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火星探测一直是世界各国行星探测的首要任务，火星是距离地球最近的类地行星，探索火星及其他星球的气候变化、地质演变，可以更好地保护地球、扩展人类生存疆域。探测火星的主要目的有三个：一是了解火星气候的历史及演变过程[1]；二是确定火星表面和内部的地质演化过程[2]；三是确定火星上是否有过生命的出现[3]。自1960年前苏联向火星发射第一颗探测器至2021年，世界各国至少进行了49次火星探测，但成功率不足50%[2, 4-6]，可见火星探测的难度非常大。
火星矿物光谱分析仪 (Mars Mineralogical Spectrometer, MMS)是我国开展首次火星探测任务配置的科学载荷之一[7]，安装于火星探测环绕器内，在运动中对火星表面目标进行光谱遥感探测。512×320 元短波红外焦平面制冷组件是火星矿物光谱分析仪的重要件，用于高光谱成像[8]。仪器突破了红外背景抑制、高效分光组件、器上组合定标等关键技术，集轻小型、低功耗、高性能于一身，以期实现探的更“精”、测的更“准”的科学探测目标[9]。
文中分析了火星矿物光谱仪512×320 元红外探测器制冷组件特点，重点阐述了红外焦平面探测器、集成式杜瓦组件、制冷机等研制和技术难点。红外组件成功应用在“天问一号”火星探测器上，为我国下一步深空探测的红外组件发展提供了一定的参考。
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由于火星探测任务的载荷数量多，将火星探测器运至地球逃逸轨道需要大推力火箭[10-12]，因而火星矿物光谱仪有效载荷需要尽量的轻巧、集成化程度高，故火星矿物光谱仪的红外探测器制冷组件需要设计成小尺寸、轻质、小功耗(Low SWaP)的集成组件[13-15]。火星矿物光谱仪的短波红外(Short Wave Infrared, SWIR)集成式探测器杜瓦制冷机组件(Integrated Detector Dewar Cooler Assembly, IDDCA)总体技术要求如表1所示。
表 1 火星矿物光谱仪集成式探测器杜瓦制冷机组件总体技术
Table 1. The characteristic of IDDCA for the MMS
Item Characteristics Remarks Detection bands From SWIR to MWIR
spectral detectionBroad spectrum spectroscopy 1000-3400 nm[7] Divided into A/B/C bands
Band A:
1-1.9 μm；
Band B:
1.4-2.7 μm；
Band C:
2.1-3.4 μmLow background noise 250e− Typical SNR 150 Operating temperature 80 K/90 K/150 K Three switchable operating temperatures SWaP Small size, low weight (IDDCA ≤ 800 g), low power consumption (stable power ≤ 12 W) Reliability test Thermal cycle test; thermal vacuum test; high temperature storage; low temperature storage; acceleration; 1400 g mechanical shock; sinusoidal and random vibration; open/close loop and life; electromagnetic compatibility (EMC) etc. Full test -
火星矿物光谱分析仪用512×320元短波红外焦平面探测器技术方案为：红外焦平面芯片由碲镉汞外延材料通过n-on-p平面结工艺制备；采用CTIA输入级读出电路；以铟柱直接倒焊互连方式构成512×320元红外焦平面器件。采用开窗模式对512×320元红外焦平面器件的探测信号进行积分、存储、转换和输出，电路工作模式采用帧积分工作方式。表2为火星矿物光谱仪系统光学主要参数。
表 2 火星矿物光谱仪系统光学主要参数
Table 2. The main optical parameters of the MMS
Item Specifications Item Specifications Optical F/# (fn) 2.87 Typical wavelength/μm 1.595/1.0/3.4 Unit cells (a1×a1)/μm2 25×25 Grating transmittance (ηg) 0.3173/0.0814/
0.4418Spectral
resolution (λw)/nm20 Solar irradiance (L)/W·m−2·μm−1 258.30/751/
16.59Surface albedo (Re) 0.15 Lens efficiency (η0) 0.9 Solar altitude
angle (Ah)0.707 Integration time (Tint1)/s 0.02 根据光学系统要求，可以得出杜瓦内探测器的输入光子能量[16]为：
$$ {E_{{\text{input}}}} = \frac{1}{4}{\alpha _{{\text{EM}}}}{A_{\text{h}}}{R_{\text{e}}}{a_1}^2\frac{1}{{f_{\text{n}}^2}}L{\eta _{\text{g}}}{\eta _{\text{0}}}{\lambda _{\text{w}}} $$ (1) 当典型波长为λ=1.595 μm、光栅透过率ηg和太阳辐照度L分别为0.3173、258.30 W·m−2·μm−1时，公式(1)中的${E_{{\text{input}}}}$为1.306×10−12 W。
根据系统输入，探测器的信噪比可以进行计算，探测器在典型波长1.595 μm处的信噪比为：
$$ S N R = \frac{{{S_{\text{s}}}}}{{{N_{{\text{total}}}}}} $$ (2) $$ {S_{\text{s}}} = \frac{\lambda }{{hc}}{E_{{\text{input}}}}Q{{E}}{T_{{\text{int1}}}} $$ (3) 其中，量子效率QE取0.5，则信号电子数Ss=1.049×105，器件光子噪声为：
$$ {N_{\text{s}}} = \sqrt {{S_{\text{s}}}} $$ (4) 根据公式(4)可以计算出Ns为323.83，两档饱和信号电子数S1和S2分别为0.25×106和1.6×106，探测器工作输出饱和电压Vout为2 V。根据两档饱和信号电子数计算CTIA输入级积分电容分别为：
$$ {C_{{\text{int1}}}} = {S_{\text{1}}}\frac{q}{{{V_{{\text{out}}}}}} $$ (5) $$ {C_{{\text{int2}}}} = {S_{\text{2}}}\frac{q}{{{V_{{\text{out}}}}}} $$ (6) 根据公式(5)、(6)可以得出Cint1、Cint2分别为2.00×10−14 F、1.28×10−13 F。探测器暗电流Id为5×10−13 A， 暗电流噪声为：
$$ {N_{\text{d}}} = \sqrt {\frac{{{I_{\text{d}}}{T_{{\text{int1}}}}}}{q}} $$ (7) 根据公式(7)可以计算出Nd为250，读出噪声和耦合接口噪声的综合设计值Nr为200。则总噪声为：
$$ {N_{{\text{total}}}} = \sqrt {{N_{\text{s}}}^2 + {N_{\text{d}}}^2 + {N_{\text{r}}}^2} $$ (8) 根据公式(8)可得出总噪声为455.38。根据公式(2)计算出信噪比为230.29。
依此短波红外焦平面总体设计，如波长为3.4 μm时，其总噪声与1.595 μm波段相同，其量子效率QE取0.3（该波段下量子效率指标要求不小于30%），根据入射光子数则可推算信噪比。火星光谱仪512×320元短波红外探测器的研制结果如表3所示，组件信噪比与设计指标相吻合。
表 3 火星光谱仪短波红外探测器技术参数
Table 3. The SWIR detector parameters in the MMS
Item Parameters Test results IDDCA performance Spectral response range/μm 1.0-3.4 Detector response characteristics Non-uniformity 4.8% Quantum efficiency 3.4 μm@50% 1.0 μm@16.5% Rate of blind pixels 0.55% Detector readout mode Non-linearity 0.764% Output saturation voltage/V 2.225 Frame frequency/Hz 60.44 IDDCA SNR 225@1.595 μm 图1为火星光谱仪512×320元短波红外探测器实物照片。
图 1 火星光谱仪512×320 元短波红外探测器
Figure 1. Photograph of 512×320 SWIR detector of the MMS
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火星矿物光谱仪的集成式杜瓦是红外探测器工作的必要保护屏障和光电性能传输的有效装置[17-18]，为其提供真空、低温环境，同时实现探测器与整机光学系统的后光路耦合匹配。在杜瓦冷平台上安装焦平面探测器、滤光片支撑、滤光片、冷光阑等。杜瓦冷平台的力学支撑采用高强度单点冷指结构，同时采用抗径向冲击的斜支撑结构设计，具体如图2所示。火星矿物光谱仪红外杜瓦组件的设计特点体现三个方面：1) 轻量化抗冲击集成式封装结构设计；2) 组件内分光设计；3) 异形冷平台设计。
图 2 512×320短波红外探测器杜瓦组件结构设计图
Figure 2. Dewar structure design for 512×320 SWIR detector
为了确保火星矿物探测的特定要求，即需满足14 grms (20~2000 Hz)量级随机振动、1400 g量级机械冲击的结构设计。对冷平台减重、冷屏轻量化设计，提高抗冲击能力，有效降低冷指负载，以提高组件环境力学后的可靠裕度。杜瓦内冷指顶部的零部件及其质量如表4所示。
表 4 杜瓦内冷指顶部的零部件及其质量
Table 4. Components and their mass at the top of cold finger in Dewar
Part name Material Density/kg·m−3 Mass/g Cold platform 4J36 8100 6.92 infrared detector MCT 5.76 0.43 Silicon circuit Si 2330 0.39 Substrate Al2O3 4020 0.62 Filter holder 4J29 8350 2.53 Filter Al2O3 4020 1.00 Cold shield Ni/Co 8908 1.29 Total 13.18 冷平台未进行拓扑优化前，其质量为10.74 g，优化后为6.92 g；冷屏采用电铸工艺成型，其厚度为0.1 mm，质量比机加工冷屏（约2.57 g）减轻一半。
为了确保杜瓦内冷屏进行有效分光，且减小分光时滤光片支架的遮挡，确保集成化和微型化封装要求，采用单片三波段的集成化分波段镀膜的全新设计。具体设计要求如图3所示（尺寸单位：mm），滤光片镀膜区域A、B、C波段具体的通光范围见表1。
图 3 滤光片分区设计要求
Figure 3. Requirements of filter partition design
由于光谱仪探测目标信号较弱，需要较长的积分时间获取目标信息。火星矿物光谱仪的红外探测器积分时间典型值为40 ms，如果在圆形平面冷平台上直接胶结红外探测器，则容易在40 ms长积分时间时产生圆形状噪声斑，实际热噪声分布如图4所示。
图 4 集成式探测器杜瓦制冷机组件在40 ms积分时间下噪声分布图
Figure 4. Noise distribution of IDDCA with 40 ms integration time
考虑到天问一号卫星环绕器和着陆器在火星轨道分离，探测器组件需要承受1400 g的冲击，因而探测器耦合支撑的冷平台需进行轻量化和集成化设计。图5为探测器安装的冷平台结构设计图，中心区域采用应力隔离设计，有效消除制冷机周期性运动对探测器产生的热噪声。测量不同型号集成式制冷机形成热噪声斑直径，其大小约为冷指直径的0.83倍左右，且降低制冷机充气压力，噪声强度减弱，热噪声形成应该与冷平台受到的气缸内气体膨胀周期性压力相关。
图 5 噪声隔离冷平台结构示意图
Figure 5. Schematic diagram of cold platform with the noise isolation
图6为探测器粘接在新型冷平台上的噪声情况。冷平台通过钎焊与冷指密封连接，确保力学强度和可靠性。
图 6 噪声隔离设计结构的40 ms积分时间的探测器噪声分布图
Figure 6. Detector noise distribution with 40 ms integration time of noise isolation structure
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集成组件的制冷机采用整体式斯特林制冷机结构布局，旋转电机同时驱动一个压缩机和一个膨胀机，控制电路采用独立厚膜电路，电机、膨胀机、压缩机之间成正交位分布。制冷工质穿过压缩机与膨胀机之间的联通管道，在压缩机和膨胀机工作空间中交替压缩膨胀实现制冷。制冷工质选用高纯氦气。该制冷机主要由制冷机本体、电机、厚膜控制电路组成。制冷机根据航天应用要求进行优化设计，同时采用了特制的厚膜电路进行制冷控制。制冷组件结构如图7所示。
图 7 火星矿物光谱仪集成式探测器杜瓦制冷机组件结构示意图
Figure 7. Schematic diagram of IDDCA for the MMS
为适用空间应用的抗辐照需求，对制冷机控制电路进行特殊设计，电路采用多层厚膜工艺，金属全密双列直插封装方式，组装密度高、体积小、可靠性高。最终研制的厚膜电路的尺寸（不含法兰）为48 mm×45 mm×7 mm，质量为56 g。
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通过上述各关键组部件的研制，成功获得了性能良好红外焦平面制冷组件，其主要性能参数见表6。
表 6 短波集成式探测器杜瓦制冷机组件技术指标
Table 6. The specifications of short wave IDDCA
Main parameters Name Test results Main performance
of IDDCASpectral response range/μm 1.0-3.4 Total weight/g 711.2 Thermal loss 539 mW@80 K Power supply 24VDC & 12VDC Switchable operating temperatures/K 80/90/150 Temperature stability 0.2 K@30 min Cooldown time 12 min@90 K Temperature accuracy/K 0.3 Detector response characteristics Non-uniformity 4.8% Quantum efficiency 3.4 μm@50% 1.0 μm@16.5% Rate of blind pixels 0.55% Non-linearity 0.764% Detector readout mode Frame frequency/Hz 60.44 SNR 225@1.595 μm 按照火星探测任务的环境试验要求，红外焦平面探测器制冷组件完成了高低温存储、高低温循环及热真空等热学试验，完成了鉴定级正弦振动、随机振动、机械冲击及加速度等环境力学试验，试验结果表明探测器性能工作正常，杜瓦制冷组件性能正常。图8为红外制冷组件实物照片。
图 8 短波集成式制冷机杜瓦组件实物照片
Figure 8. Illustration of short wave IDDCA
从表6可以看出，制冷机在常温常压下开机，到达90 K设定温度的制冷时间为12 min，同时还对比了不同充气压力的制冷时间，从图9所示的降温曲线中可以看出，充气压力为42、32、25、20 bar时，从制冷启动到开始稳定控温时间分别为12、15、18.5、24 min。
图 9 集成式探测器杜瓦制冷机组件不同充气压力下降温时间曲线
Figure 9. The cooldown time curve of IDDCA under different fill pressures
图10为火星矿物光谱仪用红外探测器制冷杜瓦组件的光谱测试曲线和在光谱仪内红外成像照片。图像中提取天空、建筑物表面、植被的光谱曲线，其中，1.0~2.0 μm光谱分辨率10.30 nm，2.0~3.4 μm光谱分辨率12.90 nm。
图 10 红外探测器组件光谱曲线及成像照片
Figure 10. Spectral response curve and imaging photo of IDDCA
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集成式红外探测器制冷组件的结构紧凑、体积小、质量轻、功耗小，在深空探测、星际探测的航天应用中具有较大优势，其航天用组件工程研制应用具有重要意义。着重分析了高灵敏度、高信噪比的面阵探测器，长积分时间下抗噪声干扰的杜瓦结构，集成化长寿命整体式微型制冷等关键技术的设计与实现，并完成了一系列力学、热学的环境适应性验证。随着“天问一号”顺利发射升空并到达火星轨道，该研究为后续深空红外光谱探测的组件研制提供了一定的参考。
SWIR focal plane array cooled assembly of Tianwen-1 mineralogical spectrometer
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摘要: 根据“天问一号”火星矿物光谱仪短波红外探测组件小型化、轻量化、低功耗的需求，分析了红外探测器匹配性设计、集成式制冷机杜瓦适应性研制的难点。针对短波红外探测器高灵敏度、低温目标及多光谱探测需求的长积分时间模式的集成封装、抗大量级星器分离冲击等特点，提出了高信噪比探测器总体设计、具有噪声隔离和集成式冷平台结构设计、抗径向冲击的斜支撑结构设计等。解决了短波红外集成组件探测器低温下低热应力、长积分时间下干扰隔离、大量级力学加固、航天应用的高可靠性厚膜电路研制等关键技术。成功研制了短波碲镉汞探测器杜瓦制冷组件，并经过高低温循环、随机振动及机械冲击等严苛的空间环境热学力学适应性试验验证，试验前后组件性能未发生明显变化，满足火星矿物光谱仪工程化应用的要求。Abstract:
Objective Mars mineralogical spectrometer (MMS) is one of the scientific instruments for China's first Mars exploration mission. It is installed in the Mars exploration orbiter and performs spectral remote sensing detection of targets on the surface of Mars while in motion. The instrument has made breakthroughs in key technologies such as infrared background suppression, high efficiency spectroscopic structure, and on-device combined calibration. The characteristics of the instrument are light and small, low power consumption and high performance. The 512 pixel × 320 pixel short wave infrared (SWIR) integrated detector Dewar cooler assembly (IDDCA) is an important part of the MMS and is used for hyperspectral imaging. This paper analyzes the characteristics of the IDDCA in MMS, focuses on the development and technical difficulties of the infrared focal plane detector, integrated Dewar and integral rotary cooler, and also proposes approaches and methods to solve the technical problems. Methods The 512 pixel × 320 pixel SWIR focal plane arrays (FPAs) is made of mercury cadmium telluride epitaxial material, prepared by n-on-p planar junction technology, is integrated CTIA input readout circuit, using indium column flip chip welding interconnection to form an infrared focal plane device. The detection signal of the 512 pixel × 320 pixel IR FPA is integrated, stored, converted, and outputted by using the window mode. The FPA architecture provides temporal detection in the SWIR bands using the frame integration incorporated into the readout integrated circuit (ROIC). The mechanical support of the integrated Dewar cold platform is a high-strength single cantilever cold finger, and a radial impact-resistant oblique support structure design is adopted (Fig.2). For the infrared Dewar in the MMS, the following designs have been applied: 1) Lightweight and impact-resistant integrated package structure; 2) Spectroscopic spectrum inside the assembly; 3) Special-shaped cold platform. The miniaturized integral Stirling cooler is selected, and the cooler drive control board is designed with an independent thick-film circuit required by aerospace. Results and Discussions The overall technical requirements of the IDDCA for the MMS are shown (Tab.1). The results of the detector show that the signal to noise ratio (SNR) is 225 in the typical band of 1.595 μm. The thermal noise generated during the 40 ms long integration time of the detector is effectively eliminated by the integrated optimized cold platform (Fig.6). Moreover, the Dewar assembly is structurally sound after being subjected to random vibration of 14 grms (20-2000 Hz) and mechanical shock of 1400 g. The results of different fill pressure and cool down time of the cooler are shown (Fig.9). The actual installed product has the fill pressure of 42 mbar, which can ensure a long enough life from leakage to failure. Through the development of the above-mentioned key components, a good performance IDDCA was successfully obtained, and its main performance parameters are shown (Tab.6). The spectral test curve of the IDDCA for the MMS and the good infrared imaging effect in the spectrometer are shown (Fig.10). Conclusion The IDDCA has advantages in aerospace applications of deep space exploration and interplanetary exploration due to their compact structure, low size, weight and power (SWaP). The application of this component for spaceflight is of great significance. This paper focuses on the design and implementation of key technologies such as high sensitivity, high signal to noise ratio FPA, anti-noise Dewar structure with long integration times, integrated long-life integral cooler. A series of mechanical and thermal environmental tests have been completed for the IDDCA. It was successfully launched with Tianwen-1 and reached Mars orbit, providing a certain reference for China subsequent deep space infrared spectroscopy detection. -
Key words:
- infrared detector /
- IDDCA /
- shock /
- Mars mineralogical spectrometer (MMS) /
- Tianwen-1
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图 2 512×320短波红外探测器杜瓦组件结构设计图
Figure 2. Dewar structure design for 512×320 SWIR detector
图 4 集成式探测器杜瓦制冷机组件在40 ms积分时间下噪声分布图
Figure 4. Noise distribution of IDDCA with 40 ms integration time
图 5 噪声隔离冷平台结构示意图
Figure 5. Schematic diagram of cold platform with the noise isolation
图 6 噪声隔离设计结构的40 ms积分时间的探测器噪声分布图
Figure 6. Detector noise distribution with 40 ms integration time of noise isolation structure
图 9 集成式探测器杜瓦制冷机组件不同充气压力下降温时间曲线
Figure 9. The cooldown time curve of IDDCA under different fill pressures
表 1 火星矿物光谱仪集成式探测器杜瓦制冷机组件总体技术
Table 1. The characteristic of IDDCA for the MMS
Item Characteristics Remarks Detection bands From SWIR to MWIR
spectral detectionBroad spectrum spectroscopy 1000-3400 nm[7] Divided into A/B/C bands
Band A:
1-1.9 μm；
Band B:
1.4-2.7 μm；
Band C:
2.1-3.4 μmLow background noise 250e− Typical SNR 150 Operating temperature 80 K/90 K/150 K Three switchable operating temperatures SWaP Small size, low weight (IDDCA ≤ 800 g), low power consumption (stable power ≤ 12 W) Reliability test Thermal cycle test; thermal vacuum test; high temperature storage; low temperature storage; acceleration; 1400 g mechanical shock; sinusoidal and random vibration; open/close loop and life; electromagnetic compatibility (EMC) etc. Full test 
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表 2 火星矿物光谱仪系统光学主要参数
Table 2. The main optical parameters of the MMS
Item Specifications Item Specifications Optical F/# (fn) 2.87 Typical wavelength/μm 1.595/1.0/3.4 Unit cells (a1×a1)/μm2 25×25 Grating transmittance (ηg) 0.3173/0.0814/
0.4418Spectral
resolution (λw)/nm20 Solar irradiance (L)/W·m−2·μm−1 258.30/751/
16.59Surface albedo (Re) 0.15 Lens efficiency (η0) 0.9 Solar altitude
angle (Ah)0.707 Integration time (Tint1)/s 0.02
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表 3 火星光谱仪短波红外探测器技术参数
Table 3. The SWIR detector parameters in the MMS
Item Parameters Test results IDDCA performance Spectral response range/μm 1.0-3.4 Detector response characteristics Non-uniformity 4.8% Quantum efficiency 3.4 μm@50% 1.0 μm@16.5% Rate of blind pixels 0.55% Detector readout mode Non-linearity 0.764% Output saturation voltage/V 2.225 Frame frequency/Hz 60.44 IDDCA SNR 225@1.595 μm
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表 4 杜瓦内冷指顶部的零部件及其质量
Table 4. Components and their mass at the top of cold finger in Dewar
Part name Material Density/kg·m−3 Mass/g Cold platform 4J36 8100 6.92 infrared detector MCT 5.76 0.43 Silicon circuit Si 2330 0.39 Substrate Al2O3 4020 0.62 Filter holder 4J29 8350 2.53 Filter Al2O3 4020 1.00 Cold shield Ni/Co 8908 1.29 Total 13.18
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表 6 短波集成式探测器杜瓦制冷机组件技术指标
Table 6. The specifications of short wave IDDCA
Main parameters Name Test results Main performance
of IDDCASpectral response range/μm 1.0-3.4 Total weight/g 711.2 Thermal loss 539 mW@80 K Power supply 24VDC & 12VDC Switchable operating temperatures/K 80/90/150 Temperature stability 0.2 K@30 min Cooldown time 12 min@90 K Temperature accuracy/K 0.3 Detector response characteristics Non-uniformity 4.8% Quantum efficiency 3.4 μm@50% 1.0 μm@16.5% Rate of blind pixels 0.55% Non-linearity 0.764% Detector readout mode Frame frequency/Hz 60.44 SNR 225@1.595 μm
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