Xie Yao, Zhao Yongpeng, Wang Qi. Research of enhancing the output of capillary discharge-pumped Ne-like Ar 46.9 nm soft X-ray laser[J]. Infrared and Laser Engineering, 2013, 42(8): 2036-2040.
| Citation:
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Xie Yao, Zhao Yongpeng, Wang Qi. Research of enhancing the output of capillary discharge-pumped Ne-like Ar 46.9 nm soft X-ray laser[J]. Infrared and Laser Engineering, 2013, 42(8): 2036-2040.
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Research of enhancing the output of capillary discharge-pumped Ne-like Ar 46.9 nm soft X-ray laser
- 1.
State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;
- 2.
National Key Laboratory of Science and Technology on Tunable Laser,Institute of Optical-electronics,Harbin Institute of Technology,Harbin 150080,China
- Received Date: 2012-12-17
- Rev Recd Date:
2013-01-19
- Publish Date:
2013-08-25
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Abstract
The observation of the capillary discharge-pumped Ne-like Ar 46.9 nm soft X-ray laser output was reported under the condition of pure Ar and gaseous mixture of Ar-He, Ar-Ne, Ar-N2 and Ar-Kr. Mixing Ar with an appropriate quantity of He, the laser output was enhanced evidently, and there was an optimum ratio of He in the gaseous mixture of Ar-He, which could be the best for laser output. The experimental results of Ar-Ne, Ar-N2 and Ar-Kr mixture show that Ne, N2 and Kr decrease the laser output. The source research of discharged produced plasma in extreme ultraviolet lithography also mixes an appropriate quantity of He, in order to enhance 13.5 nm.
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