Volume 47 Issue 12
Jan.  2019
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Ke Changjun, Wu Tianhao, Kong Xinyi, Zhong Yanhong, Wu Jin. TE CO2 laser narrow pulse modification based on a pinhole plasma shutter[J]. Infrared and Laser Engineering, 2018, 47(12): 1206007-1206007(4). doi: 10.3788/IRLA201847.1206007
Citation: Ke Changjun, Wu Tianhao, Kong Xinyi, Zhong Yanhong, Wu Jin. TE CO2 laser narrow pulse modification based on a pinhole plasma shutter[J]. Infrared and Laser Engineering, 2018, 47(12): 1206007-1206007(4). doi: 10.3788/IRLA201847.1206007

TE CO2 laser narrow pulse modification based on a pinhole plasma shutter

doi: 10.3788/IRLA201847.1206007
  • Received Date: 2018-07-11
  • Rev Recd Date: 2018-08-20
  • Publish Date: 2018-12-25
  • The typical pulse from a TE CO2 laser consists of a 100 ns sharp spike followed by a long tail region spanning about 3-5 s. A simple pinhole plasma shutter was employed for eliminating the long tail part of the pulse due to strong laser absorption and scattering. Moreover, it remained the sharp spike of the pulse, thus the pulse width was modified. The shaped laser pulse waveforms at different pinhole positions were measured. The relationships between the laser pulse width, laser energy and defocus length were obtained, the pulse width of the CO2 laser from 110 ns to 50 ns was varied using the method. Further study indicates that the life of the pinhole plasma shutter is mainly determined by the laser pulse energy, repetition frequency, and shaped pulse width. It is shown that this plasma shutter will be used as a tool for short CO2 laser pulse shaping in the search for EUV source and lidar development.
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    [2] Fried N M, Fried D. Comparison of Er:YAG and 9.6m TE CO2 lasers for ablation of skull tissue[J]. Lasers in Surgery and Medicine, 2002, 28(4):335-343.
    [3] Wang Yunfei, Wu Jin, Liu Shiming. Tuning characteristics of long pulse TE CO2 lasers[J]. Infrared and Laser Engineering, 2008, 37(2):226-229. (in Chinese)
    [4] Zhang Kuo, Lu Jun, Yang Guilong. Estimation of far field divergence of high power TEA CO2 lasers[J]. Infrared and Laser Engineering, 2015, 44(3):2286-2290. (in Chinese)
    [5] Gasmi T, Zeaiter H A, Ropero G. Plasma-based nitrogen tail pulse shutter for CO2 TEA lidar dial systems[J]. Appled Physics B, 2000, 71(2):169-175.
    [6] Ren Deming, Zhang Lili, Qu Yanchen. Application of plasma switch in TEA CO2 laser multiplication[J]. Chinese Journal of Laser, 2004, 31(9):1061-1064. (in Chinese)
    [7] Tao Y, Tillack M S, Amin N, et al. CO2 laser system for fundamental research related to an extreme ultraviolet lithography source[J]. Review of Scientific Instruments, 2009, 80:123503.
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    [9] Houtman H, Meyer J. Ultrashort CO2 laser pulse generation by square-wave mode locking and cavity dumping[J]. Optics Letters, 1987, 12(2):87-90.
    [10] Hoshino H, Suganuma T, Asayama T. LPP EUV light source employing high power CO2 laser[C]//SPIE, 2008, 6921:692131.
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TE CO2 laser narrow pulse modification based on a pinhole plasma shutter

doi: 10.3788/IRLA201847.1206007
  • 1. Institute of Electronics,Chinese Academy of Sciences,Beijing 100190,China;
  • 2. University of Chinese Academy of Sciences,Beijing 100049,China

Abstract: The typical pulse from a TE CO2 laser consists of a 100 ns sharp spike followed by a long tail region spanning about 3-5 s. A simple pinhole plasma shutter was employed for eliminating the long tail part of the pulse due to strong laser absorption and scattering. Moreover, it remained the sharp spike of the pulse, thus the pulse width was modified. The shaped laser pulse waveforms at different pinhole positions were measured. The relationships between the laser pulse width, laser energy and defocus length were obtained, the pulse width of the CO2 laser from 110 ns to 50 ns was varied using the method. Further study indicates that the life of the pinhole plasma shutter is mainly determined by the laser pulse energy, repetition frequency, and shaped pulse width. It is shown that this plasma shutter will be used as a tool for short CO2 laser pulse shaping in the search for EUV source and lidar development.

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