Research and development of filter in high speed electro-optic modulator waveguide measurement system

Fu Xiuhua; Tang Haolong; Liu Guojun; Liu Feng'e; Zhang Jing

Design and manufacture of higher rejection rate filters which meet the needs of accurate measurement of BaTiO3 single crystal film high-speed electro-optic modulator waveguide devices were focused on. The filters were used to improve the signal-to-noise ratio of the test system and eliminate stray light interference. The films were prepared by the depositing method of dual ion beam sputtering, Nb and SiO2 were chosen as deposition materials. The coating was designed and optimized with the help of Macleod and TFCalc software, orthogonal matrix method was used to optimize the process parameters of assist ion source. The absorption of film was reduced by using optimized process parameters, the problem of film thickness accuracy controlling was solved by using the method of real-time calibration of the deposition rate. Test transmission spectrum of the filter, center wavelength is 1 550.1 nm, the pass band width is 5.1 nm, the wavelength interval of optical density from -0.1 dB to - 30 dB is 1.9 nm, the using requirements of the waveguide accurate measurement system is achieved.

1. School of Electro-Optical Engineering,Changchun University of Science and Technology,Changchun 130022,China;

2. Norinco Group Standardization Research Institute,Beijing 100089,China

Received Date: 2013-03-08

Rev Recd Date: 2013-04-14

Publish Date: 2013-12-25

Key words:

Abstract: Design and manufacture of higher rejection rate filters which meet the needs of accurate measurement of BaTiO3 single crystal film high-speed electro-optic modulator waveguide devices were focused on. The filters were used to improve the signal-to-noise ratio of the test system and eliminate stray light interference. The films were prepared by the depositing method of dual ion beam sputtering, Nb and SiO2 were chosen as deposition materials. The coating was designed and optimized with the help of Macleod and TFCalc software, orthogonal matrix method was used to optimize the process parameters of assist ion source. The absorption of film was reduced by using optimized process parameters, the problem of film thickness accuracy controlling was solved by using the method of real-time calibration of the deposition rate. Test transmission spectrum of the filter, center wavelength is 1 550.1 nm, the pass band width is 5.1 nm, the wavelength interval of optical density from -0.1 dB to - 30 dB is 1.9 nm, the using requirements of the waveguide accurate measurement system is achieved.

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Reference (19)

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Research and development of filter in high speed electro-optic modulator waveguide measurement system

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