157-160. (in Chinese) doi:  10.3969/j.issn.1671-7244.2003.02.017
[63] Wang Ji, Zhang Peng, Zhang Tianrun, et al. Experiments of high frequency laser cutting of chemical vapor deposition diamond with large cutting depth [J]. Optics and Precision Engineering, 2022, 30(1): 89-95. (in Chinese) doi:  10.37188/OPE.20223001.0089
[64] Park J K, Ayres V M, Asmussen J, et al. Precision micromachining of CVD diamond films [J]. Diamond and Related Materials, 2000, 9(3): 1154-1158.
[65] Yan Lei, Wu Feifei, Deng Yuheng, et al. Study on laser processing of chemical vapor deposition diamond thick film [J]. Diamond & Abrasives Engineering, 2012, 32(5): 6-9.
[66] 郭强, 贾志新, 高坚强, 等. 聚晶金刚石复合片激光切割工艺研究 [J]. 激光与红外, 2017, 47(6): 686-692.

Guo Qiang, Jia Zhixin, Gao Jianqiang, et al. Technological study on laser cutting of polycrystalline diamond compact [J]. Laser & Infrared, 2017, 47(6): 686-692. (in Chinese)
[67] Jeong B, Lee B, Kim J H, et al. Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses [J]. Quantum Electronics, 2020, 50(2): 201-204. doi:  10.1070/QEL17097
[68] Martin A A, Bishop J, Burnett W, et al. Ultra-high aspect ratio pores milled in diamond via laser, ion and electron beam mediated processes [J]. Diamond and Related Materials, 2020, 105: 107806. doi:  10.1016/j.diamond.2020.107806
[69] Golota N C, Preiss D, Fredin Z P, et al. High aspect ratio diamond nanosecond laser machining [J]. Appl Phys A Mater Sci Process, 2023, 129(7): 490. doi:  10.1007/s00339-023-06755-2
[70] Shen Tianlun, Chen Tao, Si Jinhai, et al.Structural changes during femtosecond laser percussion drilling of high-aspect-ratio diamond microholes[J]. Optical Engineering, 2022, 61 (1): 016103.
[71] Kumar S, Eaton S M, Bollani M, et al. Laser surface structuring of diamond with ultrashort Bessel beams[J]. Sci Rep, 2018, 8(1): 14021. doi:  10.1038/s41598-018-32415-0
[72] 董春燕, 张晓宇, 顾德华, 等. 不同激光功率下金刚石微孔成形及缺陷特征[J]. 中国激光, 2023, 50(24): 2402404.

Dong Chunyan, Zhang Xiaoyu, Gu Dehua, et al. Analysis of diamond microporous forming characteristics and defects under different laser powers[J]. Chinese Journal of Lasers, 2023, 50(24): 2402404. (in Chinese)
[73] 韦新宇, 温秋玲, 陆静, 等. 紫外纳秒激光加工金刚石微槽工艺参数优化研究[J]. 中国激光, 2022, 49(10): 1002406.

Wei Xinyu, Wen Qiuling, Lu Jing, et al. Research on parameters optimization of diamond microgrooves processed by ultravilot nanosecond laser[J]. Chinese Journal of Lasers, 2022, 49(10): 1002406. (in Chinese)
[74] 黄建衡, 梁国文, 李冀, 等. 飞秒激光制备多晶金刚石微结构阵列[J]. 中国激光, 2017, 44(3): 0302007.

Huang Jianheng, Liang Guowen, Li Ji, et al. Femtosecond laser processing of polycrystalline diamond micro-structure array[J]. Chinese Journal of Lasers, 2017, 44(3): 0302007. (in Chinese)
[75] Tu Junlei, Shi Jiadong, Chen Liangxian, et al. Surface termination of the diamond microchannel and single-phase heat transfer performance[J]. International Journal of Heat and Mass Transfer, 2022, 199: 123481. doi:  10.1016/j.ijheatmasstransfer.2022.123481
[76] Dudek M, Rosowski A, Kozanecki M, et al. Microstructures manufactured in diamond by use of laser micromachining[J]. Materials (Basel), 2020, 13(5): 1199. doi:  10.3390/ma13051199
[77] Dou Jian, Cui Jianlei, Fang Xuyang, et al. Theoretical and experimental study on machining rectangular microgroove of diamond by femtosecond laser[J]. Integrated Ferroelectrics, 2020, 208(1): 104-116. doi:  10.1080/10584587.2020.1728722
[78] Shinoda M, Gattass R R, Mazur E. Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces[J]. Journal of Applied Physics, 2009, 105(5): 053102. doi:  10.1063/1.3079512
[79] Liu Huagang, Xie Linran, Lin Wenxiong, et al. Optical quality laser polishing of CVD diamond by UV pulsed laser irradiation[J]. Advanced Optical Materials, 2021, 9(21): 2100537. doi:  10.1002/adom.202100537
[80] Xu Feng. Study on laser processing and machining of CVD diamond thick-film[D]. Nanjing: Nanjing University of Aeronautics and Astronautics, 2002. (in Chinese)
[81] Prieske M, Vollertsen F. Picosecond-laser polishing of CVD-diamond coatings without graphite formation [J]. Materials Today: Proceedings, 2021, 40: 1-4. doi:  10.1016/j.matpr.2020.01.283
[82] Komlenok M, Pashinin V, Sedov V, et al. Femtosecond and nanosecond laser polishing of rough polycrystalline diamond [J]. Laser Physics, 2022, 32(8): 084003.
[83] Tsai H Y, Ting C J, Chou C P. Evaluation research of polishing methods for large area diamond films produced by chemical vapor deposition [J]. Diamond and Related Materials, 2007, 16(2): 253-261. doi:  10.1016/j.diamond.2006.06.007
[84] Tosin P, Blatter A, Lüthy W. Laser‐induced surface structures on diamond films [J]. Journal of Applied Physics, 1995, 78: 3797-3800. doi:  10.1063/1.359893
[85] Gloor S, Lüthy W, Weber H P, et al. UV laser polishing of thick diamond films for IR windows [J]. Applied Surface Science, 1999, 135-139.
[86] 胡北辰, 张志耀, 张红梅, 等. SiC单晶材料的激光剥离技术研究进展[J]. 电子工艺技术, 2022, 43(4): 192 -195.

Hu Beichen, Zhang Zhiyao, Zhang Hongmei, et al. Research progress of laser-assisted spalling for SiC single crystal [J]. Electronics Process Technology, 2022, 43(4): 192 -195. (in Chinese)
[87] Wang Fei, Shan Chao, Yan Jianping, et al. Application of femtosecond laser technique in single crystal diamond film separation [J]. Diamond and Related Materials, 2016, 63: 69-74. doi:  10.1016/j.diamond.2015.11.015
[88] Kalyanasundaram D, Schmidt A, Molian P, et al. Hybrid CO2 Laser/Waterjet machining of polycrystalline diamond substrate: Material separation through transformation induced controlled fracture[J]. Journal of Manufacturing Science and Engineering, 2014, 136(4): 041001. doi:  10.1115/1.4027304
[89] Malshe A P, Ozkan A M, Brown W D. Process for sequential multi-beam laser processing of materials: America, US006168744B1 [P]. 2001-01-02.
[90] Shi Guangfeng, Han Dongdong, Wang Shukun, et al. Analysis and evaluation of natural diamond cut by water jet-guided laser[J]. Aer Adv Eng Res, 2017, 146: 195-198.
[91] Richmann A, Kuzminykh Y, Richerzhagen B, et al. Laser microjet cutting of up to 3 mm thick sapphire[C]//Int Congr Appl Lasers Electro-Optics, 2014: 1139–1143.
[92] Qiao Hongchao, Cao Zhihe, Cui Jianfeng, et al, Experimental study on water jet guided laser micro-machining of mono-crystalline silicon[J]. Optics & Laser Technology, 2021, 140: 107507.
[93] Silvennoinen M, Kaakkunen J J J, Paivasaari K, et alWater spray assisted ultrashort laser pulse ablation[J]. Applied Surface Science, 2013, 265: 865-869. doi:  10.1016/j.apsusc.2012.11.135
[94] Tangwarodomnukun V, Likhitangsuwat P, Tevinpibanphan O, et al. Laser ablation of titanium alloy under a thin and flowing water layer[J]. Int J Mach Tool Manu, 2015, 89: 14–28.
[95] Tangwarodomnukun V, Wuttisarn TEvolution of milled cavity in the multiple laser scans of titanium alloy under a flowing water layer[J]. Int J Adv Manuf Technol, 2017, 92: 293-302. doi:  10.1007/s00170-017-0125-4
[96] Guo Bing, Zhang Jun, Wu Mingtao, et al. Water assisted pulsed laser machining of micro-structured surface on CVD diamond coating tools[J], Journal of Manufacturing Processes, 2020, 56: 591-601.