Volume 47 Issue 8
Aug.  2018
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Cui Jianjun, Du Hua, Zhu Xiaoping, Xue Zi, Yan Yonggang, Chen Kai. Measurement characteristics analysis and test of 3D laser scanning confocal microscope[J]. Infrared and Laser Engineering, 2018, 47(8): 817005-0817005(8). doi: 10.3788/IRLA201847.0817005
Citation: Cui Jianjun, Du Hua, Zhu Xiaoping, Xue Zi, Yan Yonggang, Chen Kai. Measurement characteristics analysis and test of 3D laser scanning confocal microscope[J]. Infrared and Laser Engineering, 2018, 47(8): 817005-0817005(8). doi: 10.3788/IRLA201847.0817005
shu

Measurement characteristics analysis and test of 3D laser scanning confocal microscope

doi: 10.3788/IRLA201847.0817005
  • 1.

    National Institute of Metrology,Beijing 100013,China;

  • 2.

    School of Mechanical and Power Engineering,Henan Polytechnic University,Jiaozuo 454000,China

  • Received Date: 2018-03-13
  • Rev Recd Date: 2018-04-17
  • Publish Date: 2018-08-25
  • In order to evaluate the measurement performance of laser scanning confocal microscope (LSCM) accurately, one measurement approach for checking LSCM was presented. Firstly, based on the imaging principle, the technical characteristics of LSCM, especially the vertical resolution and lateral resolution were analyzed in theory; then main parameters of the measurement characteristics were summarized, and the corresponding performance testing menthod were proposed. Such as the amplification and the lateral optical resolution of the LSCM were tested with the nanometer and sub micronmeter line spacing grid standard plates; the axial optical resolution and the axial positioning characteristics of the LSCM were tested with the nanometer height steps; the performances of the sample stage were tested with the laser interferometer. The experimental results show that this method can meet the current performance requirements of LSCM.
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Measurement characteristics analysis and test of 3D laser scanning confocal microscope

doi: 10.3788/IRLA201847.0817005
  • 1. National Institute of Metrology,Beijing 100013,China;
  • 2. School of Mechanical and Power Engineering,Henan Polytechnic University,Jiaozuo 454000,China
  • Received Date: 2018-03-13
  • Rev Recd Date: 2018-04-17
  • Publish Date: 2018-08-25

Abstract: In order to evaluate the measurement performance of laser scanning confocal microscope (LSCM) accurately, one measurement approach for checking LSCM was presented. Firstly, based on the imaging principle, the technical characteristics of LSCM, especially the vertical resolution and lateral resolution were analyzed in theory; then main parameters of the measurement characteristics were summarized, and the corresponding performance testing menthod were proposed. Such as the amplification and the lateral optical resolution of the LSCM were tested with the nanometer and sub micronmeter line spacing grid standard plates; the axial optical resolution and the axial positioning characteristics of the LSCM were tested with the nanometer height steps; the performances of the sample stage were tested with the laser interferometer. The experimental results show that this method can meet the current performance requirements of LSCM.

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