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Spectrometer optical system structure needs to consider the working wavelength range, spectral resolution, luminous flux, volume and its match with the detector and other factors[17], the main performance parameters of the designed spectrometer are shown in Tab.1.
Parameter Value Wavelength range 1000-1700 nm Spectral resolution <15 nm Size <150 mm×150 mm×150 mm Table 1. Main parameters of a DMD-based small NIR spectrometer
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In order to realize the miniaturization of the spectroscopy instrument and satisfy the requirement that multiple channels of data can be collected at one time, a receiver system with high sensitivity and low dark noise should be selected. The InGaAs detector manufactured by Pioneer Technology Inc. is selected as the spectral receiver which has a PDA that is sensitive to near-infrared light and meets the needs of the band of 1000-1700 nm. Its spectral response curve is shown in Fig.2.
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The DMD-based small NIR spectrometer system uses a digital micromirror manufactured by Texas Instruments. The DLP4500NIR model has the advantages of fast switching speed and high reliability. It consists of 1140×912 coated digital micromirrors, each with a size of 7.6 μm×7.6 μm and a diagonal dimension of 10.8 micrometer. Each micromirror can rotate ±12° around the axis of symmetry under the action of an electrostatic drive circuit. Each angle corresponds to a different working state. Its working principle is shown in Fig.3. It keeps the direction of incident light unchanged. When the direction angle between incident light and the normal direction of the DMD surface is 24°, the light of the DMD surface is also emitting at 24° on the other side of the normal, rather than entering the optical system. When the incident light is +12° to the normal direction of the DMD, that is, the micromirror plane is rotated by 12°, the incident light is reflected by the DMD surface and enters the subsequent optical system; when the incident light and the DMD surface normal direction are 36°, the plane of the micromirror is rotated by −12°, and the reflected light and the incident light are emitted at 72°. Reflected light finally is absorbed by the light blocking plate.
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The grating is a very important element in the spectrometer and can directly affect the resolution of the system. We select a planar reflective grating for spectral dispersion, from the grating equation:
where d is the grating constant, i and θ are the incident angle and the diffraction angle, respectively, and m is the diffraction order of the spectrum[11]. Angular dispersion rate of grating can be expressed as:
The dispersion rate of grating line is
where
$ {f}' $ represents the focal length of the imaging lens behind the grating. In this design, the line dispersion rate and the size of the DMD's micro-mirror determine the spectral resolution of the spectrometer. According to the theory of diffraction grating, m=1, d=300 l/mm, the blaze angle is 13.0°, and the grating diffraction efficiency curve of the aluminized film is shown in Fig.4. -
According to the Eqs. (1)-(9), a theoretical calculation model is established by combining the parameters of the detector, the grating, and the DMD. The structural parameters of the optical system obtained using the model are shown in Tab.2.
Parameter Value Working wavelength 1000-1700 nm Slit length 1 mm Slit width 50 μm Collimating lens focal length 75 nm Imaging lens focal length 45 nm Raster line density 300 l/mm DMD pixel size 7.6 μm×7.6 μm DMD pixel number 1140×912 pixels DMD tilt angle ±12° Table 2. Optical system design parameters
Principle and optimum analysis of small near-infrared spectrometers based on digital micromirror device
doi: 10.3788/IRLA20200427
- Received Date: 2020-12-05
- Rev Recd Date: 2021-01-07
- Available Online: 2021-02-07
- Publish Date: 2021-02-07
Abstract: The DMD small near-infrared spectroscopy instrument is widely used in chemical composition analysis and quality inspection for its advantages of fast detection speed, high sensitivity, no damage detection, and miniaturization of portable instruments. However, as the premise of instrument design, optical optimization design of the whole spectral range is the hard work of the system. In this paper, the theoretical design method of the spectroscopic imaging system based on the small near-infrared spectrometer of DMD was studied. The method was designed by using the double-dispensing anti-aberration lens and combining the geometric aberration theory to optimize the design of a small DMD near-infrared spectrometer to reduce the aberration of the entire system. Then, the optical simulation software was used to align the direct imaging system for optical simulation. And ultimately achieve the design simulation requirements. Simulation results indicate that the whole size of the spectrometer is less than 150 mm×150 mm×150 mm, and the resolution is better than 15 nm in the range of 1000-1700 nm in the working band. Therefore, the proposed method can meet the design requirements and has broad application prospects in practical applications.