光纤相移点衍射干涉仪关键技术

张宇; 金春水; 马冬梅; 王丽萍

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光纤相移点衍射干涉仪关键技术

张宇, 金春水, 马冬梅, 王丽萍

文章导航 > 红外与激光工程 > 2015 > 44(1): 254-259

张宇, 金春水, 马冬梅, 王丽萍. 光纤相移点衍射干涉仪关键技术[J]. 红外与激光工程, 2015, 44(1): 254-259.

引用本文:

张宇, 金春水, 马冬梅, 王丽萍. 光纤相移点衍射干涉仪关键技术[J]. 红外与激光工程, 2015, 44(1): 254-259.

Zhang Yu, Jin Chunshui, Ma Dongmei, Wang Liping. Key technology for fiber phase-shifting point diffraction interferometer[J]. Infrared and Laser Engineering, 2015, 44(1): 254-259.

Citation:

Zhang Yu, Jin Chunshui, Ma Dongmei, Wang Liping. Key technology for fiber phase-shifting point diffraction interferometer[J]. Infrared and Laser Engineering, 2015, 44(1): 254-259.

光纤相移点衍射干涉仪关键技术

1.
东北电力大学理学院,吉林长春132012;
2.
中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

基金项目:

东北电力大学博士科研启动基金(BSJXM-201218)

详细信息

作者简介:
张宇(1985-),女,讲师,博士,主要从事光学检测方面的研究。Email:521zhangyu2008@163.com

中图分类号: O436.1

Key technology for fiber phase-shifting point diffraction interferometer

1.
College of Science,Northeast Dianli University,Changchun 132012,China;
2.
State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

摘要: 为了实现光学系统波像差的高精度检测,引入了改进的光纤相移点衍射干涉仪,介绍了其工作原理,并对干涉仪的关键部件包括激光光源及光纤的参数进行了选择和分析。经测试,激光光源功率稳定性约为1%(10 min),光斑尺寸在实现最佳耦合效率允许范围内,光束位置稳定度约为6 um,相干长度为1 cm 左右,都在测试精度允许范围内;选择了纤芯直径为3.5 um 的单模不保偏光纤,对光纤端面镀半反半透金属膜,实现了较高的条纹对比度和光能利用率,并设计了波前参考源,方便了光纤端面的抛光、镀膜及装卡。最后,利用选择的部件搭建了光纤相移点衍射干涉仪实验装置,为最终能够实现光学系统波像差的高精度检测提供了前期的准备。
- 高精度检测 /
- 光纤相移点衍射干涉仪 /
- 光学系统波像差 /
- 激光光源 /
- 光纤
Abstract: In order to measure the wavefront aberration of optical system with the high accuracy, the improved fiber phase-shifting point diffraction interferometer was introduced, its working principle was introduced, and the parameters of the key components of the interferometer including laser source and fiber were selected and analyzed. After the test, the laser power stability was about 1%(10 min), the spot size was in the allowable range of the optimum coupling efficiency, the beam position stability was about 6 um, the coherence length was about 1 cm, the above were all in the allowable range of testing accuracy; No polarization-maintaining single-mode fiber was selected, its core diameter was 3.5 um, the fiber endface was coated transflective metal film, the high fringe contrast and light energy utilization were realized, and the wavefront reference source was designed, it's convenient for the polishing, coating and clamping of fiber endface. Finally, the selected components were used to build experimental device of fiber phase-shifting point diffraction interferometer, above works provide preparation for ultimately achieving high accuracy test of the wavefront aberration of optical system.
- high accuracy test /
- fiber phase-shifting point diffraction interferometer /
- wavefront aberration of optical system /
- laser source /
- fiber

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[2]	He Yong, Chen Lei, Wang Qing, et al. Twyman-Green infrared phase-shifting interferometer and application [J]. Infrared and Laser Engineering, 2003, 32(4): 335-338. (in Chinese)
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光纤相移点衍射干涉仪关键技术

1. 东北电力大学理学院,吉林长春132012;

2. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

作者简介:
张宇(1985-),女,讲师,博士,主要从事光学检测方面的研究。Email:521zhangyu2008@163.com

收稿日期: 2014-05-08
修回日期: 2014-06-03
刊出日期: 2015-01-25

基金项目:

东北电力大学博士科研启动基金(BSJXM-201218)

中图分类号: O436.1

关键词:

摘要: 为了实现光学系统波像差的高精度检测,引入了改进的光纤相移点衍射干涉仪,介绍了其工作原理,并对干涉仪的关键部件包括激光光源及光纤的参数进行了选择和分析。经测试,激光光源功率稳定性约为1%(10 min),光斑尺寸在实现最佳耦合效率允许范围内,光束位置稳定度约为6 um,相干长度为1 cm 左右,都在测试精度允许范围内;选择了纤芯直径为3.5 um 的单模不保偏光纤,对光纤端面镀半反半透金属膜,实现了较高的条纹对比度和光能利用率,并设计了波前参考源,方便了光纤端面的抛光、镀膜及装卡。最后,利用选择的部件搭建了光纤相移点衍射干涉仪实验装置,为最终能够实现光学系统波像差的高精度检测提供了前期的准备。

English Abstract

Key technology for fiber phase-shifting point diffraction interferometer

1. College of Science,Northeast Dianli University,Changchun 132012,China;

2. State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

Received Date: 2014-05-08
Rev Recd Date: 2014-06-03
Publish Date: 2015-01-25

Keywords:

high accuracy test /
fiber phase-shifting point diffraction interferometer /
wavefront aberration of optical system /
laser source /
fiber

Abstract: In order to measure the wavefront aberration of optical system with the high accuracy, the improved fiber phase-shifting point diffraction interferometer was introduced, its working principle was introduced, and the parameters of the key components of the interferometer including laser source and fiber were selected and analyzed. After the test, the laser power stability was about 1%(10 min), the spot size was in the allowable range of the optimum coupling efficiency, the beam position stability was about 6 um, the coherence length was about 1 cm, the above were all in the allowable range of testing accuracy; No polarization-maintaining single-mode fiber was selected, its core diameter was 3.5 um, the fiber endface was coated transflective metal film, the high fringe contrast and light energy utilization were realized, and the wavefront reference source was designed, it's convenient for the polishing, coating and clamping of fiber endface. Finally, the selected components were used to build experimental device of fiber phase-shifting point diffraction interferometer, above works provide preparation for ultimately achieving high accuracy test of the wavefront aberration of optical system.