-
文中总结了目前一些代表性的激光辅助三维金属微打印技术的基本原理、技术优势和主要应用。需要指出的是,尽管利用这些激光辅助金属微打印技术已在复杂三维微纳金属结构的制备方面取得了很多富有成效的进展,但如表1所示,上述技术无一例外都存在特定的适用条件和有待于进一步改善的技术不足。到目前为止,还未有一种技术能够同时将高分辨率、高纯度、大尺寸、金属通用性等制备要求完全结合起来,因此在制造三维金属结构时,大多根据具体需求进行考虑。
Processing technique Feature size Speed Applicable metals Characteristics Laser-induced forward transfer (LIFT)[29-40] Several μm several tens of
micrometers per secondAg, Au,Al, Cu,Cr,Ge,Ni,Pd,
Pt,Sn,Ti,V,W,Zn, etc.Rapid manufacture of microstructures
with a precision down to submicron scale;
High surface roughness.Laser decal transfer (LDT)[41-45] Depended on
the voxel sizeDepended on the
voxel sizeAg, Au,Al, Cu,Cr,Ge,Ni,Pd,Pt,
Sn, Ti,V,W,Zn, etc.Rapid manufacture of voxels
with specific shapes.Femtosecond laser-induced photoreduction (FLIP)[46-57] 100 nm-3 μm several tens of
micrometers per secondAg,Au,Cu,Ni Direct fabrication of sub-micron metal
structures; High surface roughness.Laser micro-sintering (LMS)[58-69] >10 μm several tens of
centimeters per secondAl,Ag,Cu,Ni,T,
W,Mo,CrHigh density of metal microstructures;
High surface roughness.3D metalization of two-photon polymerization[70-80] $\gg $120 nm several tens of
centimeters per secondAg, Au, Cu, etc. Surface metallization for 3D structures. Laser-assisted electrophoretic deposition (LAED)[81-85] 500 nm-several μm several hundreds of
nanometers per secondAu Direct fabrication of metal microstructures;
High surface roughness.Glass-channel molding assisted 3D printing[105] 10-200 μm − Ag,Cu,Au,
Ni,Pd, etc.Low surface roughness;
Widely tunable feature size.Table 1. Representative techniques for laser-assisted 3D metal microprinting
当前大尺寸、高精度、高机械强度的金属微打印技术在微纳金属制备和增材制造领域都具有很大的技术挑战。常规的三维金属增材打印虽然可以实现很大的制造尺寸和很高的机械强度,但是打印的金属结构的精度很难达到几十微米以下,并且其表面粗糙度通常受限于增材制备过程的本征局限,使得这些技术在微尺度金属打印领域的应用受到限制。毫无疑问,研发具通用性的3D金属微打印技术还有很长的道路要走。令人欣慰的是,当前的各种金属微纳结构制造技术已经在无数的尝试中逐渐成熟。最令人兴奋的是,飞秒激光技术在金属微纳结构的制备和应用中存在巨大的潜力,随着工艺的优化和发展,实现对任意形状、粗糙度和分辨率可控的微纳米金属结构的三维打印技术指日可待。就微通道模具法而言,如果大尺寸、高精度微通道结构制造技术取得突破,由此延伸到大尺寸三维金属结构的高精度制备,从而可以降低三维复杂金属微结构的大尺寸制造难度。初步的研究进展已表明,通过在通道内部进行金属沉积的方法实现在微通道结构内的金属结构可控填充,进而可实现具有较高机械强度、高精度、低表面粗糙度的三维金属微打印。相信未来的3D金属微打印技术应该和传统微纳米金属制造业会相互结合、相互补偿,开创更加广阔的应用前景。
HTML
[1] | Lipson H, Kurman M. Fabricated: The New World of 3D Printing[M]. USA: John Wiley & Sons, 2013. | |
[2] | Chua C, Leong K. 3D Printing and Additive Manufacturing: Principles and Applications[M]. Singapore: World Scientific Publishing Co Pte Ltd, 2017. | |
[3] | Vaezi M, Seitz H, Yang S. Erratum to: A review on 3D micro-additive manufacturing technologies [J]. Advanced Manufacturing Technology, 2013, 67: 1957. | |
[4] | Kotz F, Arnold K, Bauer W, et al. Three-dimensional printing of transparent fused silica glass [J]. Nature, 2017, 544: 337-339. | |
[5] | Parra-Cabrera C, Achille C, Kuhn S, et al. 3D printing in chemical engineering and catalytic technology: structured catalysts, mixers and reactors [J]. Chemical Society Reviews, 2018, 47(1): 209-230. | |
[6] | Kotikian A, Truby R, Boley J, et al. 3D printing of liquid crystal elastomeric actuators with spatially programed nematic order [J]. Advanced Materials, 2018, 30(10): 170616. | |
[7] | Lind J, Busbee T, Valentine A, et al. Instrumented cardiac microphysiological devices via multimaterial three-dimensional printing [J]. Nature Materials, 2017, 16(3): 303-308. | |
[8] | Hwang H, Zhu W, Victorine G, et al. 3D-printing of functional biomedical microdevices via light- and extrusion-based approaches [J]. Small Methods, 2018, 2(2): 1700277. | |
[9] | Ishikawa A, Kato T, Takeyasu N, et al. Selective electroless plating of 3D-printed plastic structures for three-dimensional microwave metamaterials [J]. Applied Physics Letters, 2017, 111(18): 183102. | |
[10] | Bernasconi R, Credi C, Tironi M, et al. Electroless metallization of stereolithographic photocurable resins for 3D printing of functional microdevices [J]. Journal of The Electrochemical Society, 2017, 164(5): B3059-B3066. | |
[11] | Bernasconi R, Cuneo F, Carrara E, et al. Hard-magnetic cell microscaffolds from electroless coated 3D printed architectures [J]. Materials Horizons, 2018, 5(4): 699-707. | |
[12] | Huang K M, Tsai S C, Lee Y K, et al. Selective metallic coating of 3D-printed microstructures on flexible substrates [J]. RSC Advances, 2017, 7(81): 51663-51669. | |
[13] | Hill R T, Lyon J L, Allen R, et al. Microfabrication of three-dimensional bioelectronic architectures [J]. Journal of America Chemical Society, 2005, 127(30): 10707-10711. | |
[14] | Farrer R A, LaFratta C N, Li L, et al. Selective functionalization of 3-D polymer microstructures [J]. America Chemical Society, 2006, 128(6): 1796-1797. | |
[15] | Formanek F, Takeyasu N, Tanaka T, et al. Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures [J]. Applied Physics Letters, 2006, 88: 083110. | |
[16] | Chen Y S, Tal A, Torrance D B, et al. Fabrication and characterization of three-dimensional silver-coated polymeric microstructures [J]. Advanced Functional Materials, 2006, 16(13): 1739-1744. | |
[17] | Mukai K, Yoshimura T, Maruo S. Micromolding of three-dimensional metal structures by electroless plating of photopolymerized resin [J]. Japanese Journal of Applied Physics, 2007, 46(4B): 2761-2763. | |
[18] | Hirt L, Reiser A, Spolenak R, et al. Additive manufacturing of metal structures at the micrometer scale [J]. Advanced Materials, 2017, 29(17): 1604211. | |
[19] | Reiser A, Koch L, Dunn K A, et al. Metals by micro-scale additive manufacturing: Comparison of microstructure and mechanical properties [J]. Advanced Functional Materials, 2020, 30(28): 1910491. | |
[20] | Zheng Z, Lee H, Weisgraber T H, et al. Ultra-light, ultra-stiff mechanical metamaterials [J]. Science, 2014, 344: 1373-1377. | |
[21] | Campo A, Arzt E. Fabrication approaches for generating complex micro- and nanopatterns on polymeric surfaces [J]. Chemical Reviews, 2008, 108(3): 911-9459. | |
[22] | Verschuuren M A, Sprang H A, Polman A. Large-area nanopatterns: improving LEDs, lasers, and photovoltaics [J]. Nanotechnology, 2011, 22: 505201. | |
[23] | Mosadegh B, Xiong G, Dunham S, et al. Current progress in 3D printing for cardiovascular tissue engineering [J]. Biomedical Materials, 2015, 10(3): 034002. | |
[24] | Stanton M M, Trichet-Paredes C, Sanchez S. Applications of three-dimensional (3D) printing for microswimmers and bio-hybrid robotics [J]. Lab on a Chip, 2015, 15: 1634-1637. | |
[25] | Chen H T, Padilla W J, Zide J M, et al. Active terahertz metamaterial devices [J]. Nature, 2006, 444(7119): 597-600. | |
[26] | Wang Q, Rogers E T, Gholipour B, et al. Optically reconfigurable metasurfaces and photonic devices based on phase change materials [J]. Nature Photonics, 2016, 10(1): 60-65. | |
[27] | Sun Q, Ueno K, Yu H, et al. Direct imaging of the near field and dynamics of surface plasmon resonance on gold nanostructures using photoemission electron microscopy [J]. Light: Science & Applications, 2013, 2: e118. | |
[28] | Zhu C, Du D, Eychmuller A, et al. Engineering ordered and nonordered porous noble metal nanostructures: Synthesis, assembly, and their applications in electrochemistry [J]. Chemical Reviews, 2015, 115(16): 8896-8943. | |
[29] | Bohandy J, Kim B F, Adrian F J. Metal deposition from a supported metal film using an excimer laser [J]. Journal of Applied Physics, 1986, 60(4): 1538. | |
[30] | Matthias F, Ralph P, Ton B, et al. Printing of complex free-standing microstructures via laser-induced forward transfer (LIFT) of pure metal thin films [J]. Additive Manufacturing, 2018, 24: 391-399. | |
[31] | Röder T C, Köhler J R. Physical model for the laser induced forward transfer process [J]. Applied Physics Letters, 2012, 100(7): 71603. | |
[32] | Kuznetsov A I, Kiyan R, Chichkov B N. Laser fabrication of 2D and 3D metal nanoparticle structures and arrays [J]. Optics Express, 2010, 18(20): 21198-21203. | |
[33] | Zenou M, Kotler Z. Laser jetting of femto-liter metal droplets for high resolution 3D printed structures [J]. Scientific Reports, 2015, 5(17): 17265. | |
[34] | Visser C W, Pohl R, Sun C. Toward 3D printing of pure metals by laser-induced forward transfer [J]. Advanced Materials, 2015, 27(27): 4087-4092. | |
[35] | Zenou M, Sa’ar A, Kotler Z. Laser transfer of metals and metal alloys for digital microfabrication of 3D objects [J]. Small, 2015, 11(33): 4082-4089. | |
[36] | Zenou M, Sa’ar A, Kotler Z. Digital laser printing of aluminum micro-structure on thermally sensitive substrates [J]. Journal of Physics D: Applied Physics, 2015, 48(20): 205303. | |
[37] | Winter S, Zenou M, Kotler Z. Conductivity of laser printed copper structures limited by nano-crystal grain size and amorphous metal droplet shell [J]. Journal of Physics D: Applied Physics, 2016, 49: 165310. | |
[38] | Huis in't Veld B, Overmeyer L, Schmidt M, Wegener K, Malshe A, Bartolo P. Si/Ge micro additive manufacturing using ultra-short laser pulses [J]. CIRP Annals—Manufacturing Technology, 2015, 64(2): 701-724. | |
[39] | Zenou M, Kotler Z. Printing of metallic 3D micro-objects by laser induced forward transfer [J]. Optics Express, 2016, 24(2): 1431-1446. | |
[40] | Piqué A, Auyeung R C Y, Kim H. Laser 3D micro-manufacturing [J]. Journal of Physics D: Applied Physics, 2016, 49(22): 223001. | |
[41] | Breckenfeld E, Kim H, Auyeung R C Y, et al. Laser-induced forward transfer of silver nanopaste for microwave interconnects [J]. Applied Surface Science, 2015, 331(15): 254-261. | |
[42] | Wang J, Auyeung R C Y, Kim H, et al. Three-dimensional printing of interconnects by laser direct-write of silver nanopastes [J]. Advanced Materials, 2010, 22(40): 4462-4466. | |
[43] | Piqué A, Auyeung R C Y, Kim H, et al. Digital microfabrication by laser decal transfer [J]. Journal of Laser Micro/Nanoengineering, 2008, 3(3): 163-168. | |
[44] | Mathews S A, Auyeung R C Y, Kim H, et al. High-speed video study of laser-induced forward transfer of silver nano-suspensions [J]. Journal of Applied Physics, 2013, 114(6): 64910. | |
[45] | Zenou M, Sa’ar A, Kotler Z. Digital laser printing of metal/metal-oxide nano-composites with tunable electrical properties [J]. Nanotechnology, 2016, 27(1): 15203. | |
[46] | Stellacci F, Bauer C A, Meyer-Friedrichsen T, et al. Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning [J]. Advanced Materials, 2002, 14(3): 194-198. | |
[47] | Maruo S, Saeki T. Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix [J]. Optics Express, 2008, 16(2): 1174-1179. | |
[48] | Ishikawa A, Tanaka T, Kawata S. Improvement in the reduction of silver ions in aqueous solution using two-photon sensitive dye [J]. Applied Physics Letters, 2006, 89(11): 113102. | |
[49] | Tanaka T, Ishikawa A, Kawata S. Two-photon-induced reduction of metal ions for fabricating three-dimensional electrically conductive metallic microstructure [J]. Applied Physics Letters, 2006, 88(8): 081107. | |
[50] | Xu B B, Zhang D D, Liu X L, et al. Fabrication of microelectrodes based on precursor doped with metal seeds by femtosecond laser direct writing [J]. Optics Letters, 2014, 39(3): 434-437. | |
[51] | Xu B B, Xia H, Niu L G, et al. Flexible nanowiring of metal on nonplanar substrates by femtosecond-laser-induced electroless plating [J]. Small, 2010, 6(16): 1762-1766. | |
[52] | Cao Y, Takeyasu N, Tanaka T, et al. 3D metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction [J]. Small, 2009, 5(10): 1144-1148. | |
[53] | Tanaka T, Ishikawa A, Amemiya T. Three-dimensional two-photon laser fabrication for metals, polymers, and magneto-optical materials[C]//Photonics West, 2015: 9353-21. | |
[54] | Lu W E, Zhang Y L, Zheng M L, et al. Femtosecond direct laser writing of gold nanostructures by ionic liquid assisted multiphoton photoreduction [J]. Optical Materials Express, 2013, 3(10): 1660-1673. | |
[55] | Blasco E, Müller J, Müller P, et al. Fabrication of conductive 3D gold-containing microstructures via direct laser writing [J]. Advanced Materials, 2016, 28(18): 3592-3595. | |
[56] | Vyatskikh A, Delalande S, Kudo A, et al. Additive manufacturing of 3D nano-architected metals [J]. Nature Communications, 2018, 9(1): 593. | |
[57] | Focsan M, Craciun A M, Astilean S, et al. Two-photon fabrication of three-dimensional silver microstructures in microfluidic channels for volumetric surface-enhanced Raman scattering detection [J]. Optical Materials Express, 2016, 6(5): 1587-1593. | |
[58] | Exner H, Regenfuss P, Hartwig L, et al. Selective laser micro sintering with a novel process[C]//Proceedings of SPIE-The International Society for Optical Engineering, 2003, 5063(1): 145-151. | |
[59] | 柯林达. 脉冲激光微烧结金属粉末的关键技术研究[D]. 武汉: 华中科技大学, 2014. | Ke Linda. The key technologies of laser micro sintering metal powder by pulsed laser[D]. Wuhan: Huazhong University of Science & Technology, 2014 (in Chinese) |
[60] | Promoppatum P, Onler R, Yao S C, et al. Numerical and experimental investigations of micro and macro characteristics of direct metal laser sintered Ti-6Al-4V products [J]. Journal of Materials Processing Technology, 2017, 240: 262-273. | |
[61] | 兰红波, 李涤尘, 卢秉恒. 微纳尺度 3D 打印[J]. 中国科学: 技术科学, 2015, 45(9): 919-940. | Lan Hongbo, Li Dichen, Lu Bingheng. Micro-and nanoscale 3D printing [J]. Sci Sin Tech, 2015, 45(9): 919-940. (in Chinese) |
[62] | Regenfuss P, Streek A, Hartwig L, et al. Principles of laser micro sintering [J]. Rapid Prototyping Journal, 2007, 13(4): 204-212. | |
[63] | Regenfuß P, Ebert R. Exner H. Laser micro sintering-a versatile instrument for the generation of microparts [J]. Laser Technik Journal, 2007, 4(1): 26-31. | |
[64] | Exner H, Horn M, Streek A, et al. Laser micro sintering: A new method to generate metal and ceramic parts of high resolution with sub-micrometer powder [J]. Virtual and Physical Prototyping, 2008, 3(1): 3-11. | |
[65] | Subramanian K, Vail N, Barlow J, et al. Selective laser sintering of alumina with polymer binders [J]. Rapid Prototyping Journal, 1995, 1(2): 24-35. | |
[66] | Chen J M, Wang X B, Zuo T C. The micro fabrication using selective laser sintering micron metal powder[C]//Proceedings of SPIE-The International Society for Optical Engineering, 2003, 5116: 647~651. | |
[67] | Regenfuss P, Hartwig L, Klotzer S, et al. Microparts by a novel modification of selective laser sintering[C]//Rapid Prototyping and Manufacturing Conference, 2004: 1-7. | |
[68] | Kathuria Y P. Microstructuring by selective laser sintering of metallic powder [J]. Surface and coatings technology, 1999, 116-119: 643-647. | |
[69] | Ebert R, Regenfuss P, Klotzer S, et al. Process assembly for μm-scale SLS, reaction sintering, and CVD[C]//Proceedings of SPIE-The International Society for Optical Engineering, 2003, 5063: 183-188. | |
[70] | 何飞, 程亚. 飞秒激光微加工: 激光精密加工领域的新前沿[J]. 中国激光, 2007, 34(5): 595-620. | He Fei, Cheng Ya. Femtosecond laser micromachining: Frontier in laser precision micromachining [J]. Chinese Journal of Lasers, 2007, 34(5): 595-620. (in Chinese) |
[71] | Lourtioz J M. Photonic crystals writing 3D photonic structures with light [J]. Nature Materials, 2004, 3(7): 427-428. | |
[72] | Maruo S, Fourkas J T. Recent progress in multiphoton microfabrication [J]. Laser Photonics Reviews, 2008, 2(1): 100-111. | |
[73] | Hsieh T M, Ng C W, Narayanan K, et al. Three-dimensional microstructured tissue scaffolds fabricated by two-photon laser scanning photolithography [J]. Biomaterials, 2010, 31(30): 7648-7652. | |
[74] | Gittard S D, Narayan R J. Laser direct writing of micro- and nano-scale medical devices [J]. Expert Revies of Medical Devices, 2010, 7(3): 343-356. | |
[75] | Liao C Z, Wuethrich A, Trau M. A material odyssey for 3D nano/microstructures: two photon polymerization-based nanolithography in bioapplications [J]. Applied Materials Today, 2020, 19(10): 100635. | |
[76] | Ma Z C, Zhang Y L, Han B, et al. Femtosecond-laser direct writing of metallic micro/ nanostructures: from fabrication strategies to future applications [J]. Small Methods, 2018, 2(7): 1700413. | |
[77] | Tottori S, Zhang L, Qiu F, et al. Magnetic helical micromachines: fabrication, controlled swimming, and cargo transport [J]. Advanced Materials, 2012, 24: 811-816. | |
[78] | Waller E H, Dix S, Gutsche J, et al. Functional metallic microcomponents via liquid-phase multiphoton direct laser writing: a review [J]. Micromachines, 2019, 10(12): 827. | |
[79] | Kim S, Qiu F, Kim S, et al. Fabrication and characterization of magnetic microrobots for three-dimensional cell culture and targeted transportation [J]. Advanced Materials, 2013, 25(41): 5863-5868. | |
[80] | Huang T Y, Sakar M S, Mao A, et al. 3D printed microtransporters: compound micromachines for spatiotemporally controlled delivery of therapeutic agents [J]. Advanced Materials, 2015, 27(42): 6644-6650. | |
[81] | Iwata F, Metoki J. Microelectrophoresis deposition using a nanopipette for three-dimensional structures[C]//IEEE, 2014: 304-307. | |
[82] | Takai T, Nakao H, Iwata F. Three-dimensional microfabrication using local electrophoresis deposition and a laser trapping technique [J]. Optics Express, 2014, 22(23): 28109-28117. | |
[83] | Iwata F, Kaji M, Suzuki A, et al. Local electrophoresis deposition of nanomaterials assisted by a laser trapping technique [J]. Nanotechnology, 2009, 20(23): 235303. | |
[84] | Matsuura T, Takai T, Iwata F. Local electrophoresis deposition assisted by laser trapping coupled with a spatial light modulator for three-dimensional microfabrication [J]. Japanese Journal of Applied Physics, 2017, 56(10): 105502. | |
[85] | Iwata F, Metoki J. Local electrophoretic deposition using a nanopipette for micropillar fabrication [J]. Japanese Journal of Applied Physics, 2017, 56(12): 126701. | |
[86] | Kaschke J, Wegener M. Gold triple-helix mid-infrared metamaterial by STED-inspired laser lithography [J]. Optics Letters, 2015, 40(17): 3986-3989. | |
[87] | Kaneko K, Yamamoto K, Kawata S, et al. Metal-nanoshelled three-dimensional photonic lattices, [J]. Optics Letters, 2008, 33(17): 1999. | |
[88] | Malureanu R, Alabastri A, Cheng W, et al. Enhanced broadband optical transmission in metallized woodpiles [J]. Applied Physics A, 2010, 103: 749-753. | |
[89] | Li j, Hossain M D M, Jia B. Three-dimensional hybrid photonic crystals merged with localized plasmon resonances [J]. Optics Express, 2010, 18(5): 4491. | |
[90] | Radke A, Gissibl T, Klotzbucher T, et al. Three-dimensional bichiral plasmonic crystals fabricated by direct laser writing and electroless silver plating [J]. Advanced Materials, 2011, 23(27): 3018-3021. | |
[91] | Tottori S, Zhang L, Peyer K E, et al. Assembly, disassembly, and anomalous propulsion of microscopic helices [J]. Nano Letters, 2013, 13(9): 4263-4268. | |
[92] | Kulinowski K M, Jiang P, Vaswani H, et al. Porous metals from colloidal templates [J]. Advanced Materials, 2000, 12(11): 833-838. | |
[93] | Nagpal P, Han S E, Stein A, et al. Efficient low-temperature thermophotovoltaic emitters from metallic photonic crystals [J]. Nano Letters, 2008, 8(10): 3238-3243. | |
[94] | Walsh T A, Bur J A, Kim J S, et al. High-temperature metal coating for modification of photonic band edge position [J]. Journal of the Optical Society of America B, 2009, 26: 1450-1455. | |
[95] | Mizeikis V, Juodkazis S, Tarozaite R, et al. Fabrication and properties of metalo-dielectric photonic crystal structures for infrared spectral region [J]. Optics Express, 2007, 15(13): 8454-8456. | |
[96] | Marago O M, Jones P H, Gucciardi P G, et al. Optical trapping and manipulation of nanostructures [J]. Nature Nanotechnol, 2013, 8(11): 807-819. | |
[97] | Daly M, Sergides M, Chormaic S N. Optical trapping and manipulation of micrometer and submicrometer particles [J]. Laser Photonics Reviews, 2015, 9: 309-329. | |
[98] | Gu M, Bao H, Gan X, et al. Tweezing and manipulating micro- and nanoparticles by optical nonlinear endoscopy [J]. Light: Science & Applications, 2014, 3: e126. | |
[99] | Lehmuskero A, Johansson P, Rubinsztein-Dunlop H. Laser trapping of colloidal metal nanoparticles [J]. ACS Nano, 2015, 9(4): 3453-3469. | |
[100] | Ashkin A, Dziedzic J M, Bjorkholm J E, et al. Observation of a single-beam gradient force optical trap for dielectric particles [J]. Optics Letters, 1986, 11(5): 288-290. | |
[101] | Dholakia K, Reece P. Optical micromanipulation takes hold [J]. Nano Today, 2006, 1(1): 18-27. | |
[102] | Grier D G. Grier, A revolution in optical manipulation [J]. Nature, 2003, 424: 810-816. | |
[103] | Wang H, Liu S, Zhang Y L, et al. Controllable assembly of silver nanoparticles induced by femtosecond laser direct writing [J]. Advanced Materials, 2015, 16(2): 024805. | |
[104] | Xu B B, Zhang R, Wang H, et al. Laser patterning of conductive gold micronanostructures from nanodots [J]. Nanoscale, 2012, 4(22): 6955. | |
[105] | Xu J, Li X, Zhong Y, et al. Glass-channel molding assisted 3D printing of metallic microstructures enabled by femtosecond laser internal processing and microfluidic electroless plating [J]. Advanced Materials Technologies, 2018, 3(12): 1800372. | |
[106] | Kondo Y, Qiu J, Mitsuyu T, et al. Three-dimensional microdrilling of glass by multiphoton process and chemical etching [J]. Japanese Journal Applied Physics, 1999, 38(2): L1146. | |
[107] | Ius A M, Juodkazis S, Watanabe M, et al. Femtosecond laser-assisted three-dimensional microfabrication in silica [J]. Optics Letters, 2001, 26(5): 277-279. | |
[108] | Masuda M, Sugioka K, Cheng Y, et al. 3-D microstructuring inside photosensitive glass by femtosecond laser excitation [J]. Applied Physics A, 2003, 76(5): 857-860. | |
[109] | Bellouard Y, Said A, Dugan M, et al. Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching [J]. Optics Express, 2004, 12(10): 2120-2129. | |
[110] | Itoh K, Watanabe W, Nolte S. Ultrafast processes for bulk modification of transparent materials [J]. MRS Bulletin, 2006, 31(8): 620-625. | |
[111] | Gattass R R, Mazur E. Femtosecond laser micromachining in transparent materials [J]. Nature Photonics, 2008, 2(4): 219-225. | |
[112] | Sugioka K, Cheng Y. Ultrafast lasers-reliable tools for advanced materials processing [J]. Light: Science & Applications, 2014, 3(4): e149-e149. | |
[113] | Sugioka K, Cheng Y. Femtosecond laser three-dimensional micro- and nanofabrication [J]. Applied Physics Reviews, 2014, 1(4): 041303. | |
[114] | Madani-Grasset F, Bellouard Y. Femtosecond laser micromachining of fused silica molds [J]. Optics Express, 2010, 18(21): 21826-21840. | |
[115] | Schaap A, Bellouard Y. Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass [J]. Optical Materials Express, 2013, 3(9): 1428-1437. | |
[116] | Tovar M, Weber T, Hengoju S, et al. 3D-glass molds for facile production of complex droplet microfluidic chips [J]. Biomicrofluidics, 2018, 12(2): 024115. | |
[117] | Wang P, Chu W, Li W, et al. Three-dimensional laser printing of macro-scale glass objects at a micro-scale resolution [J]. Micromachines, 2019, 10(9): 565. | |
[118] | Goluch E D, Shaikh K A, Ryu K, et al. Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces [J]. Applied Physics Letters, 2004, 85(16): 3629-3631. | |
[119] | Lang P, Neiß S, Woias P. Fabrication of three-dimensional freestanding metal micropipes for microfluidics and microreaction technology [J]. Journal of Micromechanics and Microengineering, 2011, 21(12): 125024. | |
[120] | Muench F, Oezaslan M, Svoboda I, et al. Electroless plating of ultrathin palladium films: self-initiated deposition and application in microreactor fabrication [J]. Materials Research Express, 2015, 2(10): 105010. |