Method of no stitching interferometric measurement for rotatory cylindrical surface

Sun Hao; Han Sen; Tang Shouhong; Wang Fang

doi:10.3788/IRLA201746.0717001

A new method and a Fizeau type interference system were introduced in this paper, cylindrical coordinates and cartesian coordinates can be mutual transformation, through a high precision 90℃onical reflector. This system was suitable for the test of 360rotatory cylindrical surface, and the whole surface information can be achieved with one measurement without stitching. The error correction matrix was established in cylindrical coordinates, after analyzing the main component system errors, and simulating their effect with Matlab. A metal ring was tested to prove the feasibility and validity of this method and system. The principal error correction result was consistent with the measurement result by Taylor Hobson, and it was very close to the roundness value, which was calculated through the least square circle (LSC) assessment method. The experimental results show that:this method and system can realized the 360℃ylindrical surface measurement, and the problems of rotary elements testing, low efficiency will be solved.

Method of no stitching interferometric measurement for rotatory cylindrical surface

1. School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;

2. College of Opto-Electronic Information and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;

3. Suzhou H &L Instruments LLC,Suzhou 215123,China

Received Date: 2016-11-10

Rev Recd Date: 2016-12-20

Publish Date: 2017-07-25

Key words:

Abstract: A new method and a Fizeau type interference system were introduced in this paper, cylindrical coordinates and cartesian coordinates can be mutual transformation, through a high precision 90℃onical reflector. This system was suitable for the test of 360rotatory cylindrical surface, and the whole surface information can be achieved with one measurement without stitching. The error correction matrix was established in cylindrical coordinates, after analyzing the main component system errors, and simulating their effect with Matlab. A metal ring was tested to prove the feasibility and validity of this method and system. The principal error correction result was consistent with the measurement result by Taylor Hobson, and it was very close to the roundness value, which was calculated through the least square circle (LSC) assessment method. The experimental results show that:this method and system can realized the 360℃ylindrical surface measurement, and the problems of rotary elements testing, low efficiency will be solved.

HTML

Reference (13)

[1]	Shang Guan, Wang Pin. Study on the system of beam shaping for high-power laser diode array[D]. Hangzhou:Zhejiang University, 2001. (in Chinese).
[2]	Shun Xiafei, Yu Jingchi, Ding Zhezao, et al. Fabrication and testing of the super-smooth silicon cylindrical mirror[J]. Optical Technique, 2001, 27(6):497-498. (in Chinese)
[3]	Long Wei. Study on loading characteristics of orifice compensated aerostatic thrust bearing[D]. Harbin:Harbin Institute of Technology, 2010. (in Chinese)
[4]	Xie Hongbo, Lv Eryang, Zhu Xiaochen, et al. Shaping and collimation of LD beam with astigmatism[J]. Laser Technology, 2013, 37(4):551-555. (in Chinese)
[5]	Lin Junyi, Jiang Kaiyong, Gu Yonghua, et al. Accuacy analysis and application of the profilometry with projecting grating[J]. Opto-Electronic Engineering, 2008, 35(5):80-84. (in Chinese)
[6]	Schwider J, Lindlein N, Schreiner R, et al. Grazing-incidence test for cylindrical microlenses with high numerical aperture[J]. Journal of Optics A, 2002, 4(4):S10-16.
[7]	Tam P W, Gross K P, Bogan J R. Interferometric testing of cylinder optics using computer generated hologram (CGH)[C]//SPIE, 1997, 3134:162-166.
[8]	Yu Yingjie, Xu Haifeng, Peng Junzheng. The interferometric method for the cylindrical surface[J]. Acta Metrologica Sinica, 2015, 36(5):460-463. (in Chinese)
[9]	Hai Yunfei. Research of the reflection model of the edge of objects and a method of measurement[D]. Chengdu:University of Electronic Science and Technology of China, 2015. (in Chinese)
[10]	Viotti M R, Albertazzi A, Pont A D, et al. A novel algorithm to stitch adjacent cloud of points of long cylindrical surfaces[C]//SPIE, 2007, 6616:6616E.
[11]	Sun Hao, Han Sen, Tang Shouhong, et al. Misalignment analysis of cylindrical inner surfaces in interferometric measurement[J]. Acta Optical Sinica, 2017, 37(1):0112005.
[12]	Wyant J C, Creath K. Basic Wavefront Aberration Theory for Optical Metrology[M]. New York:Academic Press, 1992.
[13]	Mahajan V N. Zernike Polynomials and Wavefront Fitting[M]. New Jersey:John WileySons Inc., 2007.

Method of no stitching interferometric measurement for rotatory cylindrical surface

doi: 10.3788/IRLA201746.0717001

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Article Metrics

Related

Proportional views