Cai Jianwen, Pan Xuetao, Zhang Meifeng, Meng Fei. Transverse spot superresolution in femtosecond laser microfabrication[J]. Infrared and Laser Engineering, 2015, 44(6): 1790-1793.
| Citation:
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Cai Jianwen, Pan Xuetao, Zhang Meifeng, Meng Fei. Transverse spot superresolution in femtosecond laser microfabrication[J]. Infrared and Laser Engineering, 2015, 44(6): 1790-1793.
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Transverse spot superresolution in femtosecond laser microfabrication
- 1.
School of Photoelectric Engineering,Changzhou Institute of Technology,Changzhou 213002,China;
- 2.
Changzhou Institute of Modern Photoelectric Technology,Changzhou 213002,China;
- 3.
Changzhou Key Laboratory of Optoelectronic Materials and Devices,Changzhou 213002,China;
- 4.
School of Mechatronical Engineering and Automation,Shanghai University,Shanghai 200072,China
- Received Date: 2014-10-18
- Rev Recd Date:
2014-11-02
- Publish Date:
2015-06-25
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Abstract
In femtosecond laser micromachining lateral distribution of the focus light spot directly affects laser machining accuracy, resolution and surface roughness. Focused spot was modulated by using laser beam spatial shaping technology, lateral ultra diffraction theory was studied and analyzed, One kind of tetracyclic lateral modulation phase plate was designed by using optimization algorithms. The radiuses of the phase plane are r1=0.16、r2=0.27、r3=0.49, the peak energy S is 0.38, the focal spot size GT is 0.74, sidelobe energy MT is 0.20. The experiments were processed using a photochromic material before and after adding the phase plate in a laser micromachining system, the experiments results show that the performance of this super-diffraction phase element is particularly desirable in the femtosecond laser micromachining system, which can reduce the size of the point.
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References
|
[1]
|
|
|
[2]
|
Chen Guofu, Cheng Guanghua, Ling Weijun. Generation and amplification of femtosecond laser technology[J]. Infrared and Laser Engineering, 2008, 37(2): 195-199. (in Chinese) 陈国夫, 程光华, 令维军. 飞秒激光产生与放大技术[J]. 红外与激光工程, 2008, 37(2): 195-199. |
|
[3]
|
|
|
[4]
|
Toraldo di Francia G. Super-gain antennas and optical resolving power[J]. Nuovo Cimento Suppl, 1953, 9: 426-435. |
|
[5]
|
|
|
[6]
|
Toraldo di Francia G. Resolving power and information[J]. JOSA, 1955, 45(7): 497-499. |
|
[7]
|
|
|
[8]
|
Tasso R M Sales. Smallest focal spot[J]. Physical Review Letters, 1998, 81(18): 3844-3847. |
|
[9]
|
Tasso R M Sales, G Michael Morris. Fundamental limits of optical superresolution[J]. Optics Letters, 1997, 22(9): 582-584. |
|
[10]
|
|
|
[11]
|
|
|
[12]
|
Sheppard C J R. Synthesis of filters for specified axial properties[J]. J Mod Optics, 1996, 43: 525-536. |
|
[13]
|
|
|
[14]
|
Cheng Kan, Tan Qiaofeng, Zhou Zhehai, et al. Design of three-dimensional superresolution diffractive optical elements for radially polarized beam[J]. Acta Optica Sinica, 2010, 30(11): 3295-3299. (in Chinese) 程侃, 谭峭峰, 周哲海, 等. 径向偏振光三维超分辨衍射光学元件设计[J]. 光学学报, 2010, 30(11): 3295-3299. |
|
[15]
|
Wei P, Tan O F, Zhu Y, et al. Axial superresolution of two-photon microfabrication[J]. Applied Optics, 2007, 46(18): 3694-3699. |
|
[16]
|
|
|
[17]
|
Ding Hongping, Li Qinghui, Zhou Wenyi. Optimization design of phase-only transverse superresolution filters[J].Journal of Xidian University, 2005, 32(1): 126-129. (in Chinese) 丁洪萍, 李庆辉, 邹文艺. 位相型横向超分辨光瞳滤波器的优化设计[J]. 西安电子科技大学学报, 2005, 32(1): 126-129. |
|
[18]
|
|
|
[19]
|
Gu Jun. Global optimization for satisfiability (SAT)problem[J]. IEEE Transactions on Knowledge and Data Engineering, 1994, 6(3): 361-381. |
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