张鹏泉, 陈佳琪, 史屹君. 离轴三反光学系统中反射膜的研制[J]. 红外与激光工程, 2022, 51(9): 20210900. DOI: 10.3788/IRLA20210900
引用本文: 张鹏泉, 陈佳琪, 史屹君. 离轴三反光学系统中反射膜的研制[J]. 红外与激光工程, 2022, 51(9): 20210900. DOI: 10.3788/IRLA20210900
Zhang Pengquan, Chen Jiaqi, Shi Yijun. Development of the aluminum substrate reflective film in the off-axis three-mirror optical system[J]. Infrared and Laser Engineering, 2022, 51(9): 20210900. DOI: 10.3788/IRLA20210900
Citation: Zhang Pengquan, Chen Jiaqi, Shi Yijun. Development of the aluminum substrate reflective film in the off-axis three-mirror optical system[J]. Infrared and Laser Engineering, 2022, 51(9): 20210900. DOI: 10.3788/IRLA20210900

离轴三反光学系统中反射膜的研制

Development of the aluminum substrate reflective film in the off-axis three-mirror optical system

  • 摘要: 离轴三反光学系统由于具有工作波段宽,像质优良且杂散光易于控制等优势,因而被广泛用作光谱成像系统的设计方案。文中采用Code V软件,对光学系统进行了设计,基于光的偏振理论,推导出薄膜样品和系统的偏振保真度与相位差之间的换算关系,选择铝材料作为基底材料,银(Ag)、三氧化二铝(Al2O3)和二氧化钛(TiO2)为镀膜材料。根据光学薄膜基础理论,设计出光线38.5°入射,在1 545~1 555 nm处RS>99.96%,RP>99.8%,P光和S光相位延迟小于1°的反射膜。结合膜系设计软件进行膜系设计和模拟分析,在德国莱宝光学公司设计生产的高性能光学镀膜机上完成了离轴三反光学系统中铝合金表面反射膜的制备。采用Lamda1050光谱仪对镀膜样品的S光、P光反射光谱和相位进行测试,测试结果满足设计要求。该研究具有重要的实际意义和工程价值。

     

    Abstract: The off-axis three-mirror optical system has been widely adopted as the design scheme for spectral imaging system because of its wide service band, high image quality, controllable stray light and other advantages. In this paper, an optical system is designed using Code V. Based on the theory of polarization of light, the conversion relationship between film samples and the polarization fidelity and phase difference of the system is derived. After that, with aluminum substrate as the base material, and silver, alumina and titanium dioxide as coating materials, the reflective film is developed based on the basic theory of optical thin films, which features the incident angle of 38.5°, RS>99.96% and RP>99.8% in the range of 1 545-1 555 nm, and the phase delays of P-light and S-light smaller than 1°. Film design and simulation analysis are completed in the film design software. Using the high-performance optical coating machine designed by Leybold Optics, the aluminum substrate reflective film for the off-axis three-mirror optical system is prepared. S and P reflectance spectra and the phase of the coating samples are tested by Lamda1050 spectrometer. The results meet the design specifications. The research is of great significance in practice and engineering projects.

     

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