-
金刚石是一种独特的材料,能在多种极端环境满足应用要求,如表1所示。它在室温下具有极高的导热系数、硬度[1]、声波速度和载流子迁移率[2]。金刚石在可见光谱范围内表现出高度的透明性,使其能被广泛应用于光学窗口[3]。同时,它还是优良的绝缘体,在进行硼元素掺杂后也可以作为高质量的p型半导体。此外,它还具有独特的辐照稳定性、化学惰性、生物相容性和许多其他重要特性,这决定了金刚石材料的诸多应用。
金刚石集多种优秀的性能于一身,使其成为世界上最理想的材料之一,但同时它也被称之为“最难加工”的材料,因为目前传统工艺下不存在能够同时满足加工精度和加工效率的有效加工方法。随着近年来化学气相沉积(Chemical Vapor Deposition, CVD)技术的快速发展,在推动人工培育钻石成本的迅速降低,促进CVD金刚石的广泛应用的同时,也对金刚石的精细加工也提出了迫切需求。
表 1 金刚石的性质和应用
Table 1. Properties and applications of diamond
Property Value Application Bandgap/eV 5.4 High-temperature electronics Carrier mobility/(cm2·V−1·s−1) Holes 3 800; electrons 4 500 Radiation-hard detectors Optoelectronic switches Resistivity/Ω·cm 1013-1015 Thermal conductivity
/(W·m−1·K−1)2 000-2 400 Heat sinks Dielectric constant 5.7 Optical transmission range 225 nm- radio frequency Photonics and MW devices Hardness/GPa (81±18) Tools, surgery blades Acoustic wave velocity/(km·s−1) 18.4 along <100> Surface acoustic wave devices Thermal expansion coefficient
/(10−6 ·K−1)0.8(293 K) Photonics and MW devices Corrosion resistance Stable in HF Electrochemistry Negative electron affinity Electron emitters Biocompatibility Biomedicine 针对金刚石的加工,目前研究人员已经应用了多种加工方法,包括电火花加工[4],磨料水射流加工[5-6],机械加工[7-8]以及激光加工[9]等。在这些方法中,激光加工加工成本低,可重复性好,是一种高效可控的加工金刚石的方法[10]。早在20世纪60年代初就有关于激光加工金刚石的报道。目前在金刚石材料的激光加工研究中,主要用到的激光类型如表2所示。其脉冲频率大多在0.1 Hz~100 kHz之间,最短的脉宽为飞秒尺度。在实际加工过程中通过选择合适的激光波长、脉宽和功率等参数可以进行金刚石的高质量及特殊形状加工,其加工精度可以达到微米级别甚至纳米尺度[11−13]。
表 2 用于金刚石加工的激光种类
Table 2. Types of laser used in diamond processing
Type Nd:YAG Ti:Al2O3 Cu Ar+ KrF ArF CO2 Wavelength/nm 1 064 532 800 510.5 488 248 193 10 600 Energy/eV 1.17 2.33 1.55 2.42 2.54 5.0 6.42 0.12 Mode Pulse/continuous Pulse Pulse Continuous Pulse Pulse Pulse 针对金刚石难加工、难成型的特点,结合激光先进加工技术,文中综述了金刚石激光加工机理,对比不同类型的激光加工效果,同时对激光在金刚石切割、打孔、微槽道成型、激光平整化、激光剥离等方面的应用研究进行总结,介绍了新型的激光加工技术,对金刚石激光加工技术未来的研究方向提出了设想。
-
近年来,为了满足金刚石等透明硬质材料的加工需求,研究人员基于传统激光加工方法开发了各种混合激光加工技术。包括混合激光加工方法、水导激光加工及水助激光加工等。
-
当前的激光加工方法大多以单一脉宽形式进行,其存在由激光本征特点决定的各种限制。例如,纳秒、微秒激光加工效率高,但易产生热影响区,易导致材料内部开裂等情况;皮秒与飞秒激光虽能减少热影响区的形成,但其加工效率存在较大限制,难以进行高效加工。单一脉冲的激光加工方法难以达到加工需求,多激光混合加工模式可能有更好效果。Dinesh Kalyanasundaram[88]等设计了CO2激光/水导激光的混合激光加工装置,如图24所示,利用CO2激光进行局部加热;水导激光对加热区进行快速淬火,从而完成聚晶金刚石板材的切割,试验结果表明CO2激光/水导激光混合的激光加工方法能以高于其他切割技术的速度完成高效加工。Malshe A P[89]等在专利中提到采用两种或两种以上波长的激光来对金刚石膜表面进行抛光,即先用Nd:YAG激光或红外光处理材料表面,使材料表面微结构破坏,然后再用波长为193 nm的激光处理结构破坏后的金刚石膜表面,其加工效果相较于单独的YAG激光处理更为理想。
混合激光的加工方式能结合不同类型激光的优势,但通常装置比较复杂,对加工样品限制性较大。对于有特殊需求的高端应用而言仍是未来发展的重要方向。
-
水导激光加工是一种由微细水射流引导激光进行加工的技术。当激光以一定入射角从较高折射率的水射向空气时,会发生全反射。与干式激光切割相比,使用水导激光加工时大部分能量消耗在水中而不是材料中。水射流冷却切割边缘,有效减少了热影响区和热残余应力,防止材料内部的热损伤。这样的加工模式既通过水射流将激光传输至加工表面又带走了多余的热量与残渣。同时,由于激光被限制在水束内从而延伸了激光的焦点,提高轴向加工的加工效率。因此,水导激光对金刚石材料的微结构具有较好的加工特性。
近年来,国内外学者采用水导激光对金刚石类透明硬脆的难加工材料开展了较为深入的研究。石广丰[90]等对比了激光和水导激光对天然金刚石大的加工效果,在加工后的金刚石表面均能观察到一层较薄的碳同素异构体,但水导激光加工的表面仅存在一薄层石墨结构,且产生的产于应力小,微裂纹较少。A. Richmann[91]使用水导激光切割厚达3 mm的蓝宝石,实现了平行壁粗糙度小于0.5 μm,切口宽度小于100 μm的高质量加工。其加工边缘质量高,曲率半径小于20 μm,且无任何切屑。Qiao Hongchao[92]使用水导激光对单晶硅进行微结构加工,切割最高纵横比高达12.7,且很少出现局部断边。
水导激光对金刚石加工有很好的适用性,但仍存在一些技术难点:更细的稳定水射流和水中激光功率的衰减是两个主要问题,此外水导激光打深孔也是一个难点。由于市场竞争和保密方面等问题,很少有关于此方面的文献报道,尤其针对金刚石等超硬材料的水导激光加工的报道更为少见。
-
水助激光与水导激光加工存在明显的差异性,水助激光的关键是通过水的冷却作用,减少激光加工过程中产生的热量。
M. Silvennoinen[93]等基于红外飞秒激光对比了有无水辅助条件下的激光打孔和凹槽烧蚀效果,如图25所示。实验结果表明水助激光加工能更有效的进行孔烧蚀,同时烧蚀孔及周边区域无碎片,保证了烧蚀质量。在水助激光加工过程中,激光束受碎片和悬浮在水中的气泡的影响而散射,同时水层的不连续性和不稳定性均会恶化加工效果。为此,Tangwarodomnukun[94-95]等提出在薄而流动的水层中进行激光烧蚀。国内研究人员基于此基本原理,提出在脉冲激光加工中引入水喷雾从而形成超薄高速流动水膜,并将其应用于金刚石涂层刀具成功制备了微槽阵列(80 μm宽槽阵列)和两种复合微结构(亚毫米尺度结构和8 μm宽槽阵列)。加工过程并没有出现再沉积和涂层脱落等现象[96]。
虽然,液相激光烧蚀技术具有隔绝空气、减少热影响区、减少碎屑堆积等优势,但是液体层吸收会导致激光能量的较大损失。另外,液体层厚度难以精确控制造成结构表面质量均匀性较差。
表3总结了金刚石不同激光加工类型的加工效果,根据加工类型进行分类,一并总结了加工所使用的激光类型及工作亮点。
表 3 激光加工金刚石不同加工类型研究进展
Table 3. Research progress of different processing types of laser processing diamond
Processing type Laser type Highlight Processing result Reference Cutting 193 nm;25 ns Argon gas is injected to change the processing atmosphere Avoid plasma heat damage [64] Cutting 1.06 μm;100 μs The optimum process parameters were determined by orthogonal experiment Section roughness: Ra=0.65 μm; Slit width: 173.1 μm; Taper: 5.9° [66] Drilling 532 nm;20 ns Low taper, high aspect ratio structure Maximum aspect ratio: 66:1; Minimum taper: 0.1°(aspect ratio 10:1) [69] Drilling 1030 nm;230 fs Effect of laser parameters on micropore geometry Micropore no debris, no heat damage [67] Microchannel 800 nm;120 fs Combined with the experiment and simulation, the micro-channel "cold" machining is realized Interface side taper <3°
no residue, crack, edge breakage and other defects on the surface[26] Microchannel 800 nm;100 fs The diamond microstructure array constitutes the X-ray source array anode Microstructure groove width: 20 μm; Groove depth: 45 μm [74] Microchannel 1060 nm;200 ns Microslot linear repeat two scans The bottom of the microgroove is wide and flat [42] Microchannel 800 nm;120 fs Laser induced formation of nanoscale linear grooves Slot width: 40 nm; the groove depth is 500 nm;
Length: 0.3 mm; Average spacing: (146±7) nm[78] Planarization 355 nm;25 ns Laser polishing is directly used in optical device manufacturing Roughness Ra= 8.02 nm (20× 20 μm2); The light transmittance reaches 47.1% [79] Planarization 1.06 μm;100 μs High efficiency flat rough diamond surface Surface roughness Sa= 1.9 μm; material removal rate 1.1mm3/min [9] Separation 800 nm;50 fs The laser forms a non-diamond phase on the subsurface Electrochemical stripping is achieved after epitaxial thickening [87] Hybrid laser CO2 laser/water guided laser The CO2 laser is processed and the water guided laser is used to quench the heating zone Cut sheets faster [88] Water guided laser ------ The waterway extends the laser focus and improves the axial processing efficiency With a carbon layer formed only on the surface, stress is reduced [90] Water-assisted laser 790 nm;120 fs Water mist assisted infrared laser ablation No self-organizing structure is generated [93] Water-assisted laser 532 nm;652 ps CVD diamond-coated tools are used to process cross-scale microstructures The precise microslot array and two composite microstructures were prepared [96]
Research and application progress of laser technology in diamond processing
-
摘要: 激光加工是目前金刚石的主流加工方法,相较于传统的机械加工形式,激光加工精度高、效率高、普适性强,因而在金刚石切割、微孔成型、微槽道加工及平整化等方面均得到广泛应用。文中阐述了金刚石激光加工原理,介绍了不同类型激光与金刚石材料相互作用机制,重点总结了近几年多种激光加工金刚石模式的发展现状,分析了新型的激光加工方法的特点,探讨了现阶段激光技术在金刚石加工领域面临的问题、挑战及未来的发展趋势。Abstract:
Significance As an efficient non-contact processing method, laser processing is an ideal processing method for super-hard brittle materials such as diamond. The high-energy laser ablation of diamond greatly improves the processing efficiency of diamond, and the ultra-fast laser processing of diamond ensures the processing accuracy to the greatest extent. At present, laser is widely used in diamond cutting, lapping, micro-grooves and other aspects. Clear diamond laser interaction mechanism and processing control mechanism for laser processing diamond industrial investment laid a foundation. Due to the limitations of traditional machining methods, laser processing methods at home and abroad are the focus of research and development technology. It is foreseeable that laser processing in the field of diamond processing will have a larger proportion, which is of great significance for the back-end application and assembly of diamond. Progress Firstly, the laser generation mode and laser processing mechanism are introduced, including laser generation and main characteristics, how the diamond absorbs laser energy, and the changes of diamond properties and surface morphology caused by the laser. At present, the main research is nanosecond laser and femtosecond laser, which are currently two typical types of laser used for diamond processing, according to the laser wavelength division commonly used a green laser (532 nm), near infrared laser (1064 nm) and ultraviolet laser. Pulsed laser is the focus of current research, for diamond processing, short wavelength and small pulse duration processing quality is higher, while longer pulse duration pulsed laser processing efficiency is higher. With the development of technology, laser processing systems in various countries are developing in a more compatible direction, that is, to achieve good processing quality and high removal efficiency at the same time. Countries have successfully carried out a number of technical studies in the field of laser diamond processing, which has been widely used in production. According to the investigation and development, the pulse width length of the laser has a decisive impact on the processing effect. For the different processing types of diamond, the multi-method joint processing method is currently used to meet the specific requirements of various tasks. For the actual processing needs of diamond, mainly including laser cutting, laser drilling, laser micro-grooves and lapping and other related fields. According to different processing types, the development status and technical highlights of laser diamond processing in recent years are summarized (Tab. 4). Through comprehensive investigation, the future development trend and common technical means of laser diamond processing are revealed. Laser diamond processing is one of the current mainstream processing methods, and compared with traditional machining methods, laser processing technology can achieve automation, low-cost, high-precision, and can obtain more accurate processing effects. At the end of this paper, the application prospect of laser diamond processing is prospected in order to provide reference for the development and research of domestic super-hard material processing technology. Conclusions and Prospects The field of laser diamond processing is still booming. At the same time, diamond processing needs are complex and diverse. For different processing types and application requirements, the type of laser used, the mode of processing operation and the selection of processing parameters need to be analyzed in detail according to each case. The research progress of laser diamond processing industry in recent years is summarized in order to provide some reference for the design and optimization of laser diamond processing in the future. Laser processing technology will also be more mature to meet a variety of processing needs, and gradually to high efficiency, high precision, low damage, highly integrated and production automation. In the foreseeable future, the application prospect of laser processing diamond will be more and more broad. -
Key words:
- diamond /
- laser processing /
- laser cutting /
- microporous forming /
- microchannel /
- laser flattening
-
图 7 800 nm飞秒激光辐照金刚石表面扫描电镜图片。(a)于3000脉冲激光能量密度1.9 J/cm2形成的170 nm周期性结构;(b)于8000脉冲激光能量密度2.8 J/cm2形成的190 nm周期性结构[36]
Figure 7. Scanning electron microscope images of diamond surface irradiated by 800 nm femtosecond laser. (a) 170 nm periodic structure formed at 3000 pulse laser energy density of 1.9 J/cm2; (b) 190 nm periodic structure formed at 8000 pulse laser energy density of 2.8 J/cm2 [36]
图 10 不同加工方式得到PCD复合材料的聚焦离子束(Focused ions beam, FIB)截面图。(a)研磨;(b)电火花加工;(c)脉宽10 ps激光;(d) 脉宽125 ns激光;(e) 脉宽450 μs激光
Figure 10. FIB cross sections of PCD composites obtained by: (a) Lapping; (b) Wire EDM; (c) Laser when pulse width =10 ps; (d) Laser when pulse width =125 ns; (e) Laser when pulse width =450 μs
图 15 200 fs激光加工单晶金刚石表面扫描电镜图。(a)激光脉冲能量为1.2 mJ加工的弯曲结构;(b)激光脉冲能量为840 nJ时的加工表面图像;(c)图(b)的放大图像[59]
Figure 15. Scanning electron microscope images of single crystal diamond surface processed by 200 fs laser. (a) Curved structure processed by laser pulse energy of 1.2 mJ; (b) The machined surface image when the laser pulse energy is 840 nJ; (c) An enlarged image of figure (b)[59]
表 1 金刚石的性质和应用
Table 1. Properties and applications of diamond
Property Value Application Bandgap/eV 5.4 High-temperature electronics Carrier mobility/(cm2·V−1·s−1) Holes 3 800; electrons 4 500 Radiation-hard detectors Optoelectronic switches Resistivity/Ω·cm 1013-1015 Thermal conductivity
/(W·m−1·K−1)2 000-2 400 Heat sinks Dielectric constant 5.7 Optical transmission range 225 nm- radio frequency Photonics and MW devices Hardness/GPa (81±18) Tools, surgery blades Acoustic wave velocity/(km·s−1) 18.4 along <100> Surface acoustic wave devices Thermal expansion coefficient
/(10−6 ·K−1)0.8(293 K) Photonics and MW devices Corrosion resistance Stable in HF Electrochemistry Negative electron affinity Electron emitters Biocompatibility Biomedicine 表 2 用于金刚石加工的激光种类
Table 2. Types of laser used in diamond processing
Type Nd:YAG Ti:Al2O3 Cu Ar+ KrF ArF CO2 Wavelength/nm 1 064 532 800 510.5 488 248 193 10 600 Energy/eV 1.17 2.33 1.55 2.42 2.54 5.0 6.42 0.12 Mode Pulse/continuous Pulse Pulse Continuous Pulse Pulse Pulse 表 3 激光加工金刚石不同加工类型研究进展
Table 3. Research progress of different processing types of laser processing diamond
Processing type Laser type Highlight Processing result Reference Cutting 193 nm;25 ns Argon gas is injected to change the processing atmosphere Avoid plasma heat damage [64] Cutting 1.06 μm;100 μs The optimum process parameters were determined by orthogonal experiment Section roughness: Ra=0.65 μm; Slit width: 173.1 μm; Taper: 5.9° [66] Drilling 532 nm;20 ns Low taper, high aspect ratio structure Maximum aspect ratio: 66:1; Minimum taper: 0.1°(aspect ratio 10:1) [69] Drilling 1030 nm;230 fs Effect of laser parameters on micropore geometry Micropore no debris, no heat damage [67] Microchannel 800 nm;120 fs Combined with the experiment and simulation, the micro-channel "cold" machining is realized Interface side taper <3°
no residue, crack, edge breakage and other defects on the surface[26] Microchannel 800 nm;100 fs The diamond microstructure array constitutes the X-ray source array anode Microstructure groove width: 20 μm; Groove depth: 45 μm [74] Microchannel 1060 nm;200 ns Microslot linear repeat two scans The bottom of the microgroove is wide and flat [42] Microchannel 800 nm;120 fs Laser induced formation of nanoscale linear grooves Slot width: 40 nm; the groove depth is 500 nm;
Length: 0.3 mm; Average spacing: (146±7) nm[78] Planarization 355 nm;25 ns Laser polishing is directly used in optical device manufacturing Roughness Ra= 8.02 nm (20× 20 μm2); The light transmittance reaches 47.1% [79] Planarization 1.06 μm;100 μs High efficiency flat rough diamond surface Surface roughness Sa= 1.9 μm; material removal rate 1.1mm3/min [9] Separation 800 nm;50 fs The laser forms a non-diamond phase on the subsurface Electrochemical stripping is achieved after epitaxial thickening [87] Hybrid laser CO2 laser/water guided laser The CO2 laser is processed and the water guided laser is used to quench the heating zone Cut sheets faster [88] Water guided laser ------ The waterway extends the laser focus and improves the axial processing efficiency With a carbon layer formed only on the surface, stress is reduced [90] Water-assisted laser 790 nm;120 fs Water mist assisted infrared laser ablation No self-organizing structure is generated [93] Water-assisted laser 532 nm;652 ps CVD diamond-coated tools are used to process cross-scale microstructures The precise microslot array and two composite microstructures were prepared [96] -
[1] Guo Jiang, Zhang Jianguo, Pan Yanan, et al. A critical review on the chemical wear and wear suppression of diamond tools in diamond cutting of ferrous metals [J]. International Journal of Extreme Manufacturing, 2020, 2(1): 1-24. [2] 袁明文 . 金刚石电子器件的研究进展 [J]. 微纳电子技术,2012 ,49 (10 ):643 -649 . Yuan Mingwen. Research Progress of Diamond Based Electronic Devices [J]. Micronanoelectronic Technology, 2012, 49(10): 643-649. (in Chinese)[3] Kiss Marcell, Mi Sichen, Huszka Gergely, et al. Diamond diffractive optics—recent progress and perspectives [J]. Advanced Optical Technologies, 2021, 10(1): 19-30. doi: 10.1515/aot-2020-0052 [4] Wang D, Zhao W S, Gu L, et al. A study on micro-hole machining of polycrystalline diamond by micro-electrical discharge machining [J]. Journal of Materials Processing Technology, 2011, 211(1): 3-11. doi: 10.1016/j.jmatprotec.2010.07.034 [5] Axinte D A, Srinivasu D S, Kong M C, et al. Abrasive waterjet cutting of polycrystalline diamond: A preliminary investigation [J]. International Journal of Machine Tools and Manufacture, 2009, 49(10): 797-803. doi: 10.1016/j.ijmachtools.2009.04.003 [6] Subramani K, Vasudevan A, Karthik K, et al. Insights of abrasive water jet polishing process characteristics and its advancements [J]. Materials Today: Proceedings, 2022, 52: 1113-1120. doi: 10.1016/j.matpr.2021.11.005 [7] 郭世斌, 曲杨, 吕反修, 等 . 大面积金刚石自支撑膜机械抛光的优化工艺研究 [J]. 功能材料,2007 (07 ):1173 -1175 . Guo Shibin, Qu Yang, Lv Fanxiu, et al. The study on the optimizational technology of the large area free-standing diamond films’ mechanical polishing [J]. Journal of Functional Materials, 2007(07): 1173-1175. (in Chinese)[8] Zheng Yuting, Cumont A E L, Bai Mingjie, et al. Smoothing of single crystal diamond by high-speed three-dimensional dynamic friction polishing: Optimization and surface bonds evolution mechanism[J]. International Journal of Refractory Metals and Hard Materials, 2021, 96: 105472. [9] 李世谕, 安康, 邵思武, 等 . CVD金刚石膜激光平整化效率和粗糙度 [J]. 金刚石与磨料磨具工程,2022 ,42 (01 ):61 -68 . Li Shiyu, An Kang, Shao Siwu, et al. Laser planarization efficiency and roughness of CVD diamond film [J]. Diamond & Abrasives Engineering, 2022, 42(1): 61-68.[10] Ohfuji H, Okuchi T, Odake S, et al. Micro-/nanostructural investigation of laser-cut surfaces of single- and polycrystalline diamonds [J]. Diamond and Related Materials, 2010, 19(7-9): 1040-1051. doi: 10.1016/j.diamond.2010.02.015 [11] Jiang Tong, Gao Si, Tian Zhennan, et al. Fabrication of diamond ultra-fine structures by femtosecond laser [J]. Chinese Optics Letters , 2020, 18(10): 38-42. doi: 10.3788/COL202018.101402 [12] Yang Liangliang, Wei Jiangtao, Ma Zhe, et al. The fabrication of micro/nano structures by laser machining [J]. Nanomaterials (Basel), 2019, 9(12): 1789. doi: 10.3390/nano9121789 [13] Konov V I. Laser in micro and nanoprocessing of diamond materials [J]. Laser & Photonics Reviews, 2012, 6(6): 739-766. [14] 卢康, 许竞翔, 孙强, 等. 金刚石材料石墨化相变诱导机制研究进展[J]. 中国材料进展, 2022, 41(07): 536-546. doi: 10.7502/j.issn.1674-3962.202012028 Lu Kang, Xu Jingxiang, Sun Qiang, et al Research Progress on lnduction Mechanism of Graphitization Phase Transition of Diamond Materials[J]. Materials China , 2022, 41(07): 536-546. (in Chinese) doi: 10.7502/j.issn.1674-3962.202012028 [15] 周炳琨. 激光原理[M]. 第6版. 北京: 国防工业出版社, 2009. [16] 崔涵. 无序光纤结构中激光脉冲的产生及优化 [D]; 电子科技大学, 2020. Cui Han. Generation optimization of laser pulse in disordered fiber structure[D]. Chengdu: University of Electronic Science and Technology of China, 2020. [17] 任彦宇. 窄线宽激光器及其在Φ-OTDR中的应用研究 [D]; 太原理工大学, 2022. Ren Yanyu. Narrow line-width laser and application study in phase sensitive optical time domain reflectometer[D]. Taiyuan: Taiyuan University of Technology, 2022. [18] 杜雯. 固体激光器中激光介质热传导方程的解析研究 [D]; 西安工业大学, 2023. Du Wen. Analytical study of laser medium heat conduction-equation in solid-state[D]. Xi’an: Xi'an Technological University, 2023. [19] Korneychuk S, Guzzinati G, Verbeeck J. Measurement of the indirect band gap of diamond with EELS in STEM[J]. Physica Status Solidi(A), 2018, 215(22): 1800318. [20] Granger M C, Witek M, Xu J, et al. Standard electrochemical behavior of high-quality, boron-doped polycrystalline diamond thin-film electrodes [J]. Anal Chem, 2000, 72(16): 3793-3804. doi: 10.1021/ac0000675 [21] Hermani J-P, Brecher C, Emonts M. Nanosecond laser processing of diamond materials[C]//Lasers in Manufacturing Conference 2015, 2015. [22] 姜玺阳, 王飞飞, 周伟, 等 飞秒激光与材料相互作用中的超快动力学 [J]. 中国激光, 2022, 49(22): 2200001. doi: 10.3788/CJL202249.2200001 Jiang Xiyang, Wang Feifei, Zhou Wei, et al. Ultrafast Dynamics of Femtosecond Laser Interaction with Materials[J]. Chinese Journal of Lasers , 2022, 49(22): 2200001. (in Chinese) doi: 10.3788/CJL202249.2200001 [23] 王海航, 马玉平, 武晓龙, 等 . 金刚石涂层激光抛光机理及加工工艺研究进展 [J]. 材料保护,2021 ,54 (06 ):136 -146 . Wang Haihang, Ma Yuping, Wuxiaolong, et al. Research progress on laser polishing mechanism and processing technology of diamond coating[J]. Materials Protection, 2021, 54(6): 136-146. (in Chinese)[24] 熊彪, 陈根余, 殷赳, 等 . 飞秒激光加工单晶金刚石锥形阵列的试验研究 [J]. 应用激光,2018 ,38 (02 ):270 -277 . Xiong Biao, Chen Genyu, Yin Jiu, et al. Experimental research on conical array of single crystal diamond based on femtosecond laser [J]. Applied Laser, 2018, 38(2): 270-277. (in Chinese)[25] Komlenok M S, Kononenko V V, Ralchenko V G, et al. Laser induced nanoablation of diamond materials[J]. Physics Procedia, 2011, 12: 37-45. doi: 10.1016/j.phpro.2011.03.103 [26] 姜海涛,崔健磊,殷东平等 . 雷达功率组件的金刚石微通道热沉激光加工工艺 [J]. 中国机械工程,2022 , 32(03 ):261 -268 . Jiang Haitao, Cui Jianlei, Yin Dongping, et al. Femtosecond laser processing technology of diamond micro-channel heat sink based on radar power module[J]. China Mechanical Engineering, 2022, 32(3): 261-268. (in Chinese)[27] 闫雄伯. CVD金刚石自支撑膜的高温石墨化行为研究 [D]; 北京科技大学, 2019. Yan Xiongbo. Graphitization behavior of CVD free-standing diamond films at high temperature [D]. Beijing: University of Science and Technology Beijing, 2019. (in Chinese) [28] Smedley J, Bohon J, Wu Q, et al. Laser patterning of diamond. Part I. Characterization of surface morphology [J]. Journal of Applied Physics , 2009, 105(12): 123107. doi: 10.1063/1.3152956 [29] Kononenko T V, Pivovarov P A, Khomich A A, et al. Effect of absorbing coating on ablation of diamond by IR laser pulses [J]. Quantum Electronics, 2018, 48(3): 244-250. doi: 10.1070/QEL16567 [30] Kononenko T V, Meier M, Komlenok M S, et al. Microstructuring of diamond bulk by IR femtosecond laser pulses [J]. Applied Physics A, 2007, 90(4): 645-651. [31] Kononenko T V, Pivovarov P A, Khomich A A, et al. Processing of polycrystalline diamond surface by IR laser pulses without interior damage [J]. Optics & Laser Technology, 2019, 117: 87-93. [32] Liu Yan, Chen Gengxu, Song Min, et al. Fabrication of nitrogen vacancy color centers by femtosecond pulse laser illumination [J]. Opt Express, 2013, 21(10): 12843-12848. doi: 10.1364/OE.21.012843 [33] Kononenko V V, Vlasov I I, Gololobov V M, et al. Nitrogen-vacancy defects in diamond produced by femtosecond laser nanoablation technique [J]. Applied Physics Letters, 2017, 111(8): 081101. [34] Dumitru G, Romano V, Weber H P, et al. Femtosecond ablation of ultrahard materials [J]. Applied Physics A: Materials Science & Processing, 2002, 74(6): 729-739. [35] Forster M, Huber C, Armbruster O, et al. 50-nanometer femtosecond pulse laser induced periodic surface structures on nitrogen-doped diamond [J]. Diamond and Related Materials, 2017, 74: 114-118. doi: 10.1016/j.diamond.2017.02.016 [36] Huang Min, Zhao Fuli, Cheng Ya, et al. Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond [J]. Physical Review B, 2009, 79(12): 125436. [37] Mastellone M, Bellucci A, Girolami M, et al. Deep-Subwavelength 2D periodic surface nanostructures on diamond by double-pulse femtosecond laser irradiation[J]. Nano Lett, 2021, 21(10): 4477-4483. doi: 10.1021/acs.nanolett.1c01310 [38] 江海河 . 激光加工技术应用的发展及展望 [J]. 光电子技术与信息,2001 (04 ):1 -12 . Jiang Haihe. Development and forecast of the laser processing technology application [J]. Journal of Atmospheric and Environmental, 2001(4): 1-12. (in Chinese)[39] Chichkov B N, Momma C, Nolte S, et al. Femtosecond, picosecond and nanosecond laser ablation of solids [J]. Applied Physics A, 1996, 63(2): 109-115. doi: 10.1007/BF01567637 [40] 张少军, 郭智, 成加皿, 等. 高重频硬X射线自由电子激光脉冲到达时间诊断方法研究 [J]. 物理学报, 2023, 72(10): 262-272. Zhang Shaojun, Guo Zhi, Cheng Jiamin, et al. Arrival time diagnosis method of high refrequency hard X-ray free electron laser[J]. Acta Physica Sinica, 2023, 72(10): 262-272. (in Chinese) [41] Qi Zhina, Zheng Yuting, Zhu Xiaohua, et al. An ultra-thick all-diamond microchannel heat sink for single-phase heat transmission efficiency enhancement[J]. Vacuum, 2020, 177: 1-7. [42] Okamoto Yasuhiro, Okubo Tubas, Kajitani Atsuya, et al. High-quality micro-shape fabrication of monocrystalline diamond by nanosecond pulsed laser and acid cleaning [J]. International Journal of Extreme Manufacturing, 2022, 4(2): 025301. doi: 10.1088/2631-7990/ac5a6a [43] Eberle G, Jefimovs K, Wegener K. Characterisation of thermal influences after laser processing polycrystalline diamond composites using long to ultrashort pulse durations [J]. Precision Engineering, 2015, 39: 16-24. doi: 10.1016/j.precisioneng.2014.06.008 [44] Mao Bo, Siddaiah Arpith, Liao Yiliang, et al. Laser surface texturing and related techniques for enhancing tribological performance of engineering materials: A review [J]. Journal of Manufacturing Processes, 2020, 53: 153-173. doi: 10.1016/j.jmapro.2020.02.009 [45] Zhang Zhen, Zhang Quanli, Wang Yeqing, et al. Modeling of the temperature field in nanosecond pulsed laser ablation of single crystalline diamond [J]. Diamond and Related Materials, 2021, 116: 108402. [46] Takayama N, Yan J. Mechanisms of micro-groove formation on single-crystal diamond by a nanosecond pulsed laser[J]. Journal of Materials Processing Technology, 2017, 243: 299-311. doi: 10.1016/j.jmatprotec.2016.12.032 [47] Cadot G B J, Thomas K, Best J P, et al. Investigation of the microstructure change due to phase transition in nanosecond pulsed laser processing of diamond [J]. Carbon, 2018, 127: 349-365. doi: 10.1016/j.carbon.2017.10.030 [48] Kononenko T V, Kononenko V V, Pimenov S M, et al. Effects of pulse duration in laser processing of diamond-like carbon films [J]. Diamond and Related Materials, 2005, 14(8): 1368-1376. doi: 10.1016/j.diamond.2005.02.009 [49] 温秋玲, 韦新宇, 王华禄, 等 . 皮秒激光加工CVD单晶金刚石的特征和机理研究[J]. 光子学报,2021 ,50 (6 ):126 -136 . doi: 10.3788/gzxb20215006.0650113 Wen Qiuling, Wei Xinyu, Wang Hualu, et al. Characteristics and mechanism of CVD single crystal diamond processed by picosecond laser[J]. Acta Photonica Sinica, 2021, 50(6): 126-136. (in Chinese) doi: 10.3788/gzxb20215006.0650113[50] Takayama N, Ishizuka J, Yan J. Microgrooving of a single-crystal diamond tool using a picosecond pulsed laser and some cutting tests [J]. Precision Engineering, 2018, 53: 252-262. doi: 10.1016/j.precisioneng.2018.04.009 [51] Pimenov S M, Khomich A A, Neuenschwander B, et al. Picosecond-laser bulk modification induced enhancement of nitrogen-vacancy luminescence in diamond[J]. Journal of the Optical Society of America B, 2016, 33(3): B49-B55. [52] Pimenov S M, Neuenschwander B, Jäggi B, et al. Effect of crystal orientation on picosecond-laser bulk microstructuring and Raman lasing in diamond[J]. Applied Physics A, 2013, 114(4): 1309-1319. [53] Pimenov S M, Vlasov I I, Khomich A A, et al. Picosecond-laser-induced structural modifications in the bulk of single-crystal diamond [J]. Applied Physics A, 2011, 105(3): 673-637. doi: 10.1007/s00339-011-6645-0 [54] Fork R L, Greene B I, Shank C V. Generation of optical pulses shorter than 0.1 psec by colliding pulse mode locking [J]. Applied Physics Letters, 1981, 38(9): 671-672. doi: 10.1063/1.92500 [55] Schaffer C B, Brodeur A, Mazur E. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses[J]. Meas Sci Technol, 2001, 12(11): 1784-1794. doi: 10.1088/0957-0233/12/11/305 [56] Gattass R R, Mazur E. Femtosecond laser micromachining in transparent materials [J]. Nature Photonics, 2008, 2(4): 219-225. doi: 10.1038/nphoton.2008.47 [57] Glezer E N, Milosavljevic M, Huang L, et al. Three-dimensional optical storage inside transparent materials [J]. Opt Lett, 1996, 21(24): 2023-2025. doi: 10.1364/OL.21.002023 [58] Qu Meina, Jin Tan, Xie Guizhi, et al. Developing a novel binderless diamond grinding wheel with femtosecond laser ablation and evaluating its performance in grinding soft and brittle materials[J]. Journal of Materials Processing Technology, 2020, 275: 1-9. [59] Zalloum O H, Parrish M, Terekhov A, et al. An amplified femtosecond laser system for material micro-/nanostructuring with an integrated Raman microscope [J]. Rev Sci Instrum, 2010, 81(5): 053906. doi: 10.1063/1.3430073 [60] Ogawa Y, Ota M, Nakamoto K, et al. A study on machining of binder-less polycrystalline diamond by femtosecond pulsed laser for fabrication of micro milling tools [J]. CIRP Annals, 2016, 65(1): 245-248. doi: 10.1016/j.cirp.2016.04.081 [61] 韩源, 马玉平, 王海航, 等 . 飞秒激光刻蚀纳米金刚石涂层材料去除率的研究 [J]. 激光与光电子学进展,2021 ,58 (11 ):1114001 . Han Yuan, Ma Yuping, Wang Haihang, et al. Material removal rate of nano-diamond coating ablated by femtosecond laser[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1114001. (in Chinese)[62] 方向阳 . CVD金刚石膜激光铲平切割工艺研究 [J]. 宁夏工程技术,2003 (02 ):157 -160 . doi: 10.3969/j.issn.1671-7244.2003.02.017 Fang Xiangyang. The research on laser cutting technology of CVD diamond film [J]. Ningxia Engineering Technology, 2003,2 (2): 157-160. (in Chinese) doi: 10.3969/j.issn.1671-7244.2003.02.017[63] Wang Ji, Zhang Peng, Zhang Tianrun, et al. Experiments of high frequency laser cutting of chemical vapor deposition diamond with large cutting depth [J]. Optics and Precision Engineering, 2022, 30(1): 89-95. (in Chinese) doi: 10.37188/OPE.20223001.0089 [64] Park J K, Ayres V M, Asmussen J, et al. Precision micromachining of CVD diamond films [J]. Diamond and Related Materials, 2000, 9(3): 1154-1158. [65] Yan Lei, Wu Feifei, Deng Yuheng, et al. Study on laser processing of chemical vapor deposition diamond thick film [J]. Diamond & Abrasives Engineering, 2012, 32(5): 6-9. [66] 郭强, 贾志新, 高坚强, 等 . 聚晶金刚石复合片激光切割工艺研究 [J]. 激光与红外,2017 ,47 (6 ):686 -692 . Guo Qiang, Jia Zhixin, Gao Jianqiang, et al. Technological study on laser cutting of polycrystalline diamond compact [J]. Laser & Infrared, 2017, 47(6): 686-692. (in Chinese)[67] Jeong B, Lee B, Kim J H, et al. Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses [J]. Quantum Electronics, 2020, 50(2): 201-204. doi: 10.1070/QEL17097 [68] Martin A A, Bishop J, Burnett W, et al. Ultra-high aspect ratio pores milled in diamond via laser, ion and electron beam mediated processes [J]. Diamond and Related Materials, 2020, 105: 107806. doi: 10.1016/j.diamond.2020.107806 [69] Golota N C, Preiss D, Fredin Z P, et al. High aspect ratio diamond nanosecond laser machining [J]. Appl Phys A Mater Sci Process, 2023, 129(7): 490. doi: 10.1007/s00339-023-06755-2 [70] Shen Tianlun, Chen Tao, Si Jinhai, et al.Structural changes during femtosecond laser percussion drilling of high-aspect-ratio diamond microholes[J]. Optical Engineering, 2022, 61 (1): 016103.[71] Kumar S, Eaton S M, Bollani M, et al. Laser surface structuring of diamond with ultrashort Bessel beams[J]. Sci Rep, 2018, 8(1): 14021. doi: 10.1038/s41598-018-32415-0 [72] 董春燕, 张晓宇, 顾德华, 等. 不同激光功率下金刚石微孔成形及缺陷特征[J]. 中国激光, 2023, 50(24): 2402404. Dong Chunyan, Zhang Xiaoyu, Gu Dehua, et al. Analysis of diamond microporous forming characteristics and defects under different laser powers[J]. Chinese Journal of Lasers, 2023, 50(24): 2402404. (in Chinese) [73] 韦新宇, 温秋玲, 陆静, 等 . 紫外纳秒激光加工金刚石微槽工艺参数优化研究[J]. 中国激光,2022 ,49 (10 ):1002406 . Wei Xinyu, Wen Qiuling, Lu Jing, et al. Research on parameters optimization of diamond microgrooves processed by ultravilot nanosecond laser[J]. Chinese Journal of Lasers, 2022, 49(10): 1002406. (in Chinese)[74] 黄建衡, 梁国文, 李冀, 等 . 飞秒激光制备多晶金刚石微结构阵列[J]. 中国激光,2017 ,44 (3 ):0302007 . Huang Jianheng, Liang Guowen, Li Ji, et al. Femtosecond laser processing of polycrystalline diamond micro-structure array[J]. Chinese Journal of Lasers, 2017, 44(3): 0302007. (in Chinese)[75] Tu Junlei, Shi Jiadong, Chen Liangxian, et al. Surface termination of the diamond microchannel and single-phase heat transfer performance[J]. International Journal of Heat and Mass Transfer, 2022, 199: 123481. doi: 10.1016/j.ijheatmasstransfer.2022.123481 [76] Dudek M, Rosowski A, Kozanecki M, et al. Microstructures manufactured in diamond by use of laser micromachining[J]. Materials (Basel), 2020, 13(5): 1199. doi: 10.3390/ma13051199 [77] Dou Jian, Cui Jianlei, Fang Xuyang, et al. Theoretical and experimental study on machining rectangular microgroove of diamond by femtosecond laser[J]. Integrated Ferroelectrics, 2020, 208(1): 104-116. doi: 10.1080/10584587.2020.1728722 [78] Shinoda M, Gattass R R, Mazur E. Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces[J]. Journal of Applied Physics, 2009, 105(5): 053102. doi: 10.1063/1.3079512 [79] Liu Huagang, Xie Linran, Lin Wenxiong, et al. Optical quality laser polishing of CVD diamond by UV pulsed laser irradiation[J]. Advanced Optical Materials, 2021, 9(21): 2100537. doi: 10.1002/adom.202100537 [80] Xu Feng. Study on laser processing and machining of CVD diamond thick-film[D]. Nanjing: Nanjing University of Aeronautics and Astronautics, 2002. (in Chinese) [81] Prieske M, Vollertsen F. Picosecond-laser polishing of CVD-diamond coatings without graphite formation [J]. Materials Today: Proceedings, 2021, 40: 1-4. doi: 10.1016/j.matpr.2020.01.283 [82] Komlenok M, Pashinin V, Sedov V, et al. Femtosecond and nanosecond laser polishing of rough polycrystalline diamond [J]. Laser Physics, 2022, 32(8): 084003. [83] Tsai H Y, Ting C J, Chou C P. Evaluation research of polishing methods for large area diamond films produced by chemical vapor deposition [J]. Diamond and Related Materials, 2007, 16(2): 253-261. doi: 10.1016/j.diamond.2006.06.007 [84] Tosin P, Blatter A, Lüthy W. Laser‐induced surface structures on diamond films [J]. Journal of Applied Physics, 1995, 78: 3797-3800. doi: 10.1063/1.359893 [85] Gloor S, Lüthy W, Weber H P, et al. UV laser polishing of thick diamond films for IR windows [J]. Applied Surface Science, 1999, 135-139. [86] 胡北辰, 张志耀, 张红梅, 等. SiC单晶材料的激光剥离技术研究进展[J]. 电子工艺技术, 2022, 43(4): 192 -195. Hu Beichen, Zhang Zhiyao, Zhang Hongmei, et al. Research progress of laser-assisted spalling for SiC single crystal [J]. Electronics Process Technology, 2022, 43(4): 192 -195. (in Chinese) [87] Wang Fei, Shan Chao, Yan Jianping, et al. Application of femtosecond laser technique in single crystal diamond film separation [J]. Diamond and Related Materials, 2016, 63: 69-74. doi: 10.1016/j.diamond.2015.11.015 [88] Kalyanasundaram D, Schmidt A, Molian P, et al. Hybrid CO2 Laser/Waterjet machining of polycrystalline diamond substrate: Material separation through transformation induced controlled fracture[J]. Journal of Manufacturing Science and Engineering, 2014, 136(4): 041001. doi: 10.1115/1.4027304 [89] Malshe A P, Ozkan A M, Brown W D. Process for sequential multi-beam laser processing of materials: America, US006168744B1 [P]. 2001-01-02. [90] Shi Guangfeng, Han Dongdong, Wang Shukun, et al. Analysis and evaluation of natural diamond cut by water jet-guided laser[J]. Aer Adv Eng Res, 2017, 146: 195-198. [91] Richmann A, Kuzminykh Y, Richerzhagen B, et al. Laser microjet cutting of up to 3 mm thick sapphire[C]//Int Congr Appl Lasers Electro-Optics, 2014: 1139–1143. [92] Qiao Hongchao, Cao Zhihe, Cui Jianfeng, et al, Experimental study on water jet guided laser micro-machining of mono-crystalline silicon[J]. Optics & Laser Technology, 2021, 140: 107507. [93] Silvennoinen M, Kaakkunen J J J, Paivasaari K, et alWater spray assisted ultrashort laser pulse ablation[J]. Applied Surface Science, 2013, 265: 865-869. doi: 10.1016/j.apsusc.2012.11.135 [94] Tangwarodomnukun V, Likhitangsuwat P, Tevinpibanphan O, et al. Laser ablation of titanium alloy under a thin and flowing water layer[J]. Int J Mach Tool Manu, 2015, 89: 14–28. [95] Tangwarodomnukun V, Wuttisarn TEvolution of milled cavity in the multiple laser scans of titanium alloy under a flowing water layer[J]. Int J Adv Manuf Technol, 2017, 92: 293-302. doi: 10.1007/s00170-017-0125-4 [96] Guo Bing, Zhang Jun, Wu Mingtao, et al. Water assisted pulsed laser machining of micro-structured surface on CVD diamond coating tools[J], Journal of Manufacturing Processes, 2020, 56: 591-601.