KrF激光和脉冲CO<sub>2</sub>激光损伤K9玻璃的实验对比与分析

王玺; 方晓东

doi:10.3788/IRLA201645.1206009

KrF激光和脉冲CO₂激光损伤K9玻璃的实验对比与分析

doi: 10.3788/IRLA201645.1206009

王玺^1,2,3,
方晓东^1, ,

1.
中国科学院安徽光学精密机械研究所,安徽合肥 230031;
2.
中国科学技术大学,安徽合肥 230029;
3.
解放军电子工程学院脉冲功率激光技术国家重点实验室,安徽合肥 230037

基金项目:

脉冲功率激光技术国家重点实验室基金项目（SKL2014ZR03）

详细信息

作者简介:
王玺(1981-),男,助理研究员,博士,主要从事激光与物质相互作用方面的研究。Email:eastangus@126.com

通讯作者: 方晓东(1963-),男,研究员,博士,主要从事激光技术应用方面的研究。Email:xdfang@aiofm.ac.cn

中图分类号: TN249

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO₂ laser

Wang Xi^1,2,3,
Fang Xiaodong^{1
, ,}

1.
Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;
2.
University of Science and Technology of China,Hefei 230029,China;
3.
State Key Laboratory of Pulsed Power Laser Technology,Electronic Engineering Institute,Hefei 230037,China

摘要: 对KrF准分子激光辐照K9玻璃进行了损伤实验，并与脉冲CO2激光损伤K9玻璃进行了对比分析，研究了紫外和远红外两种激光系统对同种光学材料的损伤特性。实验结果结果表明，KrF准分子激光和脉冲CO2激光对K9玻璃的损伤形貌基本相同，损伤主要是热力耦合损伤机制，但是两者在损伤阈值和损伤时间等方面仍有很大差别。与脉冲CO2激光相比，K9玻璃的KrF准分子激光损伤阈值更低，并且损伤持续时间更短。通过两类激光在波长和光子能量上的巨大差异可以很好地解释这一现象。该研究结果对准分子激光在空间工程应用上有着非常重要的参考价值。
- 准分子激光 /
- 激光损伤 /
- 损伤形貌 /
- K9玻璃
Abstract: It has very important application value to investigate the damage performance of K9 glass irradiated by ultraviolet excimer laser. In this paper, the experiment research on damage in K9 glass irradiated by 248 nm KrF excimer laser was carried out, the sample damage threshold and damage morphology were analyzed by means of metallurgical microscope and scanning electron microscope. The comparison of laser induced damage performance between KrF excimer laser and pulse CO2 laser were investigated. The experimental results indicate that the damage mechanism of K9 glass irradiated by KrF excimer laser and pulse CO2 laser mainly follow the thermal-mechanical coupling mechanism. However, there is apparent difference in damage threshold and damage time. For example, the damage threshold is lower and the damage time is shorter for KrF excimer laser. This can be explained by the difference in wavelength and photon energy between the KrF excimer laser and pulse CO2 laser. The research presented in this paper is helpful for further exploring the ultraviolet excimer laser damage mechanism of optical materials.
- excimer laser /
- laser damage /
- damage morphology /
- K9 glass

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KrF激光和脉冲CO₂激光损伤K9玻璃的实验对比与分析

doi: 10.3788/IRLA201645.1206009

作者简介:
王玺(1981-),男,助理研究员,博士,主要从事激光与物质相互作用方面的研究。Email:eastangus@126.com

通讯作者: 方晓东(1963-),男,研究员,博士,主要从事激光技术应用方面的研究。Email:xdfang@aiofm.ac.cn

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO₂ laser

计量

KrF激光和脉冲CO₂激光损伤K9玻璃的实验对比与分析

doi: 10.3788/IRLA201645.1206009

1. 中国科学院安徽光学精密机械研究所,安徽合肥 230031;

2. 中国科学技术大学,安徽合肥 230029;

3. 解放军电子工程学院脉冲功率激光技术国家重点实验室,安徽合肥 230037

作者简介:
王玺(1981-),男,助理研究员,博士,主要从事激光与物质相互作用方面的研究。Email:eastangus@126.com

通讯作者: 方晓东(1963-),男,研究员,博士,主要从事激光技术应用方面的研究。Email:xdfang@aiofm.ac.cn

English Abstract

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO₂ laser

1. Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;

2. University of Science and Technology of China,Hefei 230029,China;

3. State Key Laboratory of Pulsed Power Laser Technology,Electronic Engineering Institute,Hefei 230037,China

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目录

留言板

KrF激光和脉冲CO2激光损伤K9玻璃的实验对比与分析

doi: 10.3788/IRLA201645.1206009

作者简介: 王玺(1981-),男,助理研究员,博士,主要从事激光与物质相互作用方面的研究。Email:eastangus@126.com

通讯作者: 方晓东(1963-),男,研究员,博士,主要从事激光技术应用方面的研究。Email:xdfang@aiofm.ac.cn

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO2 laser

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出版历程

KrF激光和脉冲CO2激光损伤K9玻璃的实验对比与分析

doi: 10.3788/IRLA201645.1206009

1. 中国科学院安徽光学精密机械研究所,安徽 合肥 230031; 2. 中国科学技术大学,安徽 合肥 230029; 3. 解放军电子工程学院 脉冲功率激光技术国家重点实验室,安徽 合肥 230037

作者简介: 王玺(1981-),男,助理研究员,博士,主要从事激光与物质相互作用方面的研究。Email:eastangus@126.com

通讯作者: 方晓东(1963-),男,研究员,博士,主要从事激光技术应用方面的研究。Email:xdfang@aiofm.ac.cn

English Abstract

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO2 laser

1. Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China; 2. University of Science and Technology of China,Hefei 230029,China; 3. State Key Laboratory of Pulsed Power Laser Technology,Electronic Engineering Institute,Hefei 230037,China

全文HTML

目录

KrF激光和脉冲CO₂激光损伤K9玻璃的实验对比与分析

作者简介:
王玺(1981-),男,助理研究员,博士,主要从事激光与物质相互作用方面的研究。Email:eastangus@126.com

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO₂ laser

KrF激光和脉冲CO₂激光损伤K9玻璃的实验对比与分析

1. 中国科学院安徽光学精密机械研究所,安徽合肥 230031;

2. 中国科学技术大学,安徽合肥 230029;

3. 解放军电子工程学院脉冲功率激光技术国家重点实验室,安徽合肥 230037

作者简介:
王玺(1981-),男,助理研究员,博士,主要从事激光与物质相互作用方面的研究。Email:eastangus@126.com

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO₂ laser

1. Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;

2. University of Science and Technology of China,Hefei 230029,China;

3. State Key Laboratory of Pulsed Power Laser Technology,Electronic Engineering Institute,Hefei 230037,China