Rigorous coupled wave analysis of grating-embedded multilayer structure conical diffraction

Yang Liang; Li Yanqiu; Ma Xu; Sheng Naiyuan

Based on rigorous coupled wave analysis, the models for grating-embedded multilayer structure planar diffraction were generalized to the case of conical diffraction. The proposed method can be used to calculate the light diffracted from the grating-embedded multilayer structure with arbitrary wavelength, polarization, azimuthal angle and incident angle. For the micromachined optoacoustic sensor, the convergence performance of the diffraction efficiencies of the reflected +1st order in conical diffraction was investigated. The simulations show that using a 4m grating period and TM (Transverse Magnetic) polarization, when the numbers of harmonics M(2n+1) are 67, 69 and 71, the diffraction efficiencies of the +1st order are 28.86%, 28.84% and 28.86%, respectively. Then the displacement sensitivity of the micromachined optoacoustic sensor was optimized. When the incident angle, the azimuthal angle and the grating period are 22, 10and 1 m, respectively, compared with the +1st diffracted orders of 4 m grating period, the displacement sensitivity of the 0th and +1st orders under TE and TM polarization was nearly doubled. It can be used to accurately monitor the metal membrane displacement induced by the acoustic pressure or electrostatic actuation voltage.

1. School of Optoelectronics,Beijing Institute of Technology,Beijing 100081,China

Received Date: 2013-10-14

Rev Recd Date: 2013-11-15

Publish Date: 2014-06-25

Key words:

Abstract: Based on rigorous coupled wave analysis, the models for grating-embedded multilayer structure planar diffraction were generalized to the case of conical diffraction. The proposed method can be used to calculate the light diffracted from the grating-embedded multilayer structure with arbitrary wavelength, polarization, azimuthal angle and incident angle. For the micromachined optoacoustic sensor, the convergence performance of the diffraction efficiencies of the reflected +1st order in conical diffraction was investigated. The simulations show that using a 4m grating period and TM (Transverse Magnetic) polarization, when the numbers of harmonics M(2n+1) are 67, 69 and 71, the diffraction efficiencies of the +1st order are 28.86%, 28.84% and 28.86%, respectively. Then the displacement sensitivity of the micromachined optoacoustic sensor was optimized. When the incident angle, the azimuthal angle and the grating period are 22, 10and 1 m, respectively, compared with the +1st diffracted orders of 4 m grating period, the displacement sensitivity of the 0th and +1st orders under TE and TM polarization was nearly doubled. It can be used to accurately monitor the metal membrane displacement induced by the acoustic pressure or electrostatic actuation voltage.

HTML

Reference (25)

[1]	Wang Bo. Polarization-sele ctivity of high-density phase gratings[J]. Chinese Journal of Optics and Applied Optics, 2010, 3(4): 348-352. (in Chinese) 王博.高密度相位光栅的偏振选择性[J]. 中国光学与应用光学, 2010, 3(4): 348-352.
[2]
[3]	Cai Tuo, Sang Tian, Zhao Hua. Coupled-wave analysis, numerical calculation and discussion for diffraction properties of grating[J]. Opto-Electronic Engineering, 2010, 37(4): 141-146. (in Chinese) 蔡托, 桑田, 赵华. 光栅衍射特性的耦合波分析尧计算与讨论[J]. 光电工程, 2010, 37(4): 141-146.
[4]
[5]	Fan Shuwei, Zhou Qinghua, Li Hong. Research of optimization design of groove diffraction grating profile parameters[J]. Acta Optica Sinica, 2010, 30 (11): 3133-3139. (in Chinese) 樊叔维, 周庆华, 李红. 槽型衍射光栅结构参数优化设计研究[J]. 光学学报, 2010, 30(11): 3133-3139.
[6]
[7]
[8]	Wang Haibin, Wu Jianhong, Liu Quan. Diffraction characteristics of convex rectangular grating[J]. Laser Journal, 2010, 31(4): 15-17. (in Chinese) 汪海宾, 吴建宏, 刘全. 凸球面矩型槽光栅的衍射特性. 激光杂志, 2010, 31(4): 15-17.
[9]	Yang Huiyin, Zhang Dawei, Huang Yuansheng, et al. Analysis of the electromagnetic field in the subwavelength grating using methods of coupling-wave and pattern-matching respectively[J]. Laser Journal, 2011, 32(1): 29-31. (in Chinese) 杨惠尹, 张大伟, 黄元申, 等. 耦合波法和模式匹配法分析亚波长光栅中的光场分布[J]. 激光杂志, 2011, 32(1): 29-31.
[10]
[11]	Moharam M G, Gaylord T K. Rigorous coupled-wave analysis of planar-grating diffraction[J]. J Opt Soc Am, 1981, 71(7): 811-818.
[12]
[13]	Moharam M G, Grann E B, Pommet D A, et al. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J]. J Opt Soc Am A, 1995, 12(5): 1068-1076.
[14]
[15]	Moharam M G, Pommet D A, Grann E B, et al. Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings:enhanced transmittance matrix approach[J]. J Opt Soc Am A, 1995, 12(5): 1077-1086.
[16]
[17]	Li L F, Haggans C W. Convergence of the coupled-wave method for metallic lamellar diffraction gratings[J]. J Opt Soc Am A, 1993, 10(6): 1184-1189.
[18]
[19]
[20]	Peng S, Morris G M. Efficient implementation of rigorous coupled-wave analysis for surface-relief gratings[J]. J Opt Soc Am A，1995, 12(5): 1087-1096.
[21]
[22]	Lalanne P, Morris G M. Highly improved convergence of the coupled-wave method for TM polarization[J]. J Opt Soc Am A, 1996, 13(4): 779-784.
[23]	Li L F. Use of Fourier series in the analysis of discontinuous periodic structures[J]. J Opt Soc Am A, 1996, 13(9): 1870-1876.
[24]
[25]	Lee W, Degertekin F L. Rigorous coupled-wave analysis of multilayered grating structures[J]. Journal of Lightwave Technology, 2004, 22(10): 2359-2363.

Rigorous coupled wave analysis of grating-embedded multilayer structure conical diffraction

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Article Metrics

Related

Proportional views