Influence of thin-film residual stress and surface impurities on fatigue life of deformable mirror

Yu Xia; Wang Jiaqiu; Zhang Bin

doi:10.3788/IRLA201948.0916002

Considering the influence of the thin-film residual stress and surface impurities of deformable mirrors (DMs), the stress analysis model of the DM with high reflectivity films was built up by the use of the finite element analysis software ANSYS. The fatigue damage characteristics of the DM for wavefront correction process were analyzed based on the stress-cycle (S-N) curve and the Miner cumulative damage theory, and the influence of the thin-film residual stress and the surface impurity size on the fatigue life of the DM was discussed in detail as well. The results indicate that, under the condition of the thermal-mechanical coupling, the fatigue damage of the DM tends to speed up due to the thermal effect. For a given distortion wavefront to be corrected, the dynamic cyclic load of the DM is stronger with the increasing thin-film residual stress of the DM, and the fatigue life is shorter simultaneously. Besides, the residual stress mainly affects the fatigue life on the surface of the DM. For the given thin-film residual stress of the DM, the fatigue life also decreases due to larger surface stress caused by the increasing PV value of the distortion wavefront. When the surface impurities are irradiated by the high-power continuous laser, and are above a certain size, the fatigue life of the DM decreases with the increasing impurity size. However, the fatigue life of the DM is rarely affected when the sizes of the impurities are smaller enough. Furthermore, the thin-film residual stress will further increase the fatigue damage of the DM caused by surface impurities.

Influence of thin-film residual stress and surface impurities on fatigue life of deformable mirror

1. College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China

Received Date: 2019-04-11

Rev Recd Date: 2019-05-21

Publish Date: 2019-09-25

Key words:

Abstract: Considering the influence of the thin-film residual stress and surface impurities of deformable mirrors (DMs), the stress analysis model of the DM with high reflectivity films was built up by the use of the finite element analysis software ANSYS. The fatigue damage characteristics of the DM for wavefront correction process were analyzed based on the stress-cycle (S-N) curve and the Miner cumulative damage theory, and the influence of the thin-film residual stress and the surface impurity size on the fatigue life of the DM was discussed in detail as well. The results indicate that, under the condition of the thermal-mechanical coupling, the fatigue damage of the DM tends to speed up due to the thermal effect. For a given distortion wavefront to be corrected, the dynamic cyclic load of the DM is stronger with the increasing thin-film residual stress of the DM, and the fatigue life is shorter simultaneously. Besides, the residual stress mainly affects the fatigue life on the surface of the DM. For the given thin-film residual stress of the DM, the fatigue life also decreases due to larger surface stress caused by the increasing PV value of the distortion wavefront. When the surface impurities are irradiated by the high-power continuous laser, and are above a certain size, the fatigue life of the DM decreases with the increasing impurity size. However, the fatigue life of the DM is rarely affected when the sizes of the impurities are smaller enough. Furthermore, the thin-film residual stress will further increase the fatigue damage of the DM caused by surface impurities.

HTML

Reference (17)

[1]	Ye Xiaowen, Ding Tao, Cheng Xinbin, et al. Contrastive investigation of the residual stress of SiO2 films prepared by electron beam evaporation in different relative humidity environments[J]. Infrared and Laser Engineering, 2012, 41(3):713-717. (in Chinese)
[2]	Xiong Shengming, Zhang Yundong, Tang Jinfa. Dielectric coating for deformable mirrors used in COIL laser system[J]. High Power Laser Particle Beams, 2000, 12(1):1175-1180. (in Chinese)
[3]	Zhu Changchun, Zhao Hongpo, Han Jianqiang, et al. The residual stresses in MEMS thin films[J]. Micronanoelectronic Technology, 2003, 40(10):30-34. (in Chinese)
[4]	Miao Xinxiang, Yuan Xiaodong, Cheng Xiaofeng, et al. Thermal stress simulation of laser induced damage of fused silica by contamination on the surface[J]. Laser Technology, 2011, 35(2):285-288. (in Chinese)
[5]	Liu Zheng. Fatigue properties of Ti-6.5Al-3.5Mo-1.5Zr-0.3Si alloy produced by laser melting deposition[D]. Dalian:Dalian Jiaotong University, 2014. (in Chinese)
[6]	Kanchanomai C, Limtrakarn W. Effect of residual stress on fatigue failure of carbonitrided low-carbon steel[J]. Journal of Materials Engineering Performance, 2008, 17(6):879-887.
[7]	Luo Shuai, Chen Lixia, Zhang Bin. Influence of structural parameters of deformable mirror on its fatigue life[J]. Acta Optica Sinica, 2017, 37(10):18-26. (in Chinese)
[8]	Gao Chunxue. Study of the distribution and control of stress in optical thin films[D]. Nanjing:Southeast University, 2015. (in Chinese)
[9]	Chen Lixia, Hu Xiaochuan, Zhang Bin, et al. Fatigue damage characteristics of deformable mirrors for wavefront correction[J]. Chinese Journal of Lasers, 2016, 43(11):1105002. (in Chinese)
[10]	Liu Yan, Jie Meng, Xie Haifeng, et al. Fatigue life of piezoelectric actuator used in resonance-type air pump[J]. Optics and Precision Engineering, 2013, 21(4):941-947. (in Chinese)
[11]	Wu Hao, Meng Yonggang, Su Caijun, et al. An out-chip method for measuring fatigue property of poly silicon thin film[J]. Journal of Harbin Institute of Technology, 2006, 38(4):96-98+160. (in Chinese)
[12]	Liu Guangtong. Atmospheric dust fall source analysis in hohhot[D]. Hohhot:Inner Mongolia University, 2008. (in Chinese)
[13]	Hu Xiaochuan, Peng Jiaqi, Zhang Bin. Thermal distortion of deformable mirror and its influence on beam quality[J]. Chinese Journal of Lasers, 2015, 42(1):0120004. (in Chinese)
[14]	Li X D, Wang X N, Xiong Q H, et al. Mechanical properties of ZnS nanobelts[J]. Nano Letters, 2005, 5(10):1982-1986.
[15]	Wu Weibin, Dai Yifan, Guan Chaoliang, et al. Optimization design for transversal piezoelectric effect deformable mirror[J]. Infrared and Laser Engineering, 2016, 45(8):0818003. (in Chinese)
[16]	Peng Jiaqi, Hu Xiaochuan, Chen Lixia, et al. Effect of structural parameters of deformable mirrors on phase characteristics of high-power laser[J]. Acta Optica Sinica, 2015, 35(5):0514001. (in Chinese)
[17]	Zhang Yaoping. The study on infrared thin film of deformable mirror[D]. Chengdu:Institute of Optics and Electronics, Chinese Academy of Sciences, 2006. (in Chinese)

Influence of thin-film residual stress and surface impurities on fatigue life of deformable mirror

doi: 10.3788/IRLA201948.0916002

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Article Metrics

Related

Proportional views