Thermal stability of multilayer tetrahedral amorphous carbon films

HAN Xiao; ZHU Jia-Qi; ZHOU Feng; CHEN Xiao-Li

Using the filtered cathodic vacuum arc(FCVA) deposition technique with a process of changing substrate bias, a stable thick multilayer ta-C film was prepared. The multilayer films with a good adhesion consisted of alternating sp2-rich sublayers Ai and sp3-rich sublayers Bi(i=1,2,3). The sublayers thickness ratio dAi/dBi was about 1.0, and the total thickness of the multilayer film was about 1 m. The calculated compressive stress of sublayers by the Stoney formula revealed an alternating wave change. After anealling at 500 ℃ in vacuum, the Raman spectra suggested the multilayer film had a non-changed sp3-rich microstructure. The nanoindentation measurement showed an increasing hardness and Youngs modulus of the multilayer film after annealing. The nanoscratch test showed the favourable scratch resistance and adhesive properties of multilayer film. The results indicate that the multilayer ta-C film has some excellent mechanical properties and thermal stability. The multilayer film is proper for the optical protective coatings for aeronautics and space applications.

1. Beijing Institute of Space Mechanics & Electricity,Beijing 100076,China;

2. School of Astronautics,Harbin Institute of Technology,Harbin 150080,China

Publish Date: 2012-01-25

Key words:

Abstract: Using the filtered cathodic vacuum arc(FCVA) deposition technique with a process of changing substrate bias, a stable thick multilayer ta-C film was prepared. The multilayer films with a good adhesion consisted of alternating sp2-rich sublayers Ai and sp3-rich sublayers Bi(i=1,2,3). The sublayers thickness ratio dAi/dBi was about 1.0, and the total thickness of the multilayer film was about 1 m. The calculated compressive stress of sublayers by the Stoney formula revealed an alternating wave change. After anealling at 500 ℃ in vacuum, the Raman spectra suggested the multilayer film had a non-changed sp3-rich microstructure. The nanoindentation measurement showed an increasing hardness and Youngs modulus of the multilayer film after annealing. The nanoscratch test showed the favourable scratch resistance and adhesive properties of multilayer film. The results indicate that the multilayer ta-C film has some excellent mechanical properties and thermal stability. The multilayer film is proper for the optical protective coatings for aeronautics and space applications.

HTML

Reference (31)

[1]	Lifshitz Y, Kasi S R, Tabalais J W, et al. Subplantation model for film growth from hyperthermal species [J]. Phys Rev B, 1990, 41: 10468-10480.
[2]
[3]
[4]	.Davis C A. A simple model for the formation of compressive stress in thin films by ion bombardment[J]. Thin Solid Films, 1992, 226: 30-34.
[5]	Pan Yongqiang, Wu Zhensen. Infrared optical properties of hydrogenated amorphous carbon films(a-C:H)[J]. Infrared and Laser Engineering, 2006, 35(6): 777-779. (in Chinese)
[6]
[7]	Gioti M, Logothetidis S, Charitidis C. Stress relaxation and stability in thick amorphous carbon films deposited in layer structure [J]. Appl Phys Lett, 1998, 73: 184-186.
[8]	潘永强, 吴振森．含氢非晶碳膜(a-C:H)红外光学特性的研究[J]．红外与激光工程, 2006, 35(6): 777-779.
[9]
[10]	Sheeja D, Tay B K, Lau S P, et al. Structural and tribological characterization of multilayer ta?鄄C films prepared by filtered cathodic vacuum arc with substrate pulse biasing[J]. Surf Coat Technol, 2000, 132: 228-232.
[11]
[12]	Stoney G G. The tension of metallic films deposited electolysis[C]//Proc R Soc London Ser A, 1909, 82: 172-175.
[13]	Logothetidis S, Gioti M, Charitidis C, et al. Stability, enhancement of elastic properties and structure of multilayered amorphous carbon films[J]. Appl Surf Sci, 1999, 138-139: 244-249.
[14]
[15]
[16]	Friedmann T A, Sullivan J P, Knapp J A, et al. Thick stress?鄄free amorphous tetrahedral carbon films with hardness near that of diamond[J]. Appl Phys Lett, 1997, 71: 3820-3822.
[17]	Ferrari A C, Robertson J. Interpretation of Raman spectra of disordered and amorphous carbon[J]. Phys Rev B, 2000, 61: 14095-14107.
[18]
[19]	McCulloch D G, Xiao X L, Peng J L, et al. The structure and annealing properties of multilayer carbon films[J]. Surf Coating Techol, 2005, 198: 217-222.
[20]
[21]	Zhang L H, Gong H, Wang J P. Kinetics and mechanisms of the thermal degradation of amorphous carbon films [J]. J Appl Phys, 2002, 91: 9646-9651.
[22]
[23]	Pan Yongqiang, Wu Zhensen, Hang Lingxia, et al. Interface roughness of multilayer dielectric optical thin film[J]. Infrared and Laser Engineering, 2009, 38(3): 433-436. (in Chinese)
[24]
[25]	Mcculloch D G, Peng J L, Mckenzie D R, et al. Mechanisms for the behavior of carbon films during annealing[J]. Phys Rev B, 2004, 70: 085406.
[26]
[27]	Siegal M P, Tallant D R, Provencio P N, et al. Untrahard carbon nanocomposite films[J]. Appl Phys Lett, 2000, 76:3052-3054.
[28]	潘永强, 吴振森, 杭凌侠, 等．多层介质薄膜膜层间界面粗糙度及光散射[J]．红外与激光工程, 2009, 38(3): 433-436.
[29]
[30]
[31]

Thermal stability of multilayer tetrahedral amorphous carbon films

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Article Metrics

Related

Proportional views