[1] Wu Jian, Yuan Bo, Wang Liqiang. New displacement measurement method based on digital Moir fringes formed by a single grating[J]. Infrared and Laser Engineering, 2014, 43(10):3404-3409. (in Chinese)伍剑, 袁波, 王立强. 单光栅数字莫尔位移测量法[J]. 红外与激光工程, 2014, 43(10):3404-3409.
[2]

Lin Cunbao, Yan Shuhua, Du Zhiguang, et al. Symmetrical short-period and high signal-to-noise ratio heterodyne grating interferometer[J]. Chinese Optics Letters, 2015, 13(10):100501.
[3]

Hsieh H, Pan S. Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements[J]. Optics Express, 2015, 23(3):2451-2465.
[4] Mi Xiaotao, Yu Hongzhu, Yu Haili, et al. Analysis and improvement of rod structures for large diffraction grating ruling engines[J]. Optics and Precision Engineering, 2015, 23(3):745-752. (in Chinese)糜小涛, 于宏柱, 于海利, 等. 大型衍射光栅刻划机拉杆结构的分析与改进[J]. 光学精密工程, 2015, 23(3):745-752.
[5] Jiang Yanxiu, Bayan Heshig, Zhao Xulong, et al. Plane holographic varied-line-space grating for DCLS in EUV region[J]. Optics and Precision Engineering, 2015, 23(8):2117-2124. (in Chinese)姜岩秀, 巴音贺希格, 赵旭龙, 等. 自由电子激光器用极紫外波段平面变栅距光栅[J]. 光学精密工程, 2015, 23(8):2117-2124.
[6]

Liu Yongmeng, Yuan Maoqiang, Cao Jieru, et al. Use of two planar gratings to measure 3-DOF displacements of planar moving stage[J]. IEEE Transactions on Instrumentation Measurement, 2015, 64(1):163-169.
[7]

Wang Xuanze, Dong Xiaohua, Guo Jun, et al. Two-dimensional displacement sensing using a cross diffraction grating scheme[J]. Journal of Optics A:Pure and Applied Optics, 2004, 6(1):106-111.
[8]

Hsieh H, Chen J, Leronde G, et al. Two-dimensional displacement measurement by quasi-common-optical path heterodyne grating interferometer[J]. Optics Express, 2011, 19(10):9770-9782.
[9] Xian Guang, Yan Changxiang. Analysis of attitude change impact on aerial push-broom imaging[J]. Infrared and Laser Engineering, 2015, 44(8):2178-2183. (in Chinese)贤光, 颜昌翔.态变化对航空推扫式成像的影响分析[J]. 红外与激光工程, 2015, 44(8):2178-2183.
[10]

Lin Cunbao, Yan Shuhua, Du Zhiguang, et al. High-efficiency gold-coated cross-grating for heterodyne grating interferometer with improved signal contrast and optical subdivision[J]. Optics Communications, 2015, 339(15):86-93.
[11] Yang Dongxing, Yan Shuhua, Du Liebo, et al. Design of a miniature single-grating displacement measuring system with nanometer resolution[J]. Infrared and Laser Engineering, 2013, 42(4):1020-1025. (in Chinese)杨东兴, 颜树华, 杜列波, 等. 一种小型化纳米级单光栅位移测量系统的研制[J].红外与激光工程, 2013, 42(4):1020-1025.
[12] Peng Lirong, Ma Zhanlong, Wang Gaowen, et al. Key technology of ultra-thin optical element precision manufacture[J]. Chinese Optics, 2015, 8(6):964-970. (in Chinese)彭利荣, 马占龙, 王高文, 等. 超薄光学元件精密加工关键技术[J]. 中国光学, 2015, 8(6):964-970.
[13] Tao Xiaoping. Precise alignment method of online optical testing for large-aperture mirror fabrication[J]. Chinese Optics, 2015, 8(6):1027-1034. (in Chinese)陶小平. 大口径反射镜加工机床在线检测高精度对准方法[J]. 中国光学, 2015, 8(6):1027-1034.
[14]

Awtar S, Slocum A. Target block alignment error in XY stage metrology[J]. Precision Engineering, 2007, 31(3):185-187.