From subwavelength grating to metagrating: principle, design and applications
-
摘要: 随着纳米光子学的发展,光学结构如光学微腔、波导结构、光子晶体、亚波长光栅、超构表面等能够在微纳尺度实现对光的传输与调控,推动了光学集成化的发展。亚波长光栅由于其结构简单、成本低廉等特点得到了科学家们广泛的研究,应用在各种光学器件,逐渐形成了光栅分析模型的成熟理论体系。结合周期性结构耦合行为及超构表面中超构原子的散射调制特性,从亚波长光栅衍生出的超构光栅能够利用周期性布拉格散射提高调控光束的效率,从而避免了超构表面相位离散化带来的效率降低和能量损失。科学家们研究并设计了超构光栅,更多的物理现象及应用被探究和挖掘。文中对亚波长光栅以及超构光栅的基本理论、设计和应用进行了概述。从基本原理出发,论述了亚波长光栅和超构光栅的特性,综述了二者的理论设计及单元设计方法,并介绍了在生物传感、滤光片光谱调控和吸收薄膜等方面的应用。最后,展望了未来的发展方向。Abstract: With the development of nanophotonics, optical structures, such as optical microcavity, waveguide structure, photonic crystal, subwavelength gratings and metasurfaces, can realize light transmission and manipulation at nanoscale, which promotes the development of optical integration. Subwavelength grating has been widely studied by scientists because of its simple structure and low cost. It has gradually formed a mature theoretical system of grating analysis model when applied to various optical devices. Combined with the coupling of periodic structure and scattering modulation characteristics of meta-atoms, the metagrating derived from subwavelength gratings can improve the efficiency by using periodic Bragg scattering, thus avoiding the efficiency reduction and energy loss caused by the phase discretization. Scientists have studied and designed metagratings, and more physical phenomena and applications have been explored. In this paper, the basic theory, design and application of subwavelength gratings and metagratings were summarized. Based on the basic principle, the characteristics of subwavelength gratings and metagratings were discussed, the theoretical and unit design methods were also outlined and their applications in biosensing, spectral control of filter and absorption film were introduced. Finally, the future development was prospected.
-
图 11 (a)具有纳米级结构和逐点测量传感功能的微流控芯片示意图[78];一次性导模共振生物传感器芯片的 (b) 示意图和(c)其光学图像,包括在环烯烃共聚物(COC)基板上的亚波长光栅(一维TiO2光栅)结构和用于处理注射液的微流体模块[80]
Figure 11. (a) Schematic of microfluidic chip with nanostructured and spot-wise functionalized sensor field[78]; (b) Schematic and (c) optical image of the disposable GMR biosensor chip, consisting of a subwavelength grating (a one-dimensional TiO2 grating structure) on a cyclic olefin copolymer substrate and a microfluidic module for handing the injection of fluid sample into the sensing area[80]
图 12 纳米孔阵列亚波长光栅滤光片。(a) 基于金属铝的纳米孔阵列滤光片,尺寸边长分别为 (a1) 10 μm,(a2) 5 μm,(a3) 2.4 μm,(a4) 1.2 μm的滤光片光谱[87];(b)纳米孔阵列形成的彩色徽标[88];(c)与CMOS图像传感器结合的纳米孔阵列滤光片[89];(d)基于硅材料亚波长光栅滤光片[90]
Figure 12. Nanohole array subwavelength grating filters. (a) Transmission spectra of the hole array filters with different side length (a1) 10 μm, (a2) 5 μm, (a3) 2.4 μm, (a4) 1.2 μm[87]; (b) Color logo based on the nanohole array filter[88]; (c) oNanohle array filter integrated with CMOS imaging sensor[89] ; (d) Si subwavelength grating color filters[90]
图 13 一维纳米光栅滤光片。超薄银等离子体纳米光栅滤光片(a)结构示意图和(b)光谱图[98];(c) 纳米光栅滤光片结构示意图;(d) 颜色光谱与滤光片光栅周期之间的关系[100]
Figure 13. One dimensional nanograting color filters. (a) Schematic diagram and (b) the spectra of the ultrathin Ag nanogratings color filters[98];(c) Schematic diagram of the nanograting color filters; (d) Relationship between color spectra and period of the color filter nanograting[100]
图 14 硅纳米线阵列滤光片扫描电子显微镜图。(b) 不同纳米线阵列的滤光片反射光谱[105];(c) 垂直硅纳米线光电探测器的概念示意图;(d) 硅纳米线阵列拍摄测试对象的彩色图像[106]
Figure 14. (a) SEM images of silicon nanowire array; (b) Reflection spectra of color filter for different nanowire arrays[105]; (c) Concept schematic of photoelectric detectors based on vertical silicon nanowires; (d) Color image of test objects taken by silicon nanowire arrays[106]
图 15 (a) 硅铝杂化纳米盘滤光片;(b) 硅铝杂化纳米盘减色滤光片的反射光谱[108];(c)十字形硅纳米天线阵列滤光片;(d)十字形硅纳米天线阵列透射光谱[113]
Figure 15. (a) Schematic configuration and (b) reflection spectral responses of the subtractive CMY color filters incorporating a Si-Al hybrid-ND metasurface formed on a Si substrate[108]; (c) Cross-shaped Si nanoantennas color filters and (d) its transmittance spectra[113]
图 16 亚波长光栅(各向异性超材料薄膜)(a)结构图及(b)吸收谱图[118];(c) MICM结构示意图;(d)不同结构的吸收谱对比图[119]
Figure 16. (a) Diagram and (b) absorption spectra of the subwavelength grating (sawtooth anisotropic metamaterial thin film)[118]; (c) Diagram of MICM (metal-insulator composite multilayer); (d) Comparison of absorption spectra for different structures[119]
图 17 (a)纳米盘单元亚波长光栅吸收谱[123];(b) 纳米盘单元亚波长光栅电磁场强度和能量损失图[123]; (c) 多层金属−介质−金属谐振堆栈结构亚波长光栅吸收器吸收谱图[131];(d) Ti-SiO2-Al 结构构成的亚波长光栅太阳能吸收薄膜[133]
Figure 17. (a)Absorption spectra of subwavelength grating with nanodisk unit[123]; (b) Field intensity and energy loss of subwavelength grating with nanodisk unit[123]; (c) Absorption spectra of subwavelength grating absorber with multilayered metal-dielectric-metal resonant stacks [131]. (d) Subwavelength grating of Ti-SiO2-Al structure for solar energy absorption film[133]
图 18 (a)不同参数的 Ag-SiO2-Ag 十字形结构的亚波长光栅结构的吸收谱图[135]; (b)梯形阵列结构亚波长光栅及其消光谱[139]; (c)环形阵列结构及其吸收谱[140]; (d) 锥形亚波长光栅吸收器吸收谱[145]
Figure 18. (a) Measured absorption spectra of fabricated Ag-SiO2-Ag cross structure of subwavelength grating with different parameters[135]; (b) Extinction spectra using crossed trapezoid array subwavelength metagraing[139]; (c) Absorption spectra of ring array structure[140]; (d) Absorption spectra of subwavelength grating of cone unit structure[145]
-
[1] Loewen E G, Popov E. Diffraction gGatings and Applications (Optical Science and Engineering)[M]. New York: CRC Press, 1997. [2] Koenderink A F, Alu A, Polman A. Nanophotonics: shrinking light-based technology [J]. Science, 2015, 348(6234): 516-521. doi: 10.1126/science.1261243 [3] Collin S. Nanostructure arrays in free-space: optical properties and applications [J]. Reports on Progress in Physics, 2014, 77(12): 126402. doi: 10.1088/0034-4885/77/12/126402 [4] Smith D R, Pendry J B, Wiltshire M C K. Metamaterials and negative refractive index [J]. Science, 2004, 305(5685): 788-792. doi: 10.1126/science.1096796 [5] Cai W, Chettiar U K, Kildishev A V, et al. Optical cloaking with metamaterials [J]. Nature Photonics, 2007, 1(4): 224. doi: 10.1038/nphoton.2007.28 [6] Yu N, Capasso F. Flat optics with designer metasurfaces [J]. Nature Materials, 2014, 13(2): 139-150. [7] Ra’di Y, Sounas D L, Alù A. Metagratings: beyond the limits of graded metasurfaces for wave front control [J]. Physical Review Letters, 2017, 119(6): 067404. doi: 10.1103/PhysRevLett.119.067404 [8] Bonod N, Jérôme N. Diffraction gratings: from principles to applications in high-intensity lasers [J]. Advanced Optics Photonics, 2016, 8(1): 156-199. doi: 10.1364/AOP.8.000156 [9] Neviere M, Popov E. Light Propagation in Periodic Media: Differential Theory and Design[M]. Boca Raton: CRC Press, 2002. [10] Quaranta G, Basset G, Martin O J F, et al. Recent advances in resonant waveguide gratings [J]. Laser & Photonics Review, 2018, 12(9): 1800017.1-1800017.31. [11] Wang S S, Magnusson R. Theory and applications of guided-mode resonance filters [J]. Applied Optics, 1993, 32(14): 2606-2613. doi: 10.1364/AO.32.002606 [12] Magnusson R, Wang S S. New principle for optical filters [J]. Applied Physical Letters, 1992, 61(9): 1022-1024. doi: 10.1063/1.107703 [13] Chang-Hasnain C J. High-contrast gratings as a new platform for integrated optoelectronics [J]. Semiconductor Science & Technology, 2010, 26(26): 014043. [14] Zhu Li, Yang Weijian, ChangHasnain C J. Very high efficiency optical coupler for silicon nanophotonic waveguide and single mode optical fiber [J]. Optics Exp, 2017, 25(15): 18462-18473. doi: 10.1364/OE.25.018462 [15] Karagodsky V, Sedgwick F G, ChangHasnain C J. Theoretical analysis of subwavelength high contrast grating reflectors [J]. Optics Express, 2010, 18(16): 16973-16988. doi: 10.1364/OE.18.016973 [16] Chang-Hasnain C J, Yang W. High-contrast gratings for integrated optoelectronics [J]. Advances in Optics & Photonics, 2012, 4(3): 379-440. [17] Popov V, Boust F, Burokur S N, et al. Constructing the near field and far field with reactive metagratings: study on the degrees of freedom [J]. Physical Review Applied, 2019, 11(2). [18] Ra’di, Y, Alù A. Reconfigurable metagratings [J]. ACS Photonics, 2018, 5(5): 1779-1785. doi: 10.1021/acsphotonics.7b01528 [19] Fan Z, Shcherbakov M R, Allen M, et al. Perfect diffraction with multiresonant bianisotropic metagratings [J]. ACS Photonics, 2018, 5(11): 4303-4311. doi: 10.1021/acsphotonics.8b00434 [20] Deng Zilan, Cao Yaoyu, Li Xiangping, et al. Multifunctional metasurface: from extraordinary optical transmission to extraordinary optical diffraction in a single structure: publisher's note [J]. Photonics Research, 2018, 6(7): 6. [21] Sell D, Yang J, Doshay S, et al. Large-angle, multifunctional metagratings based on freeform multimode geometries [J]. Nano Letters, 2017, 17(6): 3752-3757. doi: 10.1021/acs.nanolett.7b01082 [22] Sell D, Yang J, Wang E W, et al. Ultra-high-efficiency anomalous refraction with dielectric metasurfaces [J]. ACS Photonics, 2018, 5(6): 2402-2407. doi: 10.1021/acsphotonics.8b00183 [23] Khaidarov E, Hao H, Paniaguadominguez R, et al. Asymmetric nanoantennas for ultrahigh angle broadband visible light bending [J]. Nano Letters, 2017, 17(10): 6267-6272. doi: 10.1021/acs.nanolett.7b02952 [24] Deng ZiLan, Deng Junhong, Zhuang Xin, et al. Facile metagrating holograms with broadband and extreme angle tolerance [J]. Light: Science & Applications, 2018, 7(1): 78. [25] Epstein A, Rabinovich O. Perfect anomalous refraction with metagratings[C]//European Conference on Antennas and Propagation, 2018. [26] Fu Yangyang, Shen Chen, Cao Yanyan, et al. Reversal of transmission and reflection based on acoustic metagratings with integer parity design [J]. Nature Communications, 2019, 10(1): 2326-2332. doi: 10.1038/s41467-019-10377-9 [27] Shi Tan, Wang Yujie, Deng Zilan, et al. All‐dielectric kissing-dimer metagratings for asymmetric high diffraction [J]. Advanced Optical Materials, 2019, 7(24): 1901389. doi: 10.1002/adom.201901389 [28] Liu Weinan, Chen Rui, Shi Weiyi, et al. Narrow-frequency sharp-angular filters using all-dielectric cascaded metagratings [J]. Nanophotonics, 2020: 20200141. [29] Zhang Lei, Mei Shengtao, Huang Kun, et al. Advances in full control of electromagnetic waves with metasurfaces [J]. Advanced Optical Materials, 2016, 4(6): 818-833. doi: 10.1002/adom.201500690 [30] Bonod N, Neauport J. Diffraction gratings: from principles to applications in high-intensity lasers [J]. Advances in Optics & Photonics, 2016, 8: 156-199. [31] Pierce J R. Coupling of modes of propagation [J]. Journal of Applied Physics, 1954, 25(2): 179-183. doi: 10.1063/1.1721599 [32] Collin Stéphane. Nanostructure arrays in free-space: Optical properties and applications [J]. Reports on Progress in Physics Physical Society, 2014, 77(12): 126402. doi: 10.1088/0034-4885/77/12/126402 [33] Quaranta G, Basset G, Martin O J F, et al. Recent advances in resonant waveguide gratings [J]. Laser & Photonics Review, 2018, 12(9): 1800017. [34] Deng Zilan, Zhang Shuang, Wang Guoping. A facile grating approach towards broadband, wide-angle and high-efficiency holographic metasurfaces [J]. Nanoscale, 2016, 8: 1588. doi: 10.1039/C5NR07181J [35] Liu W, Kivshar Y S. Generalized Kerker effects in nanophotonics and meta-optics [Invited] [J]. Optics Express, 2018, 26(10): 13085-13105. doi: 10.1364/OE.26.013085 [36] Chang-Hasnain C J, Yang W. High-contrast gratings for integrated optoelectronics [J]. Advances in Optics & Photonics, 2012, 4(3): 379-440. [37] Yang W. High-contrast gratings for integrated optoelectronics [J]. Advances in Optics and Photonics, 2012, 4(3): 379-440. doi: 10.1364/AOP.4.000379 [38] Wang Zhaorong, Zhang Bo, Deng Hui, et al. Dispersion engineering for vertical microcavities using subwavelength gratings [J]. Physical Review Letters, 2015, 114(7): 073601. doi: 10.1103/PhysRevLett.114.073601 [39] Liu Wenxing, Yu Tianbao, Sun Yong, et al. Highly efficient broadband wave plates using dispersion-engineered high-index-contrast subwavelength gratings [J]. Physical Review Applied, 2019, 11(6): 064005. doi: 10.1103/PhysRevApplied.11.064005 [40] Epstein A, Rabinovich O. Perfect anomalous refraction with metagratings[C]//European Conference on Antennas and Propagation, 2018. [41] Popov V, Boust F, Burokur S N, et al. Controlling diffraction patterns with metagratings [J]. Physical Review Applied, 2018, 10(1): 011002. doi: 10.1103/PhysRevApplied.10.011002 [42] Rabinovich O, Kaplon I, Reis J, et al. Experimental demonstration and in-depth investigation of analytically designed anomalous reflection metagratings [J]. Physical Review B, 2019, 99(12): 125101. doi: 10.1103/PhysRevB.99.125101 [43] Epstein A, Rabinovich O. Unveiling the properties of metagratings via a detailed analytical model for synthesis and analysis [J]. Physical Review Applied, 2017, 8(5): 054037. doi: 10.1103/PhysRevApplied.8.054037 [44] Rabinovich O, Epstein A. Analytical design of printed circuit board (pcb) metagratings for perfect anomalous reflection [J]. IEEE Transactions on Antennas and Propagation, 2018, 66(8): 4086-4095. doi: 10.1109/TAP.2018.2836379 [45] Popov V, Boust F, Burokur S N, et al. Constructing the near field and far field with reactive metagratings: study on the degrees of freedom [J]. Physical Review Applied, 2019, 11(2): 024074. doi: 10.1103/PhysRevApplied.11.024074 [46] Chalabi H, Ra"Di Y, Sounas D L, et al. Efficient anomalous reflection through near-field interactions in metasurfaces [J]. Physical Review B, 2017, 96(7): 075432. doi: 10.1103/PhysRevB.96.075432 [47] Patri A, Kenacohen S, Caloz C, et al. Large-angle, broadband and multifunctional directive waveguide scatterer gratings [J]. ACS Photonics, 2019, 6(12): 3298-3305. doi: 10.1021/acsphotonics.9b01319 [48] Yang J, Sell D, Fan J A, et al. Freeform metagratings based on complex light scattering dynamics for extreme, high efficiency beam steering [J]. Annalen der Physik, 2018, 530(1): 1700302. doi: 10.1002/andp.201700302 [49] Liu W, Miroshnichenko A E. Beam steering with dielectric metalattices [J]. ACS Photonics, 2018, 5(5): 1733-1741. doi: 10.1021/acsphotonics.7b01217 [50] Shi Weiyi, Deng Weimin, Liu Weinan, et al. Rectangular dielectric metagrating for high-efficiency diffraction with large-angle deflection [J]. Chinese Optics Letters, 2020, 18(7): 073601. doi: 10.3788/COL202018.073601 [51] Neder V, Ra’di Y, Alù A, et al. Combined metagratings for efficient broad-angle scattering metasurface [J]. ACS Photonics, 2019, 6(4): 1010-1017. doi: 10.1021/acsphotonics.8b01795 [52] Uleman F, Neder V, Cordaro A, et al. Resonant metagratings for spectral and angular control of light for colored rooftop photovoltaics [J]. ACS Applied Energy Materials, 2020, 3(4): 3150-3156. [53] Tiefenthaler K, Lukosz W. Integrated optical switches and gas sensors [J]. Optics Letters, 1984, 9: 137. doi: 10.1364/OL.9.000137 [54] Norton S M, Morris G M, Erdogan T, et al. Experimental investigation of resonant-grating filter lineshapes in comparison with theoretical models [J]. Journal of The Optical Society of America A-Optics Image Science and Vision, 1998, 15(2): 464-472. doi: 10.1364/JOSAA.15.000464 [55] Yih J, Chu Y, Mao Y, et al. Optical waveguide biosensors constructed with subwavelength gratings [J]. Applied Optics, 2006, 45(9): 1938-1942. doi: 10.1364/AO.45.001938 [56] Wawro D, Tibuleac S, Magnusson R, et al. Optical fiber endface biosensor based on resonances in dielectric waveguide gratings[C]//SPIE, 2000, 3911: 86-94. [57] Cunningham B T, Li P, Lin B, et al. Colorimetric resonant reflection as a direct biochemical assay technique [J]. Sensors and Actuators B-chemical, 2002, 81(2): 316-328. [58] Lin B, Qiu J, Gerstenmeier J, et al. A label-free optical technique for detecting small molecule interactions [J]. Biosensors and Bioelectronics, 2002, 17(9): 827-834. doi: 10.1016/S0956-5663(02)00077-5 [59] Cunningham B T, Lin B, Qiu J, et al. A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions [J]. Sensors and Actuators B-chemical, 2002, 85(3): 219-226. doi: 10.1016/S0925-4005(02)00111-9 [60] Cunningham B T, Li P, Schulz S C, et al. Label-free assays on the bind system [J]. Journal of Biomolecular Screening, 2004, 9(6): 481-490. doi: 10.1177/1087057104267604 [61] Fang Y, Ferrie A M, Fontaine N H, et al. Resonant waveguide grating biosensor for living cell sensing [J]. Biophysical Journal, 2006, 91(5): 1925-1940. doi: 10.1529/biophysj.105.077818 [62] Omalley S M, Xie X, Frutos A G, et al. Label-free high-throughput functional lytic assays [J]. Journal of Biomolecular Screening, 2007, 12(1): 117-125. doi: 10.1177/1087057106296496 [63] Walia J, Dhindsa N, Khorasaninejad M, et al. Color generation and refractive index sensing using diffraction from 2d silicon nanowire arrays [J]. Small, 2014, 10(1): 144-151. doi: 10.1002/smll.201300601 [64] Hermannsson P G, Vannahme C, Smith C L, et al. Absolute analytical prediction of photonic crystal guided mode resonance wavelengths [J]. Applied Physics Letters, 2014, 105(7): 071103. doi: 10.1063/1.4893664 [65] Wang Yongjin, Chen Jiajia, Shi Zheng, et al. Suspended membrane GaN gratings for refractive index sensing [J]. Applied Physics Express, 2014, 7(5): 052201. doi: 10.7567/APEX.7.052201 [66] Marciniak M, Gębski M, Dems M, et al. Subwavelength high contrast gratings as optical sensing elements [J]. Scientific Bulletin. Physics / Technical University of Łódź, 2017, 38: 61-70. [67] Sahoo P K, Sarkar S, Joseph J, et al. High sensitivity guided-mode-resonance optical sensor employing phase detection [J]. Scientific Reports, 2017, 7(1): 7607-7607. doi: 10.1038/s41598-017-07843-z [68] Ganesh N, Zhang W, Mathias P C, et al. Enhanced fluorescence emission from quantum dots on a photonic crystal surface [J]. Nature Nanotechnology, 2007, 2(8): 515-520. doi: 10.1038/nnano.2007.216 [69] Ganesh N, Mathias P C, Zhang W, et al. Distance dependence of fluorescence enhancement from photonic crystal surfaces [J]. Journal of Applied Physics, 2008, 103(8): 083104. doi: 10.1063/1.2906175 [70] Kano H, Kawata S. Two-photon-excited fluorescence enhanced by a surface plasmon. [J]. Optics Letters, 1996, 21(22): 1848-1850. doi: 10.1364/OL.21.001848 [71] Wenseleers W, Stellacci F, Meyerfriedrichsen T, et al. Five orders-of-magnitude enhancement of two-photon absorption for dyes on silver nanoparticle fractal clusters [J]. Journal of Physical Chemistry B, 2002, 106(27): 6853-6863. doi: 10.1021/jp014675f [72] Soria S, Katchalski T, Teitelbaum E, et al. Enhanced two-photon fluorescence excitation by resonant grating waveguide structures [J]. Optics Letters, 2004, 29(17): 1989-1991. doi: 10.1364/OL.29.001989 [73] André Selle, Kappel C, Bader M A, et al. Picosecond-pulse-induced two-photon fluorescence enhancement in biological material by application of grating waveguide structures [J]. Optics Letters, 2005, 30(13): 1683-1685. doi: 10.1364/OL.30.001683 [74] Soria S, Badenes G, Bader M A, et al. Resonant double grating waveguide structures as enhancement platforms for two-photon fluorescence excitation [J]. Applied Physics Letters, 2005, 87(8): 081109. doi: 10.1063/1.2033130 [75] Thayil A, Muriano A, Salvador J P, et al. Nonlinear immunofluorescent assay for androgenic hormones based on resonant structures [J]. Optics Express, 2008, 16(17): 13315-13322. doi: 10.1364/OE.16.013315 [76] Nazirizadeh Y, Bog U, Sekula S, et al. Low-cost label-free biosensors using photonic crystals embedded between crossed polarizers [J]. Optics Express, 2010, 18(18): 19120-19128. doi: 10.1364/OE.18.019120 [77] Nazirizadeh Y, Behrends V, Prosz A, et al. Intensity interrogation near cutoff resonance for label-free cellular profiling [J]. Scientific Reports, 2016, 6(1): 24685-24685. doi: 10.1038/srep24685 [78] Jahns S, Brau M, Meyer B, et al. Handheld imaging photonic crystal biosensor for multiplexed, label-free protein detection. [J]. Biomedical Optics Express, 2015, 6(10): 3724-3736. doi: 10.1364/BOE.6.003724 [79] Li H, Hsu W, Liu K, et al. A low cost, label-free biosensor based on a novel double-sided grating waveguide coupler with sub-surface cavities [J]. Sensors and Actuators B-chemical, 2015: 371-380. [80] Lin Y, Hsieh W, Chau L, et al. Intensity-detection-based guided-mode-resonance optofluidic biosensing system for rapid, low-cost, label-free detection [J]. Sensors and Actuators B-Chemical, 2017: 659-666. [81] Mcmahon J M, Henzie J, Odom T W, et al. Tailoring the sensing capabilities of nanohole arrays in gold films with Rayleigh anomaly-surface plasmon polaritons [J]. Optics Express, 2007, 15(26): 18119-18129. doi: 10.1364/OE.15.018119 [82] Sun L B, Hu X L, Xu Y, et al. Influence of structural parameters to polarization-independent color-filter behavior in ultrathin Ag films [J]. Optics Communications, 2014, 333(15): 16-21. [83] Ebbesen T W, Lezec H J, Ghaemi H F, et al. Extraordinary optical transmission through sub-wavelength hole arrays [J]. Nature, 1998, 391(6668): 667-669. doi: 10.1038/35570 [84] Ghaemi H F, Thio T, Grupp D E, et al. Surface plasmons enhance optical transmission through subwavelength holes [J]. Physical Review B, 1998, 58(11): 6779-6782. doi: 10.1103/PhysRevB.58.6779 [85] Chen Q, Cumming D R. High transmission and low color cross-talk plasmonic color filters using triangular-lattice hole arrays in aluminum films [J]. Optics Express, 2010, 18(13): 14056-14062. doi: 10.1364/OE.18.014056 [86] Chen Q, Das D, Chitnis D, et al. A CMOS image sensor integrated with plasmonic colour filters [J]. Plasmonics, 2012, 7(4): 695-699. doi: 10.1007/s11468-012-9360-6 [87] Yokogawa S, Burgos S P, Atwater H A, et al. Plasmonic color filters for CMOS image sensor applications [J]. Nano Letters, 2012, 12(8): 4349-4354. doi: 10.1021/nl302110z [88] Chen Q, Chitnis D, Walls K, et al. CMOS photodetectors integrated with plasmonic color filters [J]. IEEE Photonics Technology Letters, 2012, 24(3): 197-199. doi: 10.1109/LPT.2011.2176333 [89] Burgos S P, Yokogawa S, Atwater H A. Color imaging via nearest neighbor hole coupling in plasmonic color filters integrated onto a complementary metal-oxide semiconductor image sensor [J]. ACS Nano, 2013, 7(11): 10038-10047. doi: 10.1021/nn403991d [90] Horie Y, Han S, Lee J, et al. Visible wavelength color filters using dielectric subwavelength gratings for backside-illuminated cmos image sensor technologies [J]. Nano Letters, 2017, 17(5): 3159-3164. doi: 10.1021/acs.nanolett.7b00636 [91] Mahani F F, Mokhtari A, Mehran M, et al. Dual mode operation, highly selective nanohole array-based plasmonic colour filters [J]. Nanotechnology, 2017, 28(38): 385203. doi: 10.1088/1361-6528/aa80f4 [92] Tang L, Latif S, Miller D A, et al. Plasmonic device in silicon CMOS [J]. Electronics Letters, 2009, 45(13): 706-708. doi: 10.1049/el.2009.0839 [93] Balaur E, Sadatnajafi C, Kou S S, et al. Continuously tunable, polarization controlled, colour palette produced from nanoscale plasmonic pixels [J]. Scientific Reports, 2016, 6(1): 28062-28062. doi: 10.1038/srep28062 [94] Yu Yan, Chen Qin, Wen Long, et al. Spatial optical crosstalk in CMOS image sensors integrated with plasmonic color filters [J]. Optics Express, 2015, 23(17): 21994-22003. doi: 10.1364/OE.23.021994 [95] Knop K. Diffraction gratings for color filtering in the zero diffraction order [J]. Applied Optics, 1978, 17(22): 3598-3603. doi: 10.1364/AO.17.003598 [96] Ganesh N, Xiang A, Beltran N B, et al. Compact wavelength detection system incorporating a guided-mode resonance filter [J]. Applied Physics Letters, 2007, 90(8): 81103. doi: 10.1063/1.2591342 [97] Duempelmann L, Gallinet B, Novotny L, et al. Multispectral imaging with tunable plasmonic filters [J]. ACS Photonics, 2017, 4(2): 236-241. doi: 10.1021/acsphotonics.6b01003 [98] Zeng B, Gao Y, Bartoli F J, et al. Ultrathin nanostructured metals for highly transmissive plasmonic subtractive color filters [J]. Scientific Reports, 2013, 3(1): 2840-2840. doi: 10.1038/srep02840 [99] Shrestha V R, Lee S, Kim E, et al. polarization-tuned dynamic color filters incorporating a dielectric-loaded aluminum nanowire array [J]. Scientific Reports, 2015, 5(1): 12450-12450. doi: 10.1038/srep12450 [100] Wang J, Fan Q, Zhang S, et al. Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency [J]. Applied Physics Letters, 2017, 110(3): 31110. doi: 10.1063/1.4974455 [101] Lee K, Jang J Y, Park S J, et al. Angle‐insensitive and CMOS-compatible subwavelength color printing [J]. Advanced Optical Materials, 2016, 4(11): 1696-1702. doi: 10.1002/adom.201600287 [102] Koirala I, Shrestha V R, Park C, et al. All dielectric transmissive structural multicolor pixel incorporating a resonant grating in hydrogenated amorphous silicon. [J]. Scientific Reports, 2017, 7(1): 13574. doi: 10.1038/s41598-017-14093-6 [103] Koirala I, Shrestha V R, Park C, et al. Polarization-controlled broad color palette based on an ultrathin one-dimensional resonant grating structure [J]. Scientific Reports, 2017, 7(1): 40073. doi: 10.1038/srep40073 [104] Crozier K B, Seo K, Park H, et al. controlling the light absorption in a photodetector via nanowire waveguide resonances for multispectral and color imaging [J]. IEEE Journal of Selected Topics in Quantum Electronics, 2018, 24(6): 1-12. [105] Seo K, Wober M, Steinvurzel P, et al. Multicolored vertical silicon nanowires [J]. Nano Letters, 2011, 11(4): 1851-1856. doi: 10.1021/nl200201b [106] Park H, Dan Y, Seo K, et al. Filter-free image sensor pixels comprising silicon nanowires with selective color absorption [J]. Nano Letters, 2014, 14(4): 1804-1809. doi: 10.1021/nl404379w [107] Yoon J, Kim K, Meyyappan M, et al. Optical characteristics of silicon-based asymmetric vertical nanowire photodetectors [J]. IEEE Transactions on Electron Devices, 2017, 64(5): 2261-2266. doi: 10.1109/TED.2017.2682878 [108] Yue W, Gao S, Lee S, et al. Subtractive color filters based on a silicon-aluminum hybrid-nanodisk metasurface enabling enhanced color purity [J]. Scientific Reports, 2016, 6(1): 29756-29756. doi: 10.1038/srep29756 [109] Park C, Shrestha V R, Yue W, et al. Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks [J]. Scientific Reports, 2017, 7(1): 2556-2556. doi: 10.1038/s41598-017-02911-w [110] Park C, Koirala I, Gao S, et al. Structural color filters based on an all-dielectric metasurface exploiting silicon-rich silicon nitride nanodisks [J]. Optics Express, 2019, 27(2): 667-679. doi: 10.1364/OE.27.000667 [111] Miyata M, Nakajima M, Hashimoto T, et al. High-sensitivity color imaging using pixel-scale color splitters based on dielectric metasurfaces [J]. ACS Photonics, 2019, 6(6): 1442-1450. doi: 10.1021/acsphotonics.9b00042 [112] Vashistha V, Vaidya G, Gruszecki P, et al. Polarization tunable all-dielectric color filters based on cross-shaped Si nanoantennas [J]. Scientific Reports, 2017, 7(1): 8092. doi: 10.1038/s41598-017-07986-z [113] Yang Bo, Liu Wenwei, Li Zhancheng, et al. Polarization-sensitive structural colors with hue-and-saturation tuning based on all-dielectric nanopixels [J]. Advanced Optical Materials, 2018, 6(4): 1701009. doi: 10.1002/adom.201701009 [114] Dan A, Barshilia H C, Chattopadhyay K, et al. Solar energy absorption mediated by surface plasma polaritons in spectrally selective dielectric-metal-dielectric coatings: A critical review [J]. Renewable & Sustainable Energy Reviews, 2017, 79: 1050-1077. [115] Khodasevych I, Wang L, Mitchell A, et al. Micro- and nanostructured surfaces for selective solar absorption [J]. Advanced Optical Materials, 2015, 3(7): 852-881. doi: 10.1002/adom.201500063 [116] Cui Yanxia, He Yingran, Jin Yi, et al. Plasmonic and metamaterial structures as electromagnetic absorbers [J]. Laser & Photonics Reviews, 2014, 8(4): 495-520. [117] Zhao Bin, Hu Mingke, Ao Xianze, et al. Radiative cooling: A review of fundamentals, materials, applications, and prospects [J]. Applied Energy, 2019: 489-513. [118] Cui Yanxia, Fung Kung Hin, Xu Jun, et al. Ultrabroadband light absorption by a sawtooth anisotropic metamaterial sab [J]. Nano Letters, 2012, 12(3): 1443-1447. doi: 10.1021/nl204118h [119] Li Yuyin, Liu Zhengqi, Zhang Houjiao, et al. Ultra-broadband perfect absorber utilizing refractory materials in metal-insulator composite multilayer stacks [J]. Optics Express, 2019, 27(8): 11809-11818. doi: 10.1364/OE.27.011809 [120] Li Junyu, Bao Li, Jiang Shun, et al. Inverse design of multifunctional plasmonic metamaterial absorbers for infrared polarimetric imaging [J]. Optics Express, 2019, 27(6): 8375-8386. doi: 10.1364/OE.27.008375 [121] Lin H, Sturmberg B C, Lin K, et al. A 90-nm-thick graphene metamaterial for strong and extremely broadband absorption of unpolarized light [J]. Nature Photonics, 2019, 13(4): 270-276. doi: 10.1038/s41566-019-0389-3 [122] Luo M, Shen S, Zhou L, et al. Broadband, wide-angle, and polarization-independent metamaterial absorber for the visible regime [J]. Optics Express, 2017, 25(14): 16715-16724. doi: 10.1364/OE.25.016715 [123] Han X, He K, He Z, et al. Tungsten-based highly selective solar absorber using simple nanodisk array [J]. Optics Express, 2017, 25(24): A1072-A1078. doi: 10.1364/OE.25.0A1072 [124] Nielsen M G, Pors A, Albrektsen O, et al. Efficient absorption of visible radiation by gap plasmon resonators [J]. Optics Express, 2012, 20(12): 13311-13319. doi: 10.1364/OE.20.013311 [125] Mann S A, Garnett E C. Resonant nanophotonic spectrum splitting for ultrathin multijunction solar cells [J]. ACS Photonics, 2015, 2(7): 816-821. doi: 10.1021/acsphotonics.5b00260 [126] Chang C, Kortkamp W J, Nogan J, et al. High-temperature refractory metasurfaces for solar thermophotovoltaic energy harvesting [J]. Nano Letters, 2018, 18(12): 7665-7673. doi: 10.1021/acs.nanolett.8b03322 [127] Zhang Nan, Zhou Peihong Cheng Dengmu, et al. Dual-band absorption of mid-infrared metamaterial absorber based on distinct dielectric spacing layers [J]. Optics Letters, 2013, 38(7): 1125-1127. doi: 10.1364/OL.38.001125 [128] Cattoni A, Ghenuche P, Haghirigosnet A M, et al. λ3/1000 plasmonic nanocavities for biosensing fabricated by soft uv nanoimprint lithography [J]. Nano Letters, 2011, 11(9): 3557-3563. doi: 10.1021/nl201004c [129] Zhao Bo, Wang Liping, Shuai Yong, et al. Thermophotovoltaic emitters based on a two-dimensional grating/thin-film nanostructure [J]. International Journal of Heat and Mass Transfer, 2013, 67: 637-645. [130] Zhang B, Hendrickson J, Guo J. Multispectral near-perfect metamaterial absorbers using spatially multiplexed plasmon resonance metal square structures [J]. Journal of the Optical Society of America B, 2013, 30(3): 656. doi: 10.1364/JOSAB.30.000656 [131] Zhang Nan, Zhou Peiheng, Wang Shuya, et al. Broadband absorption in mid-infrared metamaterial absorbers with multiple dielectric layers [J]. Optics Communications, 2015, 338: 388-392. [132] Wu C, Neuner B, Shvets G, et al. Large-area, wide-angle, spectrally selective plasmonic absorber [J]. Physical Review B, 2011, 84(7): 075102. doi: 10.1103/PhysRevB.84.075102 [133] Lei L, Li S, Huang H, et al. Ultra-broadband absorber from visible to near-infrared using plasmonic metamaterial. [J]. Optics Express, 2018, 26(5): 5686-5693. doi: 10.1364/OE.26.005686 [134] Kang S, Qian Z, Rajaram V, et al. Ultra‐narrowband metamaterial absorbers for high spectral resolution infrared spectroscopy [J]. Advanced Optical Materials, 2019, 7(2): 1801236.1-1801236.8. [135] Butun S, Aydin K. Structurally tunable resonant absorption bands in ultrathin broadband plasmonic absorbers [J]. Optics Express, 2014, 22(16): 19457-19468. doi: 10.1364/OE.22.019457 [136] Liu X, Tyler T, Starr T, et al. Taming the blackbody with infrared metamaterials as selective thermal emitters. [J]. Physical Review Letters, 2011, 107(4): 045901. doi: 10.1103/PhysRevLett.107.045901 [137] Ma Wei, Wen Yongzheng, Yu Xiaomei, et al. Broadband metamaterial absorber at mid-infrared using multiplexed cross resonators [J]. Optics Express, 2013, 21(25): 30724-30730. doi: 10.1364/OE.21.030724 [138] Grant J, Mccrindle I J, Li C, et al. Multispectral metamaterial absorber [J]. Optics Letters, 2014, 39(5): 1227-1230. doi: 10.1364/OL.39.001227 [139] Aydin K, Ferry V E, Briggs R M, et al. Broadband polarization-independent resonant light absorption using ultrathin plasmonic super absorbers [J]. Nature Communications, 2011, 2(1): 517. doi: 10.1038/ncomms1528 [140] Li W, Guler U, Kinsey N, et al. Refractory plasmonics with titanium nitride: broadband metamaterial absorber [J]. Advanced Materials, 2014, 26(47): 7959-7965. doi: 10.1002/adma.201401874 [141] Nagarajan A, Vivek K, Shah M, et al. A broadband plasmonic metasurface superabsorber at optical frequencies: analytical design framework and demonstration [J]. Advanced Optical Materials, 2018, 6(16): 1800253. doi: 10.1002/adom.201800253 [142] Muhammad N, Tang X, Tao F, et al. Broadband polarization-insensitive absorption by metasurface with metallic pieces for energy harvesting application [J]. Materials Science and Engineering B-advanced Functional Solid-state Materials, 2019, 249: 114419. [143] Liu Jign, Chen Wei, Zheng Jiachun, et al. Wide-angle polarization-independent ultra-broadband absorber from visible to infrared [J]. Nanomaterials, 2019, 10(1): 27. doi: 10.3390/nano10010027 [144] Wu Dong, Liu Chang, Liu Yumin, et al. Numerical study of an ultra-broadband near-perfect solar absorber in the visible and near-infrared region [J]. Optics Letters, 2017, 42(3): 450-453. doi: 10.1364/OL.42.000450 [145] Liu Z, Tang P, Liu X, et al. Truncated titanium/semiconductor cones for wide-band solar absorbers [J]. Nanotechnology, 2019, 30(30): 305203. doi: 10.1088/1361-6528/ab109d [146] Chi Kequn, Yang Liu, Liu Zhaolang, et al. Large-scale nanostructured low-temperature solar selective absorber [J]. Optics Letters, 2017, 42(10): 1891-1894. doi: 10.1364/OL.42.001891 [147] Chi K, Yang L, He S, et al. Ultrathin nanostructured solar selective absorber based on a two-dimensional hemispherical shell array [J]. Applied Physics Letters, 2018, 112(6): 063903. doi: 10.1063/1.5017574 [148] Zhang Z, Mo Y, Wang H, et al. High-performance and cost-effective absorber for visible and near-infrared spectrum based on a spherical multilayered dielectric–metal structure [J]. Applied Optics, 2019, 58(16): 4467-4473. doi: 10.1364/AO.58.004467 [149] Ding Q, Barna S F, Jacobs K, et al. Feasibility analysis of nanostructured planar focusing collectors for concentrating solar power applications [J]. ACS Applied Energy Materials, 2018, 1(12): 6927-6935. [150] Wu Shangliang, Ye Yan, Jiang Zhouying, et al. Large‐area, ultrathin metasurface exhibiting strong unpolarized ultrabroadband absorption [J]. Advanced Optical Materials, 2019, 7(24): 1901162. doi: 10.1002/adom.201901162 [151] Yang Weijian, Sun Tianbo, Rao Yi, et al. High speed optical phased array using high contrast grating all-pass filters. [J]. Optics Express, 2014, 22(17): 20038-20044. doi: 10.1364/OE.22.020038 [152] Zhang Ziying, Kang Ming, Zhang Xueqian, et al. Coherent perfect diffraction in metagratings [J]. Advanced Materials, 2020, 32(36): 2002341. doi: 10.1002/adma.202002341