Ming Anjie, Tan Zhenxin, Wu Jian, Zhao Min, Ou Wen, Chen Dapeng. Automatic testing system for multi-channel MEMS accelerometers based on virtual instrument technique[J]. Infrared and Laser Engineering, 2014, 43(6): 1955-1959.
| Citation:
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Ming Anjie, Tan Zhenxin, Wu Jian, Zhao Min, Ou Wen, Chen Dapeng. Automatic testing system for multi-channel MEMS accelerometers based on virtual instrument technique[J]. Infrared and Laser Engineering, 2014, 43(6): 1955-1959.
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Automatic testing system for multi-channel MEMS accelerometers based on virtual instrument technique
- 1.
Smart Integrated Sensor Engineering Center,Jiangsu R&D Center for Internet of Things,Wuxi 214135,China;
- 2.
Key Lab of Microelectronics Device and Integration Technology,Integrated Circuit Advanced Process Center,Institute of Microelectronics Chinese Academy of Science,Beijing 100029,China
- Received Date: 2013-10-13
- Rev Recd Date:
2013-11-03
- Publish Date:
2014-06-25
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Abstract
A novel automatic testing and analyzing system with seven channels for MEMS accelerometers was introduced in this article. This system was designed with multi-function and high level of integration based on multi-channel and parallel configuration, leading to high-efficient testing and analyzing. Based on the conventional testing systems, the Labview-based top level application software in this system was used to realize manipulation of the electro-mechanical vibrator, temperature humidity chamber, the voltage bias and so on. Meanwhile, parameters such as sensitivity, linearity, repeatability, hysteresis behavior, temperature behavior and frequency behavior were able to be measured and exported as reports all in once. Normally, the efficiency of sensor testing could achieve 50 devices/h, much higher than traditional manual systems. Experimental results show that the system is built up with high accuracy, stability and reliability, with the testing error less than 2.5%. This prototype enables the cost reduction of MEMS sensors, thus the mass application in the domain of internet of things (IOT).
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References
|
[1]
|
Bishop Robert H. Practical Guide of LabVIEW 8[M]. Beijing: Electronic Industry Press, 2008: 32-132. (in Chinese) Bishop Robert H. LabVIEW 8实用教程[M]. 北京: 电子工业出版社, 2008: 32-132. |
|
[2]
|
|
|
[3]
|
|
|
[4]
|
Fan Fuling, Han Jianxun. Performance analysis test system of piezoelectric accelerometer based on LabVIEW[J]. Instrument Technique and Sensor, 2009, 1: 21-25. (in Chinese) 范福玲, 韩建勋. 基于LabVIEW 的压电加速度传感器性能分析测试系统[J]. 仪表技术与传感器, 2009, 1: 21-25. |
|
[5]
|
|
|
[6]
|
Wang Lei, Dong Jingxin, Zhao Changde, et al. Design of spectrum analyzer based on visual instrument technique[J]. Journal of Chinese Inertial Technology, 2009, 17(1): 81-84. (in Chinese)王嫘, 董景新, 赵长德, 等. 基于虚拟仪器的微机电系统动态特性测试仪设计[J]. 中国惯性技术学报, 2009, 17(1):81-84. |
|
[7]
|
Ruan Qizhen. I and LabVIEW: 10 Years of Programming Experience of an NI Engineer[M]. Beijing: Beijing University of Aeronautics and Astronautics Press, 2009: 3-33. (in Chinese) 阮奇桢. 我和LabVIEW: 一个NI 工程师的十年编程经验[M]. 北京: 北京航空航天大学出版社, 2009: 3-33. |
|
[8]
|
|
|
[9]
|
|
|
[10]
|
Lei Zhenshan, Zhao Chenguang, Wei Li, et al. Based Tutoria of LabVIEW8.2[M]. Beijing: China Railway Publishing, 2008. (in Chinese) 雷振山, 赵晨光, 魏丽, 等. LabVIEW8.2 基础教程[M].北京: 中国铁道出版社, 2008. |
|
[11]
|
|
|
[12]
|
Zhou Yi, Zhao Xiuliang. Multi-channel temperature and humidity measurement system based on LabV I EW[J]. Journal of Hunan Institute of Science and Technology, 2009, 30(8): 56-59. (in Chinese) 周熠, 赵修良. 基于LabVIEW 的多路温湿度测量系统[J].湖南科技学院学报, 2009, 30(8): 56-59. |
|
[13]
|
Yu Chengbo, Tao Hongyan. Sensors and Modern Detection Technology[M]. Beijing: Tsinghua University Press, 2009. (in Chinese) 余成波, 陶红艳. 传感器与现代检测技术[M]. 北京: 清华大学出版社, 2009. |
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