Measurement of large step structure with a speed-variable scanning technology

Lei Lihua; Li Yuan; Cai Xiaoyu; Wei Jiasi; Fu Yunxia; Shao Li

doi:10.3788/IRLA201746.0717003

A white light interference system was developed with a speed-variable scanning technology to improve signal utilization precision and short measuring time for a large step structure measurement. A Fourier transform and unilateral step evaluation algorithm were performed for processing the scanning interference images. A calibrated standard step height of 9.9760.028 m was measured by the white light interference system using the speed-variable scanning method, the measuring time was 35 s, which was much shorter than a conventional measuring time of 222 s. A 10-times-repetitive-measurement shows a result of 9.971 m with a standard deviation of 0.007 m, illustrates that the system has accuracy and high-efficiency in the measurement of large step structure.

Measurement of large step structure with a speed-variable scanning technology

1. Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China

Received Date: 2016-11-15

Rev Recd Date: 2016-12-19

Publish Date: 2017-07-25

Key words:

Abstract: A white light interference system was developed with a speed-variable scanning technology to improve signal utilization precision and short measuring time for a large step structure measurement. A Fourier transform and unilateral step evaluation algorithm were performed for processing the scanning interference images. A calibrated standard step height of 9.9760.028 m was measured by the white light interference system using the speed-variable scanning method, the measuring time was 35 s, which was much shorter than a conventional measuring time of 222 s. A 10-times-repetitive-measurement shows a result of 9.971 m with a standard deviation of 0.007 m, illustrates that the system has accuracy and high-efficiency in the measurement of large step structure.

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Measurement of large step structure with a speed-variable scanning technology

doi: 10.3788/IRLA201746.0717003

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