[1] Farokhi Hamed, Ghayesh Mergen H. Electrically actuated MEMS resonators: Effects of fringing field and viscoelasticity [J]. Mechanical Systems and Signal Processing, 2017, 95: 345-362. doi:  10.1016/j.ymssp.2017.03.018
[2] Simanca E, Morris D, Zhao L, et al. Measuring progressive soft tissue change with nasoalveolar molding using a three-dimensional system [J]. Journal of Craniofacial Surgery, 2011, 22(5): 1622-1625. doi:  10.1097/SCS.0b013e31822e8ca0
[3] Yamamoto S, Miyachi H, Fujii H, et al. Intuitive facial imaging method for evaluation of postoperative swelling: A combination of 3-dimensional computed tomography and laser surface scanning in orthognathic surgery [J]. Journal of Oral and Maxillofacial Surgery, 2016, 2506: e1-e10.
[4] Wu C, Bradley D, Garrido P, et al. Model-based teeth reconstruction [J]. ACM Transactions on Graphics, 2016, 35(6): 1-13.
[5] Zhou Peng, Zhao Fuling, Lv Qichao, et al. A surface evaluation method of carbon fiber reinforced plastic based on multifractal spectrum [J]. Journal of Dalian University of Technology, 2011, 51(4): 535-539. (in Chinese)
[6] Park D C, Kim S S, Kim B C, et al. Wear characteristics of carbon-phenolic woven composites mixed with nano-particles [J]. Composite Structures, 2006, 74(1): 89-98. doi:  10.1016/j.compstruct.2005.03.010
[7] Cao Zhile, Yan Zhonghong, Wang Hong. Summary of binocular stereo vision matching technology [J]. Journal of Chongqing University of Technology (Natural Science), 2015, 29(2): 70-75. (in Chinese)
[8] Zuo Chao, Zhang Xiaolei, Hu Yan, et al. Has 3D finally come of age?-An introduction to 3D structured-light sensor [J]. Infrared and Laser Engineering, 2020, 49(3): 0303001. (in Chinese) doi:  10.3788/IRLA202049.0303001
[9] Kumar U P, Wang Haifeng, Mohan N K, et al. White light interferometry for surface profiling with a colour CCD [J]. Optics & Lasers in Engineering, 2012, 50(8): 1084-1088. doi:  10.1016/j.optlaseng.2012.02.002
[10] Sun Xingwei, Yu Xinyu, Dong Zhixu, et al. High accuracy measurement model of laser triangulation method [J]. Infrared and Laser Engineering, 2018, 47(9): 0906008. (in Chinese) doi:  10.3788/IRLA201847.0906008
[11] Bai Jingxiang, Qu Xinghua, Feng Wei, et al. Separation method of overlapping phase-shift gratings in three-dimensional measurement of double projection structured light [J]. Acta Optica Sinica, 2018, 38(11): 150-156. (in Chinese)
[12] Wu Xiangji. Z-distance measuring system of probe station based on automatic focusing technology[D]. Hangzhou: Zhejiang University, 2017. (in Chinese)
[13] Wang Zhitong. Study on 3D image detection techniques for surface topography of micro-milling parts[D]. Changchun: Changchun University of Science and Technology, 2018. (in Chinese)
[14] Nayar S K, Nakagawa Y. Shape from focus [J]. IEEE Transactions on Pattern Analysis and Machine Intelligence, 1994, 16(8): 824-831. doi:  10.1109/34.308479
[15] Mahmood M T. Shape from focus by total variation [C]//IEEE IVMSP, 2013, 6611940: 1-4.
[16] Jia H K, Wang S B, Li L A, et al. Application of optical 3D measurement on thin film buckling to estimate interfacial toughness [J]. Optics & Lasers in Engineering, 2014, 54(1): 263-268.
[17] Song Jiangshan. Study on depth from focus technology[D]. Jinan: Shandong University, 2009. (in Chinese)
[18] Hu Yao, Gao Haibo, Yuan Shizhu, et al. 3D profile measurement of micro-structured array with light field microscope [C]//Proc SPIE, 2015, 9795: 979523.
[19] Redondo R, Bueno G, Valdiviezo J C, et al. Autofocus evaluation for brightfield microscopy pathology [J]. Journal of Biomedical Optics, 2012, 17(3): 036008.
[20] Chu Xiang, Zhu Lianqing, Lou Xiaoping, et al. Dynamic auto focus algorithm based on improved sobel operator [J]. Journal of Applied Optics, 2017, 38(2): 237-242. (in Chinese)
[21] Lin J. Divergence measures based on the Shannon entropy [J]. IEEE Transactions on Information Theory, 1991, 37(1): 145-51. doi:  10.1109/18.61115
[22] Li Chengchao, Yu Zhanjiang, Li Yiquan, et al. Sharpness evaluation of microscopic detection image for micro parts [J]. Semiconductor Optoelectronics, 2020, 41(1): 103-107. (in Chinese)
[23] Pan Xuejuan, Zhu Youpan, Pan Chao, et al. Simulation analysis of auto focusing sharpness evaluation function for images based on gradient operator [J]. Infrared Technology, 2016, 38(11): 960-968. (in Chinese)
[24] Li Qi, Feng Huajun, Xu Zhihai, et al. Digital image sharpness evaluation function [J]. Acta Photonica Sinica, 2002, 31(6): 736-738. (in Chinese)
[25] Wang Na, Zhou Quan. 3D reconstruction of micro objects under optical microscope [J]. Opto-Electronic Engineering, 2010, 37(11): 84-90. (in Chinese)
[26] Gao Zan, Jiang Wei, Zhu Kongfeng, et al. Auto-focusing algorithm based on roberts gradient [J]. Infrared and Laser Engineering, 2006, 35(1): 117-121. (in Chinese) doi:  10.3969/j.issn.1007-2276.2006.01.026
[27] Li Xue, Jiang Minshan. A comparison of sharpness functions based on microscopes [J]. Optical Instruments, 2018, 40(1): 28-38. (in Chinese)
[28] Zhang Xiaobo, Fan Fuming, Cheng Lianglun. Improvement for fast auto-focus system using laser triangulation [J]. Infrared and Laser Engineering, 2012, 41(7): 1784-1791. (in Chinese) doi:  10.3969/j.issn.1007-2276.2012.07.019
[29] Tang Chong, Hui Huihui. Gaussian curve fitting solution based on Matlab [J]. Computer & Digital Engineering, 2013, 41(8): 1262-1263+1297. (in Chinese)