Volume 43 Issue 10
Nov.  2014
Turn off MathJax
Article Contents

Deng Yong, Liu Ning, Cao Hongbei, Guo Longqiu. Nd:YAG laser feedback interference effects based PZT precision measurement technology and system[J]. Infrared and Laser Engineering, 2014, 43(10): 3434-3438.
Citation: Deng Yong, Liu Ning, Cao Hongbei, Guo Longqiu. Nd:YAG laser feedback interference effects based PZT precision measurement technology and system[J]. Infrared and Laser Engineering, 2014, 43(10): 3434-3438.

Nd:YAG laser feedback interference effects based PZT precision measurement technology and system

  • Received Date: 2014-02-06
  • Rev Recd Date: 2014-03-13
  • Publish Date: 2014-10-25
  • The piezoelectric ceramic plays an important role in the precision control system, but it lacks effective and precise measurement methods for its actual high frequency response in fast control system. The present methods of measuring characteristics of piezoelectric ceramics were summarized in this paper and their difficulties and shortages were also analyzed, the laser feedback interference principle based Nd: YAG microchip laser feedback interference measurement system was used to study the dynamic characteristics of piezoelectric ceramics. The displacement of two kinds of piezoelectric ceramics was measured with the drive frequency range from 100 Hz to 7 kHz, and the corresponding displacement scale was 7-34 nm. The accuracy could reach nanoscale, accurate measurement under higher drive frequency was also achieved. The method has very high measurement accuracy, and lower requirements on the measured object.
  • [1]
    [2] Zhang Tao, Sun Lining, Cai Hegao. Study on the fundamental characteristics of piezoelectric element[J]. Optics and Precision Engineering, 1998, 6(5): 26-32. (in Chinese)
    [3]
    [4] Wang Tao, Wang Xiaodong, Wang Liding. Study on fast response characteristic and application of piezoceramics[J]. Chinese Journal of Sensors and Actuators, 2009, 22(6): 785-789. (in Chinese)
    [5] Xu Liming, Hu Dejin, Deng Qilin, et al. Study on PZT microdisplacement driving technology in precision machining[J]. Chinese Journal of Mechanical Enginerring, 2002, 38: 43-47. (in Chinese)
    [6]
    [7]
    [8] Miao Jian, Zhu Ruogu, Guo Bing, et al. Nonlinear effect of piezoelectric ceramics on the phase modulation Fabry-Perot interferometry[J]. Journal of China University of Metrology, 2010, 21(4): 327-331. (in Chinese)
    [9]
    [10] Zhang Xinyang, Xia Liyan, Zhou Hengwei. Evaluation on PZT response curve by optical interference phase shift method[J]. Journal of Yili Normal University(Natural Science Edition), 2009(1): 25-29. (in Chinese)
    [11] Wu Shouqiang. Measurement of an micro vibration piezoelectric ceramic interference filter [J]. Journal of Minjiang University, 2006, 27(5): 62-66. (in Chinese)
    [12]
    [13] Fan Yanping, Zhu Ling, Wu Dongjian, et al. A new method of detecting the microdisplacement of PZT [J]. Piezoelectric and Acoustooptics, 2010, 32(1): 82-85. (in Chinese)
    [14]
    [15] Wang Detian, Li Zeren, Peng Qixian. Direction-judgable fiber displacement interferometer for vibration measurement [J]. Opto-Electronic Engineering, 2009, 36(10): 86-89. (in Chinese)
    [16]
    [17] Strand O T, Goosman D R, Martinez C, et al. Compact system for high-speed velocimetry using heterodyne techniques[J]. Review of Scientific Instruments, 2006, 77(8): 083108.
    [18]
    [19] Weng Jidong, Tan Hua, Wang Xiang, et al. Optical-fiber interferometer for velocity measurements with picosecond resolution[J]. Applied Physics Letters, 2006, 89(11): 111101.
    [20]
    [21] Wang Zhongping, Zhang Quan, Zhu Ling, et al. Study on voltage-displacement characteristics of piezoelectric ceramic by laser speckles [J]. Physics Experimentation, 2013, 33(3): 39-42. (in Chinese)
    [22]
    [23]
    [24] Wang Ju, Li Nan. Analysis of characteristics of piezoelectric ceramic in micro-control applications[J]. Metrology and Measurement Technique, 2013, 40(2): 24-26. (in Chinese)
    [25] Ren Zhou. Microchip Nd:YAG laser feedback interferometer and applications[D]. Beijing: Tsinghua University, 2011. (in Chinese)
    [26]
    [27] Lacot E, Day R, Stoeckel F. Coherent laser detection by frequency-shifted optical feedback[J]. Phys Rev A, 2001, 64:043815.
  • 加载中
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索

Article Metrics

Article views(279) PDF downloads(264) Cited by()

Related
Proportional views

Nd:YAG laser feedback interference effects based PZT precision measurement technology and system

  • 1. School of Mechanical Engineering,Nantong University,Nantong 226019,China

Abstract: The piezoelectric ceramic plays an important role in the precision control system, but it lacks effective and precise measurement methods for its actual high frequency response in fast control system. The present methods of measuring characteristics of piezoelectric ceramics were summarized in this paper and their difficulties and shortages were also analyzed, the laser feedback interference principle based Nd: YAG microchip laser feedback interference measurement system was used to study the dynamic characteristics of piezoelectric ceramics. The displacement of two kinds of piezoelectric ceramics was measured with the drive frequency range from 100 Hz to 7 kHz, and the corresponding displacement scale was 7-34 nm. The accuracy could reach nanoscale, accurate measurement under higher drive frequency was also achieved. The method has very high measurement accuracy, and lower requirements on the measured object.

Reference (27)

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return