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Wang Xi, Fang Xiaodong. Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO2 laser[J]. Infrared and Laser Engineering, 2016, 45(12): 1206009-1206009(5). doi: 10.3788/IRLA201645.1206009
Citation: Wang Xi, Fang Xiaodong. Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO2 laser[J]. Infrared and Laser Engineering, 2016, 45(12): 1206009-1206009(5). doi: 10.3788/IRLA201645.1206009
shu

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO2 laser

doi: 10.3788/IRLA201645.1206009
  • 1.

    Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;

  • 2.

    University of Science and Technology of China,Hefei 230029,China;

  • 3.

    State Key Laboratory of Pulsed Power Laser Technology,Electronic Engineering Institute,Hefei 230037,China

  • Received Date: 2016-04-16
  • Rev Recd Date: 2016-05-21
  • Publish Date: 2016-12-25
  • It has very important application value to investigate the damage performance of K9 glass irradiated by ultraviolet excimer laser. In this paper, the experiment research on damage in K9 glass irradiated by 248 nm KrF excimer laser was carried out, the sample damage threshold and damage morphology were analyzed by means of metallurgical microscope and scanning electron microscope. The comparison of laser induced damage performance between KrF excimer laser and pulse CO2 laser were investigated. The experimental results indicate that the damage mechanism of K9 glass irradiated by KrF excimer laser and pulse CO2 laser mainly follow the thermal-mechanical coupling mechanism. However, there is apparent difference in damage threshold and damage time. For example, the damage threshold is lower and the damage time is shorter for KrF excimer laser. This can be explained by the difference in wavelength and photon energy between the KrF excimer laser and pulse CO2 laser. The research presented in this paper is helpful for further exploring the ultraviolet excimer laser damage mechanism of optical materials.
  • [1] Carr C W, Bude J D, De M P. Laser-supported solid-state absorption fronts in silica[J]. Physical Review B, 2010, 82(18):184304.
    [2] Pan Y X. Effect of inclusion matrix model on temperature and thermal stress fields of K9-glass damaged by long-pulse laser[J]. Opt Eng, 2013, 53(4):044302.
    [3] Jones S C. Recent progress on laser-induced modifications and intrinsic bulk damage of wide-gap optical materials[J]. Opt Eng, 1989, 28(10):1039-1068.
    [4] Gallais L, Natoli J Y, Amra C. Statistical study of single and multiple pulse laser-induced damage in glasses[J]. Opt Express, 2002, 10(25):1465-1474.
    [5] Miller P E, Suratwala T I, Wong L L. The distribution of subsurface damage in fused silica[C]//SPIE, 2005, 5991:599101.
    [6] Pan Yunxiang, Shen Zhonghua, Lu Jian, et al. Analysis of temperature and thermal stress fields of K9 glass damaged by 1064nm nanosecond pulse laser[C]//SPIE, 2013, 8603:860308.
    [7] Zhang H B, Yuan Z J, Zhou J, et al. Effects of prism beam expander and slits on excimer laser linewidth narrowing modules[J]. Chin Opt Lett, 2013, 11(04):041405.
    [8] Joly P, Petrarca M, Vogel A, et al. Laser-induced condensation by ultrashort laser pulses at 248 nm[J]. Appl Phys Lett, 2013, 102(9):091112.
    [9] Schutz-Kuchly T, Slaoui A, Zelgowski J, et al. UV and IR laser induced ablation of Al2O3/SiN:H and a-Si:H/SiN:H[J]. EPJ Photovoltaics, 2013, 5:55201.
    [10] Ihlemann J, Weichenhain-Schriever R. Pulsed laser-induced formation of silica nanogrids[J]. Nanoscale Research Letters, 2014, 9(1):102.
    [11] Rosen D I. Coupling of pulsed 0. 35m laser radiation to aluminum alloys[J]. Appl Phys, 1982, 53(10):3190.
    [12] Brusasco R M, Penetrante B M, Peterson J E. UV-laser conditioning for reduction of 351nm damage initiation in fused silica[C]//SPIE, 2002, 4679:48-55.
    [13] Liu Hongjie, Wang Fengrui, Luo Qing, et al. Experimental comparison of damage performance induced by nanosecond 1laser between K9 glass and fused silica optics[J]. Acta Phys Sin, 2012, 61(7):076103. (in Chinese)刘红婕, 王风蕊, 罗青, 等. K9玻璃和熔石英玻璃纳秒基频激光损伤特性的实验对比研究[J]. 物理学报, 2012, 61(7):076103.
    [14] Wang Xi, Li Hua, Nie Jinsong. Simulation and experimental research on damage in K9 glass due to pulsed CO2 laser radiation[J]. Chinese J Lasers, 2008, 35(11):1760-1765. (in Chinese)王玺, 李化, 聂劲松. 脉冲CO2激光损伤K9玻璃的实验研究与仿真[J]. 中国激光, 2008, 35(11):1760-1765.
    [15] Wang Xi, Bian Jintian, Li Hua, et al. Experiment on damage in K9 glass due to repetition rate pulsed CO2 laser radiation[J]. Infrared and Laser Engineering, 2013, 42(5):1204-1207. (in Chinese)王玺, 卞进田, 李化, 等. 重频脉冲CO2激光损伤K9玻璃的实验[J]. 红外与激光工程, 2013, 42(5):1204-1207.
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Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO2 laser

doi: 10.3788/IRLA201645.1206009
  • 1. Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;
  • 2. University of Science and Technology of China,Hefei 230029,China;
  • 3. State Key Laboratory of Pulsed Power Laser Technology,Electronic Engineering Institute,Hefei 230037,China
  • Received Date: 2016-04-16
  • Rev Recd Date: 2016-05-21
  • Publish Date: 2016-12-25

Abstract: It has very important application value to investigate the damage performance of K9 glass irradiated by ultraviolet excimer laser. In this paper, the experiment research on damage in K9 glass irradiated by 248 nm KrF excimer laser was carried out, the sample damage threshold and damage morphology were analyzed by means of metallurgical microscope and scanning electron microscope. The comparison of laser induced damage performance between KrF excimer laser and pulse CO2 laser were investigated. The experimental results indicate that the damage mechanism of K9 glass irradiated by KrF excimer laser and pulse CO2 laser mainly follow the thermal-mechanical coupling mechanism. However, there is apparent difference in damage threshold and damage time. For example, the damage threshold is lower and the damage time is shorter for KrF excimer laser. This can be explained by the difference in wavelength and photon energy between the KrF excimer laser and pulse CO2 laser. The research presented in this paper is helpful for further exploring the ultraviolet excimer laser damage mechanism of optical materials.

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