Multi-wavelength fiber sensor for measuring surface roughness based on laser scattering

Zhu Nannan; Zhang Jun

doi:10.3788/IRLA201645.0522003

Volume 45 Issue 5

Jun. 2016

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Zhu Nannan, Zhang Jun. Multi-wavelength fiber sensor for measuring surface roughness based on laser scattering[J]. Infrared and Laser Engineering, 2016, 45(5): 522003-0522003(6). doi: 10.3788/IRLA201645.0522003

Citation:

Zhu Nannan, Zhang Jun. Multi-wavelength fiber sensor for measuring surface roughness based on laser scattering[J]. Infrared and Laser Engineering, 2016, 45(5): 522003-0522003(6). doi: 10.3788/IRLA201645.0522003

Multi-wavelength fiber sensor for measuring surface roughness based on laser scattering

doi: 10.3788/IRLA201645.0522003

1.
Institute Opto-Electronic Information of Science & Technology,Yantai University,Yantai 264005,China

Received Date: 2015-09-13
Rev Recd Date: 2015-10-15
Publish Date: 2016-05-25

Abstract

Scattering characteristics and surface roughness on the surface of the materials make a very important influence on the performance of the product. The multi-wavelength fiber sensor for measuring surface roughness and surface scattering characteristics based on laser scattering was investigated. The special geometric design was used by the probe of fiber optic sensor, specimens with different surface roughness were analyzed by using 650 nm, 1 310 nm and 1 550 nm laser as the light source, respectively. The working distance of 2 mm was chosen as the optimum measurement distance. The experimental results indicate that under the same wavelength, the reflection intensity measured from the reflective surface of grinding samples decrease with the increase of surface roughness. Under the same roughness, the incident wavelength is longer, the reflection intensity is bigger. The multi-wavelength fiber sensor can accurately measure surface roughness, and can effectively reduce the system error. The range of relative error of fiber sensor by analyzing system error is about 3.56%-7.43%.
- surface roughness,
- multi-wavelength fiber sensor,
- laser scattering,
- on-line measurement

References

[1]	Xu Jianqiang, Jiang Chi, Zhang Hui. et al. Study on fiber sensor for measuring surface roughness[J]. Metrology Journal, 2002, 23(4): 280-281. (in Chinese)徐建强,江驰,张惠,等.检测表面粗糙度的光纤传感器研究[J]. 计量学报,2002, 23(4): 280-281.
[2]	Feng Mingshen, Sui Chenghua. Study on two wavelength fiber sensor for measuring surface roughness[J]. Chinese Journal of Quantum Electronics, 2004, 21(6): 873-878. (in Chinese)丰明坤,隋成华. 用于表面粗糙度检测的双波长光纤传感器研究[J]. 量子电子学报, 2004, 21(6): 873-878.
[3]	Li Yafei. Study on a new reflective optical fiber sensor[J]. Chinese Journal of Scientific Instrument, 2005, 26(10): 1097-1099. (in Chinese)李亚非.一种反射式光纤传感器的研究[J]. 仪器仪表学报, 2005, 26(10): 1097-1099.
[4]	Xu Xiaomei. Inner surface roughness measurement of holes based on reflective intensity modulation fiber optic Sensor[D]. Harbin: Harbin Institute of Technology, 2010. (in Chinese)徐晓梅. 反射式强度调制型光纤传感孔内表面粗糙度检测技术研究[D]. 哈尔滨: 哈尔滨工业大学, 2010.
[5]	Wang Huaping, Zhou Zhi, Wang Qian, et al. Strain transfer errors of optical fiber sensors Embedded in asphalt pavement[J]. Optics and Precision Engineering, 2015, 23(6): 1499-1507. (in Chinese)王花平, 周智,王倩,等. 光纤传感器埋入沥青路面基体的应变传递误差[J]. 光学精密工程, 2015, 23(6): 1499-1507.
[6]	Zhang Ping, Zhang Xiaodong, Dong Xiaoni. Output characteristics of sensor with two-circle coaxial optical fiber in lubricating oil medium[J]. Chinese Optics, 2015, 8(3):439-446. (in Chinese)张平,张小栋,董晓妮. 双圈同轴光纤传感器在润滑油介质中的输出特性[J]. 中国光学,2015, 8(3): 439-446.
[7]	Liu Ying, Lang Zhiguo, Tang Wenyan. Development of measurement system about light-section microscope for surface roughness[J]. Infrared and Laser Engineering, 2012, 41(3): 775-779. (in Chinese)刘颖, 朗治国,唐文彦. 表面粗糙度光切显微镜测量系统的研制[J]. 红外与激光工程, 2012, 41(3): 775-779.
[8]	Guo Ruipeng. Theoretical and experimental investigation of in-process measurement of surface characteristic parameter based on laser scattering[D]. Shanghai: Shanghai JiaoTong University, 2011. (in Chinese)郭瑞鹏. 基于激光散射的在线检测表面特性参数的理论分析和实验研究[D]. 上海: 上海交通大学, 2011.
[9]	Li Lijuan. Research on applying laser scattering characteristic of object to measure surface microcosmic profile precision of steel plate[D]. Changchun: Changchun University of Science and Technology, 2005. (in Chinese)李丽娟. 目标激光散射特性在钢板表面微观轮廓精度测量中的应用研究[D]. 长春:长春理工大学, 2005.
[10]	Shi Zhenhua, Lin Guanyu, Wang Shurong, et al. Numerical analysis of small particle measurement based on the theory of laser Scattering[J]. Infrared and Laser Engineering, 2015, 44(7): 2189-2194. (in Chinese)石振华, 林冠宇,王淑荣,等. 基于激光散射理论的微小颗粒测量的数值分析[J]. 红外与激光工程,2015, 44(7): 2189-2194.
[11]	Gale M F Ruiz, Hogert E N. Apparent and real roughness[J]. Optics and Lasers in Engineering, 2007, 45(8): 947-952.
[12]	Lorenzo Basano, Stefano Leporatti, Pasquale Ottonello, et al. Measurements of surface roughness: use of a CCD camera to correlate doubly scattered speckle patterns[J]. Applied Optics, 1995, 34(31): 7286-7290.
[13]	Peter Lehmann. Surface-roughness measurement based on the intensity correlation function of scattered light under speckle-pattern illumination[J]. Applied Optics, 1999, 38(7): 1144-1152.
[14]	Wang Yonghong, Li Junrui, Sun Jianfei, et al. Frequency domain filtering for phase fringe patterns of digital speckle pattern interferometry[J]. Chinese Optics, 2014, 7(3): 389-395. (in Chinese)王永红,李骏睿,孙建飞,等. 散斑干涉相位条纹图的频域滤波处理[J]. 中国光学, 2014, 7(3): 389-395.
[15]	Kong Ping, Yang Hui, Lin Weimin, et al. Measurement of particle sizes by contrast of dynamic laser speckle[J]. Optics and Precision Engineering, 2014, 22(10): 2633-2638. (in Chinese)孔平,杨晖, 林伟民,等. 动态散斑对比度颗粒测量法[J]. 光学精密工程, 2014, 22(10): 2633-2638.
[16]	Fu Huaiyang, Zhou Sizhong, Jiang Kai, et al. Effects of mirror surface roughness on encircled energy for far ultraviolet telescopes[J]. Infrared and Laser Engineering, 2014, 43(8): 2562-2567. (in Chinese)付怀洋,周泗忠,姜凯,等. 镜面粗糙度对远紫外望远镜能量集中度的影响[J]. 红外与激光工程,2014, 43(8): 2562-2567.
[17]	Heng Zhao, Hua Dengxin. Modifications to Beckmann-Kirchhoff model for random rough surfaces with non-paraxial angles[J]. Journal of Xi'an University of Technology, 2013, 29(3): 285-289.
[18]	Stover J C, Serati S A, Cillespie C H. Calculation of surface statistics from light scatter[J]. Optical Engineering, 1984, 23(4): 406-412.
[19]	Xiao Jing, Zhang Bin. Influence of the optical components contamination on the signal to noise ratio in infrared optical systems[J]. Infrared and Laser Engineering, 2012, 41(4): 1010-1016. (in Chinese)肖静,张彬.光学元件污染对红外光学系统信噪比的影响分析[J]. 红外与激光工程,2012, 41(4): 1010-1016.
[20]	Harvey J E, Krywonos A, Bogunovic D. Nonparaxial scalar treatment of sinusoidal phase gratings[J]. Journal of OSA-A, 2006, 23(4): 858-865.
[21]	Sven S, Angela D, Luisa C, et al. Modeling of light scattering in different regimes of surface roughness[J]. Optics Express, 2011, 19(10): 9820-9835.

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Multi-wavelength fiber sensor for measuring surface roughness based on laser scattering

1. Institute Opto-Electronic Information of Science & Technology,Yantai University,Yantai 264005,China

Received Date: 2015-09-13

Rev Recd Date: 2015-10-15

Publish Date: 2016-05-25

Key words:

Abstract: Scattering characteristics and surface roughness on the surface of the materials make a very important influence on the performance of the product. The multi-wavelength fiber sensor for measuring surface roughness and surface scattering characteristics based on laser scattering was investigated. The special geometric design was used by the probe of fiber optic sensor, specimens with different surface roughness were analyzed by using 650 nm, 1 310 nm and 1 550 nm laser as the light source, respectively. The working distance of 2 mm was chosen as the optimum measurement distance. The experimental results indicate that under the same wavelength, the reflection intensity measured from the reflective surface of grinding samples decrease with the increase of surface roughness. Under the same roughness, the incident wavelength is longer, the reflection intensity is bigger. The multi-wavelength fiber sensor can accurately measure surface roughness, and can effectively reduce the system error. The range of relative error of fiber sensor by analyzing system error is about 3.56%-7.43%.

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Reference (21)

[1]	Xu Jianqiang, Jiang Chi, Zhang Hui. et al. Study on fiber sensor for measuring surface roughness[J]. Metrology Journal, 2002, 23(4): 280-281. (in Chinese)徐建强,江驰,张惠,等.检测表面粗糙度的光纤传感器研究[J]. 计量学报,2002, 23(4): 280-281.
[2]	Feng Mingshen, Sui Chenghua. Study on two wavelength fiber sensor for measuring surface roughness[J]. Chinese Journal of Quantum Electronics, 2004, 21(6): 873-878. (in Chinese)丰明坤,隋成华. 用于表面粗糙度检测的双波长光纤传感器研究[J]. 量子电子学报, 2004, 21(6): 873-878.
[3]	Li Yafei. Study on a new reflective optical fiber sensor[J]. Chinese Journal of Scientific Instrument, 2005, 26(10): 1097-1099. (in Chinese)李亚非.一种反射式光纤传感器的研究[J]. 仪器仪表学报, 2005, 26(10): 1097-1099.
[4]	Xu Xiaomei. Inner surface roughness measurement of holes based on reflective intensity modulation fiber optic Sensor[D]. Harbin: Harbin Institute of Technology, 2010. (in Chinese)徐晓梅. 反射式强度调制型光纤传感孔内表面粗糙度检测技术研究[D]. 哈尔滨: 哈尔滨工业大学, 2010.
[5]	Wang Huaping, Zhou Zhi, Wang Qian, et al. Strain transfer errors of optical fiber sensors Embedded in asphalt pavement[J]. Optics and Precision Engineering, 2015, 23(6): 1499-1507. (in Chinese)王花平, 周智,王倩,等. 光纤传感器埋入沥青路面基体的应变传递误差[J]. 光学精密工程, 2015, 23(6): 1499-1507.
[6]	Zhang Ping, Zhang Xiaodong, Dong Xiaoni. Output characteristics of sensor with two-circle coaxial optical fiber in lubricating oil medium[J]. Chinese Optics, 2015, 8(3):439-446. (in Chinese)张平,张小栋,董晓妮. 双圈同轴光纤传感器在润滑油介质中的输出特性[J]. 中国光学,2015, 8(3): 439-446.
[7]	Liu Ying, Lang Zhiguo, Tang Wenyan. Development of measurement system about light-section microscope for surface roughness[J]. Infrared and Laser Engineering, 2012, 41(3): 775-779. (in Chinese)刘颖, 朗治国,唐文彦. 表面粗糙度光切显微镜测量系统的研制[J]. 红外与激光工程, 2012, 41(3): 775-779.
[8]	Guo Ruipeng. Theoretical and experimental investigation of in-process measurement of surface characteristic parameter based on laser scattering[D]. Shanghai: Shanghai JiaoTong University, 2011. (in Chinese)郭瑞鹏. 基于激光散射的在线检测表面特性参数的理论分析和实验研究[D]. 上海: 上海交通大学, 2011.
[9]	Li Lijuan. Research on applying laser scattering characteristic of object to measure surface microcosmic profile precision of steel plate[D]. Changchun: Changchun University of Science and Technology, 2005. (in Chinese)李丽娟. 目标激光散射特性在钢板表面微观轮廓精度测量中的应用研究[D]. 长春:长春理工大学, 2005.
[10]	Shi Zhenhua, Lin Guanyu, Wang Shurong, et al. Numerical analysis of small particle measurement based on the theory of laser Scattering[J]. Infrared and Laser Engineering, 2015, 44(7): 2189-2194. (in Chinese)石振华, 林冠宇,王淑荣,等. 基于激光散射理论的微小颗粒测量的数值分析[J]. 红外与激光工程,2015, 44(7): 2189-2194.
[11]	Gale M F Ruiz, Hogert E N. Apparent and real roughness[J]. Optics and Lasers in Engineering, 2007, 45(8): 947-952.
[12]	Lorenzo Basano, Stefano Leporatti, Pasquale Ottonello, et al. Measurements of surface roughness: use of a CCD camera to correlate doubly scattered speckle patterns[J]. Applied Optics, 1995, 34(31): 7286-7290.
[13]	Peter Lehmann. Surface-roughness measurement based on the intensity correlation function of scattered light under speckle-pattern illumination[J]. Applied Optics, 1999, 38(7): 1144-1152.
[14]	Wang Yonghong, Li Junrui, Sun Jianfei, et al. Frequency domain filtering for phase fringe patterns of digital speckle pattern interferometry[J]. Chinese Optics, 2014, 7(3): 389-395. (in Chinese)王永红,李骏睿,孙建飞,等. 散斑干涉相位条纹图的频域滤波处理[J]. 中国光学, 2014, 7(3): 389-395.
[15]	Kong Ping, Yang Hui, Lin Weimin, et al. Measurement of particle sizes by contrast of dynamic laser speckle[J]. Optics and Precision Engineering, 2014, 22(10): 2633-2638. (in Chinese)孔平,杨晖, 林伟民,等. 动态散斑对比度颗粒测量法[J]. 光学精密工程, 2014, 22(10): 2633-2638.
[16]	Fu Huaiyang, Zhou Sizhong, Jiang Kai, et al. Effects of mirror surface roughness on encircled energy for far ultraviolet telescopes[J]. Infrared and Laser Engineering, 2014, 43(8): 2562-2567. (in Chinese)付怀洋,周泗忠,姜凯,等. 镜面粗糙度对远紫外望远镜能量集中度的影响[J]. 红外与激光工程,2014, 43(8): 2562-2567.
[17]	Heng Zhao, Hua Dengxin. Modifications to Beckmann-Kirchhoff model for random rough surfaces with non-paraxial angles[J]. Journal of Xi'an University of Technology, 2013, 29(3): 285-289.
[18]	Stover J C, Serati S A, Cillespie C H. Calculation of surface statistics from light scatter[J]. Optical Engineering, 1984, 23(4): 406-412.
[19]	Xiao Jing, Zhang Bin. Influence of the optical components contamination on the signal to noise ratio in infrared optical systems[J]. Infrared and Laser Engineering, 2012, 41(4): 1010-1016. (in Chinese)肖静,张彬.光学元件污染对红外光学系统信噪比的影响分析[J]. 红外与激光工程,2012, 41(4): 1010-1016.
[20]	Harvey J E, Krywonos A, Bogunovic D. Nonparaxial scalar treatment of sinusoidal phase gratings[J]. Journal of OSA-A, 2006, 23(4): 858-865.
[21]	Sven S, Angela D, Luisa C, et al. Modeling of light scattering in different regimes of surface roughness[J]. Optics Express, 2011, 19(10): 9820-9835.

Multi-wavelength fiber sensor for measuring surface roughness based on laser scattering

doi: 10.3788/IRLA201645.0522003

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References

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通讯作者: 陈斌, bchen63@163.com

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