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光纤传感是广泛应用的光学传感检测技术,其利用光纤中的传导模式感应被测信号并传导到光谱仪与解调设备中进而产生输出电信号[59-60]。如果用片上光波导代替光纤使得光在芯片平面内传输,利用其波导模式特性与外界环境的相关性同样可以获得感知能力[57,61]。光波导在这里是光传感部分,提供波导模式与被测物相互作用的一个平台。大多数光波导传感器的输入光和输出光由光栅和光纤等与片外光源、探测器和光谱仪等设备耦合[41,62-63]。为了实现片上集成的光学传感检测,至少需要将光探测部分进行片上集成来实现片上直接的电读出。如果能将光源也集成到同一块芯片上,就能实现完全的片上集成检测芯片。集成的主要困难在于,光传感器属于无源光子器件,一般用硅/氮化硅等无源波导来实现,具有传输损耗低、CMOS兼容和成本低的优势;光源和光探测器是有源光电器件,一般用三-五族化合物等有源材料来实现,具有高增益和高响应度的优势,两者在材料平台上存在显著的差异且难以异质集成。
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波导型传感器最常见的工作机制是基于被测物在特征波长的光吸收来进行物质的检测与分辨,例如非色散红外吸收光谱技术(non-dispersive infrared absorption, NDIR),通过检测暴露在被测物环境下的光波导中传输光在特定波长的强度变化来判定被测物的含量。例如:分布反馈布拉格半导体激光器输出光通过光纤耦合到SOI芯片上密集排布的硅纳米波导中,波导模式的倏逝光场与环境气体作用并在特定波长被目标气体吸收,最后由光纤耦合到探测器进行解调输出[64]。如果将光源、探测器制备到与光波导同一衬底上就实现传感与探测功能在芯片上的集成。
美国学者Z. Han等在氧化硅片上通过热蒸发沉积GeSbS红外透明硫系玻璃材料并制备成光波导,进而在光波导上通过热蒸发沉积PbTe红外有源材料形成40 μm长的波导探测器,获得了在2250 nm波长处高达1 A/W的光电探测响应率[64]。进一步,他们将GeSbS波导做成螺旋形以提高单位面积的有效波导长度,即提高光与被测物的作用距离(图2(a)),在550 μm×550 μm区域内获得长达5 mm的波导,有效弥补了波导模式倏逝波强度弱的缺点,得以在实验中展示1%浓度甲烷的探测[65]。除了增加波导长度,还可以通过优化波导结构来增强波导模式与被测物的相互作用。美国学者P. T. Lin等在SOI衬底上制备垂直狭缝硅波导形成纳流腔并通入被测物,探测灵敏度相比于倏逝波传感方式增强了50倍,实现了对甲苯和异丙醇的传感检测[41]。比利时学者H. Zhao等在氧化硅片上制备水平狭缝SiN波导并覆盖多孔氧化硅层,对丙酮、乙醇和异丙醇等挥发性有机化物的检测灵敏度提高了四个量级[69]。挪威学者J. Jagerska等报道了一种超倏逝场的波导结构来提高光场与波导外被测物的空间重叠,利用超薄脊形波导获得了高达108%的倏逝场限制因子,实验中仅用2 cm长的波导实现7 ppm (1 ppm=10−6)的乙炔检测[70]。
图 2 基于波导模式非色散光吸收的片上光传感技术。(a) GeSbS螺旋光传感波导与PbTe探测器单片集成的气体传感器[65];(b) CaF2衬底上单片集成硅光传感波导与石墨烯波导探测器的气体传感器[66];(c) GaSb衬底上外延制备的带间级联激光器与沉积工艺制备的As2Se3光传感波导的单片集成[67];(d) InP衬底上量子级联激光器、量子级联探测器和表面等离子体传感波导单片集成的溶液传感器[55];(e)玻璃衬底上基于Al-AlOx-Au隧道结的宽带光源与探测器的单片集成,两者间由表面等离子体波导连接[56];(f)在聚合物柔性基底上单片集成InGaAs探测器和硫系玻璃光传感波导[68]
Figure 2. On-chip optical sensing technology based on non-dispersive light absorption of the waveguide mode. (a) Monolithic gas sensor with GeSbS spiral optical sensing waveguide and PbTe waveguide detector [65]; (b) Monolithic gas sensor with silicon optical sensing waveguide and graphene waveguide detector on CaF2 substrate [66]; (c) Monolithic integration of epitaxially grown inter-band cascade laser and deposited As2Se3 optical sensing waveguide on GaSb substrate [67]; (d) Monolithic sensor with quantum cascade laser, quantum cascade detector and surface plasmon sensing waveguide on InP substrate [55]; (e) Monolithic integration of broadband light source and detector based on Al-AlOx-Au tunnel junction on glass substrate, which are connected by surface plasmon waveguide [56]; (f) Monolithic integration of InGaAs detector and chalcogenide glass optical sensing waveguide on polymer flexible substrate [68]
即使采用了上述优化设计的波导结构,基于材料吸收的传感机制往往还是需要较长的波导来获得足够的响应,而红外波导器件往往面临着衬底和包层材料的吸收问题,如上述工作中氧化硅片上的氧化硅包层,因此多样化的衬底成为了相关研究的关注点。如图2(b)所示,新加坡学者C. Lee等利用转印技术在CaF2衬底上制备硅波导来解决这一问题,同时通过集成石墨烯波导探测器获得了传感光波导与探测器的单片集成[66]。实验测得波导传输损耗为4.64 dB/cm,探测器在6~7 μm波段室温响应为8 mA/W,提供了较好的集成平台。通过将这些波导探测器与前述狭缝波导纳流腔传感器集成就可以获得片上电读出的光波导传感器(光源外置)。美国学者J. Hu等在GaSb衬底上分别用外延工艺制备带间级联激光器和沉积工艺制备硫系玻璃波导(图2(c)),从硫系玻璃波导输出的3.24 μm的脉冲激光功率达到150 mW[67]。将这些工作进一步单片集成,有望获得完全集成的中红外光学传感检测平台。硫系玻璃不仅具有优异的红外透明性可用于传导光,还具有高科尔非线性和低双光子吸收,能用于产生宽带光,因此其自身就具有独立作为集成光波导检测平台的潜力。厦门大学Z. Luo等用1560 nm飞秒激光器泵浦氧化硅片上的GeSbSe硫系玻璃光波导获得片上宽带光源,并将光波导器件放在四氯化碳和三氯甲烷混合液中进行倏逝波传感,通过光谱仪检测1695 nm处C-H键对应的光吸收强度来测量三氯甲烷的浓度[71]。InGaAs/InP材料平台可以外延生长量子级联激光器和探测器材料结构,是制备完全集成光传感检测芯片的理想选择之一。美国学者R. T. Chen等针对该集成方案研制了InGaAs悬空薄膜光子晶体波导,通过慢光效应增强波导模式与外界气体分子的相互作用,实验展示了5 ppm的氨气探测,并估算探测限达到84 ppb (1 ppb=10−9)[72]。奥地利学者B. Schwarz等基于InP衬底的量子级联材料实现了上述光源、探测器和传感器的单片集成[55]。如图2(d)所示,他们在InP衬底上生长37对InAlAs/InGaAs晶格匹配层,实现中红外量子级联激光器,基于同样材料结构通过反偏实现中红外的探测,并在激光器和探测器之间用表面等离子体波导进行连接,同时提供优秀的表面波传感平台。基于该单片集成的光波导传感检测器件,他们开展了水和乙醇混合液的检测演示实验,获得1.8~7 μV/ppm的检测精度,实现了0.06%浓度的检测限。
化合物半导体器件工艺复杂,成本高,尤其是量子级联器件制备难度高,而且量子级联激光器难以室温连续工作,不利于大规模的传感检测应用。如图2(e)所示,新加坡学者C. A. Nijhuis等报道了在玻璃衬底上仅通过薄膜沉积工艺制备的Al-AlOx-Au隧道结光源与探测器,两者间由表面等离子体波导连接,形成单片集成的超小型收发器件[56]。器件工作原理在于利用隧道结中的非弹性隧穿过程产生表面等离子体作为光源,并利用表面等离子体对隧道结势垒高度的影响改变隧穿电流作为探测器,两者间利用表面等离子体金属波导连接。由于表面等离子体波对环境的高灵敏性,因此可以作为传感器,这样就实现了完全单片集成的光波导传感检测功能。由于隧道结光源和探测器,以及表面等离子体波导都是纳米级器件,因此前述衬底对传输光的吸收问题可以忽略。此外,可穿戴传感概念的兴起使得片上集成光学传感检测芯片也向柔性化进一步发展,同时通过将三-五族化合物器件转移到低成本基底,也在一定程度上降低了应用成本。如图2(f)所示,美国学者J. Hu将硫系玻璃光波导与InGaAs探测器集成到聚合物柔性基底上,展现了0.8 mm的弯曲半径,探测率达到0.02 pW·Hz1/2,展示了片上集成光传感检测器件的可穿戴应用[68]。
除了上述光电效应的光源和光探测技术,基于热效应的光电器件在中红外波段光学传感检测中也有很好的发展,有望降低器件制备的难度和对工作环境的要求。英国学者M. Nedeljkovic等报道了基于纳米天线增强的非晶硅波导测辐射热探测器,在3.8 μm波段获得了1 mW入射功率下25%的阻值变化,有助于发展高适用性、低成本的可集成中红外探测器[73]。奥地利学者C. Consani等报道了一种基于热辐射中红外光源和多晶硅平板波导集成的片上气体传感芯片,其中掺杂多晶硅条在偏压下作为非相干热辐射源通过空气间隙与传感波导互联,实现了N2中10%浓度CO2的检测[74]。
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单纯地依靠被测物自身的指纹吸收,即使采用了前述的优化波导结构,传感器受限于吸收系数的大小依然需要数厘米甚至更长的光波导才能积累可探测的光强度变化。谐振腔对光场空间分布具有强限制作用,通过全内反射使得光在腔内振荡,可以提高光与腔内或腔表面被测物的相互作用强度[75-76]。对于折射率传感技术,其主要的性能指标包括器件优值(figure of merit, FoM)和折射率检测限[77-78]。FoM由传感灵敏度(S)和光学共振的品质因子(Q)决定:
$$ {{FoM}} = {{S}} \times {{Q}} / {\lambda } $$ (1) 式中:λ为工作波长;S代表被测物在每个折射率单位(refractive index unit,RIU)的折射率变化下产生的共振波长移动或光强度的相对变化量;Q代表共振结构的光学损耗情况,Q = λ/Δλ(Δλ为共振峰的半高全宽)。为了获得高的器件优值,需要获得同时高的S和Q[79]。折射率检测限就是光学传感器最小能识别的折射率变化,一般由测量噪声来决定,如基于棱镜耦合的表面等离子体共振技术已经可以获得10−7 RIU的检测限并已商用化[80]。
如图3(a)所示,美国学者J. Harris等基于硅基光子技术将硅微环传感器与GeSi探测器制备在同一块衬底上,并结合可调谐激光器对微环共振峰附近光谱进行扫描,通过建立共振峰偏移量与微环传感器表面被测物折射率变化的关系实现传感[81]。他们利用100 μm半径的微环获得了3.5×10−5 RIU的检测限。为了降低系统成本,避免使用昂贵的可调谐激光器,新加坡学者J. Song等提出级联可调谐微环滤波器和微环传感器的方案[82]。利用芯片外的宽带光源,当可调谐微环滤波器和微环传感器的共振峰一致时输出的光功率最大,通过调节可调谐微环滤波器以保持输出光信号最大,通过其共振波长调谐量可以解析出微环传感器上被测物的信息。如图3(b)所示,进一步将GeSi探测器也单片集成,就可实现片上电读出的光学传感检测[51]。10 μm半径的硅微环传感器的传感灵敏度仅有58 nm/RIU,但得益于热调谐需要的较高功率和高精度的电源,以及片上集成探测器的高信噪比,该技术的折射率检测精度达到3.9×10−6 RIU。基于该方法,他们将生物素-链霉亲和素修饰到微环传感器表面,获得了0.3 pg/mm2的检测限。此外,德国学者R. Wang等同样采用级联的微环谐振腔并利用三-五族化合物与硅键和的技术实现了硅上集成的宽带可调谐的中红外激光光源(图3(c)),进而通过调谐激光波长扫描被测气体的吸收峰,展示了其用于气体传感的能力[83]。虽然该工作中传感器依然采用的是传统气室作为光传感单元,探测方面也是用体式光谱仪,但基于前述工作中集成硫系光波导和中红外探测器的成功经验,有望通过结合实现光源、探测器和传感器的完全波导集成。如图3(d)所示,美国学者Coldren等报道了一种在InP衬底上完全单片集成的光传感器,由一对分布布拉格反射激光器、光探测器和场混合器组成。两个激光器的输出光进入平板波导场混合器,在其衍射光场重叠的地方产生外差信号,并由此处集成的探测器探测[84]。在其中一个激光器的两个布拉格反射镜形成的谐振腔之间去除一段波导的包层,从而增大波导模式的倏逝场并作为光传感区。当被测物位于传感波导区,将引起对应激光器的频率变化和外差信号频率变化,进而通过探测器对外差信号的检测频率变化来实现传感检测。在1 MHz频移精度下,被测物的折射率变化检测限高达2×10−6 RIU。
图 3 基于波导微谐振腔的片上折射率传感技术。(a)基于硅微环传感器与GeSi探测器单片集成的硅基光子集成传感器[81],光源采用片外可调谐激光器;(b)基于硅基双微环腔与GeSi探测器单片集成的电扫描硅基光子集成传感器[51],光源采用片外放大自发辐射宽带光源;(c)基于可调谐级联硅基微环谐振腔和三-五族化合物键合集成的宽带可调谐中红外激光光源,通过检测特征波长吸收信号实现气体传感[83];(d)基于InP衬底上双可调谐激光器和探测器单片集成的外差信号检测的生化传感器[84]
Figure 3. On-chip refractive index sensing technology based on waveguide-coupled micro-resonators. (a) Monolithic silicon photonic sensor with microring sensing unit and GeSi detector operating with an off-chip tunable laser [81]; (b) Monolithic silicon photonic sensor with electrically scanned dual-microring sensing unit and GeSi detector operating with an off-chip amplified spontaneous emission broadband light source [51]; (c) A broadband tunable mid-infrared laser based on tunable cascaded silicon microrings and bonded III-V active layer for gas sensing by monitoring the absorption fingerprint [83]; (d) A biochemical sensor based on heterodyne signal detection with monolithically integrated dual tunable lasers and detector on InP substrate [84]
波导型的器件在光学传感和光电探测两个方面都可以充分利用光波导沿光传输方向的延伸优势,提高光与被测物或光与光电有源材料的相互作用,从而增加传感灵敏度和探测灵敏度。硅光技术的成熟也极大地提高了相关器件的设计与工艺水平,保证了器件的较高性能。尤其是在片上光源(例如:InGaAs/Si键合集成激光器[85]、硅基外延InAs/GaAs量子点激光器[86]和全硅拉曼激光器[87])等技术引入后,可以实现波导互联的完全单片集成的光学传感检测,从而大大减小系统的质量、尺寸和成本,极大地提高芯片集成性和适用性。但是,波导型的架构也受到片上波导路由的限制,在面向并行检测的大规模阵列器件方面并没有优势,全功能芯片尺寸也较大。
Research progress of on-chip integrated optical sensing technology (Invited)
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摘要: 光学传感检测技术因具有精度高、低延时和可成像等优势而得到广泛应用。随着大数据和物联网等信息技术的迅速发展,对检测平台小型化和便携性的需求日益迫切。为了克服现有技术对大型专用设备的依赖,提高对现场快检、轻载荷平台等应用场景的适用性,近年来,基于微纳光学的片上集成光学传感检测技术受到了极大关注。通过集成光源、光学传感单元与光电探测单元、以及发展片上光色散等技术,可以有效地实现光学传感信号提取和光电信号转换的片上集成,从而实现系统的微型化和多功能集成。文中介绍了相关技术原理和技术发展现状,分析了现有技术的优缺点,讨论并总结了未来的发展方向和应用前景。Abstract: Optical sensing technology has been widely used because of its advantages of high precision, low delay and imaging. With the rapid development of information technology such as big data and Internet of things, the demand for miniaturization and portability of optical detection and inspection platform is becoming more and more urgent. In order to overcome the dependence on large-scale special equipment and improve the applicability of on-site rapid detection and light-load platform application scenarios, in recent years on-chip integrated optical sensing technology has attracted great attention. With the integration of optical source, optical sensing and photoelectric detection units, as well as the development of on-chip light dispersion technology, the on-chip integration of optical sensing signal extraction and photoelectric signal conversion can be effectively realized, which contributes to the realization of the miniaturization and multi-functional integration. The relevant technical principles and technology development status were introduced, the pros and cons of the existing techniques were discussed, and the future development direction and application prospects were summarized.
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Key words:
- optical sensing /
- photodetection /
- optical waveguide /
- integrated optics /
- lab on a chip
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图 1 片上集成光学传感检测技术路线。(a)波导型包括:(a1)基于波导模式的指纹光吸收传感器[55];(a2)基于波导微谐振腔的折射率传感器[57]。(b)自由空间型包括:(b1)低通滤波器集成的荧光计[52];(b2)微纳谐振结构垂直集成的探测器[58];(b3)具有原位光电探测的光传感器[54]
Figure 1. Route of chip-integrated optical sensing technology. (a) The waveguide type includes: (a1) Fingerprint light absorption waveguide sensor [55]; (a2) Refractive index sensor based on waveguide microresonator [57]. (b) The free-space type includes: (b1) Low-pass filter integrated fluorometer [52]; (b2) Micro/nano-resonant structure vertically integrated detector [58]; (b3) Optical sensor with in-situ photodetection [54]
图 2 基于波导模式非色散光吸收的片上光传感技术。(a) GeSbS螺旋光传感波导与PbTe探测器单片集成的气体传感器[65];(b) CaF2衬底上单片集成硅光传感波导与石墨烯波导探测器的气体传感器[66];(c) GaSb衬底上外延制备的带间级联激光器与沉积工艺制备的As2Se3光传感波导的单片集成[67];(d) InP衬底上量子级联激光器、量子级联探测器和表面等离子体传感波导单片集成的溶液传感器[55];(e)玻璃衬底上基于Al-AlOx-Au隧道结的宽带光源与探测器的单片集成,两者间由表面等离子体波导连接[56];(f)在聚合物柔性基底上单片集成InGaAs探测器和硫系玻璃光传感波导[68]
Figure 2. On-chip optical sensing technology based on non-dispersive light absorption of the waveguide mode. (a) Monolithic gas sensor with GeSbS spiral optical sensing waveguide and PbTe waveguide detector [65]; (b) Monolithic gas sensor with silicon optical sensing waveguide and graphene waveguide detector on CaF2 substrate [66]; (c) Monolithic integration of epitaxially grown inter-band cascade laser and deposited As2Se3 optical sensing waveguide on GaSb substrate [67]; (d) Monolithic sensor with quantum cascade laser, quantum cascade detector and surface plasmon sensing waveguide on InP substrate [55]; (e) Monolithic integration of broadband light source and detector based on Al-AlOx-Au tunnel junction on glass substrate, which are connected by surface plasmon waveguide [56]; (f) Monolithic integration of InGaAs detector and chalcogenide glass optical sensing waveguide on polymer flexible substrate [68]
图 3 基于波导微谐振腔的片上折射率传感技术。(a)基于硅微环传感器与GeSi探测器单片集成的硅基光子集成传感器[81],光源采用片外可调谐激光器;(b)基于硅基双微环腔与GeSi探测器单片集成的电扫描硅基光子集成传感器[51],光源采用片外放大自发辐射宽带光源;(c)基于可调谐级联硅基微环谐振腔和三-五族化合物键合集成的宽带可调谐中红外激光光源,通过检测特征波长吸收信号实现气体传感[83];(d)基于InP衬底上双可调谐激光器和探测器单片集成的外差信号检测的生化传感器[84]
Figure 3. On-chip refractive index sensing technology based on waveguide-coupled micro-resonators. (a) Monolithic silicon photonic sensor with microring sensing unit and GeSi detector operating with an off-chip tunable laser [81]; (b) Monolithic silicon photonic sensor with electrically scanned dual-microring sensing unit and GeSi detector operating with an off-chip amplified spontaneous emission broadband light source [51]; (c) A broadband tunable mid-infrared laser based on tunable cascaded silicon microrings and bonded III-V active layer for gas sensing by monitoring the absorption fingerprint [83]; (d) A biochemical sensor based on heterodyne signal detection with monolithically integrated dual tunable lasers and detector on InP substrate [84]
图 4 基于光传感器与光探测器垂直集成的片上光传感技术。(a)在CMOS工艺平台上集成纳米光栅偏振器和硅光电管的手性传感器[92];(b)金纳米盘阵列在硅pn结探测器表面集成的电读出光传感器[95];(c)银膜覆盖聚合物光栅在硅pn结探测器表面集成的电读出光传感器[96];(d)金纳米盘阵列在CMOS探测器表面集成的电读出光传感器[58];(e)在CMOS工艺平台上集成铜纳米光栅滤波器和硅光电管的荧光传感器[28];(f)金纳米孔阵列在CMOS图像传感器表面集成用于目标物多波长检测[103]
Figure 4. On-chip optical sensing technology based on vertically integrated optical sensor and optical detector. (a) Chiral sensor based on a nanograting polarizer integrated silicon photodiode on a CMOS platform [92]; (b) electric readout optical sensor based on a gold nanodisk array integrated silicon PN junction detector [95]; (c) electric readout optical sensor based on a silicon pn-junction detector integrated with silver film covered polymer gratings [96]; (d) electric readout optical sensor based on a gold nanodisk array integrated silicon photodiode on a CMOS platform [58]; (e) fluorescence sensor based on a copper nanograting filter integrated silicon photodiode on a CMOS platform [28]; (f) CMOS image sensor integrated with a gold nanohole array for multi-wavelength detection [103]
图 5 基于光学传感原位探测的片上光传感技术。(a)棱镜耦合的金属-半导体-金属架构的光传感器[109];(b)纳米孔阵列集成的金属-绝缘层-半导体架构的光传感器[113];(c)金膜覆盖硅纳米光栅的肖特基结架构的光传感器[54];(d)金纳米颗粒覆盖的Au-IGZO-Au光电导架构的光传感器[121];(e)氧化钒集成金膜覆盖硅纳米光栅的热阻型中红外波段光传感器[53];(f)氧化锂钽与超材料吸收器集成的热释电型气体传感器[122];(g) ZnO和金属纳米盘阵列集成的热释电型中远红外波段光传感器[123];(h)金纳米棒阵列与液态镓铟合金构建的隧道结光传感器[124]
Figure 5. On-chip optical sensing technology with in-situ photodetection. (a) Optical sensor based on a prism-coupled metal-semiconductor-metal multilayer [109]; (b) Optical sensor based on nanohole array integrated metal-insulator-semiconductor multilayer [113]; (c) Optical sensor based on gold film covered silicon nanogratings [54]; (d) Optical sensor based on gold nanoparticles covered Au-IGZO-Au photoconductive diode [121]; (e) Optical sensor based on a vanadium oxide bolometer integrated with gold film covered silicon nanogratings [53]; (f) Optical sensor based on a pyroelectric detector integrated with lithium tantalate and metamaterial absorber [122]; (g) Optical sensor based on a pyroelectric detector integrated with ZnO and metal nanodisk array [123]; (h) Optical sensor based on a tunnel junction consisting of gold nanorod array and liquid gallium indium [124]
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[1] Borisov S M, Wolfbeis O S. Optical biosensors [J]. Chemical Reviews, 2008, 108(2): 423-461. doi: 10.1021/cr068105t [2] Singh V, Hu J J, Agarwal A M, et al. Integrated optical sensors [J]. IEEE Photonics Journal, 2012, 4(2): 638-641. doi: 10.1109/JPHOT.2012.2192721 [3] Yan X, Li H X, Su X G. Review of optical sensors for pesticides [J]. Trac-Trends in Analytical Chemistry, 2018, 103: 1-20. doi: 10.1016/j.trac.2018.03.004 [4] Wang Q, Zhao W M. Optical methods of antibiotic residues detections: A comprehensive review [J]. Sensors and Actuators B-Chemical, 2018, 269: 238-256. [5] Salek-Maghsoudi A, Vakhshiteh F, Torabi R, et al. Recent advances in biosensor technology in assessment of early diabetes biomarkers [J]. Biosensors & Bioelectronics, 2018, 99: 122-135. [6] Khansili N, Rattu G, Krishna P M. Label-free optical biosensors for food and biological sensor applications [J]. Sensors and Actuators B-Chemical, 2018, 265: 35-49. doi: 10.1016/j.snb.2018.03.004 [7] Gao M K, Gao Y H, Tian M S, et al. Research on the application of optical sensor in quality and safety of agricultural products [J]. Chinese Journal of Analysis Laboratory, 2020, 39(10): 1225-1232. (in Chinese) [8] Tariq A, Baydoun J, Remy C, et al. Fluorescent molecular probe based optical fiber sensor dedicated to pH measurement of concrete [J]. Sensors and Actuators B-Chemical, 2021, 327: 128906. doi: 10.1016/j.snb.2020.128906 [9] Simsir E A, Erdemir S, Tabakci M, et al. Nano-scale selective and sensitive optical sensor for metronidazole based on fluorescence quenching: 1H-Phenanthro[9, 10-d]imidazolyl-calix[4]arene fluorescent probe [J]. Analytica Chimica Acta, 2021, 1162: 338494. doi: 10.1016/j.aca.2021.338494 [10] Lin D, Zheng Z C, Wang Q W, et al. Label-free optical sensor based on red blood cells laser tweezers Raman spectroscopy analysis for ABO blood typing [J]. Optics Express, 2016, 24(21): 24750-24759. doi: 10.1364/OE.24.024750 [11] Shvalya V, Filipic G, Zavasnik J, et al. Surface-enhanced Raman spectroscopy for chemical and biological sensing using nanoplasmonics: The relevance of interparticle spacing and surface morphology [J]. Applied Physics Reviews, 2020, 7(3): 031307. doi: 10.1063/5.0015246 [12] Adao T, Hruska J, Padua L, et al. Hyperspectral imaging: A review on UAV-based sensors, data processing and applications for agriculture and forestry [J]. Remote Sensing, 2017, 9(11): 1110. doi: 10.3390/rs9111110 [13] Mahlein A K, Kuska M T, Behmann J, et al. Hyperspectral sensors and imaging technologies in phytopathology: State of the art [J]. Annual Review of Phytopathology, 2018, 56: 535-558. doi: 10.1146/annurev-phyto-080417-050100 [14] Tokel O, Inci F, Demirci U. Advances in plasmonic technologies for point of care applications [J]. Chemical Reviews, 2014, 114(11): 5728-5752. doi: 10.1021/cr4000623 [15] Lopez G A, Estevez M C, Soler M, et al. Recent advances in nanoplasmonic biosensors: Applications and lab-on-a-chip integration [J]. Nanophotonics, 2017, 6(1): 123-136. doi: 10.1515/nanoph-2016-0101 [16] Geng Z X, Zhang X, Fan Z Y, et al. Recent progress in optical biosensors based on smartphone platforms [J]. Sensors, 2017, 17(11): 2449. doi: 10.3390/s17112449 [17] Liang Y, Xu T. Integrated miniature plasmonic nanostructure sensors [J]. Physics, 2019, 48(1): 22-28. (in Chinese) [18] Wang W P, Jin L. Research progress of on-chip spectrometer based on the silicon photonics platform [J]. Spectroscopy and Spectral Analysis, 2020, 40(2): 333-342. (in Chinese) [19] Yang Z Y, Albrow-Owen T, Cai W W, et al. Miniaturization of optical spectrometers [J]. Science, 2021, 371(6528): eabe0722. doi: 10.1126/science.abe0722 [20] Zhang L, Pan J, Zhang Z, et al. Ultrasensitive skin-like wearable optical sensors based on glass micro/nanofibers [J]. Opto-Electronic Advances, 2020, 3(3): 190022. [21] Zheng Y, Wu Z F, Shum P P, et al. Sensing and lasing applications of whispering gallery mode microresonators [J]. Opto-Electronic Advances, 2018, 1(9): 180085. [22] Hao Y F, Feng Z Y, Han C, et al. Application of high sensitive detection sensor chip in detection of brain glioma disease [J]. Infrared and Laser Engineering, 2021, 50(8): 20210279. (in Chinese) [23] Hasan D, Lee C. Hybrid metamaterial absorber platform for sensing of CO2 gas at mid-IR [J]. Advanced Science, 2018, 5(5): 1700581. doi: 10.1002/advs.201700581 [24] Visser D, Choudhury B D, Krasovska I, et al. Refractive index sensing in the visible/NIR spectrum using silicon nanopillar arrays [J]. Optics Express, 2017, 25(11): 12171-12181. doi: 10.1364/OE.25.012171 [25] Im H, Sutherland J N, Maynard J A, et al. Nanohole-based surface plasmon resonance instruments with improved spectral resolution quantify a broad range of antibody-ligand binding kinetics [J]. Analytical Chemistry, 2012, 84(4): 1941-1947. doi: 10.1021/ac300070t [26] Armani D K, Kippenberg T J, Spillane S M, et al. Ultra-high-Q toroid microcavity on a chip [J]. Nature, 2003, 421(6926): 925-928. doi: 10.1038/nature01371 [27] Rosenblum S, Lovsky Y, Arazi L, et al. Cavity ring-up spectroscopy for ultrafast sensing with optical microresonators [J]. Nature Communications, 2015, 6: 6788. doi: 10.1038/ncomms7788 [28] Hong L Y, Li H, Yang H, et al. Fully integrated fluorescence biosensors on-chip employing multi-functional nanoplasmonic optical structures in CMOS [J]. IEEE Journal of Solid-State Circuits, 2017, 52(9): 2388-2406. doi: 10.1109/JSSC.2017.2712612 [29] Zhu J G, Ozdemir S K, Xiao Y F, et al. On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator [J]. Nature Photonics, 2010, 4(1): 46-49. doi: 10.1038/nphoton.2009.237 [30] Jin T N, Lin H Y G, Lin P T. Monolithically integrated Si-on-AIN mid-infrared photonic chips for real-time and label-free chemical sensing [J]. ACS Applied Materials & Interfaces, 2017, 9(49): 42905-42911. [31] Rodriguez-Saona L, Aykas D P, Borba K R, et al. Miniaturization of optical sensors and their potential for high-throughput screening of foods [J]. Current Opinion in Food Science, 2020, 31: 136-150. doi: 10.1016/j.cofs.2020.04.008 [32] Johann S, Mansurova M, Kohlhoff H, et al. Wireless mobile sensor device for in-situ measurements with multiple fluorescent sensors [C]//IEEE Sensors Conference, 2018: 1067-1070. [33] Zhang J L, Khan I, Zhang Q W, et al. Lipopolysaccharides detection on a grating-coupled surface plasmon resonance smartphone biosensor [J]. Biosensors & Bioelectronics, 2018, 99: 312-317. [34] Xu X Y, Chen W J, Zhao G M, et al. Wireless whispering-gallery-mode sensor for thermal sensing and aerial mapping [J]. Light-Science & Applications, 2018, 7: 62. [35] Tittl A, Leitis A, Liu M K, et al. Imaging-based molecular barcoding with pixelated dielectric metasurfaces [J]. Science, 2018, 360(6393): 1105. doi: 10.1126/science.aas9768 [36] Estevez M C, Alvarez M, Lechuga L M. Integrated optical devices for lab-on-a-chip biosensing applications [J]. Laser & Photonics Reviews, 2012, 6(4): 463-487. [37] Wang H, Zhang Y L, Wang W, et al. On-chip laser processing for the development of multifunctional microfluidic chips [J]. Laser & Photonics Reviews, 2017, 11(2): 1600116. [38] Yavas O, Svedendahl M, Dobosz P, et al. On-a-chip biosensing based on all-dielectric nanoresonators [J]. Nano Letters, 2017, 17(7): 4421-4426. doi: 10.1021/acs.nanolett.7b01518 [39] Brown C, Goncharov A, Ballard Z S, et al. Neural network-based on-chip spectroscopy using a scalable plasmonic encoder [J]. ACS Nano, 2021, 15(4): 6305-6315. doi: 10.1021/acsnano.1c00079 [40] Garcia-Meca C, Lechago S, Brimont A, et al. On-chip wireless silicon photonics: From reconfigurable interconnects to lab-on-chip devices [J]. Light-Science & Applications, 2017, 6(9): e17053. [41] Lin P T, Kwok S W, Lin H Y G, et al. Mid-infrared spectrometer using opto-nanofluidic slot-waveguide for label-free on-chip chemical sensing [J]. Nano Letters, 2014, 14(1): 231-238. doi: 10.1021/nl403817z [42] Acimovic S S, Sipova H, Emilsson G, et al. Superior LSPR substrates based on electromagnetic decoupling for on-a-chip high-throughput label-free biosensing [J]. Light-Science & Applications, 2017, 6(8): e17042. [43] Lu C H, Shih T S, Shih P C, et al. Finger-powered agglutination lab chip with CMOS image sensing for rapid point-of-care diagnosis applications [J]. Lab on a Chip, 2020, 20(2): 424-433. doi: 10.1039/C9LC00961B [44] Zhang Y, Wang G, Yang L, et al. Recent advances in gold nanostructures based biosensing and bioimaging [J]. Coordination Chemistry Reviews, 2018, 370: 1-21. doi: 10.1016/j.ccr.2018.05.005 [45] Blanchard-Dionne A P, Meunier M. Sensing with periodic nanohole arrays [J]. Advances in Optics and Photonics, 2017, 9(4): 891-940. doi: 10.1364/AOP.9.000891 [46] Brolo A G. Plasmonics for future biosensors [J]. Nature Photonics, 2012, 6(11): 709-713. doi: 10.1038/nphoton.2012.266 [47] Anker J N, Hall W P, Lyandres O, et al. Biosensing with plasmonic nanosensors [J]. Nature Materials, 2008, 7(6): 442-453. doi: 10.1038/nmat2162 [48] Zanchetta G, Lanfranco R, Giavazzi F, et al. Emerging applications of label-free optical biosensors [J]. Nanophotonics, 2017, 6(4): 627-645. doi: 10.1515/nanoph-2016-0158 [49] Xu Y, Bian J, Zhang W H. Principles and processes of nanometric localized-surface-plasmonic optical sensors [J]. Laser & Optoelectronics Progress, 2019, 56(20): 202407. (in Chinese) [50] Ma Y M, Dong B W, Lee C K. Progress of infrared guided-wave nanophotonic sensors and devices [J]. Nano Convergence, 2020, 7: 12. doi: 10.1186/s40580-020-00222-x [51] Song J F, Luo X S, Kee J S, et al. Silicon-based optoelectronic integrated circuit for label-free bio/chemical sensor [J]. Optics Express, 2013, 21(15): 17931-17940. doi: 10.1364/OE.21.017931 [52] Dandin M, Abshire P, Smela E. Optical filtering technologies for integrated fluorescence sensors [J]. Lab on a Chip, 2007, 7(8): 955-977. doi: 10.1039/b704008c [53] Chen Q, Liang L, Zheng Q L, et al. On-chip readout plasmonic mid-IR gas sensor [J]. Opto-Electronic Advances, 2020, 3(7): 07190040. [54] Wen L, Liang L, Yang X G, et al. Multiband and ultrahigh figure-of-merit nanoplasmonic sensing with direct electrica readout in Au-Si nanojunctions [J]. ACS Nano, 2019, 13(6): 6963-6972. doi: 10.1021/acsnano.9b01914 [55] Schwarz B, Reininger P, Ristanic D, et al. Monolithically integrated mid-infrared lab-on-a-chip using plasmonics and quantum cascade structures [J]. Nature Communications, 2014, 5: 4085. doi: 10.1038/ncomms5085 [56] Du W, Wang T, Chu H S, et al. Highly efficient on-chip direct electronic-plasmonic transducers [J]. Nature Photonics, 2017, 11(10): 623-627. doi: 10.1038/s41566-017-0003-5 [57] Singh R, Su P, Kimerling L, et al. Towards on-chip mid infrared photonic aerosol spectroscopy [J]. Applied Physics Letters, 2018, 113(23): 231107. doi: 10.1063/1.5058694 [58] Shakoor A, Cheah B C, Hao D, et al. Plasmonic sensor monolithically integrated with a CMOS photodiode [J]. ACS Photonics, 2016, 3(10): 1926-1933. doi: 10.1021/acsphotonics.6b00442 [59] Zhao Y, Zhao J, Zhao Q. Review of no-core optical fiber sensor and applications [J]. Sensors and Actuators a-Physical, 2020, 313: 112160. doi: 10.1016/j.sna.2020.112160 [60] Caucheteur C, Guo T, Liu F, et al. Ultrasensitive plasmonic sensing in air using optical fibre spectral combs [J]. Nature Communications, 2016, 7: 13371. doi: 10.1038/ncomms13371 [61] Mittal V, Mashanovich G Z, Wilkinson J S. Perspective on thin film waveguides for on-chip mid-infrared spectroscopy of liquid biochemical analytes [J]. Analytical Chemistry, 2020, 92(16): 10891-10901. doi: 10.1021/acs.analchem.0c01296 [62] Krupin O, Asiri H, Wang C, et al. Biosensing using straight long-range surface plasmon waveguides [J]. Optics Express, 2013, 21(1): 698-709. doi: 10.1364/OE.21.000698 [63] Tombez L, Zhang E J, Orcutt J S, et al. Methane absorption spectroscopy on a silicon photonic chip [J]. Optica, 2017, 4(11): 1322-1325. doi: 10.1364/OPTICA.4.001322 [64] Han Z, Singh V, Kita D, et al. On-chip chalcogenide glass waveguide-integrated mid-infrared PbTe detectors [J]. Applied Physics Letters, 2016, 109(7): 071111. doi: 10.1063/1.4961532 [65] Su P, Han Z, Kita D, et al. Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector [J]. Applied Physics Letters, 2019, 114(5): 051103. doi: 10.1063/1.5053599 [66] Ma Y M, Chang Y H, Dong B W, et al. Heterogeneously integrated graphene/silicon/halide waveguide photodetectors toward chip-scale zero-bias long-wave infrared spectroscopic sensing [J]. ACS Nano, 2021, 15(6): 10084-10094. doi: 10.1021/acsnano.1c01859 [67] Lin H, Kim C S, Li L, et al. Monolithic chalcogenide glass waveguide integrated interband cascaded laser [J]. Optical Materials Express, 2021, 11(9): 2869-2876. doi: 10.1364/OME.435061 [68] Li L, Lin H T, Huang Y Z, et al. High-performance flexible waveguide-integrated photodetectors [J]. Optica, 2018, 5(1): 44-51. doi: 10.1364/OPTICA.5.000044 [69] Zhao H L, Baumgartner B, Raza A, et al. Multiplex volatile organic compound Raman sensing with nanophotonic slot waveguides functionalized with a mesoporous enrichment layer [J]. Optics Letters, 2020, 45(2): 447-450. doi: 10.1364/OL.379469 [70] Vlk M, Datta A, Alberti S, et al. Extraordinary evanescent field confinement waveguide sensor for mid-infrared trace gas spectroscopy [J]. Light-Science & Applications, 2021, 10(1): 26. [71] Du Q Y, Luo Z Q, Zhong H K, et al. Chip-scale broadband spectroscopic chemical sensing using an integrated supercontinuum source in a chalcogenide glass waveguide [J]. Photonics Research, 2018, 6(6): 506-510. doi: 10.1364/PRJ.6.000506 [72] Yoo K M, Midkiff J, Rostamian A, et al. InGaAs membrane waveguide: A promising platform for monolithic integrated mid-infrared optical gas sensor [J]. ACS Sensors, 2020, 5(3): 861-869. doi: 10.1021/acssensors.0c00180 [73] Wu Y B, Qu Z B, Osman A, et al. Nanometallic antenna-assisted amorphous silicon waveguide integrated bolometer for mid-infrared [J]. Optics Letters, 2021, 46(3): 677-680. doi: 10.1364/OL.412529 [74] Consani C, Ranacher C, Tortschanoff A, et al. Mid-infrared photonic gas sensing using a silicon waveguide and an integrated emitter [J]. Sensors and Actuators B-Chemical, 2018, 274: 60-65. doi: 10.1016/j.snb.2018.07.096 [75] Chen W J, Ozdemir S K, Zhao G M, et al. Exceptional points enhance sensing in an optical microcavity [J]. Nature, 2017, 548(7666): 192-198. doi: 10.1038/nature23281 [76] Liu S, Sun W Z, Wang Y J, et al. End-fire injection of light into high-Q silicon microdisks [J]. Optica, 2018, 5(5): 612-616. doi: 10.1364/OPTICA.5.000612 [77] Xu Y, Bai P, Zhou X D, et al. Optical refractive index sensors with plasmonic and photonic structures: Promising and inconvenient truth [J]. Advanced Optical Materials, 2019, 7(9): 1801433. doi: 10.1002/adom.201801433 [78] Liang L, Wen L, Jiang C P, et al. Research progress of terahertz sensor based on artificial microstructure [J]. Infrared and Laser Engineering, 2019, 48(2): 0203001. (in Chinese) doi: 10.3788/IRLA201948.0203001 [79] Liang L, Hu X, Wen L, et al. Unity integration of grating slot waveguide and microfluid for terahertz sensing [J]. Laser & Photonics Reviews, 2018, 12(11): 1800078. [80] Homola J. Surface plasmon resonance sensors for detection of chemical and biological species [J]. Chemical Reviews, 2008, 108(2): 462-493. doi: 10.1021/cr068107d [81] Zang K, Zhang D K, Huo Y J, et al. Microring bio-chemical sensor with integrated low dark current Ge photodetector [J]. Applied Physics Letters, 2015, 106(10): 101111. doi: 10.1063/1.4915094 [82] Song J F, Luo X S, Tu X G, et al. Electrical tracing-assisted dual-microring label-free optical bio/chemical sensors [J]. Optics Express, 2012, 20(4): 4189-4197. doi: 10.1364/OE.20.004189 [83] Wang R J, Sprengel S, Vasiliev A, et al. Widely tunable 2.3 μm III-V-on-silicon vernier lasers for broadband spectroscopic sensing [J]. Photonics Research, 2018, 6(9): 858-866. doi: 10.1364/PRJ.6.000858 [84] Cohen D A, Nolde J A, Pedretti A T, et al. Sensitivity and scattering in a monolithic heterodyned laser biochemical sensor [J]. IEEE Journal of Selected Topics in Quantum Electronics, 2003, 9(5): 1124-1131. doi: 10.1109/JSTQE.2003.819481 [85] Crosnier G, Sanchez D, Bouchoule S, et al. Hybrid indium phosphide-on-silicon nanolaser diode [J]. Nature Photonics, 2017, 11(5): 297-301. doi: 10.1038/nphoton.2017.56 [86] Wang Y, Chen S M, Yu Y, et al. Monolithic quantum-dot distributed feedback laser array on silicon [J]. Optica, 2018, 5(5): 528-533. doi: 10.1364/OPTICA.5.000528 [87] Rong H S, Jones R, Liu A S, et al. A continuous-wave Raman silicon laser [J]. Nature, 2005, 433(7027): 725-728. doi: 10.1038/nature03346 [88] Cetin A E, Coskun A F, Galarreta B C, et al. Handheld high-throughput plasmonic biosensor using computational on-chip imaging [J]. Light-Science & Applications, 2014, 3: e122. [89] Wang J W, Sanchez M M, Yin Y, et al. Silicon-based integrated label-free optofluidic biosensors: Latest advances and roadmap [J]. Advanced Materials Technologies, 2020, 5(6): 1901138. doi: 10.1002/admt.201901138 [90] Gopinath S C B. Biosensing applications of surface plasmon resonance-based Biacore technology [J]. Sensors and Actuators B-Chemical, 2010, 150(2): 722-733. doi: 10.1016/j.snb.2010.08.014 [91] Dattner Y, Yadid-Pecht O. Low light CMOS contact imager with an integrated poly-acrylic emission filter for fluorescence detection [J]. Sensors, 2010, 10(5): 5014-5027. doi: 10.3390/s100505014 [92] Tokuda T, Matsuoka H, Tachikawa N, et al. CMOS sensor-based miniaturised in-line dual-functional optical analyser for high-speed, in situ chirality monitoring [J]. Sensors and Actuators B-Chemical, 2013, 176: 1032-1037. doi: 10.1016/j.snb.2012.09.042 [93] Bollschweiler L, English A, Baker R J, et al. Chip-scale nanophotonic chemical and biological sensors using CMOS process [C]//52nd IEEE International Midwest Symposium on Circuits and Systems, IEEE, 2009. [94] Koppa S, Joo Y J, Venkataramasubramani M, et al. Nanoscale biosensor chip [C]//53rd Midwest Symposium on Circuits and Systems (MWSCAS 2010), IEEE, 2010. [95] Mazzotta F, Wang G L, Hagglund C, et al. Nanoplasmonic biosensing with on-chip electrical detection [J]. Biosensors & Bioelectronics, 2010, 26(4): 1131-1136. [96] Turker B, Guner H, Ayas S, et al. Grating coupler integrated photodiodes for plasmon resonance based sensing [J]. Lab on a Chip, 2011, 11(2): 282-287. doi: 10.1039/C0LC00081G [97] Chen Q, Chitnis D, Walls K, et al. CMOS photodetectors integrated with plasmonic color filters [J]. IEEE Photonics Technology Letters, 2012, 24(3): 197-199. doi: 10.1109/LPT.2011.2176333 [98] Chen Q, Hu X, Wen L, et al. Nanophotonic image sensors [J]. Small, 2016, 12(36): 4922-4935. doi: 10.1002/smll.201600528 [99] Manley M. Near-infrared spectroscopy and hyperspectral imaging: Non-destructive analysis of biological materials [J]. Chemical Society Reviews, 2014, 43(24): 8200-8214. doi: 10.1039/C4CS00062E [100] Augel L, Fischer I A, Dunbar L A, et al. Plasmonic nanohole arrays on Si-Ge heterostructures: An approach for integrated biosensors [C]//SPIE, 2015, 9724: 97240M. [101] Augel L, Bechler S, Korner R, et al. An integrated plasmonic refractive index sensor: Al nanohole arrays on Ge PIN photodiodes [C]//IEEE International Electron Devices Meeting (IEDM), 2017: 896-897. [102] Augel L, Kawaguchi Y, Bechler S, et al. Integrated collinear refractive index sensor with Ge PIN photodiodes [J]. ACS Photonics, 2018, 5(11): 4586-4593. doi: 10.1021/acsphotonics.8b01067 [103] Seiler S T, Rich I S, Lindquist N C. Direct spectral imaging of plasmonic nanohole arrays for real-time sensing [J]. Nanotechnology, 2016, 27(18): 184001. doi: 10.1088/0957-4484/27/18/184001 [104] Blockstein L, Yadid-Pecht O. Lensless miniature portable fluorometer for measurement of chlorophyll and CDOM in water using fluorescence contact imaging [J]. IEEE Photonics Journal, 2014, 6(3): 6600716. [105] Maruyama Y, Sawada K, Takao H, et al. A novel filterless fluorescence detection sensor for DNA analysis [J]. IEEE Transactions on Electron Devices, 2006, 53(3): 553-558. doi: 10.1109/TED.2005.864385 [106] Nakazawa H, Ishida M, Sawada K. Multimodal bio-image sensor for real-time proton and fluorescence imaging [J]. Sensors and Actuators B-Chemical, 2013, 180: 14-20. doi: 10.1016/j.snb.2011.11.010 [107] Raissi F, Mirzakuchaki S, Jalili H M, et al. Room-temperature gas-sensing ability of PtSi/porous Si Schottky junctions [J]. Ieee Sensors Journal, 2006, 6(1): 146-150. doi: 10.1109/JSEN.2005.854146 [108] Augel L, Berkmann F, Latta D, et al. Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing [J]. Microfluidics and Nanofluidics, 2017, 21: 169. doi: 10.1007/s10404-017-2007-3 [109] Bora M, Celebi K, Zuniga J, et al. Near field detector for integrated surface plasmon resonance biosensor applications [J]. Optics Express, 2009, 17(1): 329-336. doi: 10.1364/OE.17.000329 [110] Park B, Yun S H, Cho C Y, et al. Surface plasmon excitation in semitransparent inverted polymer photovoltaic devices and their applications as label-free optical sensors [J]. Light-Science & Applications, 2014, 3: e222. [111] Hu X, Xu G Q, Wen L, et al. Metamaterial absorber integrated microfluidic terahertz sensors [J]. Laser & Photonics Reviews, 2016, 10(6): 962-969. [112] Liang L, Zheng Q L, Wen L, et al. Miniaturized spectroscopy with tunable and sensitive plasmonic structures [J]. Optics Letters, 2021, 46(17): 4264-4267. doi: 10.1364/OL.426624 [113] Guyot L, Blanchard-Dionne A P, Patskovsky S, et al. Integrated silicon-based nanoplasmonic sensor [J]. Optics Express, 2011, 19(10): 9962-9967. doi: 10.1364/OE.19.009962 [114] Alavirad M, Mousavi S S, Roy L, et al. Schottky-contact plasmonic dipole rectenna concept for biosensing [J]. Optics Express, 2013, 21(4): 4328-4347. doi: 10.1364/OE.21.004328 [115] Chen W J, Kan T, Ajiki Y, et al. NIR spectrometer using a Schottky photodetector enhanced by grating-based SPR [J]. Optics Express, 2016, 24(22): 25797-25804. doi: 10.1364/OE.24.025797 [116] Ajiki Y, Kan T, Matsumoto K, et al. Electrically detectable surface plasmon resonance sensor by combining a gold grating and a silicon photodiode [J]. Applied Physics Express, 2018, 11: 022001. doi: 10.7567/APEX.11.022001 [117] Tsukagoshi T, Kuroda Y, Noda K, et al. Compact surface plasmon resonance system with Au/Si Schottky barrier [J]. Sensors, 2018, 18(2): 399. doi: 10.3390/s18020399 [118] Saito Y, Yamamoto Y, Kan T, et al. Electrical detection SPR sensor with grating coupled backside illumination [J]. Optics Express, 2019, 27(13): 17763-17770. doi: 10.1364/OE.27.017763 [119] Oshita M, Takahashi H, Ajiki Y, et al. Reconfigurable surface plasmon resonance photodetector with a MEMS deformable cantilever [J]. ACS Photonics, 2020, 7(3): 673-679. doi: 10.1021/acsphotonics.9b01510 [120] Sammito D, De Salvador D, Zilio P, et al. Integrated architecture for the electrical detection of plasmonic resonances based on high electron mobility photo-transistors [J]. Nanoscale, 2014, 6(3): 1390-1397. doi: 10.1039/C3NR04666D [121] Kojori H S, Ji Y W, Paik Y, et al. Monitoring interfacial lectin binding with nanomolar sensitivity using a plasmon field effect transistor [J]. Nanoscale, 2016, 8(39): 17357-17364. doi: 10.1039/C6NR05544C [122] Tan X C, Zhang H, Li J Y, et al. Non-dispersive infrared multi-gas sensing via nanoantenna integrated narrowband detectors [J]. Nature Communications, 2020, 11: 5245. doi: 10.1038/s41467-020-19085-1 [123] Dao T D, Ishii S, Doan A T, et al. An on-chip quad-wavelength pyroelectric sensor for spectroscopic infrared sensing [J]. Advanced Science, 2019, 6(20): 1900579. doi: 10.1002/advs.201900579 [124] Wang P, Krasavin A V, Nasir M E, et al. Reactive tunnel junctions in electrically driven plasmonic nanorod metamaterials [J]. Nature Nanotechnology, 2018, 13(2): 159-164. doi: 10.1038/s41565-017-0017-7 [125] Ciappesoni M, Cho S, Tian J, et al. Computational study for optimization of a plasmon FET as a molecular biosensor [J]. Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XV, 2018: 10506. [126] Tan X C, Li J Y, Yang A, et al. Narrowband plasmonic metamaterial absorber integrated pyroelectric detectors towards infrared gas sensing [C]//Conference on Lasers and Electro-Optics (CLEO), 2018: FF2F. 4. [127] Wang P, Nasir M E, Krasavin A V, et al. Optoelectronic synapses based on hot-electron-induced chemical processes [J]. Nano Letters, 2020, 20(3): 1536-1541. doi: 10.1021/acs.nanolett.9b03871 [128] Song H Y, Zhang W Y, Li H F, et al. Review of compact computational spectral information acquisition systems [J]. Frontiers of Information Technology & Electronic Engineering, 2020, 21(8): 1119-1133. [129] Zheng Q L, Wen L, Chen Q. Research progress of computational microspectrometer based on speckle inspection [J]. Opto-Electronic Engineering, 2021, 48(3): 200183. (in Chinese)