Volume 48 Issue 5
May  2019
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Jiang Yugang, Liu Xiaoli, Liu Huasong, Wang Lishuan, Li Shida, Chen Dan, Liu Dandan, Jiang Chenghui, Ji Yiqin. Effects of aging treatment on properties of SiO2 thin films with different deposition technology[J]. Infrared and Laser Engineering, 2019, 48(5): 521001-0521001(6). doi: 10.3788/IRLA201948.0521001
Citation: Jiang Yugang, Liu Xiaoli, Liu Huasong, Wang Lishuan, Li Shida, Chen Dan, Liu Dandan, Jiang Chenghui, Ji Yiqin. Effects of aging treatment on properties of SiO2 thin films with different deposition technology[J]. Infrared and Laser Engineering, 2019, 48(5): 521001-0521001(6). doi: 10.3788/IRLA201948.0521001
shu

Effects of aging treatment on properties of SiO2 thin films with different deposition technology

doi: 10.3788/IRLA201948.0521001
  • 1.

    Tianjin Key Laboratory of Optical Thin Film,Tianjin Jinhang Institute of Technical Physics,Tianjin 300308,China;

  • 2.

    Joint Laboratory of Optoelectronic Materials and Intelligent Surface Structures,Tianjin 300308,China;

  • 3.

    Air Force Agent Office in the Beijing-Tianjin Area,Tianjin 300308,China

  • Received Date: 2018-12-11
  • Rev Recd Date: 2019-01-21
  • Publish Date: 2019-05-25
  • SiO2 thin films is one of the most important low refractive index materials in the field of optical thin film. SiO2 thin films were deposited on Si substrates by different deposition technique. The optical stability of SiO2 thin films were investigated as a function of time placed in the air. Optical constants of SiO2 thin films were calculated using the ellipsometry spectra at different aging times. With the increase of the placed time, the physical thickness and optical thickness of EB-SiO2 thin films and IAD-SiO2 thin films increase, but IBS-SiO2 thin film decreases. The change of optical thickness of SiO2 thin films are separately 1.0%, 2.3% and -0.2%. When the placed time reaches 120 days, the physical thickness and optical thickness of IBS-SiO2 thin films, EB-SiO2 thin films, and IAD-SiO2 thin films tend to be stable. The results indicate that the optical stability of IBS-SiO2 thin film is better than other SiO2 thin films, and in the design of protective coating, SiO2 thin films should be deposited with ion beam sputtering technique.
  • [1] Kintaka K, Nishii J, Mizutani A, et al. Antirefletion microstructures fabricated upon fluorine-doped SiO2 films[J]. Optics Letters, 2001, 26(21):1642-1644.
    [2] Zhang Jinlong, Tikhonravov A V, Trubetskov M K, et al. Design and fabrication of ultra-steep notch filters[J]. Optics Express, 2013, 21(18):21523-21529.
    [3] Ji Yiqin, Jiang Yugang, Liu Huasong, et al. Analysis of effects of thermal treatment on optical properties of low loss high reflective coatings[J]. Infrared and Laser Engineering, 2013, 42(3):742-746. (in Chinese)
    [4] Cheng Xinbin, Shen Zhengxiang, Jiao Hongfei, et al. Laser damage study of nodules in electron-beam-evaporated HfO2/SiO2 high reflectors[J]. Applied Optics, 2011, 50:C357-C363.
    [5] Ji Yiqin, Jiang Yugang, Liu Huasong, et al. Analysis on effects of thermal treatment on structural characteristic of ion beam sputtering SiO2 films[J]. Infrared and Laser Engineering, 2013, 42(2):418-422. (in Chinese)
    [6] Harada T, Yamada Y, Uyama H, et al. High rate deposition of TiO2 and SiO2 films by radical beam assisted deposition (RBAD)[J]. Thin Solid Films, 2001, 392(2):191-195.
    [7] Zhao Yuanan, Wang Tao, Zhang Dawei, et al. Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 antireflective coatings[J]. Applied Surface Science, 2005, 245:335-339.
    [8] Charnd N, Johnson J E, Oscenbach J W, et al. Molecular beam deposition of high quality silicon oxide dielectric films[J]. Journal of Crystal Growth, 1995, 148(4):336-344.
    [9] Wu Wenfa, Chiou Bishiou. Properties of radio frequency magnetron sputtered silicon dioxide films[J]. Applied Surface Science, 1996, 99(1):237-243.
    [10] Klug W, Schneider R, Zoller A. Plasma enhanced CVD hard coatings for ophtalmic optics[C]//SPIE, 1990, 1323:88-97.
    [11] Acquaviva S, De Giorgi M L, Elia L, et al. Laser deposition of thin SiO2 and ITO films[J]. Applied Surface Science, 2000, 168:244-247.
    [12] Ristau D, Grob T. Ion beam sputter coatings for laser technology[C]//SPIE, 2005, 5963:596313.
    [13] Harry G M, Armandula H, Black E, et al. Thermal noise from optical coatings in gravitational wave detectors[J]. Applied Optics, 2006, 45(7):1569-1574.
    [14] Beghi A, Belfi J, Beverini N, et al. Compensation of the laser parameter fluctuations in large ring-laser gyros:a Kalman filter approach[J]. Applied Optics, 2012, 51(31):7518-7528.
    [15] Liu Huasong, Yang Xiao, Liu Dandan, et al. Physical model of optical constants of SiO2 thin films[J]. Infrared and Laser Engineering, 2017, 46(9):0921003. (in Chinese)
    [16] J. A. Woollam Co., Inc. Guide to Using WVASE32[Z], 2008:814-816.
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Effects of aging treatment on properties of SiO2 thin films with different deposition technology

doi: 10.3788/IRLA201948.0521001
  • 1. Tianjin Key Laboratory of Optical Thin Film,Tianjin Jinhang Institute of Technical Physics,Tianjin 300308,China;
  • 2. Joint Laboratory of Optoelectronic Materials and Intelligent Surface Structures,Tianjin 300308,China;
  • 3. Air Force Agent Office in the Beijing-Tianjin Area,Tianjin 300308,China
  • Received Date: 2018-12-11
  • Rev Recd Date: 2019-01-21
  • Publish Date: 2019-05-25

Abstract: SiO2 thin films is one of the most important low refractive index materials in the field of optical thin film. SiO2 thin films were deposited on Si substrates by different deposition technique. The optical stability of SiO2 thin films were investigated as a function of time placed in the air. Optical constants of SiO2 thin films were calculated using the ellipsometry spectra at different aging times. With the increase of the placed time, the physical thickness and optical thickness of EB-SiO2 thin films and IAD-SiO2 thin films increase, but IBS-SiO2 thin film decreases. The change of optical thickness of SiO2 thin films are separately 1.0%, 2.3% and -0.2%. When the placed time reaches 120 days, the physical thickness and optical thickness of IBS-SiO2 thin films, EB-SiO2 thin films, and IAD-SiO2 thin films tend to be stable. The results indicate that the optical stability of IBS-SiO2 thin film is better than other SiO2 thin films, and in the design of protective coating, SiO2 thin films should be deposited with ion beam sputtering technique.

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