Analysis of optical and damage properties for several ultraviolet thin film materials

Zhang Qian; Jiao Hongfei; Cheng Xinbin; Ma Bin; Ji Yiqin

For further improvement of optical and laser induced damage properties of the thin films equipped on three harmonic of YAG laser system, different test methods were used to analysis the correlations between optical constant, crystalline structures, surface roughness, weak absorption and laser induced damage threshold of several thin films fabricated by reactive electron beam deposition process with different ultraviolet materials. The weak absorption and the bandgap limited the laser-induced damage threshold, rather than the surface roughness increased by the appearance of crystalline structures. Two laser damage processes were observed as that in higher weak absorption material, small damage expanded step by step when it absorbed the pulse laser energy, while in lower weak absorption material, a sudden damage occurred when the absorbed laser energy were higher enough.

1. Shanghai Key Laboratory of special Artificial Microstructure Materials and Technology,Tongji University,Shanghai 200092,China;

2. Institute of Precision Optical Engineering,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China;

3. Tianjin Jinhang Institute of Technology Physics,Tianjin Key Laboratory of Optical Thin Film,Tianjin 300192,China

Received Date: 2013-08-05

Rev Recd Date: 2013-09-03

Publish Date: 2014-04-25

Key words:

Abstract: For further improvement of optical and laser induced damage properties of the thin films equipped on three harmonic of YAG laser system, different test methods were used to analysis the correlations between optical constant, crystalline structures, surface roughness, weak absorption and laser induced damage threshold of several thin films fabricated by reactive electron beam deposition process with different ultraviolet materials. The weak absorption and the bandgap limited the laser-induced damage threshold, rather than the surface roughness increased by the appearance of crystalline structures. Two laser damage processes were observed as that in higher weak absorption material, small damage expanded step by step when it absorbed the pulse laser energy, while in lower weak absorption material, a sudden damage occurred when the absorbed laser energy were higher enough.

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Analysis of optical and damage properties for several ultraviolet thin film materials

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