Study on energy stability for excimer laser skin therapeutic apparatus

Zhao Duliang; Li Wenjie; Liang Xu; Fang Xiaodong

doi:10.3788/IRLA201746.1206001

Volume 46 Issue 12

Jan. 2018

Turn off MathJax

Article Contents

Article Navigation > Infrared and Laser Engineering > 2017 > 46(12): 1206001-1206001(7)

Zhao Duliang, Li Wenjie, Liang Xu, Fang Xiaodong. Study on energy stability for excimer laser skin therapeutic apparatus[J]. Infrared and Laser Engineering, 2017, 46(12): 1206001-1206001(7). doi: 10.3788/IRLA201746.1206001

Citation:

Zhao Duliang, Li Wenjie, Liang Xu, Fang Xiaodong. Study on energy stability for excimer laser skin therapeutic apparatus[J]. Infrared and Laser Engineering, 2017, 46(12): 1206001-1206001(7). doi: 10.3788/IRLA201746.1206001

Study on energy stability for excimer laser skin therapeutic apparatus

doi: 10.3788/IRLA201746.1206001

1.
Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;
2.
University of Science and Technology of China,Hefei 230026,China

Received Date: 2017-04-10
Rev Recd Date: 2017-05-20
Publish Date: 2017-12-25

Abstract

In order to meet output parameters, especially the stability of the laser energy requirements for the 308 nm skin therapeutic apparatus, first of all, the laser energy attenuation model and proportional integral (PI) algorithm based on energy compensation by the excitation voltage were established, its theoretical analysis and simulation were compeleted. Secondly, the experimental research on excimer laser was carried out which included high voltage excitation power supply and laser energy detection module based on fast nondestructive photoelectric diode. Meanwhile, the experimental research on the relationship between excitation voltage and output power, characteristics of laser energy attenuation and laser energy stability properties with the introduction of PI algorithm was studied. The results show that the power supply and energy detection module meet the PI algorithm control precision and response speed. Meanwhile, the excimer laser output energy can still maintain a target energy within 17.5 mJ and energy variance is slowly rising from 0.2% to 3% in the 10 million pulses after introducing the PI algorithm, which well meets the usage requirements of excimer laser skin therapeutic apparatus.
- energy stability,
- excimer,
- laser,
- excitation power,
- proportional integral algorithm

References

[1]	Gontad F, Conde J C, Chiussi S, et al. 193 nm excimer laser processing of Si/Ge/Si(100) micropatterns[J]. Applied Surface Science, 2016, 362:217-220.
[2]	Yu Yinshan, You Libing, Liang Xu, et al. Progress of excimer lasers technology[J]. Chinese J Lasers, 2010, 37(9):2253-2270. (in Chinese)余吟山, 游利兵, 梁勖, 等. 准分子激光技术发展[J]. 中国激光, 2010, 37(9):2253-2270.
[3]	Zhang Jian, Lin Guangping, Zhang Rui, et al. Fabrication of large grain size p-Si film by phase modulated excimer laser crystallization[J]. Optics and Precision Engineering, 2012, 20(1):59-63. (in Chinese)张健,林广平,张睿,等. 准分子激光相位掩膜法制备大晶粒尺寸多晶硅薄膜[J]. 光学精密工程, 2012, 20(1):59-63.
[4]	Tian L S, Liu Z, Li L, et al. A comparison of the characteristics of excimer and femtosecond laser ablation of acrylonitrile butadiene styrene (ABS)[J]. Applied Surface Science, 2016, 364:467-476.
[5]	Guo P, Rao Y, Li D, et al. Inscription of Bragg gratings in few-mode optical fibers[J]. Chinese Optics Letters, 2013, 11(2):18-20.
[6]	Chen Y, Okada T, Noguchi T, et al. Excimer laser annealing for low-voltage power MOSFET[J]. Japanese Journal of Applied Physics, 2016, 55(8):086503.
[7]	Zhang Wei, Liang Xu, Tao Ruhua, et al. Reasarch of compact excimer laser for producing FBG[J]. Infrared and Laser Engineering, 2016, 45(1):0105001. (in Chinese)张威, 梁勖, 陶汝华, 等. 用于制作FBG的紧凑型准分子激光器的研究[J]. 红外与激光工程, 2016, 45(1):0105001.
[8]	Plaza-Puche A B, Aswad A E, Arba-Mosquera S, et al. Optical profile following high hyperopia correction with a 500-Hz excimer laser system.[J]. Journal of Refractive Surgery, 2016, 32(1):6.
[9]	Shroff A, Malajian D, Czarnowicki T, et al. Use of 308 nm excimer laser for the treatment of chronic hand and foot eczema[J]. International Journal of Dermatology, 2016, 55(8):e447-e453.
[10]	Ma Yue, Yang Chunjun, Deng Zanhong, et al. Advances in vitiligo treatment by 308nm excimer laser[J]. Acta Laser Biology Sinica, 2012, 21(4):295-298. (in Chinese)马跃, 杨春俊, 邓赞红,等. 308 nm准分子激光治疗白癜风皮肤病进展[J]. 激光生物学报, 2012, 21(4):295-298.
[11]	Fang Xiaodong, Dai Jinghua. Experimental study on gas lifetime of XeCl excimer laser[J]. Laser Technology, 1996, 20(1):50-52. (in Chinese)方晓东, 戴静华. 实用化XeCl准分子激光器气体寿命的实验研究[J]. 激光技术, 1996, 20(1):50-52.
[12]	Hu Xuejin, Zhao Zhensheng, Li Zhaolin, et al. Study on the operation lifetime of an excimer laser[J]. Acta Photonica Sinica, 1985, 5(10):881-884. (in Chinese)胡雪金,赵振声, 李昭林. 等. XeCl准分子激光器寿命的研究[J]. 光学学报, 1985, 5(10):881-884.
[13]	Sumitani A, Andou S, Watanabe T, et al. Output stabilization technology with chemical impurity control on ArF excimer laser[C]//Microlithography, International Society for Optics and Photonics, 2000:1424-1434.
[14]	Liang Xu, You Libing, Yu Yinshan. Excimer laser pulse energy detection under pulse repetion running mode[J]. Chinese Journal of Quantum Electronics, 2010, 27(3):281-287. (in Chinese)梁勖, 游利兵, 余吟山. 重复率激光的单个激光能量检测技术[J]. 量子电子学报, 2010, 27(3):281-287.
[15]	Fan Yuanyuan, Zhou Yi, Liu Guangyi, et al. Compound cavity ArF excimer laser with high efficiency[J]. Chinese J Lasers, 2016, 43(2):0202001. 范元媛, 周翊, 刘广义, 等. 高效率ArF准分子激光复合腔技术研究[J]. 中国激光, 2016, 43(2):0202001.
[16]	Kakizaki K, Sasaki Y, Inoue T. High-repetition-rate(6 kHz)and long-pulse-duration(50 ns) ArF immersion lithography[C]//Proceedings of SPIE, 2008, 6924:2R1-2R10.
[17]	Pflanz T, Huber H. Compact excimer laser light source for optical inspection systems[C]//Proceedings of SPIE, 2001, 4349:180-184.
[18]	Wang Xiaoshun, Liang Xu, You Libing, et al. Study on energy control algorithm for high-repetition-rate ArF excimer lasers[J]. Laser Technology, 2012, 36(6):763-766. (in Chinese)王效顺, 梁勖, 游利兵, 等.高重复频率ArF准分子激光器能量控制算法研究[J]. 激光技术, 2012, 36(6):763-766.
[19]	Zhan Juntong, Fu Qiang, Duan Jin, et al. Stability improvement of DFB laser driving power using digital position PID algorithm[J]. Infrared and Laser Engineering, 2015, 44(6):1758-1761. (in Chinese)战俊彤, 付强, 段锦, 等.利用位置式数字PID算法提高DFB激光器驱动电源稳定性[J].红外与激光工程, 2015, 44(6):1758-1761.
[20]	Liu Yi, Fang Xiaodong, Liang Xu, et al. 308 nm XeCl excimer laser system used for treatment of vitiligo[J]. Chinese J Lasers, 2012, 39(6):0602002. 刘毅, 方晓东, 梁勖, 等. 用于白癜风治疗的308 nm XeCl准分子激光系统[J]. 中国激光, 2012, 39(6):0602002.
[21]	Patil S L, Agarwala A K. Push pull boost converter with low loss switching[C]//Industrial Technology ICIT International Conference on IEEE, 2008:1-6.
[22]	Kim E H, Kwon B H. High step-up resonant push-pull converter with high efficiency[J]. Power Electronics, IET, 2009, 2(1):79-89.

Proportional views

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Get Citation

PDF

XML

Article Metrics

Article views(432) PDF downloads(38) Cited by()

Proportional views

Study on energy stability for excimer laser skin therapeutic apparatus

1. Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;

2. University of Science and Technology of China,Hefei 230026,China

Received Date: 2017-04-10

Rev Recd Date: 2017-05-20

Publish Date: 2017-12-25

Key words:

Abstract: In order to meet output parameters, especially the stability of the laser energy requirements for the 308 nm skin therapeutic apparatus, first of all, the laser energy attenuation model and proportional integral (PI) algorithm based on energy compensation by the excitation voltage were established, its theoretical analysis and simulation were compeleted. Secondly, the experimental research on excimer laser was carried out which included high voltage excitation power supply and laser energy detection module based on fast nondestructive photoelectric diode. Meanwhile, the experimental research on the relationship between excitation voltage and output power, characteristics of laser energy attenuation and laser energy stability properties with the introduction of PI algorithm was studied. The results show that the power supply and energy detection module meet the PI algorithm control precision and response speed. Meanwhile, the excimer laser output energy can still maintain a target energy within 17.5 mJ and energy variance is slowly rising from 0.2% to 3% in the 10 million pulses after introducing the PI algorithm, which well meets the usage requirements of excimer laser skin therapeutic apparatus.

HTML

Reference (22)

[1]	Gontad F, Conde J C, Chiussi S, et al. 193 nm excimer laser processing of Si/Ge/Si(100) micropatterns[J]. Applied Surface Science, 2016, 362:217-220.
[2]	Yu Yinshan, You Libing, Liang Xu, et al. Progress of excimer lasers technology[J]. Chinese J Lasers, 2010, 37(9):2253-2270. (in Chinese)余吟山, 游利兵, 梁勖, 等. 准分子激光技术发展[J]. 中国激光, 2010, 37(9):2253-2270.
[3]	Zhang Jian, Lin Guangping, Zhang Rui, et al. Fabrication of large grain size p-Si film by phase modulated excimer laser crystallization[J]. Optics and Precision Engineering, 2012, 20(1):59-63. (in Chinese)张健,林广平,张睿,等. 准分子激光相位掩膜法制备大晶粒尺寸多晶硅薄膜[J]. 光学精密工程, 2012, 20(1):59-63.
[4]	Tian L S, Liu Z, Li L, et al. A comparison of the characteristics of excimer and femtosecond laser ablation of acrylonitrile butadiene styrene (ABS)[J]. Applied Surface Science, 2016, 364:467-476.
[5]	Guo P, Rao Y, Li D, et al. Inscription of Bragg gratings in few-mode optical fibers[J]. Chinese Optics Letters, 2013, 11(2):18-20.
[6]	Chen Y, Okada T, Noguchi T, et al. Excimer laser annealing for low-voltage power MOSFET[J]. Japanese Journal of Applied Physics, 2016, 55(8):086503.
[7]	Zhang Wei, Liang Xu, Tao Ruhua, et al. Reasarch of compact excimer laser for producing FBG[J]. Infrared and Laser Engineering, 2016, 45(1):0105001. (in Chinese)张威, 梁勖, 陶汝华, 等. 用于制作FBG的紧凑型准分子激光器的研究[J]. 红外与激光工程, 2016, 45(1):0105001.
[8]	Plaza-Puche A B, Aswad A E, Arba-Mosquera S, et al. Optical profile following high hyperopia correction with a 500-Hz excimer laser system.[J]. Journal of Refractive Surgery, 2016, 32(1):6.
[9]	Shroff A, Malajian D, Czarnowicki T, et al. Use of 308 nm excimer laser for the treatment of chronic hand and foot eczema[J]. International Journal of Dermatology, 2016, 55(8):e447-e453.
[10]	Ma Yue, Yang Chunjun, Deng Zanhong, et al. Advances in vitiligo treatment by 308nm excimer laser[J]. Acta Laser Biology Sinica, 2012, 21(4):295-298. (in Chinese)马跃, 杨春俊, 邓赞红,等. 308 nm准分子激光治疗白癜风皮肤病进展[J]. 激光生物学报, 2012, 21(4):295-298.
[11]	Fang Xiaodong, Dai Jinghua. Experimental study on gas lifetime of XeCl excimer laser[J]. Laser Technology, 1996, 20(1):50-52. (in Chinese)方晓东, 戴静华. 实用化XeCl准分子激光器气体寿命的实验研究[J]. 激光技术, 1996, 20(1):50-52.
[12]	Hu Xuejin, Zhao Zhensheng, Li Zhaolin, et al. Study on the operation lifetime of an excimer laser[J]. Acta Photonica Sinica, 1985, 5(10):881-884. (in Chinese)胡雪金,赵振声, 李昭林. 等. XeCl准分子激光器寿命的研究[J]. 光学学报, 1985, 5(10):881-884.
[13]	Sumitani A, Andou S, Watanabe T, et al. Output stabilization technology with chemical impurity control on ArF excimer laser[C]//Microlithography, International Society for Optics and Photonics, 2000:1424-1434.
[14]	Liang Xu, You Libing, Yu Yinshan. Excimer laser pulse energy detection under pulse repetion running mode[J]. Chinese Journal of Quantum Electronics, 2010, 27(3):281-287. (in Chinese)梁勖, 游利兵, 余吟山. 重复率激光的单个激光能量检测技术[J]. 量子电子学报, 2010, 27(3):281-287.
[15]	Fan Yuanyuan, Zhou Yi, Liu Guangyi, et al. Compound cavity ArF excimer laser with high efficiency[J]. Chinese J Lasers, 2016, 43(2):0202001. 范元媛, 周翊, 刘广义, 等. 高效率ArF准分子激光复合腔技术研究[J]. 中国激光, 2016, 43(2):0202001.
[16]	Kakizaki K, Sasaki Y, Inoue T. High-repetition-rate(6 kHz)and long-pulse-duration(50 ns) ArF immersion lithography[C]//Proceedings of SPIE, 2008, 6924:2R1-2R10.
[17]	Pflanz T, Huber H. Compact excimer laser light source for optical inspection systems[C]//Proceedings of SPIE, 2001, 4349:180-184.
[18]	Wang Xiaoshun, Liang Xu, You Libing, et al. Study on energy control algorithm for high-repetition-rate ArF excimer lasers[J]. Laser Technology, 2012, 36(6):763-766. (in Chinese)王效顺, 梁勖, 游利兵, 等.高重复频率ArF准分子激光器能量控制算法研究[J]. 激光技术, 2012, 36(6):763-766.
[19]	Zhan Juntong, Fu Qiang, Duan Jin, et al. Stability improvement of DFB laser driving power using digital position PID algorithm[J]. Infrared and Laser Engineering, 2015, 44(6):1758-1761. (in Chinese)战俊彤, 付强, 段锦, 等.利用位置式数字PID算法提高DFB激光器驱动电源稳定性[J].红外与激光工程, 2015, 44(6):1758-1761.
[20]	Liu Yi, Fang Xiaodong, Liang Xu, et al. 308 nm XeCl excimer laser system used for treatment of vitiligo[J]. Chinese J Lasers, 2012, 39(6):0602002. 刘毅, 方晓东, 梁勖, 等. 用于白癜风治疗的308 nm XeCl准分子激光系统[J]. 中国激光, 2012, 39(6):0602002.
[21]	Patil S L, Agarwala A K. Push pull boost converter with low loss switching[C]//Industrial Technology ICIT International Conference on IEEE, 2008:1-6.
[22]	Kim E H, Kwon B H. High step-up resonant push-pull converter with high efficiency[J]. Power Electronics, IET, 2009, 2(1):79-89.

Study on energy stability for excimer laser skin therapeutic apparatus

doi: 10.3788/IRLA201746.1206001

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Article Metrics

Related

Proportional views