Design of a miniature single-grating displacement measuring system with nanometer resolution

Yang Dongxing; Yan Shuhua; Du Liebo; Wang Guochao; Lin Cunbao; Zou Pengfei

As the extensive application of nanotechnology and the deepened cognition of nanometer measurement, the measuring technologies of displacement with nanometer resolution were paid extensively attention to. On the basis of researching in working principle of the reflex-grating measurement, a miniature single-grating displacement measuring system with nanometer resolution was designed as well as realized. The overall design, optical structure, and software algorithm of the system were elaborated. In the end, comparative experiments were done with the help of auxiliary instruments which mainly included a capacitive displacement sensor named ASP-10-ILA. Experimental results show that the system can measure accurately when the two signals are not absolutely orthogonal, and the resolution of the system is 1 nm theoretically; the mean values of the measuring system deviates from the reference values by a maximum of 118 nm, and deviates from the fitting-line by no more than 100 nm when the grating displacement experiments are done within the range of capacitive displacement sensor; the deviations of the results are less than 5 ppm when the grating has displacement larger than 10 mm.

1. College of Mechatronical Engineering and Automation,National University of Defense Technology,Changsha 410073,China

Received Date: 2012-08-14

Rev Recd Date: 2012-09-13

Publish Date: 2013-04-25

Key words:

Abstract: As the extensive application of nanotechnology and the deepened cognition of nanometer measurement, the measuring technologies of displacement with nanometer resolution were paid extensively attention to. On the basis of researching in working principle of the reflex-grating measurement, a miniature single-grating displacement measuring system with nanometer resolution was designed as well as realized. The overall design, optical structure, and software algorithm of the system were elaborated. In the end, comparative experiments were done with the help of auxiliary instruments which mainly included a capacitive displacement sensor named ASP-10-ILA. Experimental results show that the system can measure accurately when the two signals are not absolutely orthogonal, and the resolution of the system is 1 nm theoretically; the mean values of the measuring system deviates from the reference values by a maximum of 118 nm, and deviates from the fitting-line by no more than 100 nm when the grating displacement experiments are done within the range of capacitive displacement sensor; the deviations of the results are less than 5 ppm when the grating has displacement larger than 10 mm.

HTML

Reference (15)

[1]	Su Shaojing. Research on theory and key technologies of long-range displacement measuring with nanometer resolution by grating[D]. Changsha: National University of Defense Technology, 2001: 5-11. (in Chinese) 苏绍璟. 大量程纳米级光栅位移测量理论及关键技术研究[D]. 长沙: 国防科学技术大学, 2001: 5-11.
[2]
[3]	Wang Guochao, Yan Shuhua, Zhou Weihong, et al. Effect of non-ideal performance of lasers in dual-wavelength single-grating nanometer measurement[J]. Infrared and Laser Engineering, 2011, 40(6): 1119-1124． (in Chinese) 王国超, 颜树华, 周卫红, 等. 双波长单光栅纳米测量中激光器性能非理想的影响[J]. 红外与激光工程, 2011, 40(6): 1119-1124.
[4]
[5]	Yan Shuhua. Design of Diffractive Micro-optics[M]. Beijing: National Defense Industry Press, 2011: 177-178. (in Chinese) 颜树华.衍射微光学设计[M]. 北京: 国防工业出版社, 2011: 177-178.
[6]
[7]
[8]	Chu Xingchun. Research on key technologies of nanometer displacement measurement by grating interferometry[D].Changsha: National University of Defense Technology, 2005: 36-37. (in Chinese) 楚兴春. 纳米光栅干涉位移测量关键技术的研究[D]. 长沙: 国防科学技术大学, 2005: 36-37.
[9]	Born M, Wolf E. Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light[M]. 7th ed. Translated by Yang Xiasun. Beijing: Publishing House of Electronics Industry, 2006: 472-473. (in Chinese) 马科斯波恩, 埃米尔沃尔夫. 光学原理[M]. 第7版. 杨葭荪, 译. 北京: 电子工业出版社, 2006: 472-473.
[10]
[11]
[12]	Wang Fengpeng, Zhao Chengguo, Liao Zhimeng, et al. Interferometry for length measurement based on video image[J]. Infrared and Laser Engineering, 2011, 40(6): 1133-1137. (in Chinese) 王凤鹏, 赵成果, 廖志孟, 等. 采用视频图像的激光干涉测长技术[J]. 红外与激光工程, 2011, 40(6): 1133-1137.
[13]
[14]	Huang Qianghui, Cao Yiping. New method for detecting orthogonal signals of laser interference fringes using four-quadrant detector[J]. Chinese Journal of Lasers, 2009, 36(5): 1166-1170. (in Chinese) 黄强辉, 曹益平. 采用四象限探测器检测干涉条纹正交信号的新方法[J]. 中国激光, 2009, 36(5): 1166-1170.
[15]	Sun Lei, Zhang Zhili, Tan Lilong, et al. Denoising method of dynamic grating Moire signal based on wavelet threshold[J]. Infrared and Laser Engineering, 2010, 39(3): 576-580. (in Chinese) 孙磊, 张志利, 谭立龙, 等. 采用小波阈值的时变光栅莫尔信号去噪方法[J]. 红外与激光工程, 2010, 39(3): 576-580.

Design of a miniature single-grating displacement measuring system with nanometer resolution

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Article Metrics

Related

Proportional views