| [1] |
Zou Y, Chakravarty S, Chung C-J, et al. Mid-infrared silicon photonic waveguides and devices [Invited] [J]. Photonics Research, 2018, 6(4): 254-276. |
| [2] |
Lin H, Sun B, Ma H, et al. Review of mid-infrared on-chip integrated photonics (Invited) [J]. Infrared and Laser Engineering, 2022, 51(1): 20211111. (in Chinese) |
| [3] |
Ma H, Yang H, Tang B, et al. Passive devices at 2 μm wavelength on 200 mm CMOS compatible silicon photonics platform [Invited] [J]. Chinese Optics Letters, 2021, 19(7): 071301. |
| [4] |
Lambrecht A, Schmitt K. Mid-infrared gas-sensing systems and applications [C]// Mid-infrared Optoelectronics, 2020: 661-715. |
| [5] |
Schliesser A, Picqué N, Hänsch T W. Mid-infrared frequency combs [J]. Nature Photonics, 2012, 6(7): 440-449. doi: 10.1038/nphoton.2012.142 |
| [6] |
Neetesh S, Alvaro C B, Hudson D, et al. Mid-IR absorption sensing of heavy water using a silicon-on-sapphire waveguide [J]. Optics Letters, 2016, 41(24): 5776-5779. doi: 10.1364/OL.41.005776 |
| [7] |
Dong L, Tittel F K, Li C, et al. Compact TDLAS based sensor design using interband cascade lasers for mid-IR trace gas sensing [J]. Optics Express, 2016, 24(6): A528-A535. doi: 10.1364/OE.24.00A528 |
| [8] |
Ottonello-Briano F, Errando-herranz C, Rdjegrd H, et al. Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide [J]. Optics Letters, 2019, 45(1): 109-112. |
| [9] |
Wang Y, Shu H, Han X. High-precision silicon-based integrated optical temperature sensor [J]. Chinese Optics, 2021, 14(6): 1355-1361. (in Chinese) doi: 10.37188/CO.2021-0054 |
| [10] |
Rodrigo D, Limaj O, Janner D, et al. Mid-infrared plasmonic biosensing with graphene [J]. Science, 2015, 349(6244): 165-168. doi: 10.1126/science.aab2051 |
| [11] |
Moser H, Pölz W, Waclawek J P, et al. Implementation of a quantum cascade laser-based gas sensor prototype for sub-ppmv H2S measurements in a petrochemical process gas stream [J]. Analytical and Bioanalytical Chemistry, 2016, 409: 729-739. |
| [12] |
Vainio M, Halonen L. Mid-infrared optical parametric oscillators and frequency combs for molecular spectroscopy [J]. Physical Chemistry Chemical Physics, 2016, 18(6): 4266-4294. doi: 10.1039/C5CP07052J |
| [13] |
Kim S. Novel air temperature measurement using midwave hyperspectral Fourier transform infrared imaging in the carbon dioxide absorption band [J]. Remote Sensing, 2020, 12(11): 1860. |
| [14] |
Yang S, Yan X, Qin H, et al. Mid-infrared compressive hyperspectral imaging [J]. Remote Sensing, 2021, 13(4): 741. |
| [15] |
Stanley R. Plasmonics in the mid-infrared [J]. Nature Photon, 2012, 6: 409-411. |
| [16] |
Gaeta A L, Lipson M, Kippenberg T J. Photonic-chip-based frequency combs [J]. Nature Photonics, 2019, 13(3): 158-169. doi: 10.1038/s41566-019-0358-x |
| [17] |
Li D, Zhou H, Hui X, et al. Multifunctional chemical sensing platform based on dual-resonant infrared plasmonic perfect absorber for on-chip detection of poly (ethyl cyanoacrylate) [J]. Advanced Science, 2021, 8(20): 2101879. |
| [18] |
Henderson B, Khodabakhsh A, Metsälä M, et al. Laser spectroscopy for breath analysis: towards clinical implementation [J]. Applied Physics B, 2018, 124(8): 161. doi: 10.1007/s00340-018-7030-x |
| [19] |
Soref R. Mid-infrared photonics in silicon and germanium [J]. Nature Photonics, 2010, 4(8): 495-497. doi: 10.1038/nphoton.2010.171 |
| [20] |
Chen Q, Nan X, Liang W, et al. Research progress of on-chip integrated optical sensing technology (Invited) [J]. Infrared and Laser Engineering, 2022, 51(1): 20210671. (in Chinese) |
| [21] |
Mashanovich G Z, Mitchell C J, Penades J S, et al. Germanium mid-infrared photonic devices [J]. Journal of Lightwave Technology, 2017, 35(4): 624-630. doi: 10.1109/JLT.2016.2632301 |
| [22] |
Lin P T, Jung H, Kimerling L C, et al. Low-loss aluminium nitride thin film for mid-infrared microphotonics [J]. Laser & Photonics Reviews, 2014, 8(2): L23-L28. |
| [23] |
Ma P, Choi D-Y, Yu Y, et al. Low-loss chalcogenide waveguides for chemical sensing in the mid-infrared [J]. Optics Express, 2013, 21(24): 29927-29937. doi: 10.1364/OE.21.029927 |
| [24] |
Lin H, Song Y, Huang Y, et al. Chalcogenide glass-on-graphene photonics [J]. Nature Photonics, 2017, 11(12): 798-805. doi: 10.1038/s41566-017-0033-z |
| [25] |
Mizaikoff B. Waveguide-enhanced mid-infrared chem/bio sensors [J]. Chemical Society Reviews, 2013, 42: 8683-8699. |
| [26] |
Hu T, Dong B, Luo X, et al. Silicon photonic platforms for mid-infrared applications [Invited] [J]. Photonics Research, 2017, 5(5): 417-430. doi: 10.1364/PRJ.5.000417 |
| [27] |
Liu X, Cheng S, Liu H, et al. A survey on gas sensing technology [J]. Sensors, 2012, 12: 9635-9665. doi: 10.3390/s120709635 |
| [28] |
Jane H, Ralph P T. Optical gas sensing: A review [J]. Measurement Science & Technology, 2013, 24(1): 012004. |
| [29] |
Dinh T V, Choi I Y, Son Y S, et al. A review on non-dispersive infrared gas sensors: Improvement of sensor detection limit and interference correction [J]. Sensors and Actuators, B Chemical, 2016, 231: 529-538. |
| [30] |
Cetin A E, Coskun A, Galarreta B C, et al. Handheld high-throughput plasmonic biosensor using computational on-chip imaging [J]. Light: Science & Applications, 2014, 3(1): e122. |
| [31] |
Brolo A. Plasmonics for future biosensors [J]. Nature Photonics, 2012, 6(11): 709-713. doi: 10.1038/nphoton.2012.266 |
| [32] |
Tombez L, Zhang E J, Orcutt J S, et al. Methane absorption spectroscopy on a silicon photonic chip [J]. Optica, 2017, 4(11): 1322-1325. doi: 10.1364/OPTICA.4.001322 |
| [33] |
Jágerská J, Jouy P, Tuzson B, et al. Simultaneous measurement of NO and NO2 by dual-wavelength quantum cascade laser spectroscopy [J]. Optics Express, 2015, 23(2): 1512-1522. doi: 10.1364/OE.23.001512 |
| [34] |
Schwarz B, Reininger P, Ristanić D, et al. Monolithically integrated mid-infrared lab-on-a-chip using plasmonics and quantum cascade structures [J]. Nature Communications, 2014, 5(1): 4085. doi: 10.1038/ncomms5085 |
| [35] |
Shankar R, Leijssen R, Bulu I, et al. Mid-infrared photonic crystal cavities in silicon [J]. Optics Express, 2011, 19(6): 5579-5586. doi: 10.1364/OE.19.005579 |
| [36] |
Liu Q, Ramirez J M, Vakarin V, et al. Mid-infrared sensing between 5.2 and 6.6 µm wavelengths using Ge-rich SiGe waveguides [Invited] [J]. Optical Materials Express, 2018, 8(5): 1305-1312. doi: 10.1364/OME.8.001305 |
| [37] |
Li W, Anantha P, Lee K H, et al. Spiral waveguides on germanium-on-silicon nitride platform for mid-IR sensing applications [J]. IEEE Photonics Journal, 2018, 10(3): 1-7. |
| [38] |
Kang J, Takenaka M, Takagi S. Novel Ge waveguide platform on Ge-on-insulator wafer for mid-infrared photonic integrated circuits [J]. Optics Express, 2016, 24(11): 11855-11864. doi: 10.1364/OE.24.011855 |
| [39] |
Xiao T-H, Zhao Z, Zhou W, et al. Mid-infrared high-Q germanium microring resonator [J]. Optics Letters, 2018: 43(12): 2885-2888. |
| [40] |
WU J, YUE G, CHEN W, et al. On-chip optical gas sensors based on group-IV materials [J]. ACS Photonics, 2020, 7(11): 2923-2940. doi: 10.1021/acsphotonics.0c00976 |
| [41] |
Wang C, Yin L, Zhang L, et al. Metal oxide gas sensors: Sensitivity and influencing factors [J]. Sensors, 2010, 10(3): 2088-2106. |
| [42] |
Chang Y-c, Wägli P, Paeder V, et al. Cocaine detection by a mid-infrared waveguide integrated with a microfluidic chip [J]. Lab on a Chip, 2012, 12(17): 3020-3023. doi: 10.1039/c2lc40601b |
| [43] |
Lin P, Singh V, Hu J, et al. Chip-scale mid-infrared chemical sensors using air-clad pedestal silicon waveguides [J]. Lab on a Chip, 2013: 13(11): 2161-2166. |
| [44] |
Zou Y, Vijayraghavan K, Wray P, et al. Monolithically integrated quantum cascade lasers, detectors and dielectric waveguides at 9.5µm for far-infrared lab-on-chip chemical sensing[C]//Proceedings of the CLEO, 2015: STu4I.2. |
| [45] |
Hale G M, Querry M R. Optical constants of water in the 200-nm to 200-microm wavelength region [J]. Applied Optics, 1973, 12(3): 555-563. doi: 10.1364/AO.12.000555 |
| [46] |
Nedeljkovic M, Khokhar A Z, Hu Y, et al. Silicon photonic devices and platforms for the mid-infrared [J]. Optical Materials Express, 2013, 3(9): 1205-1214. doi: 10.1364/OME.3.001205 |
| [47] |
Penades J S, Khokhar A, Nedeljkovic M, et al. Low-loss mid-infrared SOI slot waveguides [J]. IEEE Photonics Technology Letters, 2015, 27(11): 1197-1199. |
| [48] |
Lin P T, Kwok S W, Lin H Y G, et al. Mid-infrared spectrometer using opto-nanofluidic slot-waveguide for label-free on-chip chemical sensing [J]. Nano Letters, 2014, 14(1): 231-238. |
| [49] |
Patimisco P, Spagnolo V, Vitiello M S, et al. Low-loss hollow waveguide fibers for mid-infrared quantum cascade laser sensing applications [J]. Sensors, 2013, 13(1): 1329-1340. doi: 10.3390/s130101329 |
| [50] |
Zheng S, Cai H, Xu L, et al. Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing [J]. Photonics Research, 2022, 10(1): 261-268. doi: 10.1364/PRJ.439434 |
| [51] |
Petruci J, Wilk A, Cardoso A A, et al. A hyphenated preconcentrator-infrared-hollow-waveguide sensor system for N2O sensing [J]. Scientific Reports, 2018, 8(1): 5909. |
| [52] |
Vasiliev A, Malik A, Muneeb M, et al. On-chip mid-infrared photothermal spectroscopy using suspended silicon-on-insulator microring resonators [J]. ACS Sensors, 2016, 1(11): 1301-1307. |
| [53] |
Mario L N, Benedetto T, Tommaso M, et al. Recent advances in gas and chemical detection by Vernier effect-based photonic sensors [J]. Sensors, 2014, 14(3): 4831-4855. |
| [54] |
Jin L, Li M, He J J. Highly-sensitive silicon-on-insulator sensor based on two cascaded micro-ring resonators with vernier effect [J]. Optics Communications, 2011, 284(1): 156-159. doi: 10.1016/j.optcom.2010.08.035 |
| [55] |
Ren L, Wu X, Li M, et al. Ultrasensitive label-free coupled optofluidic ring laser sensor [J]. Optics Letters, 2012, 37(18): 3873-3875. doi: 10.1364/OL.37.003873 |
| [56] |
Yebo N A, Lommens P, Hens Z, et al. An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film [J]. Optics Express, 2010, 18(11): 11859-11866. doi: 10.1364/OE.18.011859 |
| [57] |
Stievater T H, Pruessner M W, Park D, et al. Trace gas absorption spectroscopy using functionalized microring resonators [J]. Optics Letters, 2014, 39(4): 969-972. doi: 10.1364/OL.39.000969 |
| [58] |
Troia B, Khokhar A Z, Nedeljkovic M, et al. Cascade-coupled racetrack resonators based on the Vernier effect in the mid-infrared [J]. Optics Express, 2014, 22(20): 23990-24003. |
| [59] |
Chang Y, Dong B, Ma Y, et al. Vernier effect-based tunable mid-infrared sensor using silicon-on-insulator cascaded rings [J]. Optics Express, 2020, 28(5): 6251-6260. |
| [60] |
Carlborg C F, Gylfason K B, Kamierczak A, et al. A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips [J]. Lab on a Chip, 2010, 10(3): 281-290. doi: 10.1039/B914183A |
| [61] |
Ksendzov A, Lin Y. Integrated optics ring-resonator sensors for protein detection [J]. Optics Letters, 2005, 30(24): 3344-3346. doi: 10.1364/OL.30.003344 |
| [62] |
Smith C J, Shankar R, Laderer M, et al. Sensing nitrous oxide with QCL-coupled silicon-on-sapphire ring resonators [J]. Optics Express, 2015, 23(5): 5491-5499. doi: 10.1364/OE.23.005491 |
| [63] |
Chen Y, Lin H, Hu J, et al. Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing [J]. ACS Nano, 2014, 8(7): 6955-6961. doi: 10.1021/nn501765k |
| [64] |
Lai W-C, Chakravarty S, Wang X, et al. Photonic crystal slot waveguide absorption spectrometer for on-chip near-infrared spectroscopy of xylene in water [J]. Applied Physics Letters, 2011, 98: 023304. |
| [65] |
Lai W-C, Chakravarty S, Zou Y, et al. Multiplexed detection of xylene and trichloroethylene in water by photonic crystal absorption spectroscopy [J]. Optics Letters, 2013, 38(19): 3799-3802. doi: 10.1364/OL.38.003799 |
| [66] |
Lai W-C, Chakravarty S, Wang X, et al. On-chip methane sensing by near-IR absorption signatures in a photonic crystal slot waveguide [J]. Optics Letters, 2011, 36(6): 984-986. doi: 10.1364/OL.36.000984 |
| [67] |
Iqbal M, Gleeson M A, Spaugh B, et al. Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation [J]. IEEE Journal of Selected Topics in Quantum Electronics, 2010, 16(3): 654-661. doi: 10.1109/JSTQE.2009.2032510 |
| [68] |
Skivesen N, Têtu A, Kristensen M, et al. Photonic-crystal waveguide biosensor [J]. Optics Express, 2007, 15(6): 3169-3176. doi: 10.1364/OE.15.003169 |
| [69] |
Chakravarty S, Zou Y, Yan H, et al. Silicon chip integrated photonic sensors for biological and chemical sensing [C]//SPIE, 2016. |
| [70] |
Kraeh C, Martinez Hurtado J L, Popescu A, et al. Slow light enhanced gas sensing in photonic crystals [J]. Optical Materials, 2018, 76: 106-110. doi: 10.1016/j.optmat.2017.12.024 |
| [71] |
Zou Y, Chakravarty S, Wray P, et al. Experimental demonstration of propagation characteristics of mid-infrared photonic crystal waveguides in silicon-on-sapphire [J]. Optics Express, 2015, 23(5): 6965-6975. |
| [72] |
Zou Y, Chakravarty S, Chen R T. Mid-infrared silicon-on-sapphire waveguide coupled photonic crystal microcavities [J]. Applied Physics Letters, 2015, 107(8): 081109. |
| [73] |
Zou Y, Chakravarty S, Wray P, et al. Mid-infrared holey and slotted photonic crystal waveguides in silicon-on-sapphire for chemical warfare simulant detection [J]. Sensors and Actuators B:Chemical, 2015, 221: 1094-1103. doi: 10.1016/j.snb.2015.07.061 |
| [74] |
Rostamian A, Madadi-kandjani E, Dalir H, et al. Towards lab-on-chip ultrasensitive ethanol detection using photonic crystal waveguide operating in the mid-infrared [J]. Nanophotonics, 2021, 10(6): 1675-1682. doi: 10.1515/nanoph-2020-0576 |
| [75] |
Nazabal V, Baudet E, Chahal R, et al. Chalcogenide glasses for mid-IR photonic applications [C]//2014 IEEE Photonics Society Summer Topical Meeting Series, 2014. |
| [76] |
Mittal V, Nedeljkovic M, Rowe D J, et al. Chalcogenide glass waveguides with paper-based fluidics for mid-infrared absorption spectroscopy [J]. Optics Letters, 2018, 43(12): 2913-2916. doi: 10.1364/OL.43.002913 |
| [77] |
Gutierrez-arroyo A, Baudet E, Bodiou L, et al. Optical characterization at 7.7 µm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared [J]. Optics Express, 2016, 24(20): 23109-23117. doi: 10.1364/OE.24.023109 |
| [78] |
Baudet E, Gutierrez-arroyo A, Baillieul M, et al. Development of an evanescent optical integrated sensor in the mid-infrared for detection of pollution in groundwater or seawater [J]. Advanced Device Materials, 2017, 3(2): 23-29. |
| [79] |
Lin P T, Jung H, Kimerling L C, et al. Low-loss aluminium nitride thin film for mid-infrared microphotonics [J]. Laser & Photonics Reviews, 2014, 8(2): L23-L28. |
| [80] |
Jung H, Poot Menno, Tang H X. In-resonator variation of waveguide cross-sections for dispersion control of aluminum nitride micro-rings [J]. Optics Express, 2015, 23(24): 30634-30640. |
| [81] |
Pernice W, Xiong C, Schuck C, et al. High-Q aluminum nitride photonic crystal nanobeam cavities [J]. Applied Physics Letters, 2012, 100(9): 091105. doi: 10.1063/1.3690888 |
| [82] |
Dong B, Luo X, Zhu S, et al. Aluminum nitride on insulator (AlNOI) platform for mid-infrared photonics [J]. Optics Letters, 2019, 44(1): 73-76. doi: 10.1364/OL.44.000073 |
| [83] |
Belt M, Davenport M L, Bowers J E, et al. Ultra-low-loss Ta2O5-core/SiO2-clad planar waveguides on Si substrates [J]. Optica, 2017, 4(5): 532-536. doi: 10.1364/OPTICA.4.000532 |
| [84] |
Muttalib M F A, Chen R, Pearce S, et al. Anisotropic Ta2O5 waveguide etching using inductively coupled plasma etching [J]. Journal of Vacuum Science & Technology A:Vacuum, Surfaces, and Films, 2014, 32: 041304. |
| [85] |
Vlk M, Datta A, Alberti S, et al. Extraordinary evanescent field confinement waveguide sensor for mid-infrared trace gas spectroscopy [J]. Light: Science & Applications, 2021, 10(1): 26. |
| [86] |
Chaneliere C, Autran J L, Devine R A B, et al. Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications [J]. Materials Science and Engineering: R: Reports, 1998, 22(6): 269-322. doi: 10.1016/S0927-796X(97)00023-5 |
| [87] |
Lee C C, Tien C L, Sheu W S, et al. An apparatus for the measurement of internal stress and thermal expansion coefficient of metal oxide films [J]. Review of Scientific Instruments, 2001, 72(4): 2128-2133. doi: 10.1063/1.1357228 |
| [88] |
Wu C-L, Hung Y, Fan R, et al. Tantalum pentoxide (Ta2O5) based athermal micro-ring resonator [J]. OSA Continuum, 2019, 2(4): 1198-1206. doi: 10.1364/OSAC.2.001198 |
| [89] |
Saygin-Hinczewski D, Koc K, Sorar I, et al. Optical and structural properties of Ta2O5–CeO2 thin films [J]. Solar Energy Materials and Solar Cells, 2007, 91(18): 1726-1732. doi: 10.1016/j.solmat.2007.05.029 |
| [90] |
Pi M, Zheng C, Zhao H, et al. Mid-infrared ChG-on-MgF2 waveguide gas sensor based on wavelength modulation spectroscopy [J]. Optics Letters, 2021, 46(19): 4797-4800. |
| [91] |
Li C, Zheng C, Dong L, et al. Ppb-level mid-infrared ethane detection based on three measurement schemes using a 3.34-μm continuous-wave interband cascade laser [J]. Applied Physics B, 2016, 122(7): 185. |
| [92] |
Jin T, Lin H, Tiwald T, et al. Flexible mid-infrared photonic circuits for real-time and label-free hydroxyl compound detection [J]. Scientific Reports, 2019, 9(1): 4153. |
| [93] |
Chang C, Lin H, Lai M, et al. Flexible localized surface plasmon resonance sensor with metal-insulator-metal nanodisks on PDMS substrate [J]. Scientific Reports, 2018, 8: 11812. |
| [94] |
Neutens P, Lagae L, Borghs G, et al. Plasmon filters and resonators in metal-insulator-metal waveguides [J]. Optics Express, 2012, 20(4): 3408-3423. doi: 10.1364/OE.20.003408 |
| [95] |
Wei Q, Xiao J, Yang D, et al. Ultra-compact electro-optic modulator based on alternative plasmonic material [J]. Appled Optics, 2021, 60(17): 5252-5257. doi: 10.1364/AO.425679 |
| [96] |
Ansell D, Radko I P, Han Z, et al. Hybrid graphene plasmonic waveguide modulators [J]. Nature Communications, 2015, 6(1): 8846. doi: 10.1038/ncomms9846 |
| [97] |
Zhang T, Shan F. Development and application of surface plasmon polaritons on optical amplification [J]. Journal of Nanomaterials, 2014, 7: 7-16. |
| [98] |
Izadi M A, Nouroozi R. Adjustable propagation length enhancement of the surface plasmon polariton wave via phase sensitive optical parametric amplification [J]. Scientific Reports, 2018, 8(1): 15495. doi: 10.1038/s41598-018-33831-y |
| [99] |
Kang T, Fan B, Qin J, et al. Mid-infrared active metasurface based on Si/VO2 hybrid meta-atoms [J]. Photonics Research, 2022, 10(2): 373-380. doi: 10.1364/PRJ.445571 |
| [100] |
Adato R, Altug H. In-situ ultra-sensitive infrared absorption spectroscopy of biomolecule interactions in real time with plasmonic nanoantennas [J]. Nature Communications, 2013, 4: 2154. |
| [101] |
Limaj O, Etezadi D, Wittenberg N J, et al. Infrared plasmonic biosensor for real-time and label-free monitoring of lipid membranes [J]. Nano Letters, 2016, 16(2): 1502-1508. doi: 10.1021/acs.nanolett.5b05316 |
| [102] |
Zhou H, Hui X, Li D, et al. Metal-organic framework‐surface‐enhanced infrared absorption platform enables simultaneous on‐chip sensing of greenhouse gases [J]. Advanced Science, 2020: 7(20): 2001173. |
| [103] |
Wei J, Li Y, Chang Y, et al. Ultrasensitive transmissive infrared spectroscopy via loss engineering of metallic nanoantennas for compact devices [J]. ACS Appl Mater Interfaces, 2019, 11(50): 47270-47278. doi: 10.1021/acsami.9b18002 |
| [104] |
Xu J, Ren Z, Dong B, et al. Nanometer-scale heterogeneous interfacial sapphire wafer bonding for enabling plasmonic-enhanced nanofluidic mid-infrared spectroscopy [J]. ACS Nano, 2020, 14(9): 12159-12172. doi: 10.1021/acsnano.0c05794 |
| [105] |
Chang Y, Hasan D, Dong B, et al. All-dielectric surface-enhanced infrared absorption-based gas sensor using guided resonance [J]. ACS Appl Mater Interfaces, 2018, 10(44): 38272-38279. doi: 10.1021/acsami.8b16623 |
| [106] |
Neubrech F, Pucci A, Cornelius T W, et al. Resonant plasmonic and vibrational coupling in a tailored nanoantenna for infrared detection [J]. Physical Review Letters, 2008, 101(15): 157403. |
| [107] |
Cho N J, Frank C W, Kasemo B, et al. Quartz crystal microbalance with dissipation monitoring of supported lipid bilayers on various substrates [J]. Nature Protocols, 2010, 5(6): 1096-1106. doi: 10.1038/nprot.2010.65 |
| [108] |
Rodrigo D, Tittl A, Ait-bouziad N, et al. Resolving molecule-specific information in dynamic lipid membrane processes with multi-resonant infrared metasurfaces [J]. Nature Communications, 2018, 9(1): 2160. doi: 10.1038/s41467-018-04594-x |
| [109] |
Maß T W W, Taubner T. Incident angle-tuning of infrared antenna array resonances for molecular sensing [J]. ACS Photonics, 2015, 2(10): 1498-1504. doi: 10.1021/acsphotonics.5b00399 |
| [110] |
Agrawal A, Singh A, Yazdi S, et al. Resonant coupling between molecular vibrations and localized surface plasmon resonance of faceted metal oxide nanocrystals [J]. Nano Letters, 2017, 17(4): 2611-2620. doi: 10.1021/acs.nanolett.7b00404 |
| [111] |
Baumberg J J, Aizpurua J, Mikkelsen M H, et al. Extreme nanophotonics from ultrathin metallic gaps [J]. Nature Materials, 2019, 18(7): 668-678. doi: 10.1038/s41563-019-0290-y |
| [112] |
Akselrod G M, Argyropoulos C, Hoang T B, et al. Probing the mechanisms of large Purcell enhancement in plasmonic nanoantennas [J]. Nature Photonics, 2014, 8(11): 835-840. |
| [113] |
Chen X, Wang C, Yao Y, et al. Plasmonic vertically coupled complementary antennas for dual-mode infrared molecule sensing [J]. Acs Nano, 2017, 11(8): 8034-8046. |
| [114] |
Liu N, Mesch M, Weiss T, et al. Infrared perfect absorber and its application as plasmonic sensor [J]. Nano Lett, 2010, 10(7): 2342-2348. doi: 10.1021/nl9041033 |
| [115] |
Brown L V, Yang X, Zhao K, et al. Fan-shaped gold nanoantennas above reflective substrates for surface-enhanced infrared absorption (SEIRA) [J]. Nano Letters, 2015, 15(2): 1272-1280. doi: 10.1021/nl504455s |
| [116] |
Dong L, Yang X, Zhang C, et al. Nanogapped Au antennas for ultrasensitive surface-enhanced infrared absorption spectroscopy [J]. Nano Letters, 2017: 17(9): 5768–5774. |
| [117] |
Miao X, Lingyue Y, Wu Y, et al. High-sensitivity nanophotonic sensors with passive trapping of analyte molecules in hot spots [J]. Light: Science and Applications, 2021, 10(1): 5. |
| [118] |
Chen J, Xiong Y, Xu F, et al. Silica optical fiber integrated with two-dimensional materials: towards opto-electro-mechanical technology [J]. Light:Science & Applications, 2021, 10 (1): 78. |
| [119] |
Zhu Y, Li Z, Hao Z, et al. Optical conductivity-based ultrasensitive mid-infrared biosensing on a hybrid metasurface [J]. Light: Science & Applications, 2018, 7(1): 67. |
| [120] |
Yang Z, Albrow-Owen T, Cai W, et al. Miniaturization of optical spectrometers [J]. Science, 2021, 371(6528): eabe0722. doi: 10.1126/science.abe0722 |
| [121] |
Mishchenko M I, Hovenier J W. Depolarization of light backscattered by randomly oriented nonspherical particles [J]. Optics Letters, 1995, 20(12): 1356-1358. doi: 10.1364/OL.20.001356 |
| [122] |
Naumann D, Helm D, Labischinski H. Microbiological characterizations by FT-IR spectroscopy [J]. Nature, 1991, 351(6321): 81-82. doi: 10.1038/351081a0 |
| [123] |
Rosema A. Potential of chlorophyll fluorescence for remote sensing of canopy photosynthesis[C]//Proceedings of the Proc OECD Workshop on Remote Sensing for Agriculture for the Environment, 2002. |
| [124] |
Lavchiev V M, Jakoby B. Photonics in the mid-infrared: challenges in single-chip integration and absorption sensing [J]. IEEE Journal of Selected Topics in Quantum Electronics, 2016, 23(2): 452-463. |
| [125] |
Hasan M, Rad M, Hasan G M, et al. Ultra-high resolution wideband On-chip spectrometer [J]. IEEE Photonics Journal, 2020, 12(5): 1-17. |
| [126] |
Manley M. Near-infrared spectroscopy and hyperspectral imaging: Non-destructive analysis of biological materials [J]. Chemical Society Reviews, 2014, 43(24): 8200-8214. doi: 10.1039/C4CS00062E |
| [127] |
Ouzounov D, Freund F. Mid-infrared emission prior to strong earthquakes analyzed by remote sensing data [J]. Advances in Space Research, 2004, 33(3): 268-273. doi: 10.1016/S0273-1177(03)00486-1 |
| [128] |
Kita D M, Miranda B, Favela D, et al. High-performance and scalable on-chip digital Fourier transform spectroscopy [J]. Nature Communications, 2018, 9 (1): 4405. |
| [129] |
Li A, Fainman Y. Integrated silicon Fourier transform spectrometer with broad bandwidth and ultra‐high resolution [J]. Laser & Photonics Reviews, 2021, 15(4): 2000358. |
| [130] |
Lin Z, Dadalyan T, Bélanger-de Villers S, et al. Chip-scale full-Stokes spectropolarimeter in silicon photonic circuits [J]. Photonics Research, 2020, 8(6): 864-874. doi: 10.1364/PRJ.385008 |
| [131] |
Xia Z, Eftekhar A A, Soltani M, et al. High resolution on-chip spectroscopy based on miniaturized microdonut resonators [J]. Optics Express, 2011, 19(13): 12356-12364. doi: 10.1364/OE.19.012356 |
| [132] |
Sarwar T, Cheekati S, Chung K, et al. On-chip optical spectrometer based on GaN wavelength-selective nanostructural absorbers [J]. Applied Physics Letters, 2020, 116(8): 081103. doi: 10.1063/1.5143114 |
| [133] |
Dinh T T D, González-Andrade D, Montesinos-Ballester M, et al. Silicon photonic on-chip spatial heterodyne Fourier transform spectrometer exploiting the Jacquinot's advantage [J]. Optics Letters, 2021, 46(6): 1341-1344. |
| [134] |
González-Andrade D, Dinh T T D, Guerber S, et al. Broadband Fourier-transform silicon nitride spectrometer with wide-area multiaperture input [J]. Optics Letters, 2021, 46(16): 4021-4024. doi: 10.1364/OL.438361 |
| [135] |
Liu T, Fiore A. Designing open channels in random scattering media for on-chip spectrometers [J]. Optica, 2020, 7(8): 934-939. doi: 10.1364/OPTICA.391612 |
| [136] |
Yuan S, Naveh D, Watanabe K, et al. A wavelength-scale black phosphorus spectrometer [J]. Nature Photonics, 2021, 15(8): 601-607. doi: 10.1038/s41566-021-00787-x |
| [137] |
Lee H S, Hwang G W, Seong T Y, et al. Design of mid-infrared filter array based on plasmonic metal nanodiscs array and its application to on-chip spectrometer [J]. Scientific Reports, 2021, 11(1): 12218. doi: 10.1038/s41598-021-91762-7 |
| [138] |
Zhang L, Chen J, Ma C, et al. Research progress on on‐chip Fourier transform spectrometer [J]. Laser & Photonics Reviews, 2021, 15(9): 2100016. |
| [139] |
Florjańczyk M, Cheben P, Janz S, et al. Multiaperture planar waveguide spectrometer formed by arrayed Mach-Zehnder interferometers [J]. Optics Express, 2007, 15(26): 18176-18189. doi: 10.1364/OE.15.018176 |
| [140] |
Nedeljkovic M, Velasco A V, Khokhar A Z, et al. Mid-infrared silicon-on-insulator fourier-transform spectrometer chip [J]. IEEE Photonics Technology Letters, 2016, 28(4): 528-531. doi: 10.1109/LPT.2015.2496729 |
| [141] |
Heidari E, Xu X, Chung C-J, et al. On-chip Fourier transform spectrometer on silicon-on-sapphire [J]. Optics Letters, 2019, 44(11): 2883-2886. |
| [142] |
Liu Q, Ramirez J M, Vakarin V, et al. Integrated broadband dual-polarization Ge-rich SiGe mid-infrared Fourier-transform spectrometer [J]. Optics Letters, 2018, 43(20): 5021-5024. doi: 10.1364/OL.43.005021 |
| [143] |
Montesinos-Ballester M, Liu Q, Vakarin V, et al. On-chip Fourier-transform spectrometer based on spatial heterodyning tuned by thermo-optic effect [J]. Scientific Reports, 2019, 9(1): 14633. doi: 10.1038/s41598-019-50947-x |
| [144] |
Fathy A, Sabry Y M, Nazeer S, et al. On-chip parallel Fourier transform spectrometer for broadband selective infrared spectral sensing [J]. Microsystems & Nanoengineering, 2020, 6 (1): 10. doi: 10.1038/s41378-019-0111-0 |
| [145] |
KEIlmann F, Gohle C, Holzwarth R. Time-domain mid-infrared frequency-comb spectrometer [J]. Optics Letters, 2004, 29(13): 1542-1544. doi: 10.1364/OL.29.001542 |
| [146] |
Picqué N, Hänsch T W. Frequency comb spectroscopy [J]. Nature Photonics, 2019, 13(3): 146-157. doi: 10.1038/s41566-018-0347-5 |
| [147] |
Coddington I, Newbury N, Swann W. Dual-comb spectroscopy [J]. Optica, 2016, 3(4): 414-426. doi: 10.1364/OPTICA.3.000414 |
| [148] |
Del’haye P, Schliesser A, Arcizet O, et al. Optical frequency comb generation from a monolithic microresonator [J]. Nature, 2007, 450(7173): 1214-1217. doi: 10.1038/nature06401 |
| [149] |
Kippenberg T J, Gaeta A L, Lipson M, et al. Dissipative Kerr solitons in optical microresonators [J]. Science , 2018, 361(6402): eaan8083. doi: 10.1126/science.aan8083 |
| [150] |
Yu M, Okawachi Y, Griffith A G, et al. Silicon-chip-based mid-infrared dual-comb spectroscopy [J]. Nature Communications, 2018, 9(1): 1869. doi: 10.1038/s41467-018-04350-1 |
| [151] |
Lin T, Dutt A, Joshi C, et al. Broadband ultrahigh-resolution chip-scale scanning soliton dual-comb spectroscopy [J]. arXiv preprint, 2020: 200100869. |
| [152] |
Rogalski A. HgCdTe photodetectors [C]//Mid-infrared Optoelectronics, 2020: 235-335. |
| [153] |
Steenbergen E H. InAsSb-based photodetectors [C]//Mid-infrared Optoelectronics, 2020: 415-453. |
| [154] |
Liu C, Guo J, Yu L, et al. Silicon/2D-material photodetectors: from near-infrared to mid-infrared [J]. Light: Science & Applications, 2021, 10(1): 123. doi: 10.1038/s41377-021-00551-4 |
| [155] |
Du W, Yu S-Q. Group IV photonics using (Si)GeSn technology toward mid-IR applications [C]//Mid-infrared Optoelectronics, 2020: 493-538. |
| [156] |
Chen J, Wang J, Li X, et al. Recent progress in improving the performance of infrared photodetectors via optical field manipulations [J]. Sensors, 2022, 22(2): 677. |
| [157] |
Carmody M, Pasko J G, Edwall D, et al. Status of LWIR HgCdTe-on-silicon FPA technology [J]. Journal of Electronic Materials, 2008, 37(9): 1184-1188. doi: 10.1007/s11664-008-0434-3 |
| [158] |
Dhar N K, Tidrow M Z. Large-format IRFPA development on silicon[C]//SPIE, 2004: 5564. |
| [159] |
Wu J, Jiang Q, Chen S, et al. Monolithically integrated InAs/GaAs quantum dot mid-infrared photodetectors on silicon substrates [J]. ACS Photonics, 2016, 3(5): 749-753. doi: 10.1021/acsphotonics.6b00076 |
| [160] |
Jia B W, Tan K H, Loke W K, et al. Monolithic integration of insb photodetector on silicon for mid-infrared silicon photonics [J]. ACS Photonics, 2018, 5(4): 1512-1520. doi: 10.1021/acsphotonics.7b01546 |
| [161] |
Delli E, Letka V, Hodgson P D, et al. Mid-Infrared InAs/InAsSb superlattice nBn photodetector monolithically integrated onto silicon [J]. ACS Photonics, 2019, 6(2): 538-544. doi: 10.1021/acsphotonics.8b01550 |
| [162] |
Wu E, Wu D, Jia C, et al. In situ fabrication of 2 D WS2/Si type-II Heterojunction for self-powered broadband photodetector with response up to mid-infrared [J]. ACS Photonics, 2019, 6(2): 565-572. doi: 10.1021/acsphotonics.8b01675 |
| [163] |
Cong H, Xue C, Zheng J, et al. Silicon based GeSn p-i-n photodetector for SWIR detection [J]. IEEE Photonics Journal, 2016, 8(5): 1-6. |
| [164] |
Tran H, Pham T, Margetis J, et al. Si-based GeSn photodetectors toward mid-infrared imaging applications [J]. ACS Photonics, 2019, 6(11): 2807-2815. doi: 10.1021/acsphotonics.9b00845 |
| [165] |
Wang X, Cheng Z, Xu K, et al. High-responsivity graphene/silicon-heterostructure waveguide photodetectors [J]. Nature Photonics, 2013, 7(11): 888-891. doi: 10.1038/nphoton.2013.241 |
| [166] |
Qu Z, Nedeljkovic M, Wu Y, et al. Waveguide integrated graphene mid-infrared photodetector[C]//SPIE, 2018: 10537. |
| [167] |
Huang L, Dong B, Guo X, et al. Waveguide-integrated black phosphorus photodetector for mid-infrared applications [J]. ACS Nano, 2019, 13(1): 913-921. doi: 10.1021/acsnano.8b08758 |