Ultrashort pulse laser drilling of micro-holes (part 1)——theoretical study

Zhao Wanqin; Mei Xuesong; Wang Wenjun

doi:10.3788/IRLA201948.0106008

Volume 48 Issue 1

Jan. 2019

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Zhao Wanqin, Mei Xuesong, Wang Wenjun. Ultrashort pulse laser drilling of micro-holes (part 1)——theoretical study[J]. Infrared and Laser Engineering, 2019, 48(1): 106008-0106008(9). doi: 10.3788/IRLA201948.0106008

Citation:

Zhao Wanqin, Mei Xuesong, Wang Wenjun. Ultrashort pulse laser drilling of micro-holes (part 1)——theoretical study[J]. Infrared and Laser Engineering, 2019, 48(1): 106008-0106008(9). doi: 10.3788/IRLA201948.0106008

Ultrashort pulse laser drilling of micro-holes (part 1)——theoretical study

doi: 10.3788/IRLA201948.0106008

1.
School of Materials Engineering,Shanghai University of Engineering Science,Shanghai 201620,China;
2.
Shanghai Collaborative Innovation Center of Laser Advanced Manufacturing Technology,Shanghai 201620,China;
3.
State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049,China

Received Date: 2018-08-05
Rev Recd Date: 2018-09-03
Publish Date: 2019-01-25

Abstract

Since the invention of lasers in the 1960s, the pulse duration has being continuously shorten down to the sub-picosecond and even femtosecond regime. It makes the laser processing technology to the ultrashort pulse laser era. In order to further optimize the ultrashort pulse laser micro-machining, theoretical study is indispensable. The interaction mechanism between ultrashort pulse laser and different types of materials were presented. The typical physical properties, such as plasma effect, self-focusing and filamentation, and conical radiation, were discussed. The theoretical studies for ultrashort pulse laser drilling of micro-hole were analyzed. Furthermore, the challenging issues were obtained.
- ultrashort pulse laser,
- micro-hole drilling,
- mechanical,
- physical property

References

[1]	Siegal Y, Glezer E N, L Huang A, et al. Laser-induced phase transitions in semiconductors[J]. Annual Review of Materials Research, 1995, 25(1):223-247.
[2]	Maiman T H. Stimulated optical radiation in ruby[J]. Nature, 1969, 187(4736):134-136.
[3]	Wang Xiaodong. Ablation and micromachining of metals with short and ultra-short laser pulses[D]. Wuhan:Huazhong University of Science and Technology, 2009. (in Chinese)
[4]	Lu Shiji. A course on solid physics[M]. Beijing:Peking University Press, 1990. (in Chinese)
[5]	Chichkov B N, Momma C, Nolte S, et al. Femtosecond, picosecond and nanosecond laser ablation of solids[J]. Applied Physics A Materials Science Processing, 1996, 63(2):109-115.
[6]	Sundaram S K, Mazur E. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses[J]. Nature Materials, 2002, 1(4):217.
[7]	Linde D V D, Sokolowski-Tinten K, Bialkowski J. Laser-solid interaction in the femtosecond time regime[J]. Applied Surface Science, 1997, s109-110:1-10.
[8]	Buerle D. Laser Processing and Chemistry[M]. Berlin:Springer, 2000:291-292.
[9]	Shah J. Ultrafast Spectroscopy of Semiconductors and Semiconductor Nanostructures[M]. Berlin:Springer, 1999.
[10]	Httner B, Rohr G. On the theory of ps and sub-ps laser pulse interaction with metals I. Surface temperature[J]. Applied Surface Science, 1996, 103(3):269-274.
[11]	Downer M C, Shank C V. Ultrafast heating of silicon on sapphire by femtosecond optical pulses[J]. Physical Review Letters, 1986, 56(56):761-764.
[12]	Kaiser A, Rethfeld B, Vicanek M, et al. Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses[J]. Physical Review B, 2000, 61(17):11437-11450.
[13]	Jiang L, Tsai H L. Prediction of crater shape in femtosecond laser ablation of dielectrics[J]. Journal of Physics D Applied Physics, 2004, 37(10):1492.
[14]	Sugioka K, Cheng Y. Ultrafast Laser Processing:from Micro-to Nanoscale[M]. Singapore:Pan Stanford Pub, 2013.
[15]	Kper S, Stuke M. Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses[J]. Applied Physics Letters, 1989, 54(1):4-6.
[16]	Li Yi. Heat accumulation in high repetition rate femtosecond laser micromachining and its applications[D]. Tianjin:Tianjin University, 2012. (in Chinese)
[17]	Fan C H, Sun J, Longtin J P. Plasma Absorption of Femtosecond Laser Pulses in Dielectrics[J]. Journal of Heat Transfer, 2002, 124(2):275-283.
[18]	Zhang Wentao. Research on the interaction between femtosecond and the silicon nitride crystal film[D]. Xi'an:Northwest University, 2009. (in Chinese)
[19]	Stuart B C, Feit M D, Herman S, et al. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics[J]. Physical Review B Condensed Matter, 1996, 53(4):1749.
[20]	Jiang L, Tsai H L. Plasma modeling for ultrashort pulse laser ablation of dielectrics[J]. Journal of Applied Physics, 2006, 100(2):729.
[21]	Russo R E, Mao X L, Liu H C, et al. Time-resolved plasma diagnostics and mass removal during single-pulse laser ablation[J]. Applied Physics A, 1999, 69(1):S887-S894.
[22]	Mao S S, Mao X, Greif R, et al. Initiation of an early-stage plasma during picosecond laser ablation of solids[J]. Applied Physics Letters, 2000, 77(16):2464-2466.
[23]	Dausinger F, Lubatschowski H, Lichtner F. Femtosecond Technology for Technical and Medical Applications[M]. Topics in Applied Physics, 96. Berlin, Heidelberg:Springer, 2004.
[24]	Breitling D, Dausinger F. Fundamental aspects in machining of metals with short and ultrashort laser pulses[C]//SPIE, 2004, 5339:49-63.
[25]	Kasparian J, Sauerbrey R, Chin S L. The critical laser intensity of self-guided light filaments in air[J]. Applied Physics B, 2000, 71(6):877-879.
[26]	Stafe M, Marcu A, Puscas N N. Pulsed Laser Ablation of Solids[M]. Berlin:Springer, 2014:758-770.
[27]	Marburger J H, Dawes E. Dynamical formation of a small-scale filament[J]. Physical Review Letters, 1968, 21(8):556-558.
[28]	Couairon A, Mysyrowicz A. Femtosecond filamentation in transparent media[J]. Physics Reports, 2007, 441(2-4):47-189.
[29]	Braun A, Korn G, Liu X, et al. Self-channeling of high-peak-power femtosecond laser pulses in air[J]. Optics Letters, 1995, 20(1):73-75.
[30]	Schaaf P. Laser Processing of Materials:Fundamentals, Applications and Developments[M]. Berlin:Springer, 2010:15-21.
[31]	Courvoisier F, Boutou V, Kasparian J, et al. Ultraintense light filaments transmitted through clouds[J]. Applied Physics Letters, 2003, 83(2):213-215.
[32]	Monot P, Auguste T, Gibbon P, et al. Experimental demonstration of relativistic self-channeling of a multiterawatt laser pulse in an underdense plasma[J]. Physical Review Letters, 1995, 74(15):2953.
[33]	Pukhov A. Strong field interaction of laser radiation[J]. Reports on Progress in Physics, 2003, 65(1):1-55.
[34]	Breitling D, Ruf A, Berger P W, et al. Plasma effects during ablation and drilling using pulsed solid-state lasers[C]//SPIE, 2003, 5121:24-33.
[35]	Golub I. Optical characteristics of supercontinuum generation[J]. Optics Letters, 1990, 15(6):305.
[36]	Nibbering E T, Curley P F, Grillon G, et al. Conical emission from self-guided femtosecond pulses in air[J]. Optics Letters, 1996, 21(1):62.
[37]	Sun J, Longtin J P. Effects of a gas medium on ultrafast laser beam delivery and materials processing[J]. Journal of the Optical Society of America B, 2004, 21(5):1081-1088.
[38]	Kaganov M I, Lifshits I M, Tanatarov L V. Relaxation between electrons and crystalline lattice[J]. Sov Phys JETP, 1957, 4(31):173.
[39]	Anisimov S I, Kapeliovich B L, Perelman T L. Electron emission from metal surfaces exposed to ultrashort laser pulses[J]. Zhurnal Eksperimentalnoi I Teoreticheskoi Fiziki, 1974, 66(776):776-781.
[40]	Qiu T Q, Tien C L. Heat transfer mechanisms during short-pulse laser heating of metals[J]. Journal of Heat Transfer, 1993, 115:4(4):835-841.
[41]	Xu Xiaofang. Study on transient reflectivity phenomenon on the surfaceas of metal films induced by femtosecond laser[D]. Zhenjiang:Jiangsu University, 2013. (in Chinese)
[42]	Anisimov S I, Rethfeld B. Theory of ultrashort laser pulse interaction with a metal[C]//SPIE, 1997, 3093:192-203.
[43]	Kotake S, Kuroki M. Molecular dynamics study of solid melting and vaporization by laser irradiation[J]. International Journal of Heat Mass Transfer, 1993, 36(8):2061-2067.
[44]	Jiang L, Tsai H L. Improved two-temperature model and its application in ultrashort laser heating of metal films[J]. Journal of Heat Transfer, 2005, 127(10):1167.
[45]	Bvillon E, Colombier J P, Recoules V, et al. First-principles calculations of heat capacities of ultrafast laser-excited electrons in metals[J]. Applied Surface Science, 2015, 336:79-84.
[46]	Bevillon E, Colombier J P, Dutta B, et al. Ab initio nonequilibrium thermodynamic and transport properties of ultrafast laser irradiated 316L stainless steel[J]. Journal of Physical Chemistry C, 2015, 119:11438-11446.
[47]	Nedialkov N N, Atanasov P A. Molecular dynamics simulation study of deep hole drilling in iron by ultrashort laser pulses[J]. Applied Surface Science, 2006, 252(13):4411-4415.
[48]	Urbassek H M, Rosandi Y. Insight from molecular dynamics simulation into ultrashort-pulse laser ablation[C]//SPIE, 2010, 7842(1):104-104.
[49]	Wang Xinlin. Femtosecond laser ablation of metallic materials and fabrication of micro-components[D]. Wuhan:Huazhong University of Science and Technology, 2007. (in Chinese)
[50]	Rouleau C M, Shih C Y, Wu C, et al. Nanoparticle generation and transport resulting from femtosecond laser ablation of ultrathin metal films:Time-resolved measurements and molecular dynamics simulations[J]. Applied Physics Letters, 2014, 104(19):312-124.
[51]	Wu C, Zhigilei L V. Microscopic mechanisms of laser spallation and ablation of metal targets from large-scale molecular dynamics simulations[J]. Applied Physics A, 2014, 114(1):11-32.

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Ultrashort pulse laser drilling of micro-holes (part 1)——theoretical study

1. School of Materials Engineering,Shanghai University of Engineering Science,Shanghai 201620,China;

2. Shanghai Collaborative Innovation Center of Laser Advanced Manufacturing Technology,Shanghai 201620,China;

3. State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049,China

Received Date: 2018-08-05

Rev Recd Date: 2018-09-03

Publish Date: 2019-01-25

Key words:

Abstract: Since the invention of lasers in the 1960s, the pulse duration has being continuously shorten down to the sub-picosecond and even femtosecond regime. It makes the laser processing technology to the ultrashort pulse laser era. In order to further optimize the ultrashort pulse laser micro-machining, theoretical study is indispensable. The interaction mechanism between ultrashort pulse laser and different types of materials were presented. The typical physical properties, such as plasma effect, self-focusing and filamentation, and conical radiation, were discussed. The theoretical studies for ultrashort pulse laser drilling of micro-hole were analyzed. Furthermore, the challenging issues were obtained.

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Reference (51)

[1]	Siegal Y, Glezer E N, L Huang A, et al. Laser-induced phase transitions in semiconductors[J]. Annual Review of Materials Research, 1995, 25(1):223-247.
[2]	Maiman T H. Stimulated optical radiation in ruby[J]. Nature, 1969, 187(4736):134-136.
[3]	Wang Xiaodong. Ablation and micromachining of metals with short and ultra-short laser pulses[D]. Wuhan:Huazhong University of Science and Technology, 2009. (in Chinese)
[4]	Lu Shiji. A course on solid physics[M]. Beijing:Peking University Press, 1990. (in Chinese)
[5]	Chichkov B N, Momma C, Nolte S, et al. Femtosecond, picosecond and nanosecond laser ablation of solids[J]. Applied Physics A Materials Science Processing, 1996, 63(2):109-115.
[6]	Sundaram S K, Mazur E. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses[J]. Nature Materials, 2002, 1(4):217.
[7]	Linde D V D, Sokolowski-Tinten K, Bialkowski J. Laser-solid interaction in the femtosecond time regime[J]. Applied Surface Science, 1997, s109-110:1-10.
[8]	Buerle D. Laser Processing and Chemistry[M]. Berlin:Springer, 2000:291-292.
[9]	Shah J. Ultrafast Spectroscopy of Semiconductors and Semiconductor Nanostructures[M]. Berlin:Springer, 1999.
[10]	Httner B, Rohr G. On the theory of ps and sub-ps laser pulse interaction with metals I. Surface temperature[J]. Applied Surface Science, 1996, 103(3):269-274.
[11]	Downer M C, Shank C V. Ultrafast heating of silicon on sapphire by femtosecond optical pulses[J]. Physical Review Letters, 1986, 56(56):761-764.
[12]	Kaiser A, Rethfeld B, Vicanek M, et al. Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses[J]. Physical Review B, 2000, 61(17):11437-11450.
[13]	Jiang L, Tsai H L. Prediction of crater shape in femtosecond laser ablation of dielectrics[J]. Journal of Physics D Applied Physics, 2004, 37(10):1492.
[14]	Sugioka K, Cheng Y. Ultrafast Laser Processing:from Micro-to Nanoscale[M]. Singapore:Pan Stanford Pub, 2013.
[15]	Kper S, Stuke M. Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses[J]. Applied Physics Letters, 1989, 54(1):4-6.
[16]	Li Yi. Heat accumulation in high repetition rate femtosecond laser micromachining and its applications[D]. Tianjin:Tianjin University, 2012. (in Chinese)
[17]	Fan C H, Sun J, Longtin J P. Plasma Absorption of Femtosecond Laser Pulses in Dielectrics[J]. Journal of Heat Transfer, 2002, 124(2):275-283.
[18]	Zhang Wentao. Research on the interaction between femtosecond and the silicon nitride crystal film[D]. Xi'an:Northwest University, 2009. (in Chinese)
[19]	Stuart B C, Feit M D, Herman S, et al. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics[J]. Physical Review B Condensed Matter, 1996, 53(4):1749.
[20]	Jiang L, Tsai H L. Plasma modeling for ultrashort pulse laser ablation of dielectrics[J]. Journal of Applied Physics, 2006, 100(2):729.
[21]	Russo R E, Mao X L, Liu H C, et al. Time-resolved plasma diagnostics and mass removal during single-pulse laser ablation[J]. Applied Physics A, 1999, 69(1):S887-S894.
[22]	Mao S S, Mao X, Greif R, et al. Initiation of an early-stage plasma during picosecond laser ablation of solids[J]. Applied Physics Letters, 2000, 77(16):2464-2466.
[23]	Dausinger F, Lubatschowski H, Lichtner F. Femtosecond Technology for Technical and Medical Applications[M]. Topics in Applied Physics, 96. Berlin, Heidelberg:Springer, 2004.
[24]	Breitling D, Dausinger F. Fundamental aspects in machining of metals with short and ultrashort laser pulses[C]//SPIE, 2004, 5339:49-63.
[25]	Kasparian J, Sauerbrey R, Chin S L. The critical laser intensity of self-guided light filaments in air[J]. Applied Physics B, 2000, 71(6):877-879.
[26]	Stafe M, Marcu A, Puscas N N. Pulsed Laser Ablation of Solids[M]. Berlin:Springer, 2014:758-770.
[27]	Marburger J H, Dawes E. Dynamical formation of a small-scale filament[J]. Physical Review Letters, 1968, 21(8):556-558.
[28]	Couairon A, Mysyrowicz A. Femtosecond filamentation in transparent media[J]. Physics Reports, 2007, 441(2-4):47-189.
[29]	Braun A, Korn G, Liu X, et al. Self-channeling of high-peak-power femtosecond laser pulses in air[J]. Optics Letters, 1995, 20(1):73-75.
[30]	Schaaf P. Laser Processing of Materials:Fundamentals, Applications and Developments[M]. Berlin:Springer, 2010:15-21.
[31]	Courvoisier F, Boutou V, Kasparian J, et al. Ultraintense light filaments transmitted through clouds[J]. Applied Physics Letters, 2003, 83(2):213-215.
[32]	Monot P, Auguste T, Gibbon P, et al. Experimental demonstration of relativistic self-channeling of a multiterawatt laser pulse in an underdense plasma[J]. Physical Review Letters, 1995, 74(15):2953.
[33]	Pukhov A. Strong field interaction of laser radiation[J]. Reports on Progress in Physics, 2003, 65(1):1-55.
[34]	Breitling D, Ruf A, Berger P W, et al. Plasma effects during ablation and drilling using pulsed solid-state lasers[C]//SPIE, 2003, 5121:24-33.
[35]	Golub I. Optical characteristics of supercontinuum generation[J]. Optics Letters, 1990, 15(6):305.
[36]	Nibbering E T, Curley P F, Grillon G, et al. Conical emission from self-guided femtosecond pulses in air[J]. Optics Letters, 1996, 21(1):62.
[37]	Sun J, Longtin J P. Effects of a gas medium on ultrafast laser beam delivery and materials processing[J]. Journal of the Optical Society of America B, 2004, 21(5):1081-1088.
[38]	Kaganov M I, Lifshits I M, Tanatarov L V. Relaxation between electrons and crystalline lattice[J]. Sov Phys JETP, 1957, 4(31):173.
[39]	Anisimov S I, Kapeliovich B L, Perelman T L. Electron emission from metal surfaces exposed to ultrashort laser pulses[J]. Zhurnal Eksperimentalnoi I Teoreticheskoi Fiziki, 1974, 66(776):776-781.
[40]	Qiu T Q, Tien C L. Heat transfer mechanisms during short-pulse laser heating of metals[J]. Journal of Heat Transfer, 1993, 115:4(4):835-841.
[41]	Xu Xiaofang. Study on transient reflectivity phenomenon on the surfaceas of metal films induced by femtosecond laser[D]. Zhenjiang:Jiangsu University, 2013. (in Chinese)
[42]	Anisimov S I, Rethfeld B. Theory of ultrashort laser pulse interaction with a metal[C]//SPIE, 1997, 3093:192-203.
[43]	Kotake S, Kuroki M. Molecular dynamics study of solid melting and vaporization by laser irradiation[J]. International Journal of Heat Mass Transfer, 1993, 36(8):2061-2067.
[44]	Jiang L, Tsai H L. Improved two-temperature model and its application in ultrashort laser heating of metal films[J]. Journal of Heat Transfer, 2005, 127(10):1167.
[45]	Bvillon E, Colombier J P, Recoules V, et al. First-principles calculations of heat capacities of ultrafast laser-excited electrons in metals[J]. Applied Surface Science, 2015, 336:79-84.
[46]	Bevillon E, Colombier J P, Dutta B, et al. Ab initio nonequilibrium thermodynamic and transport properties of ultrafast laser irradiated 316L stainless steel[J]. Journal of Physical Chemistry C, 2015, 119:11438-11446.
[47]	Nedialkov N N, Atanasov P A. Molecular dynamics simulation study of deep hole drilling in iron by ultrashort laser pulses[J]. Applied Surface Science, 2006, 252(13):4411-4415.
[48]	Urbassek H M, Rosandi Y. Insight from molecular dynamics simulation into ultrashort-pulse laser ablation[C]//SPIE, 2010, 7842(1):104-104.
[49]	Wang Xinlin. Femtosecond laser ablation of metallic materials and fabrication of micro-components[D]. Wuhan:Huazhong University of Science and Technology, 2007. (in Chinese)
[50]	Rouleau C M, Shih C Y, Wu C, et al. Nanoparticle generation and transport resulting from femtosecond laser ablation of ultrathin metal films:Time-resolved measurements and molecular dynamics simulations[J]. Applied Physics Letters, 2014, 104(19):312-124.
[51]	Wu C, Zhigilei L V. Microscopic mechanisms of laser spallation and ablation of metal targets from large-scale molecular dynamics simulations[J]. Applied Physics A, 2014, 114(1):11-32.

Ultrashort pulse laser drilling of micro-holes (part 1)——theoretical study

doi: 10.3788/IRLA201948.0106008

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References

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