Design of highly sensitive on-line detecting system for ultraviolet pulse lasers energy

Li Wenjie; Zhao Duliang; Lin Ying; Liang Xu; Fang Xiaodong

doi:10.3788/IRLA201746.1222002

A kind of ultraviolet pulse laser energy detection system based on PIN photodiode was introduced. Firstly, the light outside main optical path was used to realize nondestructive and real-time pulse energy detecting. Secondly, high-speed and high-precision integral circuit was designed to process photocurrent signal for voltage peak. Finally, the synchronous trigger signal of laser system was used for timing sequence design. Thus, the accurate voltage difference was obtained and the exact laser pulse energy can be calculated. Tested on 248 nmKrF and 308 nmXeCl excimer laser, the real-time nondestructive measuring was realized while the laser ran in a pulse repetition mode up to 200 Hz. The relevance and repeatability of the measuring data were in accordance with the results of the external energy meter of output end and the system meets the application requirements.

Design of highly sensitive on-line detecting system for ultraviolet pulse lasers energy

1. Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;

2. University of Science and Technology of China,Hefei 230026,China

Received Date: 2017-04-05

Rev Recd Date: 2017-05-03

Publish Date: 2017-12-25

Key words:

Abstract: A kind of ultraviolet pulse laser energy detection system based on PIN photodiode was introduced. Firstly, the light outside main optical path was used to realize nondestructive and real-time pulse energy detecting. Secondly, high-speed and high-precision integral circuit was designed to process photocurrent signal for voltage peak. Finally, the synchronous trigger signal of laser system was used for timing sequence design. Thus, the accurate voltage difference was obtained and the exact laser pulse energy can be calculated. Tested on 248 nmKrF and 308 nmXeCl excimer laser, the real-time nondestructive measuring was realized while the laser ran in a pulse repetition mode up to 200 Hz. The relevance and repeatability of the measuring data were in accordance with the results of the external energy meter of output end and the system meets the application requirements.

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Reference (16)

[1]	Liu Shiyuan, Wu Xiaojian. Real-time exposure dose control algorithm for DUV excimer lasers[J]. Acta Optica Sinica, 2006, 26(6):878-884.
[2]	Yu Yinshan, You Libing, Liang Xu, et al. Progress of excimer lasers technology[J]. Chinese J Lasers, 2010, 37(9):2253-2270. (in Chinese)
[3]	Wakabayashi O, Enami T, Ishii K, et al. High-repetition-rate ArF excimer laser for microlithography[C]//SPIE, 2000, 4088:DOI10.1117/12. 405749.
[4]	Inoue S, Fujisawa T, Izuha K. Effective exposure dose measurement in optical microlithography[C]//SPIE, 2000, 3998:DOI10.1117/12. 386445.
[5]	Shi Haiyan, Zhao Jiangshan, Song Xingliang, et al. Analysis on factors affecting energy stability of excimer laser for lithography[J]. Infrared and Laser Engineering, 2014, 43(11):3540-3546. (in Chinese)
[6]	Xie Chengke, Chen Ming, Yang Baoxi, et al. Development and performance testing of pulsed excimer laser energy detector[J]. Chinese J Lasers, 2015, 42(1):0102006. (in Chinese)
[7]	Hu Juntao, Liu Xiang, Zhang Guoyong, et al. A real-time energy meter for medical excimer laser[J]. Chinese J Lasers, 2007, 34(12):1732-1735. (in Chinese)
[8]	Liang Xu, You Libing, Wang Tao, et al. Excimer pulse energy stabilization realized by charging voltage realtime adjusting[J]. Chinese J Lasers, 2010, 37(2):374-378.
[9]	Zhang Lei, Zhao Jun, Yang Pengling, et al. Pyroelectric detecting of high-repetition-frequency pulse laser[J]. Laser Optoelectronics Progress, 2010, 47(7):109-113. (in Chinese)
[10]	Liang Xu, You Libing, Yu Yinshan. Excimer laser pulse energy detection under pulse repetion running mode[J]. Chinese Journal of Quantum Electronics, 2010, 27(3):281-287. (in Chinese)
[11]	Cen Zhaofeng, Li Xiaotong, Zhu Qihua. Stray light analysis for optical system[J]. Infrared and Laser Engineering, 2007, 36(3):300-304. (in Chinese)
[12]	Zhang Haibo, Lou Qihong, Zhou Jun, et al. ArF excimer laser line narrowing technique[J]. Laser Optoelectronics Progress, 2009, 46(12):46-51. (in Chinese)
[13]	Wang Qi, Wang Xiaoman, Zhao Haili, et al. Research on weak laser energy detection system[J]. Journal of Changchun University of Science and Technology (Natural Science Edition), 2016, 39(2):62-66. (in Chinese)
[14]	Feng Gang, Feng Guobin, Shao Bibo, et al. Energy measurement of high-repetition-rate pulsed laser[J]. Chinese Optics, 2013, 6(2):196-200. (in Chinese)
[15]	Barna A, Fldes I B, Gingl Z, et al. Compact energy measuring system for short pulse lasers[J]. Metrology and Measurement Systems, 2013, 20(2):183-190.
[16]	Xiong Yan, Lu Yaodong, Zhu Min, et al. Design of peak holding circruit for narrow laser pulse[J]. Laser Infrared, 2012, 42(12):1377-1380. (in Chinese)

Design of highly sensitive on-line detecting system for ultraviolet pulse lasers energy

doi: 10.3788/IRLA201746.1222002

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