[1]
|
Peng Ziqiu, Wang Jun, Yuan Kai, et al. Recent developments of micro-bolometer using double sacrificial layers[J]. Chinese Journal of Electron Devices, 2010, 33(3): 304-307. (in Chinese) |
[2]
|
Xu X D, Zhang H L, Zhang L C, et al. Stress engineering of SiNx films for modifying optical and mechanical properties [J]. J Phys Chem C, 2009, 113: 4634-4640. |
[3]
|
Zhou Dong, Xu Xiangdong, Wang Zhi, et al. Study on characteristics and structures of amorphous silicon nitride thin films applied in micro-bolometer[J]. Acta Optica Sinica, 2010, 30(10): 2782-2787. (in Chinese) |
[4]
|
Deniz S T, Selim E, Orhan S A, et al. An uncooled microbolometer infrared focal plane array in standard CMOS[C]//SPIE, 2001, 4288: 112-121. |
[5]
|
Li Su, Wu Zhiming, Jiang Yadong, et al. Performance analysis of microbolometer microbridge structure [J]. Chinese Journal of Sensors and Actuators, 2006, 19(5): 1728-1730. (in Chinese) |
[6]
|
Yutaka Tanaka, Akio Tanaka, Kiyoshi Iida, et al. Performance of 320240 uncooled bolometer type infrared focal plane arrays [C]//SPIE, 2003, 5074: 414-424. |
[7]
|
Xu Lujia, Hu Ming, Yang Haibo, et al. Thickness ratio of support membranes for incooled infrared microbolometer [J]. J Infrared Millim Waves, 2010, 29(4): 251-254. (in Chinese) |
[8]
|
Wang Zhi, Xu Xiangdong, Zhou Dong, et al. Study on effect of thermal-stress on microbridges of uncooled IRFPAs and the controlling methods[J]. Acta Optica Sinica, 2011, 31(3): 0331002-1-0331002-5. (in Chinese) |
[9]
|
Xu Xiangdong, Yang Zhuo, Wang Zhi, et al. Advanced design of microbolometers for uncooled infrared detectors[C]//IEEE Proc Intern Conf Sci Technol, 2011: 745-747. |
[10]
|
Li Chuan, Skidmore G D. Recent development of ultra small pixel uncooled focal plane arrays at DRS[C]//SPIE, 2007, 6542: 65421Y-2. |
[11]
|
Murphy D, Ray M, Wyles J. Performance improvements for VOx microbolometer FPAs[C]//SPIE, 2004, 5406: 531-540. |
[12]
|
Xu Tairan. MEMS Microsystems Design and Manufacture [M]. Wang Xiaohao, Zhou Zhaoying translated. Beijing: China Machine Press, 2004: 225. (in Chinese) |
[13]
|
Fan Qingshan, Cai Xin. Material Mechanics[M]. Beijing:Tsinghua Press, 2006: 173. (in Chinese) |
[14]
|
Gong Yuguang, Li Wei, Cai Haihong, et al. Simulation of microbolometers based on а-Si: H thin films with thermal and mechanical performance [J]. Chinese Journal of Sensors and Actuators, 2009, 22(8): 1122-1126. (in Chinese) |
[15]
|
Liu Weiguo, Jin Na. Integrated Uncooled Thermal Imaging Detecing Array[M]. Beijing: National Defence Industry Press, 2004: 13. (in Chinese) |
[16]
|
Dong Liang, Yue Ruifeng, Liu Litian. Optical And Thermal design for mircobolometer[J]. J Infrared Millim Waves, 2003, 22(2): 109-113. (in Chinese) |
[17]
|
Zhang Yizhong, Wu Zhiming, Xu Xiangdong, et al. Deformation analysis of Bolometer micro-bridges[J]. Infrared Technology, 2008, 30(9): 516-519. (in Chinese) |
[18]
|
Fan Jinxiang, Yue Yanjun. Development in new concepts and new schemes for military infrared imaging systems [J]. Infrared and Laser Engineering, 2011, 40(1): 1-6. (in Chinese) |
[19]
|
He Wenjin, Tai Yunjian, Li Yuying, et al. Thermal isolation structure for pyroelectric uncooled infrared focal plane array detector[J]. Infrared and Laser Engineering, 2011, 40(8): 1407-1411. (in Chinese) |