高贺岩, 金星, 李兰, 姚猛, 王莹. 能量密度对毫秒脉宽激光烧蚀铝靶物质迁移机制的影响[J]. 红外与激光工程, 2021, 50(S2): 20210264. DOI: 10.3788/IRLA20210264
引用本文: 高贺岩, 金星, 李兰, 姚猛, 王莹. 能量密度对毫秒脉宽激光烧蚀铝靶物质迁移机制的影响[J]. 红外与激光工程, 2021, 50(S2): 20210264. DOI: 10.3788/IRLA20210264
Gao Heyan, Jin Xing, Li Lan, Yao Meng, Wang Ying. Effect of energy density on material migration mechanism in millisecond laser ablation of aluminum target[J]. Infrared and Laser Engineering, 2021, 50(S2): 20210264. DOI: 10.3788/IRLA20210264
Citation: Gao Heyan, Jin Xing, Li Lan, Yao Meng, Wang Ying. Effect of energy density on material migration mechanism in millisecond laser ablation of aluminum target[J]. Infrared and Laser Engineering, 2021, 50(S2): 20210264. DOI: 10.3788/IRLA20210264

能量密度对毫秒脉宽激光烧蚀铝靶物质迁移机制的影响

Effect of energy density on material migration mechanism in millisecond laser ablation of aluminum target

  • 摘要: 毫秒脉宽激光打孔过程中靶物质的迁移机制直接影响孔的形貌,因此靶物质的迁移机制研究对于激光加工参数优化具有重要意义。靶物质的迁移主要包括脱靶的气化产物、溅射的熔融物质和非脱靶的熔融物质迁移,熔融物质重新凝固形成重铸层。对于脱靶的物质,采用高速相机直接成像法观察运动规律;对于重铸层,采用金相显微镜观察其形貌;最后,使用分析天平测量烧蚀质量。结果表明:铝合金的相爆炸阈值为1 047.24 J/cm2,能量密度在相爆炸阈值以下时,脱靶的靶物质主要以气化形式迁移,重铸层内部会形成周向和径向的裂纹,而能量密度在相爆炸阈值以上时,熔融物质被冲刷出烧蚀坑,烧蚀坑内部几乎不存在重铸层;气化损失的质量占比很小,靶材的质量损失主要来自相爆炸驱动的熔体喷溅,相爆炸会使单脉冲烧蚀质量增加10.7倍;相爆炸和激光强度的下降均会导致靶材的气化速率下降。

     

    Abstract: The migration mechanism of the target material in the millisecond laser drilling process directly affects the morphology of the hole. Therefore, the study of it was of great significance for the optimization of laser parameters. The migration of the material includes the migration of off-target gasification products, sputtered molten materials and non-off-target molten materials, and the molten materials was re-solidified to form the recast layer. For the off-target material, the high-speed camera was used to observe the movement law; For the recast layer, the metallurgical microscope was used to observe its morphology; Finally, the mass loss was measured with an analytical balance. The results show that the phase explosion threshold of aluminum alloy is 1 047.24 J/cm2. When the energy density is below the phase explosion threshold, the off-target material mainly migrates in the form of vaporization, and form circumferential and radial cracks. When the energy density is above the phase explosion threshold, the molten material is washed out of the ablation hole, and there is almost no recast layer inside the hole. The quality of gasification loss is very small. The mass loss mainly comes from the melt splash driven by the phase explosion. The phase explosion increases the single-pulse ablation quality by 10.7 times. Both the phase explosion and the decrease of laser intensity cause the vaporization rate of the target material to decrease.

     

/

返回文章
返回