Piecewise linear calibration of Fourier spectral measurement system responsivity based on the high temperature blackbody
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摘要: 傅里叶红外光谱仪（FTIR）光谱响应度的标定工作是FTIR红外光谱精准测量的基础。基于中国计量科学研究院（NIM）的ThermoGage HT9500型高温基准黑体辐射源，对NIM搭建的FTIR高温黑体红外辐射特性测量系统的光谱响应度，通过分段线性标定法进行了标定实验。建立并描述了FTIR测量高温黑体红外辐射特性系统响应度函数标定模型，并通过测量的黑体辐射源在1 273~1 973 K温区、1~14 m宽频谱内的红外光谱，对FTIR测量系统的光谱响应度进行了标定实验研究。结果表明：分段线性标定FTIR红外光谱测量系统方法具有良好可靠性。1 373~1 873 K温区的测量光谱与基于黑体标定的计算光谱在1~14 m频谱内平均偏差优于1%，黑体光谱辐射亮度峰值波长上反演得到的黑体计算温度与实际温度偏差优于0.45%。Abstract: The calibration of the spectral responsivity of Fourier transform infrared(FTIR) spectrometer is the basis for accurate spectrum measurement. The spectral responsivity of FTIR spectrometer measurement system with high temperature blackbody infrared radiation characteristics, established at National Institute of Metrology, China(NIM), was calibrated based on piecewise linear calibration via the ThermoGage HT9500 high temperature reference blackbody furnace from NIM. A calculation model of the spectral responsivity calibration of FTIR measurement system was established and described. The infrared spectrum of the blackbody radiation source was measured in the temperature range of 1 273-1 973 K in the wavelength range of 1-14 m. The results indicate that the method of piecewise linear calibration is practicable. The measured infrared spectrum in the temperature range of 1 373-1 873 K in the wavelength range of 1-14 m was compared with the calculation which showed the signal divergence was less than 1%. The calculated temperature obtained by inverse calculation in this temperature region was compared with the actual temperature which showed the temperature divergence was less than 0.45%.
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Key words:
- metrology /
- responsivity calibration /
- FTIR /
- high temperature blackbody /
- wideband spectrum
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